Cleaning device

Abstract

A cleaning device for cleaning workpieces includes a base, a transfer mechanism mounted on the base, a plasma cleaning mechanism mounted on the base and above the transfer mechanism, a detection mechanism mounted on the base and above the transfer mechanism, and a unloading mechanism mounted on the base and above the transfer mechanism. The plasma cleaning mechanism, detection mechanism, and unloading mechanism are arranged side-by-side, with the detection mechanism located between the plasma cleaning mechanism and the unloading mechanism. The transfer mechanism carries and moves the workpiece sequentially below the plasma cleaning mechanism, detection mechanism, and unloading mechanism. The plasma cleaning mechanism sprays plasma onto the workpiece to clean it. The detection mechanism captures and acquires image information of the workpiece to determine its qualification. The unloading mechanism removes the workpiece for unloading. This cleaning device achieves non-contact cleaning by spraying plasma onto the workpiece through the plasma cleaning mechanism, improving cleaning efficiency while ensuring the cleaning quality of the workpiece.

Description

Technical Field

[0001] This application relates to the field of cleaning technology, and in particular to a cleaning device. Background Technology

[0002] In the manufacturing process of consumer electronics (such as smartphones, tablets, and laptops), the display screen, as a core component, typically requires a sealing process for fixation and sealing. Before sealing, the area to be sealed must be cleaned to ensure reliable adhesion of the adhesive. However, existing cleaning methods (such as mechanical polishing, chemical solvent cleaning, and plasma cleaning) have the following problems: they may cause surface damage (such as micro-scratches or substrate corrosion), incomplete cleaning (residual contaminants may lead to bubbles or delamination), and damage to functional coatings (such as failure of the graphite heat dissipation layer or optical film layer, resulting in uneven display brightness or color deviation). Utility Model Content

[0003] In view of the above situation, it is necessary to provide a non-contact cleaning device to improve cleaning efficiency and ensure the cleaning quality of the workpiece.

[0004] This application provides a cleaning device for cleaning workpieces. The cleaning device includes a base, a transfer mechanism disposed on the base, a plasma cleaning mechanism disposed on the base and above the transfer mechanism, a detection mechanism disposed on the base and above the transfer mechanism, and a unloading mechanism disposed on the base and above the transfer mechanism. The detection mechanism is arranged adjacent to the plasma cleaning mechanism, and the unloading mechanism is arranged adjacent to the detection mechanism. The plasma cleaning mechanism, the detection mechanism, and the unloading mechanism are arranged side by side, with the detection mechanism located between the plasma cleaning mechanism and the unloading mechanism. The transfer mechanism carries the workpiece and moves the workpiece sequentially below the plasma cleaning mechanism, the detection mechanism, and the unloading mechanism. The plasma cleaning mechanism sprays plasma towards the workpiece below it to clean it. The detection mechanism captures and acquires image information of the workpiece below it to determine whether the workpiece is qualified. The unloading mechanism removes the workpiece below it for unloading.

[0005] In some embodiments, the transfer mechanism includes a transfer drive connected to the base and a positioning component located above the transfer drive and positioning the workpiece. The transfer drive is driven to be connected to the positioning component and drives the positioning component to move the workpiece sequentially below the plasma cleaning mechanism, the detection mechanism and the unloading mechanism.

[0006] In some embodiments, the positioning assembly includes a support seat connected to the transfer drive and carrying the workpiece, a plurality of abutment members slidably disposed around the periphery of the support seat, a transmission member disposed between the plurality of abutment members and respectively connected to the plurality of abutment members, and an abutment drive member disposed on the support seat and drivenly connected to the transmission member. The abutment drive member drives the transmission member to move the plurality of abutment members toward the center of the support seat, so that the plurality of abutment members jointly abut against and position the workpiece on the support seat.

