A system for detecting quality of polysilicon feedstock

Abstract

This utility model relates to the field of polysilicon production technology, and in particular to a system for detecting the quality of polysilicon raw materials. Test furnace one is connected to a fresh trichlorosilane pipeline and a recycled hydrogen pipeline via a mixer one; test furnace two is connected to a fresh trichlorosilane pipeline and a fresh hydrogen pipeline via a mixer two; test furnace three is connected to a recycled trichlorosilane pipeline and a recycled hydrogen pipeline via a mixer three; test furnace four is connected to a recycled trichlorosilane pipeline and a fresh hydrogen pipeline via a mixer four; a tail gas pipeline is connected to test furnace one, test furnace two, test furnace three, and test furnace four respectively; a recycled material storage container is connected to test furnace one, test furnace two, test furnace three, and test furnace four respectively; and the recycled material storage container is connected to a distillation system. Using this utility model, the same raw material can be used in different test furnaces for production. Through cross-comparison, problematic raw materials can be quickly identified, improving detection efficiency and reducing losses after problems occur.

Description

Technical Field

[0001] This utility model relates to the field of polysilicon production technology, and in particular to a system for detecting the quality of polysilicon raw materials. Background Technology

[0002] In the modified Siemens process for polysilicon production, high-purity trichlorosilane reacts with hydrogen in a reduction furnace to deposit silicon rods, a process that takes approximately 90 hours. Currently, quality inspection requires shutting down the furnace and taking silicon rod samples for analysis (approximately 6 hours), resulting in an excessively long cycle from material input to obtaining results. If product abnormalities occur (such as excessive resistivity or impurities), the inability to monitor them in real time can lead to a large number of defective products (for example, in a 50,000-ton / year plant, 50 reduction furnaces produce 5 tons per hour), resulting in significant economic losses.

[0003] When quality abnormalities occur, it is necessary to check the impurity content of four raw materials (fresh trichlorosilane / recycled trichlorosilane, fresh hydrogen / recycled hydrogen). Due to the extremely low impurity content in the raw materials, current technology cannot directly detect the impurity content in the raw materials, and testing is required in the finished silicon rods. However, testing is only conducted after the reduction furnace produces the finished silicon rods, which takes about 90 hours. If the cause of the quality abnormality is not found or adjusted in time, a large number of unqualified polysilicon products will be produced, causing huge economic losses to the company. Utility Model Content

[0004] In view of this, the present invention provides a system for detecting the quality of polycrystalline silicon raw materials. The main purpose is to use the same raw material in different test furnaces for production, and to quickly identify problematic raw materials through cross-comparison, thereby improving detection efficiency and reducing losses after problems occur.

[0005] To achieve the above objectives, this utility model mainly provides the following technical solutions:

[0006] An embodiment of this utility model provides a system for detecting the quality of polysilicon raw materials, comprising: a first delivery pump, a first vaporizer, a first mixer, a first test furnace, a second vaporizer, a second mixer, a second test furnace, a second delivery pump, a third vaporizer, a third mixer, a third test furnace, a fourth vaporizer, a fourth mixer, a fourth test furnace, an exhaust gas pipeline, and a recycled material storage container.

[0007] The inlet of the first conveying pump is connected to the fresh trichlorosilane pipeline; the inlet of the first vaporizer is connected to the outlet of the first conveying pump.

[0008] The inlet 1 of the mixer 1 is connected to the outlet of the vaporizer 1; the inlet 2 of the mixer 1 is connected to the hydrogen recovery pipeline.

[0009] The feed inlet of the test furnace is connected to the outlet of the mixer.

[0010] The inlet of the vaporizer 2 is connected to the outlet of the delivery pump 1;

[0011] The inlet 1 of the mixer 2 is connected to the outlet of the vaporizer 2; the inlet 2 of the mixer 2 is connected to the fresh hydrogen pipeline.

[0012] The feed inlet of the second test furnace is connected to the outlet of the second mixer;

[0013] The inlet of the second conveying pump is connected to the trichlorosilane recovery pipeline;

[0014] The inlet of the vaporizer three is connected to the outlet of the conveying pump two;

[0015] The inlet 1 of the mixer 3 is connected to the outlet of the vaporizer 3; the inlet 2 of the mixer 3 is connected to the hydrogen recovery pipeline.

