A lifting UV curing device

Abstract

This utility model relates to a lifting UV curing device, comprising: a curing chamber, a glass plate, a lifting device, a UV lamp, and a support plate. The curing chamber is located above the support plate. The lifting device drives the curing chamber to move up and down relative to the support plate. The top surface of the curing chamber has a through opening. The glass plate seals the opening and is fixedly connected to the curing chamber. The UV lamp is located above the glass plate. The curing chamber has an air inlet and an air outlet. This utility model allows the curing chamber or fixed plate to be sealed, with air extracted and nitrogen introduced, thereby reducing the oxygen content around the UV adhesive on the semiconductor, ensuring the quality of UV adhesive curing, and preventing the oxygen-sensitive material from yellowing and failing to polymerize. The curing chamber and UV lamp are fixedly connected and move up and down together. The simple structure also prevents ultraviolet light leakage from the curing chamber, reducing harm to workers and surrounding equipment.

Description

Technical Field

[0001] This utility model relates to the field of UV curing, and in particular to a lifting UV curing device. Background Technology

[0002] In semiconductor manufacturing, it's necessary to shield certain areas of the semiconductor to prevent damage to these non-processed areas during subsequent processing. Currently, this is done by covering the non-processed areas with UV adhesive before processing and then curing the adhesive. After processing, the cured UV adhesive is peeled off from the non-processed areas. However, current UV adhesive curing methods suffer from problems such as yellowing and failure to polymerize in oxygen-sensitive materials. Utility Model Content

[0003] The present invention aims to solve the above problems by providing a lifting UV curing device, which solves the problem of yellowing and non-polymerization of oxygen-sensitive materials in UV adhesives during curing.

[0004] A lifting UV curing device includes: a curing chamber, a glass plate, a lifting device, a UV lamp, and a support plate. The curing chamber is located above the support plate. The lifting device drives the curing chamber to move up and down relative to the support plate. The top surface of the curing chamber has a vertically penetrating opening. The glass plate seals the opening and is fixedly connected to the curing chamber. The UV lamp is located above the glass plate. The curing chamber has an air inlet and an air outlet.

[0005] Preferably, it also includes an outer casing, which is located above and fixedly connected to the support plate. The curing chamber, lifting device and UV lamp are located inside the outer casing, and the outer casing is rotatably connected to the door.

[0006] Preferably, it further includes an elastic seal, which is annular and located below the top surface of the curing chamber, with its position fixed relative to the curing chamber.

[0007] Preferably, it further includes a fixing plate, which is annular around the opening, located below the top surface of the curing chamber and fixedly connected to the top surface of the curing chamber, and fixedly connected to an elastic seal.

[0008] Preferably, the side of the curing chamber has a first bent plate forming inward, the fixing plate has a second bent plate forming outward, the elastic seal is located between the side of the curing chamber and the fixing plate, the first bent plate and the second bent plate are embedded in the elastic seal and fixedly connected to the elastic seal, and the elastic seal is made of foam plastic.

[0009] Preferably, it also includes an oxygen sensor, an inlet pipe, and an outlet pipe. The fixing plate has an inlet hole and an outlet hole. The inlet pipe passes through the inlet pipe hole and is fixedly connected to the inlet hole. The inlet pipe is connected to a nitrogen cylinder. The outlet pipe passes through the outlet pipe hole and is fixedly connected to the outlet hole. The outlet pipe is connected to an air pump and an oxygen sensor 7.

[0010] Preferably, it also includes an oxygen sensor, an inlet pipe, and an outlet pipe. The oxygen sensor is located inside the curing chamber and is fixedly connected to the curing chamber. The inlet pipe is fixedly connected to the inlet pipe hole and communicates with the inside of the curing chamber. The inlet pipe is connected to a nitrogen cylinder. The outlet pipe is fixedly connected to the outlet hole and communicates with the inside of the curing chamber. The outlet pipe is connected to an air pump.

[0011] Preferably, the system further includes a control device and a solenoid valve. The solenoid valve is provided between the air inlet pipe and the nitrogen cylinder. The control device is electrically connected to the solenoid valve, the air pump, and the oxygen sensor, respectively.