[0007] In some embodiments, the support base includes a support portion connected to the transfer drive member, a support portion disposed on the side of the support portion away from the transfer drive member and carrying the workpiece, and a plurality of protective covers disposed on the support portion and located around the support portion. The abutment drive member is disposed between the support portion and the support portion and connected to the support portion. The plurality of abutment members are slidably disposed around the support portion and are correspondingly disposed with the plurality of protective covers. Each abutment member can move into the protective cover when it moves away from the center of the support base.

[0008] In some embodiments, the plasma cleaning mechanism includes a plasma seat disposed on the base, a plasma drive unit disposed on the plasma seat and located above the transfer mechanism, and a plasma cleaning unit drivenly connected to the plasma drive unit and located above the transfer mechanism. The plasma drive unit drives the plasma cleaning unit to move so that the plasma cleaning unit sprays plasma toward the workpiece to clean the workpiece.

[0009] In some embodiments, the plasma cleaning mechanism further includes a plasma guide connected below the plasma base and an air extraction assembly connected to the plasma guide. The plasma guide has a guide groove extending in a vertical direction, which guides the plasma ejected by the plasma cleaning component. The side wall of the plasma guide has an air extraction hole communicating with the guide groove. The air extraction assembly is connected to the air extraction hole to remove plasma near the groove wall of the guide groove.

[0010] In some embodiments, the plasma cleaning mechanism further includes a cooling component disposed on one side of the cleaning component and connected to the cleaning component, the cooling component blowing air toward the workpiece to cool the workpiece.

[0011] In some embodiments, the detection mechanism includes a detection seat disposed on the base and a detection element connected to the detection seat and located above the transfer mechanism. The detection drive element drives the detection element to move so that the detection element captures and acquires image information of the workpiece to determine whether the workpiece is qualified.

[0012] In some embodiments, the testing mechanism further includes an antistatic component disposed on the testing seat and located below the testing element, the antistatic component blowing ion air toward the workpiece to remove static electricity from the workpiece.

[0013] In some embodiments, the unloading mechanism includes an unloading seat disposed on the base, an unloading drive unit disposed on the unloading seat and located above the transfer mechanism, and an unloading component drivenly connected to the unloading drive unit and located above the transfer mechanism. The unloading drive unit drives the unloading component to move so that the unloading component picks up the workpiece for unloading.

[0014] The aforementioned cleaning device achieves non-contact cleaning by spraying plasma onto the workpiece through a plasma cleaning mechanism, avoiding surface scratches and material corrosion problems caused by traditional mechanical or chemical cleaning. Through an integrated transfer, detection, and unloading mechanism, it realizes an integrated process of automatic workpiece cleaning, online detection, and sorting, significantly improving cleaning efficiency and consistency. At the same time, plasma cleaning has excellent compatibility with multiple material systems such as glass substrates and graphite heat dissipation layers, solving the coating damage problem caused by material differences in traditional processes, thereby effectively ensuring the cleaning quality of the workpiece. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the cleaning device provided in an embodiment of this application.

[0016] Figure 2 yes Figure 1 A three-dimensional structural diagram of the transfer mechanism in the cleaning device shown.

[0017] Figure 3 yes Figure 2 An exploded view of the positioning component in the transfer mechanism is shown.

[0018] Figure 4 yes Figure 1 A three-dimensional structural diagram of the plasma cleaning mechanism in the cleaning device shown.

[0019] Figure 5 yes Figure 1 A three-dimensional structural diagram of the detection mechanism in the cleaning device shown.

[0020] Figure 6 yes Figure 1 A three-dimensional structural diagram of the feeding mechanism in the cleaning device shown.

[0021] Figure 7 yes Figure 1 A three-dimensional structural diagram of the transport mechanism in the cleaning device shown.

