An adsorption device with a pore gradient distribution

Abstract

This utility model discloses an adsorption device with a gradient pore distribution, including a fixture body with an adsorption surface and a vacuum channel inside. The fixture body has a connector communicating with the vacuum channel, and the adsorption surface has multiple pores communicating with the vacuum channel. This adsorption device with a gradient pore distribution generates appropriate adsorption forces in different areas of the adsorption surface through the gradient pore distribution. The edge area has a large adsorption force to suppress warping deformation, while the central area has a small adsorption force to avoid deformation and damage. Simultaneously, the shape of the adsorption surface can be customized according to the workpiece shape to meet stable adsorption requirements. The vacuum channel is divided into an independent central area and multiple pressure regulating areas by a main partition and sub-partitions. Multiple corresponding connectors allow for individual pressure adjustment, enabling precise adjustment of the adsorption force in each area for workpieces of different types, models, and uneven weight distribution, avoiding workpiece damage or weak adsorption due to improper adsorption force.

Description

Technical Field

[0001] This utility model relates to the field of workpiece handling technology, and in particular to an adsorption device with a pore gradient distribution. Background Technology

[0002] In fields such as electronics manufacturing and precision machining, it is often necessary to handle, position, or process thin, soft, and easily deformable workpieces such as glass, silicon wafers, flexible screens, and thin films. Vacuum adsorption fixtures are widely used because they can stably adsorb workpieces. In existing technologies, the adsorption surface of traditional vacuum adsorption fixtures usually adopts a uniformly distributed pore structure with consistent pore diameter, resulting in relatively uniform adsorption force in different areas of the adsorption surface. At the same time, the shape of the adsorption surface is mostly a fixed plane or a specific curved surface, which makes it difficult to flexibly adapt to workpieces of different shapes.

[0003] This design has obvious flaws: for thin, soft, and easily deformable workpieces (such as flexible screens and ultra-thin glass), if the overall adsorption force is too small, the edges of the workpiece are prone to warping and displacement due to their weak rigidity, affecting adsorption stability and processing accuracy; if the overall adsorption force is increased to enhance edge adsorption, the central area of ​​the workpiece may deform or even be damaged due to excessive force; in addition, when facing workpieces of different shapes (such as flat screens and curved screens), the fixed-shape adsorption surface cannot completely fit the workpiece surface, which can easily cause uneven local adsorption force, further aggravating the risk of workpiece deformation or damage, making it difficult to meet the needs of efficient and safe adsorption of thin, soft, easily deformable precision workpieces of different types and shapes.

[0004] Therefore, an adsorption device with a pore gradient distribution is proposed to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide an adsorption device with a pore gradient distribution to solve the above-mentioned problems.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] An adsorption device with a gradient pore distribution includes a fixture body having an adsorption surface and a vacuum channel inside the fixture body. The fixture body has a connector communicating with the vacuum channel, and the adsorption surface has a plurality of pores communicating with the vacuum channel. The density of the pores increases continuously from the center to the edge of the adsorption surface.

[0008] Optionally, the adsorption surface is divided into a central region and an edge region from the center to the edge, wherein the pore distribution density is the highest in the edge region and the lowest in the central region.

[0009] Optionally, the vacuum channel is provided with a main partition, which is an annular structure and corresponds to the position between the central region and the edge region on the adsorption surface. The main partition divides the vacuum channel into independent central and edge regions, with the central region corresponding to the central region of the adsorption surface and the edge region corresponding to the edge region of the adsorption surface. At least two sub-partitions are provided between the side of the main partition and the inner wall of the edge region of the vacuum channel. Each sub-partition is distributed circumferentially along the annular main partition, dividing the edge region into multiple independent pressure regulating zones.

[0010] Optionally, the number of the connectors is multiple, and each connector is connected to the central region and the multiple voltage regulating zones.

[0011] Optionally, the fixture body is provided with a control module, and the adsorption surface is embedded with a pressure sensing array. The pressure sensing array includes multiple pressure sensors, which are respectively located in the central area and the edge area of ​​the adsorption surface. The number of pressure sensors in the edge area is the same as the number of pressure regulating areas, and the position of each pressure sensor in the edge area corresponds one-to-one with the position of each pressure regulating area.