[0012] Preferably, the lifting device is an electric push rod, the curing box is fixedly connected to the push rods of the two lifting devices, and the housing of the lifting device is fixedly connected to the outer cover box;

[0013] It also includes a light box and a mounting bracket. The UV lamp is fixedly connected to the light box, and the mounting bracket is fixedly connected to the outer casing. The mounting bracket has multiple fixing grooves along the vertical direction. Screws pass through the fixing grooves and are threadedly connected to the light box to fix the mounting bracket and the light box.

[0014] Preferably, the lifting device is an electric push rod, the curing chamber is fixedly connected to the push rods of the two lifting devices, the housing of the lifting device is fixedly connected to the support plate, and the UV lamp is fixedly connected to the curing chamber.

[0015] This invention has the following advantages: After sealing, the air in the curing chamber or fixing plate is extracted and nitrogen is introduced, thereby reducing the oxygen content around the UV adhesive on the semiconductor, ensuring the quality of UV adhesive curing, and preventing the oxygen-sensitive material of the UV adhesive from yellowing and failing to polymerize; the curing chamber is fixedly connected to the UV lamp and rises and falls together, which is simple in structure and can prevent ultraviolet light from leaking from the curing chamber, reducing harm to workers and surrounding equipment. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0017] Figure 1 : A three-dimensional structural schematic diagram of this utility model;

[0018] Figure 2 : A three-dimensional structural diagram of the present invention with the outer casing removed;

[0019] Figure 3 : A top view of the structure of this utility model;

[0020] Figure 4 :exist Figure 3 Schematic diagram of the cross-sectional structure at point AA;

[0021] Figure 5 :exist Figure 4 Schematic diagram of the cross-sectional structure at point BB;

[0022] Figure 6 :exist Figure 4 A magnified schematic diagram of the local structure at point C;

[0023] Figure 7 :exist Figure 5 A magnified schematic diagram of the structure at point D. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and examples:

[0025] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0027] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] like Figures 1 to 7 As shown, a lifting UV curing device includes: a curing chamber 1, a glass plate 2, a lifting device 4, a UV lamp 5, and a support plate 8. The curing chamber 1 is located above the support plate 8. The lifting device 4 drives the curing chamber 1 to move up and down relative to the support plate 8. The top surface of the curing chamber 1 has a vertically penetrating opening 10. The glass plate 2 seals the opening 10 and is fixedly connected to the curing chamber 1. The UV lamp 5 is located above the glass plate 2. The curing chamber 1 has an air inlet 12 and an air outlet 11.

[0029] Preferably, it also includes an outer casing 6, which is located above and fixedly connected to the support plate 8. The outer casing 6 is used to block ultraviolet rays and prevent ultraviolet rays from shining outward. The curing chamber 1, the lifting device 4 and the UV lamp 5 are located inside the outer casing 6. The outer casing 6 is rotatably connected to the door 61, through which the semiconductor is placed into and taken out of the outer casing 6.

[0030] Preferably, the system further includes an elastic sealing element 9, which is annular and located below the top surface of the curing chamber 1. The elastic sealing element 9 is fixed in position relative to the curing chamber 1. It should be noted that the annular shape is a closed structure with its ends connected, and is not limited to a circular ring.

[0031] Preferably, it further includes a fixing plate 3, which is annular around the opening 10. The fixing plate 3 is located below the top surface of the curing chamber 1 and is fixedly connected to the top surface of the curing chamber 1. The fixing plate 3 is fixedly connected to the elastic sealing element 9. It should be noted that the annular shape is a closed structure with its ends connected, and is not limited to a circular ring. For example, it can be... Figure 5 The image shows a rectangular ring.

[0032] Optionally, a first bent plate 13 is formed inward on the side of the curing chamber 1, and a second bent plate 34 is formed outward on the fixing plate 3. The elastic seal 9 is located between the side of the curing chamber 1 and the fixing plate 3. The first bent plate 13 and the second bent plate 34 are embedded in the elastic seal 9 and fixedly connected to it, improving the reliability of the fixed connection. The elastic seal 9 is made of foam plastic. When manufacturing the elastic seal 9, the foam plastic is filled between the fixing plates 3 of the curing chamber 1 and then cured, followed by shaping.

