Cleaning solution buffer delivery device for semiconductor wet cleaning equipment

Abstract

This invention provides a cleaning fluid buffer conveying device for semiconductor wet cleaning equipment. The device includes a cleaning fluid buffer tank, an external cleaning fluid inlet pipe, a cleaning fluid outlet pipe, and an exhaust overflow pipe. The cleaning fluid is located at the bottom of the buffer tank. The cleaning fluid inlet pipe is connected to the top of the buffer tank, and the cleaning fluid outlet pipe is connected to the bottom of the buffer tank. One end of the exhaust overflow pipe is located at the top of the buffer tank and communicates with it. This cleaning fluid buffer device can remove gas from the buffer tank through the exhaust overflow pipe, thereby ensuring the normal operation of the cleaning fluid buffer conveying device.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a cleaning fluid buffer conveying device for semiconductor wet cleaning equipment. Background Technology

[0002] In integrated circuit manufacturing processes, EKC cleaning solution is typically supplied to the mixing tank of semiconductor wet cleaning equipment via a cleaning solution buffer delivery device. EKC cleaning solution is commonly used to remove compounds, metallic impurities, or particles from the wafer surface. Depending on the specific model, the active ingredient in EKC cleaning solution can be hydroxylamine hydrochloride, hydroxylamine and ammonia, or a solution containing -NH2-OH groups.

[0003] When the cleaning fluid delivery device delivers EKC cleaning fluid, because EKC cleaning fluid is relatively viscous, once air bubbles are generated at the supply end, they cannot be observed with the naked eye. The EKC cleaning fluid with air bubbles in the buffer tank will trigger the flow meter alarm when it passes through the ultrasonic flow meter, thus affecting the normal delivery of EKC cleaning fluid.

[0004] Therefore, for those skilled in the art, how to design a cleaning fluid buffer delivery device that can remove air bubbles inside the buffer tank is a technical problem that urgently needs to be solved. Utility Model Content

[0005] The purpose of this invention is to provide a cleaning fluid buffer conveying device for semiconductor wet cleaning equipment. This cleaning fluid buffer conveying device can remove gas from the cleaning fluid buffer tank through an exhaust overflow pipe, thereby ensuring the normal operation of the cleaning fluid buffer conveying device.

[0006] To achieve the above objectives, this utility model provides a cleaning fluid buffer conveying device for a semiconductor wet cleaning equipment, comprising: a cleaning fluid buffer tank, a cleaning fluid inlet pipe outside the equipment, a cleaning fluid outlet pipe, and an exhaust overflow pipe; the cleaning fluid in the cleaning fluid buffer tank is located at the bottom of the cleaning fluid buffer tank, the cleaning fluid inlet pipe is connected to the top of the cleaning fluid buffer tank, the cleaning fluid outlet pipe is connected to the bottom of the cleaning fluid buffer tank, and one end of the exhaust overflow pipe is located at the top of the buffer tank and communicates with the cleaning fluid buffer tank.

[0007] Optionally, the other end of the exhaust overflow pipe is provided with an overflow pipe and an exhaust pipe, and the overflow pipe and the exhaust pipe are connected to the other end of the exhaust overflow pipe through a tee fitting; the exhaust pipe is arranged towards the top of the cleaning fluid buffer tank, and the overflow pipe is arranged towards the bottom of the cleaning fluid buffer tank.

[0008] Optionally, the cleaning fluid buffer conveying device further includes a cleaning fluid circulation pipeline, one end of which is connected to the end of the cleaning fluid output pipeline near the bottom of the cleaning fluid buffer tank, and the other end of which is connected to the top of the cleaning fluid buffer tank.

[0009] Optionally, the other end of the cleaning fluid output pipeline is connected to the cleaning fluid mixing tank and is equipped with a flow meter, which is used at least to detect the liquid flow rate output from the cleaning fluid output pipeline to the cleaning fluid mixing tank.

[0010] Optionally, a drain pipe is provided near the bottom of the cleaning fluid buffer tank in the cleaning fluid output pipeline, and the drain pipe is equipped with a switch valve, which is normally closed.

[0011] Optionally, the overflow pipe is connected to one end of the drain pipe.

[0012] Optionally, the cleaning fluid buffer conveying device further includes a liquid level sensor, which is installed in the cleaning fluid buffer tank to monitor the installation status of the cleaning fluid buffer tank along the direction of gravity.

