A vacuum chamber and reflow oven with uniform temperature

By dividing the vacuum chamber into multiple zones and independently controlling the voltage of the heating components, the problem of uneven temperature in the vacuum zone of the reflow oven was solved, achieving uniform temperature control and improving product quality and production stability.

CN224444805UActive Publication Date: 2026-07-03CONWAY (SUZHOU) SEMICON TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CONWAY (SUZHOU) SEMICON TECH CO LTD
Filing Date
2025-06-26
Publication Date
2026-07-03

AI Technical Summary

Technical Problem

The temperature uniformity of the vacuum zone in existing reflow ovens is poor, and they are greatly affected by adjacent high-temperature zones and cooling zones, which affects the stability of the production process and product quality.

Method used

The vacuum chamber is divided into multiple zones, each with an independent heating element. The temperature is controlled by adjusting the voltage of the heating element. A closed-loop control system is formed by combining a temperature sensor and a solid-state voltage regulator to ensure temperature uniformity.

Benefits of technology

It improves the temperature uniformity within the vacuum chamber, reduces the impact of temperature fluctuations on product quality, and enhances production stability and product quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

This utility model discloses a vacuum chamber and reflow oven with uniform temperature. The vacuum chamber is located between a high-temperature zone and a low-temperature zone. The vacuum chamber includes a base and a top cover that can be closed onto the base to form a vacuum chamber. The vacuum chamber includes multiple regions of equal area arranged sequentially from the high-temperature zone to the low-temperature zone. Each region is equipped with a heating element, and the operating voltage of each heating element is adjusted. The temperature inside the vacuum chamber is uniform, with minimal influence from adjacent high-temperature and low-temperature zones, thus improving product quality.
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