[0033] Optionally, the elastic seal 9 is a rubber or silicone gasket, and the elastic seal 9 is fixedly connected to the underside of the curing chamber 1 and / or the fixing plate 3.

[0034] Optionally, it also includes an oxygen sensor 7, an inlet pipe, and an outlet pipe. The fixing plate 3 has an inlet hole 32 and an outlet hole 31. The inlet pipe passes through the inlet pipe hole 12 and is fixedly connected to the inlet hole 32. The inlet pipe is connected to a nitrogen cylinder. The outlet pipe passes through the outlet pipe hole 11 and is fixedly connected to the outlet hole 31. The outlet pipe is connected to an air pump and to the oxygen sensor 7.

[0035] Optionally, it also includes an oxygen sensor 7, an inlet pipe, and an outlet pipe. The oxygen sensor 7 is located inside the curing chamber 1 and is fixedly connected to the curing chamber 1. The inlet pipe is fixedly connected to the inlet pipe hole 12 and communicates with the inside of the curing chamber 1. The inlet pipe is connected to a nitrogen cylinder. The outlet pipe is fixedly connected to the outlet hole 31 and communicates with the inside of the curing chamber 1. The outlet pipe is connected to an air pump.

[0036] Preferably, it also includes a control device and a solenoid valve. A solenoid valve is provided between the air inlet pipe and the nitrogen cylinder. The control device is electrically connected to the solenoid valve, the air pump, and the oxygen sensor 7, respectively.

[0037] Optionally, the lifting device 4 is an electric push rod, the curing box 1 is fixedly connected to the push rods 41 of the two lifting devices 4, and the housing of the lifting device 4 is fixedly connected to the outer cover box 6.

[0038] Preferably, the system further includes a light box 51 and a mounting bracket 52. The UV lamp 5 is fixedly connected to the light box 51, and the mounting bracket 52 is fixedly connected to the outer casing 6. The mounting bracket 52 has multiple mounting slots 521 formed along the vertical direction. Screws pass through the mounting slots 521 and are threadedly connected to the light box 51 to fix the mounting bracket 52 and the light box 51. The height of the light box 51 from the curing chamber 1 can be adjusted by passing screws through different mounting slots 521.

[0039] Optionally, the lifting device 4 is an electric push rod, the curing chamber 1 is fixedly connected to the push rods 41 of the two lifting devices 4, the housing of the lifting device 4 is fixedly connected to the support plate 8, and the UV lamp 5 is fixedly connected to the curing chamber 1. All the ultraviolet rays emitted by the UV lamp 5 pass through the glass plate 2, and the curing chamber 1 is used to block the internal ultraviolet rays and prevent ultraviolet rays from leaking out, so that the outer cover chamber 6 is not required.

[0040] Working principle:

[0041] After the semiconductor coated with UV adhesive is placed under the glass plate 2, the push rod 41 of the lifting device 4 moves downward, driving the curing chamber 1 downward until the bottom of the elastic seal 9 contacts the support plate 8. The elastic seal 9 undergoes elastic deformation, and together with the support plate 8, seals the space inside the curing chamber 1 or the fixed plate 3.

[0042] The air pump operates by drawing air out of the curing chamber 1 or the fixed plate 3 through the air outlet pipe. Simultaneously, the solenoid valve opens, allowing nitrogen from the nitrogen cylinder to enter the curing chamber 1 or the fixed plate 3 through the air inlet pipe. The oxygen sensor 7 monitors the oxygen content inside the curing chamber 1 or the fixed plate 3 in real time. When the oxygen content falls below a set value, the UV lamp 5 activates. The ultraviolet light emitted by the UV lamp 5 passes through the glass plate 2 and irradiates the UV adhesive coated on the semiconductor until the UV adhesive cures. During the UV adhesive curing process, if the oxygen sensor 7 detects that the air content is higher than the set value, air is drawn out again and nitrogen is added.

[0043] After the set time, the UV adhesive is cured. Then, the lifting device 4 drives the curing chamber 1 to move upward and reset, and the staff removes the cured semiconductor and puts in a new semiconductor.

