Adjustable single crystal silicon rod processing cutting platform

Abstract

The utility model discloses adjustable cutting platform for monocrystalline silicon rod processing, including the box that places, elevating platform and step -by -step rotating platform. Advantageous effect: the utility model discloses step -by -step rotating platform and material receiving plate have been adopted, and multiple sets of limit ring are distributed with equal angle on the top surface of material receiving plate, when cutting monocrystalline silicon rod, monocrystalline silicon rod is pushed under the push of push plate, and cutting end is inserted into limit ring, and motor box drives cutter head rotation, and electric cylinder pushes cutter head and goes up, can cut monocrystalline silicon rod, and the monocrystalline silicon rod that cuts off stays in the inside of limit ring, and step -by -step rotating platform can drive material receiving plate rotation 90, and the monocrystalline silicon rod that cuts off is turned over to other position, and monocrystalline silicon rod can continue to cut operation, when cutting operation, staff can use hoisting equipment to cut off monocrystalline silicon rod and hang off to the next processing station, and cutting continues in the hoisting process, and does not affect the continuity of cutting work, and improves work efficiency.

Description

Technical Field

[0001] This utility model relates to the field of single-crystal silicon rod cutting technology, and more specifically, to an adjustable single-crystal silicon rod processing cutting platform. Background Technology

[0002] Single-crystal silicon is a crystal with a basically complete lattice structure. Its properties differ in different directions, making it an excellent semiconductor material. Single-crystal silicon rods are rod-shaped single-crystal silicon rods grown from melt in industrial production using the Czochralski method or the floating zone melting method.

[0003] Monocrystalline silicon rods are quite long after molding and need to be cut into short rods and then into sheets before they can be used. Traditional monocrystalline silicon rod cutting is done using a cutting machine. Due to the high density of monocrystalline silicon rods, even when cut into short rods, their weight is still considerable, requiring workers to use hoisting equipment to move them. Connecting the hoisting equipment to the monocrystalline silicon rods requires time for workers to operate, resulting in long waiting times. This affects the efficiency of continuous cutting. In addition, traditional cutting equipment uses a meter counter to adjust the cutting length, which is cumbersome, and the meter counter feedback is prone to inaccuracies. Further improvements are needed.

[0004] Therefore, based on this, the technical solution of this utility model is proposed. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, this invention provides an adjustable cutting platform for processing single-crystal silicon rods, which improves work efficiency and thus solves the problems mentioned in the background.

[0007] (II) Technical Solution

[0008] To achieve the aforementioned advantages of improved work efficiency, the specific technical solution adopted by this utility model is as follows:

[0009] An adjustable single-crystal silicon rod processing cutting platform includes a placement box, a lifting platform, and a stepper rotary table. A conveying groove is fixedly installed on the top surface of the placement box, and a stepper motor is fixedly connected to one end of the placement box. A lead screw is connected to the output end of the stepper motor. A top groove is formed on the top surface of the placement box, and a push plate is slidably connected through the top groove. The lead screw passes through the push plate and is threadedly connected to it. A motor housing is fixedly installed on the top surface of the lifting platform, and a cutter head is installed at the output end of the motor housing. An electric cylinder is installed below the lifting platform. A receiving plate is fixedly installed on the top surface of the output end of the stepper rotary table, and a limit ring is fixedly installed on the top surface of the receiving plate.

[0010] Furthermore, the limiting rings are arranged in pairs, and the limiting rings are a ring structure. There are four sets of limiting rings distributed at equal angles along the central axis of the receiving plate.

[0011] Furthermore, a base is fixedly installed between the placement box and the stepping rotary table, and the top surface of the base is fixedly connected to the bottom surface of the electric cylinder, and the top surface of the moving rod of the electric cylinder is fixedly connected to the bottom surface of the lifting platform.

[0012] Furthermore, a drive motor is fixedly installed inside the motor housing, and the output end of the drive motor is fixedly connected to the cutter head mounting end.

[0013] Furthermore, the conveying groove is an arc-shaped groove, and the inner wall of the conveying groove is polished.

[0014] Furthermore, both ends of the lead screw are rotatably connected to both ends of the placement box via bearings.

[0015] Furthermore, a gantry is fixedly installed on the top surface of the other end of the conveying trough, and a hydraulic cylinder is fixedly installed on the top surface of the gantry. A pressure ring is fixedly installed on the bottom surface of the piston rod of the hydraulic cylinder, and a pressure pad is fixedly adhered to the inner wall of the pressure ring.

[0016] Furthermore, the bottom surface of the conveying trough is flush with the top surface of the receiving plate, and the receiving plate is a round plate.