[0022] Key component symbols: Cleaning device 100, base 10, transfer mechanism 20, transfer drive 21, positioning assembly 22, support seat 221, support part 2211, support part 2212, protective cover 2213, suction nozzle 2214, holding part 222, transmission part 223, first end 223a, second end 223b, first inclined surface structure 2231, second inclined surface structure 2221, holding drive 224, plasma cleaning mechanism 30, plasma seat 31, plasma drive Component 32, plasma cleaning component 33, plasma guide component 34, guide groove 341, air extraction hole 342, air extraction assembly 35, cooling assembly 36, blower drive component 361, blower plate 362, detection mechanism 40, detection seat 41, detection component 42, static elimination assembly 43, unloading mechanism 50, unloading seat 51, unloading drive component 52, unloading component 53, unloading rack 531, suction cup 532, transport mechanism 60, transport seat 61, transport drive component 62, transport component 63, workpiece 200. Detailed Implementation

[0023] The embodiments of this application are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0024] Please see Figure 1 This application provides a cleaning device 100 for cleaning a workpiece 200, in which the workpiece 200 is a mobile phone display screen back panel. The cleaning device 100 includes a base 10, two spaced-apart transfer mechanisms 20, a plasma cleaning mechanism 30, a detection mechanism 40, a feeding mechanism 50, and a transport mechanism 60. The two transfer mechanisms 20 are spaced apart on the base 10. The plasma cleaning mechanism 30 is located on the base 10 and above the two transfer mechanisms 20. The detection mechanism 40 is located on the base 10 and above the two transfer mechanisms 20, adjacent to the plasma cleaning mechanism 30. The feeding mechanism 50 is located on the base 10 and above the two transfer mechanisms 20, adjacent to the detection mechanism 40. The plasma cleaning mechanism 30, the detection mechanism 40, and the feeding mechanism 50 are arranged side-by-side, with the detection mechanism 40 located between the plasma cleaning mechanism 30 and the feeding mechanism 50. The transport mechanism 60 is located on the base 10 and on the same side as the plasma cleaning mechanism 30, the detection mechanism 40, and the feeding mechanism 50. For ease of understanding, the spacing direction between the two transfer mechanisms 20 is defined as the X-axis direction, the direction in which the workpiece 200 moves on the transfer mechanism 20 is defined as the Y-axis direction, and the vertical direction is defined as the Z-axis direction.

[0025] The transfer mechanism 20 carries the workpiece 200 and moves the workpiece 200 sequentially to below the plasma cleaning mechanism 30, the inspection mechanism 40 and the unloading mechanism 50. Each transfer mechanism 20 can carry two workpieces 200.

[0026] Please see also Figure 2 The transfer mechanism 20 includes a transfer drive 21 connected to the base 10 and a positioning component 22 located above the transfer drive 21 and positioning the workpiece 200. The transfer drive 21 is driven to the positioning component 22, and drives the positioning component 22 to move the workpiece 200 sequentially below the plasma cleaning mechanism 30, the detection mechanism 40, and the unloading mechanism 50. In this embodiment, the transfer drive 21 is a linear module, and the positioning component 22 can carry two workpieces 200.

[0027] Please see also Figure 3 The positioning assembly 22 includes a support base 221 connected to the transfer drive member 21 and supporting the workpiece 200; a plurality of abutment members 222 slidably disposed around the periphery of the support base 221; a transmission member 223 disposed between and respectively connected to the plurality of abutment members 222; and an abutment drive member 224 disposed on the support base 221 and drivenly connected to the transmission member 223. The abutment members 222 are block-shaped structures. The transmission member 223 is generally rod-shaped. The abutment drive member 224 drives the transmission member 223 to move the plurality of abutment members 222 toward the center of the support base 221, so that the plurality of abutment members 222 jointly abut and position the workpiece 200 on the support base 221. In this embodiment, the abutment drive member 224 is a cylinder.

[0028] The support base 221 includes a support portion 2211 connected to the transfer drive member 21, a support portion 2212 located on the side of the support portion 2211 opposite to the transfer drive member 21 and supporting the workpiece 200, and a plurality of protective covers 2213 located on the support portion 2211 and around the support portion 2212. The support portion 2211 is a cuboid structure with an inner cavity. The support portion 2212 is a plate-like structure. The protective covers 2213 are sheet-like structures. In this embodiment, there are two support portions 2212, which are spaced apart along the Y-axis.