[0013] This application provides a cleaning fluid buffer conveying device for a semiconductor wet cleaning equipment. The cleaning fluid buffer conveying device can timely discharge the gas in the cleaning fluid buffer tank through the exhaust overflow pipe. On the one hand, it can prevent air bubbles in the cleaning fluid buffer tank from triggering the flow meter alarm and make the flow meter detection more accurate, thereby improving the metering accuracy of the cleaning fluid buffer conveying device. On the other hand, it can maintain the normal pressure in the cleaning fluid buffer tank, ensure the smooth flow of fluid in the cleaning fluid buffer tank, and ensure the stable operation of the cleaning fluid buffer conveying device. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the cleaning fluid buffer delivery device in a preferred embodiment of the present invention.

[0015] The reference numerals in the attached figures are explained as follows:

[0016] 1. Cleaning fluid buffer tank; 2. Cleaning fluid inlet pipe; 3. Cleaning fluid outlet pipe; 4. Exhaust overflow pipe; 41. Exhaust pipe; 5. Overflow pipe; 51. Drainage tank; 6. Drainage pipe; 7. Flow meter; 8. Cleaning fluid circulation pipe; 9. Liquid level sensor. Detailed Implementation

[0017] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0018] The terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the mechanism or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0019] It should be understood that the terms "first," "second," etc., are used in this utility model to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this utility model, "first" information can also be called "second" information, and similarly, "second" information can also be called "first" information.

[0020] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "fixation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between the components; they can refer to a direct connection or a connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0021] Furthermore, those skilled in the art can combine and integrate the different embodiments or examples described herein, as well as the features of the different embodiments or examples, without contradiction.

[0022] Reference Figure 1 As shown, a preferred embodiment of this application provides a cleaning fluid buffer conveying device for a semiconductor wet cleaning equipment, including a cleaning fluid buffer tank 1, a cleaning fluid inlet pipe 2 outside the equipment, a cleaning fluid outlet pipe 3, and an exhaust overflow pipe 4. The cleaning fluid in the cleaning fluid buffer tank 1 is located at the bottom of the tank. The cleaning fluid inlet pipe 2 is connected to the top of the tank, and the cleaning fluid outlet pipe 3 is connected to the bottom of the tank. One end of the exhaust overflow pipe 4 is located at the top of the tank and communicates with it, and is used to discharge gas from the cleaning fluid buffer tank 1.

[0023] It should be noted that the cleaning fluid buffer tank 1 of the cleaning fluid buffer delivery device can provide a buffer for EKC cleaning fluid, so that cleaning fluid can be continuously supplied to the cleaning fluid output pipeline 3.

[0024] Generally, EKC580 cleaning fluid can be supplied to the cleaning fluid buffer tank 1 through the cleaning fluid inlet pipe 2. EKC580 cleaning fluid, as a type of EKC cleaning fluid, includes components such as hydroxylamine (HDA), ethanol (DGA), catechol, and water. This solution is relatively viscous, and bubbles invisible to the naked eye often appear at the supply end. If the gas is not promptly released after being introduced into the cleaning fluid buffer tank 1, the accumulated gas will increase the pressure inside the tank, posing a safety hazard. Furthermore, the presence of gas in the cleaning fluid buffer tank 1 will also trigger an alarm on the flow meter, affecting the accuracy of the flow meter measurement.

[0025] This application provides a cleaning fluid buffer conveying device for a semiconductor wet cleaning equipment. The cleaning fluid buffer conveying device can timely discharge the gas in the cleaning fluid buffer tank 1 through the exhaust overflow pipe 4. On the one hand, it can prevent air bubbles in the cleaning fluid buffer tank 1 from triggering the flow meter alarm and make the flow meter detection more accurate, thereby improving the metering accuracy of the cleaning fluid buffer conveying device. On the other hand, it can maintain the normal pressure in the cleaning fluid buffer tank 1, ensure the smooth flow of fluid in the cleaning fluid buffer tank 1, and ensure the stable operation of the cleaning fluid buffer conveying device.

[0026] Optionally, the other end of the exhaust overflow pipe 4 is provided with an overflow pipe 5 and an exhaust pipe 41, which are connected to the other end of the exhaust overflow pipe 4 via a first tee fitting (not labeled). The exhaust pipe 41 is positioned towards the top of the cleaning fluid buffer tank 1, and the overflow pipe 5 is positioned towards the bottom of the cleaning fluid buffer tank 1 to facilitate liquid discharge. The overflow pipe 5 is used to discharge liquid overflowing from the cleaning fluid buffer tank 1. Preferably, a drain tank 51 is provided below the overflow pipe 5 to collect the liquid discharged from the overflow pipe 5.