[0012] Optionally, the pore diameter in the edge region is smaller than the pore diameter in the center region.

[0013] Optionally, an elastic layer is provided on the adsorption surface.

[0014] Optionally, the fixture body is provided with a connecting frame, and the connecting frame is provided with a connecting hole on the side away from the fixture body.

[0015] Compared to existing technologies, the advantages of this invention are as follows: Through a gradient distribution of pores, each region of the adsorption surface generates a suitable adsorption force. The edge region exhibits a strong adsorption force to suppress warping and deformation, while the central region has a weaker adsorption force to prevent deformation and damage. Furthermore, the shape of the adsorption surface can be customized according to the workpiece shape to meet stable adsorption requirements. The vacuum channel is divided into an independent central region and multiple pressure-regulating zones by the main and sub-partitions. Multiple corresponding connectors allow for individual pressure adjustment, enabling precise adjustment of the adsorption force in each region for workpieces of different types, models, and uneven weight distributions, preventing workpiece damage or weak adsorption due to improper adsorption force. The pressure sensor array monitors the adsorption force data of each region in real time and transmits it to the control module. The control module can adaptively adjust the air pressure in each region based on the data, promptly correcting any abnormal adsorption force, further enhancing the intelligence and precision of clamping, ensuring reliable clamping and protection for various thin, soft, and easily deformable workpieces, and comprehensively meeting the stable adsorption requirements of different workpieces. Attached Figure Description

[0016] The accompanying drawings further illustrate the present invention, but the content of the drawings does not constitute any limitation on the present invention.

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model, where the adsorption surface is a plane.

[0018] Figure 2 This is a bottom view of the overall structure of this utility model, where the adsorption surface is a plane.

[0019] Figure 3 This is a cross-sectional view of the overall structure of this utility model, where the adsorption surface is a plane. The cut-out position is the surface where the fixture body and the connecting frame are connected.

[0020] Figure 4 This is a schematic diagram of the overall structure of this utility model, where the adsorption surface is convex.

[0021] Figure 5 This is a schematic diagram of the overall structure of this utility model, where the adsorption surface is concave.

[0022] In the attached diagram: 1. Fixture body; 11. Adsorption surface; 111. Central area; 113. Edge area; 12. Vacuum channel; 121. Central region; 122. Edge region; 1221. Pressure regulating area; 13. Connector; 2. Air hole; 3. Main compartment; 4. Sub-compartment; 5. Pressure sensor array; 51. Pressure sensor; 6. Elastic layer; 7. Connecting frame; 8. Connecting hole. Detailed Implementation

[0023] The embodiments of this utility model are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model. In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this utility model. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this utility model, "multiple" means two or more, and "several" means one or more, unless otherwise explicitly specified.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows for mutual communication; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0025] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0026] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0027] In this embodiment, by Figure 1-5 An adsorption device with a pore gradient distribution is provided, including a fixture body 1 and an adsorption surface 11 disposed thereon. The adsorption surface 11 is the part that contacts the workpiece when adsorbing it. The fixture body 1 is provided with a vacuum channel 12 inside. The fixture body 1 is provided with a connector 13 (such as a pneumatic connector 13) that communicates with the vacuum channel 12. The connector 13 is connected to an external vacuum pump or vacuum generator through a pipe (a pipe with flexible properties, such as a hose) to provide a stable vacuum negative pressure for the vacuum channel 12.