[0044] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A lift-up UV curing device, characterized by, include: The curing chamber (1), glass plate (2), lifting device (4), UV lamp (5) and support plate (8) are provided. The curing chamber (1) is located above the support plate (8). The lifting device (4) drives the curing chamber (1) to move up and down relative to the support plate (8). The top surface of the curing chamber (1) has an opening (10) that runs through it. The glass plate (2) blocks the opening (10) and is fixedly connected to the curing chamber (1). The UV lamp (5) is located above the glass plate (2). The curing chamber (1) has an air inlet hole (12) and an air outlet hole (11).

2. The lift-up UV curing device according to claim 1, wherein: It also includes an outer casing (6), which is located above the support plate (8) and fixedly connected to the support plate (8). The curing box (1), the lifting device (4) and the UV lamp (5) are located inside the outer casing (6), and the outer casing (6) is rotatably connected to the box door (61).

3. The lift-up UV curing device according to claim 1, wherein: It also includes an elastic seal (9), which is annular and located below the top surface of the curing chamber (1). The position of the elastic seal (9) relative to the curing chamber (1) is fixed.

4. The lift-up UV curing device according to claim 3, wherein: It also includes a fixing plate (3), which is an annular ring surrounding the opening (10). The fixing plate (3) is located below the top surface of the curing chamber (1) and is fixedly connected to the top surface of the curing chamber (1). The fixing plate (3) is fixedly connected to the elastic seal (9).

5. A lifting UV curing device according to claim 4, characterized in that: The curing chamber (1) has a first bent plate (13) formed inward on its side, and the fixing plate (3) has a second bent plate (34) formed outward. The elastic seal (9) is located between the side of the curing chamber (1) and the fixing plate (3). The first bent plate (13) and the second bent plate (34) are embedded in the elastic seal (9) and fixedly connected to the elastic seal (9). The elastic seal (9) is made of foam plastic.

6. The lift-up UV curing device according to claim 4, wherein: It also includes an oxygen sensor (7), an inlet pipe and an outlet pipe. The fixing plate (3) has an inlet hole (32) and an outlet hole (31). The inlet pipe passes through the inlet pipe hole (12) and is fixedly connected to the inlet hole (32). The inlet pipe is connected to a nitrogen cylinder. The outlet pipe passes through the outlet pipe hole (11) and is fixedly connected to the outlet hole (31). The outlet pipe is connected to an air pump and the outlet pipe is connected to the oxygen sensor (7).

7. The lift-up UV curing device according to claim 1, wherein: It also includes an oxygen sensor (7), an inlet pipe and an outlet pipe. The oxygen sensor (7) is located inside the curing chamber (1) and is fixedly connected to the curing chamber (1). The inlet pipe is fixedly connected to the inlet pipe hole (12) and communicates with the inside of the curing chamber (1). The inlet pipe is connected to a nitrogen cylinder. The outlet pipe is fixedly connected to the outlet hole (31) and communicates with the inside of the curing chamber (1). The outlet pipe is connected to an air pump.

8. A UV curing device according to claim 6 or 7, wherein: It also includes a control device and a solenoid valve. A solenoid valve is provided between the air inlet pipe and the nitrogen cylinder. The control device is electrically connected to the solenoid valve, the air pump and the oxygen sensor (7) respectively.

9. The lift-up UV curing device according to claim 2, wherein: The lifting device (4) is an electric push rod. The curing box (1) is fixedly connected to the push rods (41) of the two lifting devices (4). The housing of the lifting device (4) is fixedly connected to the outer cover box (6). It also includes a light box (51) and a fixing frame (52). The UV lamp (5) is fixedly connected to the light box (51), and the fixing frame (52) is fixedly connected to the outer casing (6). The fixing frame (52) has multiple fixing grooves (521) formed in the vertical direction. Screws pass through the fixing grooves (521) and are threadedly connected to the light box (51) to fix the fixing frame (52) and the light box (51).

10. The lift-up UV curing device according to claim 1, wherein: The lifting device (4) is an electric push rod. The curing box (1) is fixedly connected to the push rods (41) of the two lifting devices (4). The housing of the lifting device (4) is fixedly connected to the support plate (8). The UV lamp (5) is fixedly connected to the curing box (1).

Images