A photoelectric converter mounting structure for an etching machine

Abstract

This utility model discloses a photoelectric converter mounting structure for an etching machine, including a photoelectric converter, a reaction chamber, and a heat shield. The photoelectric converter, reaction chamber, and heat shield are fixedly connected, with the heat shield positioned between the reaction chamber and the photoelectric converter. The connector of the photoelectric converter passes through a mounting hole on the heat shield and connects to a connection port on the outer wall of the reaction chamber. An air nozzle is fixedly mounted on the heat shield, facing the photoelectric converter, and connected to an air source. By adding a heat shield and blowing air onto the surface of the photoelectric converter, the surface temperature of the photoelectric converter is cooled, allowing the operating temperature of the photoelectric converter to be reduced to its normal operating temperature range, extending its service life and improving its reliability.

Description

Technical Field

[0001] This utility model relates to the field of etching machine technology, and specifically to a photoelectric converter mounting structure for an etching machine. Background Technology

[0002] In an etching machine, the photoelectric converter / converter, as a key component for converting optical and electrical signals, directly reflects the actual temperature of the electrostatic chuck / cup. The etching chamber needs to be kept at a constant temperature of 60°C to meet process requirements, and the photoelectric converter / converter, mounted on the lower end face of the etching chamber, is susceptible to its heat. Simultaneously, the casing of the molecular pump (turbo), fixed to the lower end face of the metal reaction chamber, is also at approximately 60°C, transferring heat from the side of the photoelectric converter / converter. Furthermore, photoelectric converters / converters also generate heat during operation. The combined effect of these factors causes the operating environment temperature of the photoelectric converter / converter to exceed its normal temperature (40±5℃) after prolonged operation, reaching approximately 55℃. As a precision component, it has high temperature requirements. Exceeding the normal maximum temperature by more than 10 degrees will significantly affect its service life, leading to the failure of its internal electronic components. When the photoelectric converter / converter malfunctions, it will be unable to accurately reflect the surface temperature of the electrostatic tray / suction cup, causing the temperature control of the electrostatic tray / suction cup to fail, failing to meet process requirements, reducing product yield, leading to product scrap, and even causing some serious safety accidents. Utility Model Content

[0003] This invention proposes a photoelectric converter mounting structure for an etching machine. By adding a heat-resistant plate to form a thermal barrier, heat from the reaction chamber is prevented from being transferred to the surface of the photoelectric converter. This allows the working environment temperature of the photoelectric converter to reach its normal operating temperature range, thus extending its service life.

[0004] The technical solution disclosed in this utility model is: a photoelectric converter mounting structure for an etching machine, including a photoelectric converter, a reaction chamber, and a heat shield. The photoelectric converter, the reaction chamber, and the heat shield are fixedly connected. The heat shield is located between the reaction chamber and the photoelectric converter. The connector of the photoelectric converter passes through the mounting hole on the heat shield and connects to the connection port on the outer wall of the reaction chamber.

[0005] Based on the above scheme, as a preferred option, a cooling device is fixedly installed on the heat shield plate, with the cooling device facing the photoelectric converter.

[0006] Based on the above scheme, as a preferred option, the photoelectric converter, reaction chamber, and heat shield are fixedly connected by bolts.

[0007] Based on the above scheme, as a preferred embodiment, the photoelectric converter includes a housing, a connector is located at the connecting end of the housing, the connecting end has a plurality of first threaded holes in the circumferential direction, the heat shield plate has second threaded holes corresponding to the first threaded holes, the outer wall of the reaction chamber in the circumferential direction of the connecting port has a connecting post corresponding to the first threaded holes, the connecting post has a third threaded hole, the number of the first threaded holes, the second threaded holes and the connecting post are the same, and the bolts are connected to the third threaded holes in sequence through the first threaded holes and the second threaded holes to fix the photoelectric converter and the heat shield plate to the outer wall of the reaction chamber.