[0027] Preferably, the cleaning fluid buffer delivery device further includes an extraction mechanism (not shown), which is connected to the exhaust pipe 41 and is used to extract gas from the cleaning fluid buffer tank 1. This application does not limit the type of extraction mechanism, which may include, but is not limited to, vacuum pumps and fans.

[0028] If the liquid level in the cleaning fluid buffer tank 1 reaches the height of the overflow pipe 5, the cleaning fluid in the cleaning fluid buffer tank 1 can flow out sequentially through the exhaust overflow pipe 4 and the overflow pipe 5, and flow to the drain tank 51 or other pipes. This setting can keep the liquid level in the cleaning fluid buffer tank 1 within a suitable range, avoid the liquid level in the cleaning fluid buffer tank 1 being too high and affecting the buffering effect of the cleaning fluid, and also prevent the pressure in the cleaning fluid buffer tank 1 from being too high and causing a safety accident, which helps to stabilize the operation of the cleaning fluid buffer delivery device.

[0029] Reference Figure 1 As shown, the other end of the cleaning fluid output pipeline 3 is connected to a cleaning fluid mixing tank (not shown). The cleaning fluid output pipeline 3 is used to deliver cleaning fluid to the cleaning fluid mixing tank. A flow meter 7 is installed on the cleaning fluid output pipeline 3. The flow meter 7 is used to detect at least the flow rate of the liquid output from the cleaning fluid output pipeline 3 to the cleaning fluid mixing tank. This application can timely discharge the gas in the cleaning fluid buffer tank 1 through the exhaust overflow pipeline 4, thereby preventing air bubbles from passing through the flow meter 7 and triggering an alarm, ensuring the normal operation of the flow meter 7 and the cleaning fluid buffer delivery device.

[0030] This application does not limit the type of flow meter 7, which includes, but is not limited to, ultrasonic flow meters or turbine flow meters.

[0031] Furthermore, a drain pipe 6 is provided near the bottom of the cleaning fluid buffer tank 1 on the cleaning fluid output pipeline 3. The drain pipe 6 is equipped with a switch valve, which is normally closed. The drain pipe 6 is used to drain the liquid in the cleaning fluid buffer tank 1. In a specific example, the drain pipe 6 is connected to the cleaning fluid output pipeline 3 through a second tee fitting.

[0032] Preferably, one end of the overflow pipe 5 is connected to the drain pipe 6, and the fluid overflowing from the cleaning fluid buffer tank 1 can be discharged through the overflow pipe 5 and the drain pipe 6 in sequence.

[0033] Furthermore, the cleaning fluid delivery device also includes a cleaning fluid circulation pipeline 8, one end of which is connected to the end of the cleaning fluid output pipeline 3 near the bottom of the cleaning fluid buffer tank 1, and the other end of which is connected to the top of the cleaning fluid buffer tank 1. In one example, one end of the cleaning fluid circulation pipeline 8 is connected to the bottom end of the cleaning fluid output pipeline 3 via a third tee fitting.

[0034] The cleaning fluid circulation pipeline 8 is used to re-input the fluid output from the cleaning fluid buffer tank 1 into the cleaning fluid buffer tank 1, so that the fluid in the cleaning fluid buffer tank 1 remains in a flowing state. This can avoid the fluid flow being affected by excessively high or low local pressure, and can also reduce the sedimentation and stratification of the fluid in the cleaning fluid buffer tank 1, which facilitates the subsequent processing and transportation of the fluid.

[0035] Continue to refer to Figure 1As shown, in a preferred embodiment, the cleaning fluid output pipeline 3 is provided with a second tee fitting, a third tee fitting, and a flow meter 7 in sequence in the direction away from the cleaning fluid buffer tank 1.

[0036] More specifically, after the cleaning fluid output pipeline 3 is connected to the cleaning fluid buffer tank 1, it is first connected to the drain pipe 6 via a second tee fitting. If necessary, the fluid in the cleaning fluid buffer tank 1 can be discharged through the drain pipe 6. Then, the cleaning fluid output pipeline 3 is connected to the cleaning fluid circulation pipeline 8 via a third tee fitting, and the fluid in the cleaning fluid buffer tank 1 is circulated through the cleaning fluid circulation pipeline 8. Afterwards, a flow meter 7 can be installed on the cleaning fluid output pipeline 3 to measure the liquid flow rate in the cleaning fluid output pipeline 3.