[0017] The beneficial effects of this utility model are as follows:

[0018] (1) This utility model adopts a stepping rotary table and a receiving plate. Multiple sets of limiting rings are distributed at equal angles on the top surface of the receiving plate. When the monocrystalline silicon rod is cut, the cutting end of the monocrystalline silicon rod is pushed into the limiting ring by the push plate. The motor box drives the cutter head to rotate, and the electric cylinder pushes the cutter head to move upward, so as to cut the monocrystalline silicon rod. The cut monocrystalline silicon rod stays inside the limiting ring. The stepping rotary table can drive the receiving plate to rotate 90° and flip the cut monocrystalline silicon rod to other positions. The monocrystalline silicon rod can then continue to be fed for cutting. During the cutting operation, the operator can use the hoisting equipment to lift the cut monocrystalline silicon rod to the next processing station. During the hoisting process, the cutting continues without affecting the continuity of the cutting work, thus improving the work efficiency.

[0019] (2) This utility model adopts a stepper motor, which drives the lead screw to rotate, thereby driving the push plate connected to the lead screw to move. The operator can control the step angle of the stepper motor to control the rotation angle of the lead screw, thereby adjusting the moving distance of the push plate, thereby automatically adjusting the feed length of the single crystal silicon rod, and thus adjusting the cutting length, so as to realize automated and stable cutting. Compared with the traditional meter counter measurement, it is more convenient to use and has higher work efficiency. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the internal structure of the adjustable single-crystal silicon rod processing cutting platform proposed in this utility model.

[0022] Figure 2 This is a front view of the adjustable single-crystal silicon rod processing cutting platform proposed in this utility model.

[0023] Figure 3 This is a schematic diagram of the vertical cross-section of the conveying trough proposed in this utility model.

[0024] Figure 4 This is a schematic diagram of the installation of the pressure ring proposed in this utility model.

[0025] The attached figures are labeled as follows:

[0026] 1. Placing box; 2. Conveying trough; 3. Lead screw; 4. Push plate; 5. Stepper motor; 6. Top trough; 7. Gantry; 8. Hydraulic cylinder; 9. Pressure ring; 10. Stepping rotary table; 11. Receiving plate; 12. Limit ring; 13. Lifting platform; 14. Motor box; 15. Cutter head; 16. Electric cylinder; 17. Base; 18. Pressure pad. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0028] In the description of this application, it should be understood that the terms "upper", "lower", "inner", "outer", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" or "several" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0030] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0031] Example 1

[0032] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments. Please refer to them. Figure 1The adjustable single-crystal silicon rod processing cutting platform according to an embodiment of the present invention includes a placement box 1, a lifting platform 13, and a stepper rotary table 10. A conveying trough 2 is fixedly installed on the top surface of the placement box 1. The conveying trough 2 is made of high-strength aluminum alloy and undergoes T6 heat treatment, achieving a surface hardness of HB150 or higher. The placement box 1 has a hollow internal structure, and support legs are fixedly installed at the corners of the bottom surface of the placement box 1. The support legs are welded from Q235 steel and have rubber shock-absorbing pads at the bottom. The shock-absorbing pads have a Shore hardness of 60A and are used for stable placement of the placement box 1. A stepper motor 5 is fixedly connected to one end of the placement box 1. The stepper motor 5 is model 57HS76-4004A, with a static torque of 4.0 N·m and a step angle of 1.8°. It is used in conjunction with a PLC controller, model FX3U-32MT / ES-A. Furthermore, the output end of the stepper motor 5 is connected to a lead screw 3, which is a ball screw, model SFU1605-3, with a lead of 5mm, and is arranged parallel to the placement box 1. A top groove 6 is formed on the top surface of the placement box 1, extending along its length. The top groove 6 has a rectangular strip structure, with a width of 50mm and a depth of 30mm. A push plate 4 is slidably connected through the top groove 6, with a width equal to the width of the top groove 6 and a gap controlled between 0.05-0.1mm to prevent the push plate 4 from tipping over. The top groove 6 also serves as a guide for the movement of the push plate 4. The lead screw 3 passes through the push plate 4 and is threadedly connected to it, a common drive structure. A motor housing 14 is fixedly mounted on the top surface of the lifting platform 13, and a cutter head 15 is mounted on the output end of the motor housing 14. The cutter head 15 uses a special cutter for single-crystal silicon rods, with a diameter of 350mm and a thickness of 0.3mm. The cutter teeth are made using a diamond sintering process, with a diamond particle size of 30 / 40 mesh, which is a common material in this field and will not be described in detail here. An electric cylinder 16, model SEB63-200, with a thrust of 5000N, is installed below the lifting platform 13 to control the lifting of the lifting platform 13, and thus the lifting of the cutter head 15. The lifting speed range is 5-50mm / s. A receiving plate 11 is fixedly mounted on the top surface of the output end of the stepper rotary table 10. The stepping frequency of the stepper rotary table 10 is the same as that of the stepper motor 5, and a limit ring 12 is fixedly mounted on the top surface of the receiving plate 11. Multiple sets of limit rings 12 are evenly distributed on the top surface of the receiving plate 11. During the cutting of monocrystalline silicon rods, the cutting end of the rod is pushed into the limiting ring 12 by the pusher plate 4. The motor housing 14 drives the cutter head 15 to rotate, and the electric cylinder 16 pushes the cutter head 15 upward, thus cutting the monocrystalline silicon rod. The cut monocrystalline silicon rod remains inside the limiting ring 12, and the stepping rotary table 10 drives the receiving plate 11 to rotate 90°, flipping the cut monocrystalline silicon rod to another position, allowing the rod to be fed again for cutting. During the cutting operation, workers can use hoisting equipment to lift the cut monocrystalline silicon rod to the next processing station. Cutting continues during hoisting, without affecting the continuity of the cutting work, thus improving work efficiency.