[0008] Based on the above scheme, as a preferred embodiment, the cooling device includes an air nozzle facing the photoelectric converter and connected to a compressed air source through a pipe.

[0009] Based on the above scheme, as a preferred embodiment, the heat shield plate includes a first panel and a second panel. Mounting holes and a second threaded hole are provided on the first panel. An air nozzle is fixed on the second panel. There is a gap between the second panel and the housing of the photoelectric converter. The air outlet of the air nozzle is located within the gap. A molecular pump housing is fixedly installed on the lower end face of the reaction chamber. The second panel is located between the molecular pump housing and the photoelectric converter.

[0010] Based on the above scheme, as a preferred option, a flow valve is installed on the pipeline, and a temperature sensor is fixedly installed on the side of the second panel facing the photoelectric converter.

[0011] Based on the above scheme, as a preferred option, the air nozzle is an L-shaped threaded quick-connect coupling.

[0012] Based on the above scheme, as a preferred option, the heat-insulating plate is made of thermal insulation material.

[0013] Based on the above scheme, as a preferred option, the heat insulation board is made of Teflon, rock wool, or asbestos.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] By adding a heat-insulating plate between the outer wall of the reaction chamber and the photoelectric converter, the heat from the reaction chamber is prevented from being transferred to the housing of the photoelectric converter, thus slowing down the heating rate of the photoelectric converter.

[0016] Furthermore, air is blown onto the surface of the photoelectric converter through a nozzle to create airflow and cool the surface of the photoelectric converter.

[0017] This invention reduces the operating temperature of the photoelectric converter to at least 40°C, bringing it within the normal operating temperature range. The service life can be extended from 360 days to approximately 720 days, significantly improving its application reliability. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the existing photoelectric converter installation structure;

[0019] Figure 2 yes Figure 1 A schematic diagram of the structure after the bolts have been removed;

[0020] Figure 3 This is a schematic diagram of the structure of one embodiment of the present utility model;

[0021] Figure 4 yes Figure 3 A schematic diagram of the structure after the bolts have been removed;

[0022] Figure 5 This is a schematic diagram showing the heat transfer to the photoelectric converter before and after the heat shield is installed;

[0023] Figure 6 This is the ambient temperature of the photoelectric converter detected by a temperature gun when the heat shield is not installed.

[0024] Figure 7 It is the ambient temperature of the photoelectric converter detected by a temperature gun after the heat shield and air nozzle are installed. Detailed Implementation

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific implementation methods of this utility model will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0026] In this article, left, right, up, down, etc., only indicate the relative positional relationship in the attached drawings and do not contain any other meaning. First, second, etc., are only used to distinguish the same parts and do not make any other limitations.

[0027] The mounting structure of the photoelectric converter on the etching machine is as follows: Figure 1-2 As shown, 1 is the reaction chamber, 2 is the molecular pump housing, 3 is the photoelectric converter, 4 is the connecting post fixed to the lower end face of the reaction chamber, 5 is the flange edge of the upper end of the photoelectric converter, 6 is the bolt, 7 is the connector, 8 is the connection port, 9 is the first threaded hole, and 10 is the third threaded hole. The molecular pump housing 2 is fixed to the lower end face of the reaction chamber 1, and the photoelectric converter 3 is installed on its left side. The connector 7 is connected to the connection port 8, and the bolt 6 passes through the first threaded hole 9 on the flange edge 5 and connects to the third threaded hole 10 on the connecting post 4 to fix the photoelectric converter 3 to the lower end face of the reaction chamber 1.

[0028] Example 1, such as Figure 3-4As shown, based on the existing structure, heat-insulating plates and other structures are added to insulate against heat, forming a thermal barrier to prevent heat from the reaction chamber from being transferred to the housing of the photoelectric converter. In some other embodiments, a cooling device is further provided. The cooling device can use compressed air for heat dissipation, specifically including air nozzles and air pipes. By blowing air through the air nozzles, the gas in the working environment of the photoelectric converter is made to flow, thereby cooling the working environment to the normal operating temperature (e.g., 40±5℃). Other heat dissipation methods can also be used.