[0028] Reference Figure 2 As shown, the adsorption surface 11 is divided into a central region 111 and an edge region 113 from the center to the edge. The adsorption surface 11 is provided with multiple pores 2 that connect to the vacuum channel 12. The distribution density of the pores 2 increases continuously from the center to the edge of the adsorption surface 11, that is, the distribution density at the edge is higher than that at the center. Specifically, the density of pores 2 in the central region 111 is less than that in the edge region 113. This is because when adsorbing thin, soft, and easily deformable workpieces (such as glass, silicon wafers, flexible materials, thin films, and screens), under uniform suction, the edges or areas with weak rigidity of the workpiece are prone to warping or displacement due to insufficient suction (affecting processing accuracy), while the center or areas with strong rigidity of the workpiece may experience unnecessary deformation or even damage due to excessive suction. The magnitude of the adsorption force in a certain area of ​​the adsorption surface 11 is directly proportional to the density (number) of the pores 2, that is, the greater the density, the greater the adsorption force, and vice versa. The device achieves this by having an increasing relationship between the pore density 2 of the edge region 113 and the central region 111 of the adsorption surface 11, with the edge region 113 having a higher pore density 2. The purpose of this design is to make the adsorption force at the edge of the adsorption surface 11 (i.e., the edge region 113) greater than the adsorption force at the center (i.e., the central region 111).

[0029] Specifically, the edge region 113, with its greater adsorption force, can effectively suppress warping and deformation that may occur during adsorption; while the central region 111, with its smaller adsorption force, can avoid deformation or damage caused by excessive adsorption force. This structural design balances the suppression of edge warping with the protection of the central region, achieving a more stable and reliable adsorption effect.

[0030] Reference Figure 1 , Figure 4 and Figure 5 As shown, the adsorption surface 11 can be either planar or arc-shaped. A planar structure can only adsorb flat workpieces, such as a flat screen, while an arc-shaped structure can only adsorb arc-shaped workpieces, such as a curved screen. Taking a curved screen as an example, when the adsorbed workpiece is arc-shaped, the shape of the adsorption surface 11 matches the shape of the curved screen, and the length direction of the pores 2 on the arc-shaped adsorption surface 11 is perpendicular to the curved screen, thus ensuring the stability of the adsorption force on the curved screen.

[0031] In summary, the pore density 2 in the edge region 113 is greater than that in the central region 111. This ensures that the adsorption force at the edge of the adsorption surface 11 (edge ​​region 113) is greater than that at the center of the adsorption surface 11 (central region 111). The strong adsorption force in the edge region 113 suppresses warping deformation, while the weak adsorption force in the central region 111 prevents deformation and damage. This achieves suitable adsorption force for different parts of the workpiece (such as edges, transition areas, and the center), ensuring overall firm adsorption while avoiding excessive local pressure that could cause deformation or damage to the workpiece (especially flexible screens and ultra-thin screens). Furthermore, the shape of the adsorption surface 11 can be customized according to the shape of the workpiece to meet the requirements for stable adsorption.

[0032] Reference Figure 2 As shown, the pore size of the pores 2 in the edge region 113 is smaller than that in the center region 111. This is because the density of the pores 2 in the edge region 113 is high to ensure sufficient adsorption force to suppress warping of the workpiece edge, while the small pore size can prevent the weak edge parts from being damaged due to excessive suction force of a single pore 2. The large pore size in the center region 111 provides suitable adsorption force at low density to prevent the central part from deforming due to excessive suction force. The combination of both with the density gradient makes the adsorption force accurately match the rigidity and anti-deformation ability of different areas of the workpiece, ensuring overall firm adsorption while avoiding local damage.

[0033] Reference Figure 2 As shown, the fixture body 1 is made of a rigid material. If the workpiece being adsorbed comes into direct contact with the surface of the fixture body 1, it may cause damage to the workpiece surface, such as scratches or cracks. Therefore, an elastic layer 6 is applied to the adsorption surface 11. The elastic layer 6 is made of elastic rubber, silicone, or sponge, and has elasticity and softness, so it will not cause damage to the workpiece surface.

[0034] Reference Figure 2 As shown, the fixture body 1 is equipped with a connecting frame 7, which consists of two horizontal plates and a connecting block. The two horizontal plates are parallel, one of which is connected to the fixture body 1, and the two horizontal plates are connected together by the connecting block, thus forming an "I"-shaped structure. Furthermore, the horizontal plates not connected to the fixture body 1 are provided with connecting holes 8, at least two of which allow bolts to pass through and engage with nuts, thereby enabling the fixture body 1 to be installed on the required handling equipment.