[0033] Example 2

[0034] refer to Figure 2 The limiting rings 12 are arranged in pairs, and each limiting ring 12 has a ring structure with an inner diameter 5mm larger than the outer diameter of the monocrystalline silicon rod, facilitating the entry of the monocrystalline silicon rod. Furthermore, four sets of limiting rings 12 are evenly distributed along the central axis of the receiving plate 11. The limiting rings 12 are made of polytetrafluoroethylene (PTFE) with a Shore D50-60 hardness and a surface roughness Ra≤0.4μm, serving as lateral limiting rings to prevent the monocrystalline silicon rod from rolling on the top surface of the receiving plate 11, thus preventing the monocrystalline silicon rod from falling and being damaged. At the same time, it does not affect the normal hoisting and removal of the monocrystalline silicon rod by the workers.

[0035] Example 3

[0036] refer to Figure 1 A base 17 is fixedly installed between the placement box 1 and the stepping rotary table 10. The base 17 is made of HT250 cast iron, has undergone aging treatment, and is fixedly connected to the installation ground by M12 expansion bolts with a tightening torque of 40 N·m. The top surface of the base 17 is fixedly connected to the bottom surface of the electric cylinder 16 by hexagonal bolts, and the top surface of the moving rod of the electric cylinder 16 is fixedly connected to the bottom surface of the lifting platform 13 by a flange. A guide rod is vertically fixedly installed on one side of the electric cylinder 16 on the top surface of the base 17. The guide rod is made of Cr12MoV mold steel, with a hard chrome plated surface and a hardness of HRC58-62. The guide rod passes through the lifting platform 13 and is slidably connected to the lifting platform 13. The guide rod is arranged parallel to the electric cylinder 16 to guide the lifting of the lifting platform 13, improve the lifting stability of the lifting platform 13 and the cutter head 15, and achieve a guiding accuracy of ±0.02mm, thereby improving cutting stability.

[0037] Example 4

[0038] refer to Figure 1 ,refer to Figure 1 The motor housing 14 houses a fixed drive motor, model YE2-132S-4, with a power of 5.5kW and a speed of 1440r / min. The output end of the drive motor is fixedly connected to the mounting end of the cutter head 15 via a coupling, model CL1-40, a common cutting structure. The motor housing 14 is welded from Q235 steel plate with a wall thickness of 3mm, serving to protect the drive motor. It has ventilation holes on its surface, with a total area of ​​not less than 15% of the housing surface area, and is equipped with a dustproof mesh of 80 mesh.

[0039] Example 5

[0040] refer to Figure 3The conveying groove 2 is an arc-shaped groove with an arc radius 2mm larger than the radius of the single crystal silicon rod. The inner wall of the conveying groove 2 is polished, with a surface roughness Ra≤0.2μm. The smooth surface of the conveying groove 2 reduces friction, with a friction coefficient ≤0.1, thereby reducing the wear of the single crystal silicon rod during pushing and improving the stability of the single crystal silicon rod feeding.

[0041] Example 6

[0042] refer to Figure 1 Both ends of the lead screw 3 are rotatably connected to both ends of the placement box 1 via bearings. The bearing model is 6206. The lead screw 3 is stably rotatably connected to the placement box 1 via bearings, which is a common rotatable connection method. The stepper motor 5 drives the lead screw 3 to rotate, which in turn drives the push plate 4, which is threadedly connected to the lead screw 3, to move. The operator can control the step angle of the stepper motor 5 to control the rotation angle of the lead screw 3, thereby adjusting the moving distance of the push plate 4. The moving accuracy can reach ±0.05mm, which in turn automatically adjusts the feed length of the monocrystalline silicon rod. The feed speed range is 10-100mm / min, thereby adjusting the cutting length and achieving automated and stable cutting. Compared with the traditional meter counter measurement, it is more convenient to use and has higher work efficiency.