[0037] This application does not limit the placement of the second tee fitting, the third tee fitting, and the flow meter 7 on the cleaning fluid output pipeline 3. For example, in another specific example, the third tee fitting, the second tee fitting, and the flow meter 7 may be sequentially arranged on the cleaning fluid output pipeline 3 in a direction away from the cleaning fluid buffer tank 1.

[0038] In addition, the cleaning fluid buffer conveying device preferably also includes a liquid level sensor 9, which is installed in the cleaning fluid buffer tank 1 to monitor the installation status of the cleaning fluid buffer tank 1 along the direction of gravity, that is, the liquid level sensor 9 is used to detect the liquid level height in the cleaning fluid buffer tank 1.

[0039] In one example, the cleaning fluid buffer delivery device may also include other types of water level sensors (such as pressure water level sensors, hydrostatic water level sensors, or ultrasonic water level sensors), which can measure the liquid level height in the cleaning fluid buffer tank 1, thereby enabling liquid level detection of the closed cleaning fluid buffer tank 1.

[0040] In summary, this utility model provides a cleaning fluid buffer conveying device for semiconductor wet cleaning equipment. The cleaning fluid buffer conveying device can timely discharge the gas in the cleaning fluid buffer tank 1 through the exhaust overflow pipe 4. On the one hand, it can prevent air bubbles in the cleaning fluid buffer tank 1 from triggering the flow meter 7 alarm and make the flow meter 7 detection more accurate, thereby improving the metering accuracy of the cleaning fluid buffer conveying device. On the other hand, it can maintain the normal pressure in the cleaning fluid buffer tank 1, ensure the smooth flow of fluid in the cleaning fluid buffer tank 1, and ensure the stable operation of the cleaning fluid buffer conveying device.

[0041] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present utility model.

Claims

1. A cleaning fluid buffer and conveying device for a semiconductor wet cleaning equipment, characterized in that, include: The equipment includes a cleaning fluid buffer tank, a cleaning fluid inlet pipe, a cleaning fluid outlet pipe, and an exhaust overflow pipe. The cleaning fluid in the cleaning fluid buffer tank is located at the bottom of the tank. The cleaning fluid inlet pipe is connected to the top of the buffer tank, the cleaning fluid outlet pipe is connected to the bottom of the buffer tank, and one end of the exhaust overflow pipe is located at the top of the buffer tank and communicates with it.

2. The cleaning fluid buffer conveying device of the equipment as described in claim 1, characterized in that, The other end of the exhaust overflow pipe is provided with an overflow pipe and an exhaust pipe, which are connected to the other end of the exhaust overflow pipe through a tee fitting; the exhaust pipe is arranged towards the top of the cleaning fluid buffer tank, and the overflow pipe is arranged towards the bottom of the cleaning fluid buffer tank.

3. The cleaning fluid buffer conveying device of the equipment as described in claim 2, characterized in that, It also includes a cleaning fluid circulation pipeline, one end of which is connected to the end of the cleaning fluid output pipeline near the bottom of the cleaning fluid buffer tank, and the other end of which is connected to the top of the cleaning fluid buffer tank.

4. The cleaning fluid buffer conveying device of the equipment as described in claim 3, characterized in that, The other end of the cleaning fluid output pipeline is connected to the cleaning fluid mixing tank and is equipped with a flow meter. The flow meter is used to detect at least the flow rate of the liquid output from the cleaning fluid output pipeline to the cleaning fluid mixing tank.

5. The cleaning fluid buffer conveying device of the equipment as described in claim 2, characterized in that, The cleaning fluid output pipeline is provided with a drain pipe near the bottom of the cleaning fluid buffer tank, and the drain pipe is equipped with a switch valve, which is normally closed.

6. The cleaning fluid buffer conveying device of the equipment as described in claim 5, characterized in that, The overflow pipe is connected to one end of the drain pipe.

7. The cleaning fluid buffer conveying device of the equipment as described in claim 1, characterized in that, It also includes a liquid level sensor, which is installed in the cleaning fluid buffer tank to monitor the installation status of the cleaning fluid buffer tank along the direction of gravity.

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