[0035] Reference Figures 1 to 3As shown, since the types of workpieces being adsorbed can vary, such as glass, silicon wafers, flexible materials, thin films, and screens, and even the same type of workpiece can have different models—for example, some screens are thicker, some are thinner, or the thickness varies in different areas—and for instance, the thickness of the central and edge regions 122 of a curved screen differs. For example, in curved screen displays, the screen is typically thinner in the middle and thicker at the edges (from the perspective of curvature), and thinner at the top and thicker at the bottom (from the perspective of overall design). This is the conventional type and structure of curved screen displays, and therefore will not be elaborated further. Consequently, the adsorption force required for the central region 111 and the edge region 113 of the adsorption surface 11 will also differ. To solve the above problems, in this embodiment, the vacuum channel 12 is provided with a main partition 3 inside. The main partition 3 is an annular structure (such as a rectangular frame or an elliptical frame) and corresponds to the position between the central area 111 and the edge area 113 on the adsorption surface 11 (the transition position between the central area 111 and the edge area 113). There are no air holes 2 between the central area 111 and the edge area 113 on the adsorption surface 11. The main partition 3 divides the vacuum channel 12 into an independent central area 121 and an edge area 122. That is, the central area 121 is a closed area, while the edge area 122 is an annular area formed by the annular main partition 3 and the inner wall of the vacuum channel 12. The edge area 122 is equivalent to being fitted onto the central area 121. Furthermore, the central region 121 corresponds to the central region 111 of the adsorption surface 11, and the edge region 122 corresponds to the edge region 113 of the adsorption surface 11. At least two sub-parts 4 are fixedly installed between the side of the main partition 3 and the inner wall of the edge region 122 of the vacuum channel 12. Each sub-part 4 is distributed circumferentially along the annular main partition 3, dividing the edge region 122 into multiple independent pressure regulating zones 1221. The central region 111 and the multiple pressure regulating zones 1221 correspond to different positions of the central region 111 and the edge region 113 of the adsorption surface 11, respectively. Moreover, there are multiple connectors 13, each corresponding to and connected to the central region 121 and the multiple pressure regulating zones 1221. Therefore, the air pressure of the central region 121 and the multiple pressure regulating zones 1221 can be controlled independently. This allows the adsorption force at each position of the adsorption surface 11 to be adjusted according to the shape and weight distribution of the adsorbed workpiece. Specifically, the number of sub-parts 4 varies depending on the adsorbed workpiece. Generally, the number of sub-parts 4 is preferably four or more. The selection rule for the number of sub-parts 4 is that the more uneven the weight distribution of the adsorbed workpiece, the more sub-parts 4 need to be matched, and vice versa.

[0036] In this embodiment, the vacuum channel 12 is divided into an independent central region 121 and an edge region 122 by the main partition 3, and the edge region 122 is further divided into multiple independent pressure regulating zones 1221 by the sub-partition 4. Each region is connected to an external device through a corresponding connector 13 to achieve individual air pressure regulation. This allows the adsorption force of the central region 111, the edge region 113, and each pressure regulating zone 1221 at the edge to be flexibly adjusted according to the type (such as glass, silicon wafer, flexible material, etc.) and model (such as screen thickness and thickness position differences). Its beneficial effect is that it can accurately match the adsorption force required by the center and the edge and each part of the edge for different workpieces and different models of the same type, avoiding workpiece deformation, damage, or weak adsorption due to improper adsorption force. It is especially suitable for workpieces with uneven weight distribution. By refining the adjustment, the stability and adaptability of clamping are improved, ensuring reliable clamping and protection of various thin, soft, and easily deformable workpieces.