[0029] Furthermore, the support 221 also includes a suction nozzle 2214, which is embedded in the support portion 2212 to adsorb and fix the workpiece 200. In this embodiment, each support portion 2212 is provided with four suction nozzles 2214, which are distributed in a rectangular shape.

[0030] Multiple abutment members 222 are slidably disposed on the periphery of the support portion 2212. There are six abutment members 222 in total, with two abutment members 222 spaced apart along the Y-axis and the other four spaced apart in pairs along the X-axis. The six abutment members 222 move towards the center of the support seat 221, thereby abutting and positioning the workpiece 200 on the support seat 221. The six abutment members 222 also move away from the center of the support seat 221, thereby releasing the workpiece 200 from the support seat 221. Each abutment member 222 corresponds one-to-one with a plurality of protective covers 2213. Each abutment member 222 can move into the protective cover 2213 as it moves away from the center of the support seat 221. The protective cover 2213 can protect the abutment member 222 that has moved below it. In this embodiment, each support portion 2212 has multiple abutment members 222 and multiple protective covers 2213 on its periphery. To reduce the impact of the plasma cleaning flame on the lifespan of the retainer 222, a stainless steel protective cover 2213 is installed to shield the retainer 222. The protective cover 2213 can effectively prevent heat transfer from burning the retainer 222, and its conductivity can also prevent charge accumulation during the plasma cleaning process, thereby preventing the workpiece 200 from being damaged.

[0031] The transmission component 223 has a first end 223a and a second end 223b. The first end 223a is fixedly connected to one of the abutment members 222 located in the Y-axis direction, and the second end 223b of the transmission component 223 is engaged with another abutment member 222 located in the Y-axis direction. The abutment drive component 224 is fixedly connected to the second end 223b of the transmission component 223. The transmission component 223 is provided with a first inclined surface structure 2231 at the positions of the four abutment members 222 located in the X-axis direction, and the four abutment members 222 located in the X-axis direction are provided with a second inclined surface structure 2221 adapted to the first inclined surface structure 2231. The first inclined surface structure 2231 and the second inclined surface structure 2221 abut against each other.

[0032] The abutment drive member 224 is disposed between the support portion 2211 and the bearing portion 2212 and is connected to the support portion 2211. The abutment drive member 224 drives the first inclined surface structure 2231 of the transmission member 223 to push the second inclined surface structure 2221 of the abutment member 222 to move, so that the plurality of abutment members 222 move toward the center of the bearing seat 221, thereby abutting and positioning the workpiece 200 on the bearing seat 221 by the plurality of abutment members 222.

[0033] Please see also Figure 4 The plasma cleaning unit 30 cleans the workpiece 200 by spraying plasma toward the workpiece 200 that has moved below it.

[0034] The plasma cleaning mechanism 30 includes a plasma seat 31 mounted on the base 10, a plasma drive 32 mounted on the plasma seat 31 and located above the transfer mechanism 20, and a plasma cleaning component 33 driven and connected to the plasma drive 32 and located above the transfer mechanism 20. The plasma seat 31 is a gantry frame. The plasma drive 32 drives the plasma cleaning component 33 to move, so that the plasma cleaning component 33 sprays plasma toward the workpiece 200 to clean the workpiece 200. In this embodiment, the plasma drive 32 is a three-axis moving platform that can drive the plasma cleaning component 33 to move along the X-axis, Y-axis, and Z-axis. The plasma cleaning component 33 is a plasma jetting component that can spray plasma. There are two plasma cleaning components 33, which are spaced apart along the Y-axis and located on both sides of the plasma drive 32, for cleaning the two workpieces 200 on the support 221 respectively.