[0043] Example 7

[0044] refer to Figure 4 A gantry 7 is fixedly installed on the top surface of the other end of the conveying trough 2. The gantry 7 is welded from square tubing with specifications of 50×50×3mm. A hydraulic cylinder 8, model HSG-63 / 45-100, is fixedly installed on the top surface of the gantry 7. It is used in conjunction with a pump station with a pressure range of 6-16MPa. A pressure ring 9 is fixedly installed on the bottom surface of the piston rod of the hydraulic cylinder 8. A pressure pad 18 is fixedly bonded to the inner wall of the pressure ring 9. The pressure pad 18 is made of nitrile rubber with a Shore A70 hardness. The dimensions of the pressure ring 9 and the pressure pad 18 are matched to the outer diameter of the monocrystalline silicon rod. During cutting, the hydraulic cylinder 8 pushes the pressure ring 9 and the pressure pad 18 downward, and the pressure pad 18 compresses and stabilizes the monocrystalline silicon rod with a pressure range of 50-200N, improving the stability of cutting.

[0045] Example 8

[0046] refer to Figure 1 The bottom surface of the conveying trough 2 is flush with the top surface of the receiving plate 11, and the height difference is controlled within ±0.1mm, which facilitates the movement of the monocrystalline silicon rod to the top surface of the receiving plate 11. The receiving plate 11 is a circular plate with a diameter of 600mm and a thickness of 20mm, and is coaxially arranged with the stepper rotary table 10, with a coaxiality error not exceeding 0.05mm.

[0047] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. An adjustable single crystal silicon rod processing cutting platform, characterized in that, The system includes a placement box (1), a lifting platform (13), and a stepper rotating platform (10). The top surface of the placement box (1) is fixedly equipped with a conveying groove (2), and one end of the placement box (1) is fixedly connected to a stepper motor (5). The output end of the stepper motor (5) is connected to a lead screw (3). The top surface of the placement box (1) is provided with a top groove (6), and a push plate (4) is slidably connected through the top groove (6). The lead screw (3) passes through the push plate (4) and is threadedly connected to the push plate (4). The top surface of the lifting platform (13) is fixedly equipped with a motor box (14), and the output end of the motor box (14) is equipped with a cutter disc (15). An electric cylinder (16) is installed below the lifting platform (13). The top surface of the output end of the stepper rotating platform (10) is fixedly equipped with a receiving plate (11), and the top surface of the receiving plate (11) is fixedly equipped with a limit ring (12).

2. The adjustable single crystal silicon rod processing cutting platform of claim 1, wherein, The limiting rings (12) are in pairs, and the limiting rings (12) are ring structures. The limiting rings (12) are distributed in four groups at equal angles along the central axis of the receiving plate (11).

3. The adjustable single crystal silicon rod processing dicing platform of claim 1, wherein, A base (17) is fixedly installed between the placement box (1) and the stepping rotating platform (10), and the top surface of the base (17) is fixedly connected to the bottom surface of the electric cylinder (16), and the top surface of the moving rod of the electric cylinder (16) is fixedly connected to the bottom surface of the lifting platform (13).

4. The adjustable single-crystal silicon rod cutting platform according to claim 1, characterized in that, The drive motor is fixedly installed inside the motor housing (14), and the output end of the drive motor is fixedly connected to the mounting end of the cutter head (15).

5. The adjustable single crystal silicon rod processing dicing platform of claim 1, wherein, The conveying groove (2) is an arc-shaped groove, and the inner wall of the conveying groove (2) is polished.

6. The adjustable single crystal silicon rod processing dicing platform of claim 1, wherein, Both ends of the lead screw (3) are rotatably connected to both ends of the placement box (1) via bearings.

7. The adjustable single crystal silicon rod processing dicing platform of claim 1, wherein, A gantry (7) is fixedly installed on the top surface of the other end of the conveying trough (2), and a hydraulic cylinder (8) is fixedly installed on the top surface of the gantry (7). A pressure ring (9) is fixedly installed on the bottom surface of the piston rod of the hydraulic cylinder (8), and a pressure pad (18) is fixedly bonded to the inner wall of the pressure ring (9).

8. The adjustable single crystal silicon rod processing dicing table of claim 7, wherein, The bottom surface of the conveying trough (2) is flush with the top surface of the receiving plate (11), and the receiving plate (11) is a round plate.

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