[0037] Reference Figure 2 and Figure 3 As shown above, although the adsorption force generated at different parts of the adsorption surface 11 is different when the air pressure of the central region 121 and each pressure regulating zone 1221 is different, the adsorption force at a certain part of the adsorption surface 11 cannot be adaptively adjusted according to the pressure of the workpiece on the adsorption surface 11 (the pressure corresponds to the adsorption force) during the adsorption process and when adsorbing different workpieces. To solve the above problem, this embodiment embeds a pressure sensing array 5 on the adsorption surface 11. The pressure sensing array 5 is composed of multiple pressure sensors 51, and the multiple pressure sensors 51 are respectively located in the central region 111 and the edge region 113 of the adsorption surface 11. The number of pressure sensors 51 in the edge region 113 is the same as the number of pressure regulating zones 1221, and the position of each pressure sensor 51 in the edge region 113 corresponds one-to-one with the position of each pressure regulating zone 1221. The fixture body 1 is provided with a control module. The control module is electrically connected to an external vacuum pump or vacuum generator and pressure sensors 51. The pressure sensor array 5 is used to monitor the adsorption force data of the central area 111 and the adsorption force data of each pressure regulating area 1221 corresponding to the edge area 113 in real time, and transmits the adsorption force data to the control module. If the value exceeds the set value, the control module can control the external vacuum pump or vacuum generator to control the adsorption force of each part of the adsorption surface 11, so as to avoid the workpiece being damaged or not adsorbed firmly due to the failure to detect abnormal adsorption force (such as excessive or insufficient local adsorption force). This further improves the intelligence and precision of clamping and ensures reliable adsorption and protection of different types and models of workpieces.

[0038] In the description of this specification, the references to terms such as "embodiment," "one implementation," "some implementations," "illustrative implementation," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with the described implementation or example is included in at least one implementation or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same implementation or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more implementations or examples.

[0039] The technical principles of this utility model have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this utility model and should not be construed as limiting the scope of protection of this utility model in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of this utility model without inventive effort, and these equivalent modifications or substitutions are all included within the scope defined by the claims of this application.

Claims

1. An adsorption device with a gradient pore distribution, comprising a fixture body (1), the fixture body (1) having an adsorption surface (11), a vacuum channel (12) provided inside the fixture body (1), a connector (13) communicating with the vacuum channel (12) provided on the fixture body (1), and a plurality of pores (2) communicating with the vacuum channel (12) provided on the adsorption surface (11), characterized in that: The distribution density of the pores (2) increases continuously from the center to the edge of the adsorption surface (11).

2. The pore-gradient distribution adsorption device according to claim 1, wherein, The adsorption surface (11) is divided into a central region (111) and an edge region (113) from the center to the edge, wherein the pore (2) distribution density is the highest in the edge region (113) and the lowest in the central region (111).

3. The pore-gradient distribution adsorbent device according to claim 2, wherein The vacuum channel (12) is provided with a main partition (3) inside. The main partition (3) is annular and corresponds to the position between the central area (111) and the edge area (113) on the adsorption surface (11). The main partition (3) divides the vacuum channel (12) into an independent central area (121) and an edge area (122). The central area (121) corresponds to the central area (111) of the adsorption surface (11), and the edge area (122) corresponds to the edge area (113) of the adsorption surface (11). At least two sub-partitions (4) are provided between the side of the main partition (3) and the inner wall of the edge area (122) of the vacuum channel (12). Each sub-partition (4) is distributed along the circumference of the annular main partition (3) and divides the edge area (122) into multiple independent pressure regulating areas (1221).

4. The pore-gradient distribution adsorbent apparatus according to claim 3, wherein The number of the connectors (13) is multiple and each of them is connected to the central region (121) and the multiple pressure regulating zones (1221).

5. The pore-gradient distribution adsorbent device according to claim 3, wherein The fixture body (1) is provided with a control module, and the adsorption surface (11) is embedded with a pressure sensing array (5). The pressure sensing array (5) includes multiple pressure sensors (51). The multiple pressure sensors (51) are respectively located in the central area (111) and the edge area (113) of the adsorption surface (11). The number of pressure sensors (51) in the edge area (113) is the same as the number of pressure regulating areas (1221), and the positions of each pressure sensor (51) in the edge area (113) correspond one-to-one with the positions of each pressure regulating area (1221).

6. The pore-gradiented adsorbent device of claim 2, wherein, The diameter of the pore (2) in the edge region (113) is smaller than the diameter of the pore in the center region (111).

7. The pore-gradiented adsorbent device of claim 1, wherein, An elastic layer (6) is applied to the adsorption surface (11).

8. The pore-gradiented adsorbent device of claim 1, wherein, The fixture body (1) is provided with a connecting frame (7), and the connecting frame (7) is provided with a connecting hole (8) on the side away from the fixture body (1).

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