[0035] The plasma cleaning mechanism 30 also includes a plasma guide 34 connected below the plasma cleaning component 33, and an air extraction assembly 35 connected to the plasma guide 34. The plasma guide 34 has a frustum-shaped structure and a guide groove 341 extending vertically. The guide groove 341 has a trumpet-shaped structure that is smaller at the top and larger at the bottom. The guide groove 341 guides the plasma cleaning component 33 to spray plasma. The side wall of the plasma guide 34 has an air extraction hole 342 that communicates with the guide groove 341. The air extraction assembly 35 is connected to the air extraction hole 342 to remove the plasma near the wall of the guide groove 341. In this embodiment, there are two plasma guides 34 and two extraction assemblies 35. The two plasma guides 34 are respectively connected to two plasma cleaning components 33. The two extraction assemblies 35 are respectively connected to the corresponding plasma guides 34. Each extraction assembly 35 includes an extraction connector (not shown) and a high-flow-rate vacuum extraction device (not shown). The extraction connector is connected to the extraction hole 342, and the high-flow-rate vacuum extraction device is connected to the extraction connector to remove plasma near the tank wall of the guide groove 341. By setting the extraction assembly 35 to increase the extraction, the hot air / exhaust gas in the plasma cleaning process can be extracted in time, reducing temperature accumulation. At the same time, gases such as ozone and NOx generated in the plasma cleaning process, as well as fine dust generated in the cleaning process, are extracted to avoid contaminating the workpiece 200.

[0036] The plasma cleaning mechanism 30 also includes a cooling component 36, which is located on one side of the cleaning component 33 and connected to it. The cooling component 36 blows air towards the workpiece 200 to cool it down. In this embodiment, the cooling component 36 includes a blowing drive component 361 and a blowing plate 362 connected to one side of the blowing drive component 361. The blowing drive component 361 is located on one side of the cleaning component 33 and connected to it. The blowing plate 362 has multiple blowing holes (not shown in the figure). The blowing drive component 361 is used to blow air towards the workpiece 200 through the multiple blowing holes to cool the workpiece 200. During the plasma cleaning process, the plasma cleaning flame will cause the temperature to rise, and the temperature of the surrounding support will accumulate and rise, which may cause damage to the workpiece 200. Therefore, cooling is necessary. By setting up the cooling component 36 to increase the blowing, the high-temperature component can be cooled to prevent the temperature from becoming too high.

[0037] Please see Figure 5 The inspection agency 40 takes and acquires image information of the workpiece 200 that has moved below it in order to determine whether the workpiece 200 is qualified.

[0038] The detection mechanism 40 includes a detection seat 41 disposed on the base 10 and a detection element 42 connected to the detection seat 41 and located above the transfer mechanism 20. The detection element 42 captures and acquires image information of the workpiece 200 to determine whether the workpiece 200 is qualified. In this embodiment, the detection element 42 is a CCD camera. Since there are two feature detection areas on each workpiece 200, four detection elements 42 are set. The four detection elements 42 are spaced apart along the X-axis to detect the feature detection areas on the two workpieces 200 on the two transfer mechanisms 20 respectively.

[0039] The testing mechanism 40 also includes an antistatic component 43, which is disposed on the testing base 41 and located below the testing piece 42. The antistatic component 43 blows ion air towards the workpiece 200 to remove static electricity from the workpiece 200. In this embodiment, there are two antistatic components 43, which are spaced apart on the testing base 41 along the X-axis. After plasma cleaning, static electricity is immediately eliminated from the workpiece 200 to neutralize the residual charge on the workpiece 200 (screen assembly) and prevent damage to the electronic components on the screen assembly.

[0040] Please see Figure 6 The unloading mechanism 50 picks up the workpiece 200 that has been moved below it for unloading.

[0041] The unloading mechanism 50 includes an unloading seat 51 disposed on the base 10, an unloading drive 52 disposed on the unloading seat 51 and located above the transfer mechanism 20, and an unloading component 53 drivenly connected to the unloading drive 52 and located above the transfer mechanism 20. The unloading seat 51 is a gantry frame. The unloading drive 52 drives the unloading component 53 to move, so that the unloading component 53 removes the workpiece 200 for unloading. In this embodiment, the unloading drive 52 is a two-axis moving platform that can drive the unloading component 53 to move along the X-axis and Z-axis. The unloading component 53 includes an unloading frame 531 and eight suction cups 532 connected below the unloading frame 531. The unloading frame 531 is connected below the unloading drive 52, and the eight suction cups 532 are divided into two groups, with four suction cups 532 in each group arranged in a rectangular shape to adsorb and fix the workpiece 200.