[0029] In this embodiment, the components that differ from the existing structure are: 11 is the first panel, 12 is the second threaded hole, 13 is the mounting hole, 14 is the second panel, and 15 is the air nozzle.

[0030] Specifically, the photoelectric converter 3, the reaction chamber 1, and the heat shield are fixedly connected. The heat shield is located between the reaction chamber 1 and the photoelectric converter 3. The connector 7 of the photoelectric converter 3 passes through the mounting hole on the heat shield and connects to the connection port on the outer wall of the reaction chamber. An air nozzle is fixedly installed on the heat shield, facing the photoelectric converter, and the air nozzle is connected to the air source.

[0031] The photoelectric converter 5 includes a housing, and the connector 7 is located at the center of the connecting end (upper end) of the housing. The connecting end has several first threaded holes 9 in the circumferential direction (flange edge). The connecting port 8 on the outer wall of the reaction chamber 1 has a connecting post 5 corresponding to the first threaded holes 9 in the circumferential direction. The heat shield plate has a second threaded hole 12 corresponding to the first threaded hole 9. The connecting post 5 has a third threaded hole 10. The number of the first threaded holes 9, the second threaded holes 12, and the connecting post 5 are the same. The bolt 6 passes through the first threaded hole, the second threaded hole 12, and then connects to the third threaded hole 10 to fix the photoelectric converter 5 and the heat shield plate on the outer wall of the reaction chamber 1.

[0032] For the first threaded hole and the second threaded hole, they may not be connected to the threads on the bolt. That is, in this application, the first threaded hole and the second threaded hole can be threaded holes with a pitch of 0, i.e., through holes, which are considered equivalent solutions.

[0033] The heat shield is made of Teflon and can be L-shaped. Specifically, it includes a first panel 11 and a second panel 14. Mounting holes 13 and second threaded holes 12 are provided on the first panel 11. The gas nozzle 15 is fixed on the second panel 14. There is a gap between the second panel 14 and the housing. The gas outlet of the gas nozzle 15 is located in the gap. The molecular pump housing 2 is fixedly installed on the lower end face of the reaction chamber 1. The second panel 11 is located between the molecular pump housing 2 and the photoelectric converter 3. By adding a heat shield between the outer wall of the reaction chamber 1 and the photoelectric converter 3, the heat of the reaction chamber is prevented from being transferred to the housing of the photoelectric converter, thereby slowing down the heating rate of the photoelectric converter.

[0034] The nozzle 15 is connected to a compressed air source through a pipe. A flow control valve can be installed on the pipe. The temperature of the compressed air source is lower than the normal operating temperature of the photoelectric converter, such as 20-25℃, with a pressure of 0.3MPA. Air is blown onto the surface of the photoelectric converter through the nozzle 15 to make the gas flow and cool the surface of the photoelectric converter.

[0035] The air nozzle 15 can be any type of device capable of gas flow, such as an L-shaped threaded quick-connect coupling.

[0036] Example 2: The air nozzle in Example 1 does not have other program control and is usually quantitatively controlled. In order to improve automation, reduce costs and increase efficiency, the following design is made: A temperature sensor is fixedly installed on the side of the second panel 14 facing the photoelectric converter. The temperature sensor is interlocked with the flow control valve and the flow control valve is automatically adjusted according to the temperature detected by the temperature sensor.

[0037] Example 3: Based on Example 1, the heat-insulating plate is used as a thermal insulation material to block the heat flow transfer. It can also be replaced by a board such as asbestos or rock wool.