[0042] Please see Figure 7 The transport mechanism 60 conveys the workpiece 200 placed by the unloading mechanism 50.

[0043] The transport mechanism 60 includes a transport seat 61 mounted on the base 10, a feeding drive 52 mounted on the transport seat 61, and a transport component 63 mounted on the transport seat 61 and connected above the transport drive 62. The transport drive 62 drives the transport component 63 to rotate, so that the transport component 63 transports the workpiece 200 placed by the feeding mechanism 50. In this embodiment, the workpiece 200 on the transport component 63 moves along the Y-axis. The feeding drive 52 is a motor.

[0044] The implementation process of the cleaning device 100 in this application embodiment is as follows:

[0045] The feeding gripper picks up the workpiece 200 and places the workpiece 200 on the bearing part 2212 of the bearing seat 221 of the positioning component 22 of the transfer mechanism 20;

[0046] The abutment drive member 224 drives the transmission member 223 to move multiple abutment members 222 toward the center of the support seat 221, so that the multiple abutment members 222 abut against and position the workpiece 200 on the support seat 221;

[0047] The transfer drive 21 drives the positioning assembly 22 to move the workpiece 200 to below the plasma cleaning mechanism 30. Then, the plasma drive 32 drives the plasma cleaning component 33 to move so that the plasma cleaning component 33 sprays plasma toward the workpiece 200 to clean the workpiece 200. During this period, the high-flow vacuum exhaust device draws away the plasma near the wall of the guide groove 341 through the exhaust connector, and the cooling assembly 36 increases the blowing to cool the high-temperature components.

[0048] The transfer drive component 21 drives the positioning component 22 to move the workpiece 200 to below the detection mechanism 40. The static removal component 43 blows ion air towards the workpiece 200 to remove static electricity from the workpiece 200. The detection component 42 captures and acquires image information of the workpiece 200 to determine whether the workpiece 200 is qualified.

[0049] The transfer drive 21 drives the positioning assembly 22 to move the workpiece 200 to below the unloading mechanism 50. The unloading drive 52 drives the unloading component 53 to move so that the unloading component 53 picks up the workpiece 200 and places it on the transport component 63 of the transport mechanism 60. The transport drive 62 drives the transport component 63 to rotate so that the transport component 63 transports the workpiece 200 placed by the unloading mechanism 50 away.

[0050] The aforementioned cleaning device 100 cleans the workpiece 200 by spraying plasma onto it through the plasma cleaning mechanism 30, achieving non-contact cleaning and avoiding surface scratches and material corrosion caused by traditional mechanical or chemical cleaning. Through the integrated transfer, detection, and unloading mechanism 50, an integrated process of automatic cleaning, online detection, and sorting of the workpiece 200 is realized, significantly improving cleaning efficiency and consistency. At the same time, plasma cleaning has excellent compatibility with multiple material systems such as glass substrates and graphite heat dissipation layers, solving the coating damage problem caused by material differences in traditional processes, thereby effectively ensuring the cleaning quality of the workpiece 200.

[0051] Finally, it should be noted that the above embodiments are only illustrative of the technical solutions of this application and not limiting. Although this application has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and scope of the technical solutions of this application.