[0038] The heat transfer method of the installation structure of this utility model before and after application is as follows: Figure 5 As shown, the effect is similar to that of... Figure 6-7 As shown, where, Figure 5 Figure a shows a schematic diagram with a heat shield applied, and figure b shows a schematic diagram without a heat shield applied. Figure 5 The effect of the heat shield on heat transfer can be seen in the diagram. Figure 6 This is the ambient temperature of the photoelectric converter detected by a temperature gun when the heat shield is not installed. Figure 7 It is the ambient temperature of the photoelectric converter detected by a temperature gun after the heat shield and air nozzle are installed. Figure 6-7 It can be seen that the operating temperature of the photoelectric converter can be reduced to about 40℃, reaching the normal operating temperature range of the photoelectric converter.

[0039] In summary, by adding a heat-insulating plate between the outer wall of the reaction chamber and the photoelectric converter, the heat transfer from the reaction chamber to the photoelectric converter housing is prevented, thus slowing down the heating rate of the photoelectric converter. Air is blown onto the surface of the photoelectric converter through a nozzle, causing gas flow and cooling the surface. This invention can reduce the operating temperature of the photoelectric converter to at least approximately 40°C, reaching the normal operating temperature range. The service life can be extended from 360 days to approximately 720 days, significantly improving its application reliability.

[0040] It should be noted that the above embodiments can be freely combined as needed. The above description is only a preferred embodiment of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. An optical-to-electrical converter mounting structure of an etching machine, characterized by, It includes a photoelectric converter, a reaction chamber, and a heat shield. The photoelectric converter, reaction chamber, and heat shield are fixedly connected. The heat shield is located between the reaction chamber and the photoelectric converter. The connector of the photoelectric converter passes through the mounting hole on the heat shield and connects to the connection port on the outer wall of the reaction chamber.

2. The photoelectric converter mounting structure of the etching machine as described in claim 1, characterized in that, A cooling device is fixedly installed on the heat shield, with the cooling device facing the photoelectric converter.

3. The photoelectric converter mounting structure of the etching machine as described in claim 2, characterized in that, The photoelectric converter, reaction chamber, and heat shield are fixedly connected by bolts.

4. The photoelectric converter mounting structure of the etching machine as described in claim 3, characterized in that, The photoelectric converter includes a housing, a connector located at the connecting end of the housing, and several first threaded holes in the circumferential direction of the connecting end. The heat shield plate has second threaded holes corresponding to the first threaded holes. The outer wall of the reaction chamber in the circumferential direction of the connecting port has a connecting post corresponding to the first threaded holes. The connecting post has a third threaded hole. The number of the first threaded holes, the second threaded holes, and the connecting post are the same. The bolt passes through the first threaded holes and the second threaded holes in sequence and then connects to the third threaded hole to fix the photoelectric converter and the heat shield plate to the outer wall of the reaction chamber.

5. The photoelectric converter mounting structure of the etching machine as described in claim 4, characterized in that, The cooling device includes an air nozzle that faces the photoelectric converter and is connected to a compressed air source via a pipe.

6. The photoelectric converter mounting structure of the etching machine as described in claim 5, characterized in that, The heat shield plate includes a first panel and a second panel. Mounting holes and a second threaded hole are provided on the first panel. An air nozzle is fixed on the second panel. There is a gap between the second panel and the housing of the photoelectric converter. The air outlet of the air nozzle is located within the gap. A molecular pump housing is fixedly installed on the lower end face of the reaction chamber. The second panel is located between the molecular pump housing and the photoelectric converter.

7. The photoelectric converter mounting structure of the etching machine as described in claim 6, characterized in that, A flow valve is installed on the pipeline, and a temperature sensor is fixedly installed on the side of the second panel facing the photoelectric converter.

8. The photoelectric converter mounting structure of the etching machine as described in claim 5, characterized in that, The air nozzle is an L-shaped threaded quick-connect coupling.

9. The photoelectric converter mounting structure of the etching machine as described in claim 1, characterized in that, The heat-insulating plate is made of thermally insulating material.

10. The photoelectric converter mounting structure of the etching machine as described in claim 9, characterized in that, The heat insulation plate is made of Teflon, rock wool, or asbestos.

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