Claims

1. A cleaning apparatus for cleaning a workpiece, characterized by, The cleaning device includes a base, a transfer mechanism disposed on the base, a plasma cleaning mechanism disposed on the base and above the transfer mechanism, a detection mechanism disposed on the base and above the transfer mechanism, and a unloading mechanism disposed on the base and above the transfer mechanism. The detection mechanism is arranged adjacent to the plasma cleaning mechanism, and the unloading mechanism is arranged adjacent to the detection mechanism. The plasma cleaning mechanism, the detection mechanism, and the unloading mechanism are arranged side by side, with the detection mechanism located between the plasma cleaning mechanism and the unloading mechanism. The transfer mechanism carries the workpiece and moves the workpiece sequentially below the plasma cleaning mechanism, the detection mechanism, and the unloading mechanism. The plasma cleaning mechanism sprays plasma towards the workpiece below it to clean the workpiece. The detection mechanism captures and acquires image information of the workpiece below it to determine whether the workpiece is qualified. The unloading mechanism removes the workpiece below it for unloading.

2. The cleaning device as claimed in claim 1, characterized in that, The transfer mechanism includes a transfer drive connected to the base and a positioning component located above the transfer drive and positioning the workpiece. The transfer drive is driven to connect with the positioning component and drives the positioning component to move the workpiece sequentially below the plasma cleaning mechanism, the detection mechanism and the unloading mechanism.

3. The cleaning device as described in claim 2, characterized in that, The positioning assembly includes a support base connected to the transfer drive and carrying the workpiece, a plurality of abutment members slidably disposed around the periphery of the support base, a transmission member disposed between the plurality of abutment members and respectively connected to the plurality of abutment members, and an abutment drive member disposed on the support base and drivenly connected to the transmission member. The abutment drive member drives the transmission member to move the plurality of abutment members toward the center of the support base, so that the plurality of abutment members jointly abut against and position the workpiece on the support base.

4. The cleaning device as described in claim 3, characterized in that, The support base includes a support portion connected to the transfer drive member, a support portion disposed on the side of the support portion away from the transfer drive member and bearing the workpiece, and a plurality of protective covers disposed on the support portion and located around the support portion. The abutment drive member is disposed between the support portion and the support portion and connected to the support portion. The plurality of abutment members are slidably disposed on the periphery of the support portion and are correspondingly disposed with the plurality of protective covers. Each abutment member can move into the protective cover when it moves away from the center of the support base.

5. The cleaning device as claimed in claim 1, characterized in that, The plasma cleaning mechanism includes a plasma seat disposed on the base, a plasma drive unit disposed on the plasma seat and located above the transfer mechanism, and a plasma cleaning unit driven and connected to the plasma drive unit and located above the transfer mechanism. The plasma drive unit drives the plasma cleaning unit to move so that the plasma cleaning unit sprays plasma toward the workpiece to clean the workpiece.

6. The cleaning device as described in claim 5, characterized in that, The plasma cleaning mechanism further includes a plasma guide connected below the plasma base and an air extraction assembly connected to the plasma guide. The plasma guide has a guide groove extending in a vertical direction, which guides the plasma ejected by the plasma cleaning component. The side wall of the plasma guide has an air extraction hole communicating with the guide groove. The air extraction assembly is connected to the air extraction hole to remove the plasma near the groove wall of the guide groove.

7. The cleaning device as claimed in claim 5, characterized in that, The plasma cleaning mechanism also includes a cooling component, which is located on one side of the cleaning component and connected to it. The cooling component blows air toward the workpiece to cool it down.

8. The cleaning device as claimed in claim 5, characterized in that, The testing mechanism includes a testing seat disposed on the base and a testing component connected to the testing seat and located above the transfer mechanism. The testing component captures and acquires image information of the workpiece to determine whether the workpiece is qualified.

9. The cleaning device as claimed in claim 8, characterized in that, The testing mechanism also includes an antistatic component, which is disposed on the testing base and located below the testing piece. The antistatic component blows ion air toward the workpiece to remove static electricity from the workpiece.

10. The cleaning device as claimed in claim 1, characterized in that, The unloading mechanism includes an unloading seat disposed on the base, an unloading drive unit disposed on the unloading seat and located above the transfer mechanism, and an unloading component drivenly connected to the unloading drive unit and located above the transfer mechanism. The unloading drive unit drives the unloading component to move so that the unloading component picks up the workpiece for unloading.

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