[0016] The feed inlet of the test furnace three is connected to the outlet of the mixer three;

[0017] The inlet of the vaporizer four is connected to the outlet of the conveying pump two;

[0018] The inlet 1 of the mixer 4 is connected to the outlet of the vaporizer 4; the inlet 2 of the mixer 4 is connected to the fresh hydrogen pipeline.

[0019] The feed inlet of the test furnace four is connected to the outlet of the mixer four;

[0020] The exhaust gas pipeline is connected to the gas outlets of test furnace one, test furnace two, test furnace three and test furnace four respectively;

[0021] The recycled material storage container is connected to the liquid outlets of test furnace one, test furnace two, test furnace three and test furnace four respectively; the discharge port of the recycled material storage container is connected to the distillation system.

[0022] Furthermore, the first delivery pump is connected to the fresh trichlorosilane pipeline via a first pipe; a first control valve is installed on the first pipe;

[0023] The second delivery pump is connected to the trichlorosilane recovery pipeline via a second pipeline; a second control valve is installed on the second pipeline.

[0024] The vaporizer 1 is connected to the delivery pump 1 via pipe 3; a control valve 3 is installed on pipe 3;

[0025] The vaporizer 2 is connected to the delivery pump 1 via pipe 4; a control valve 4 is installed on pipe 4.

[0026] The vaporizer three is connected to the delivery pump two via pipe five; a control valve five is installed on pipe five.

[0027] The vaporizer four is connected to the delivery pump two via a pipeline six; a control valve six is ​​installed on the pipeline six.

[0028] Furthermore, the mixer is connected to the hydrogen recovery pipeline via a pipe seven; a control valve seven is installed on the pipe seven.

[0029] The mixer 2 is connected to the fresh hydrogen pipeline via pipe 8; a control valve 8 is installed on pipe 8.

[0030] The mixer three is connected to the recovered hydrogen pipeline via pipe nine; a control valve nine is installed on pipe nine.

[0031] The mixer four is connected to the fresh hydrogen pipeline through pipe ten; a control valve ten is installed on pipe ten.

[0032] Furthermore, it also includes: control systems;

[0033] The control system is connected to control valve one, control valve two, control valve three, control valve four, control valve five, control valve six, control valve seven, control valve eight, control valve nine and control valve ten respectively, and is used to output control signals.

[0034] Furthermore, one-way valves are respectively installed on pipes seven, eight, nine and ten.

[0035] Furthermore, a valve is installed on each of the exhaust gas pipelines connecting to the gas outlets of test furnace one, test furnace two, test furnace three, and test furnace four;

[0036] Valve 2 is installed on the connecting pipeline between the recycled material storage container and the liquid outlets of test furnace 1, test furnace 2, test furnace 3 and test furnace 4.

[0037] Furthermore, the test furnace is a reduction furnace for one or two pairs of rod-shaped polycrystalline silicon;

[0038] The second test furnace is a polycrystalline silicon reduction furnace with one or two pairs of rods;

[0039] The test furnace three is a polycrystalline silicon reduction furnace with one or two pairs of rods;

[0040] The test furnace four is a polycrystalline silicon reduction furnace with one or two pairs of rods.

[0041] Embodiments of this utility model provide a system for detecting the quality of polysilicon raw materials, which can be implemented by the following methods:

[0042] The mixture of fresh trichlorosilane and recycled hydrogen used in the polysilicon production system is fed into test furnace 1 to produce polysilicon rods for a predetermined time period.

[0043] The mixture of fresh trichlorosilane and fresh hydrogen used in the polysilicon production system is fed into test furnace two to produce polysilicon rods for a predetermined time length two.

[0044] The mixture of recycled trichlorosilane and recycled hydrogen used in the polysilicon production system is fed into test furnace three to produce polysilicon rods for a predetermined time length three.

[0045] The polysilicon production system uses a mixture of recycled trichlorosilane and fresh hydrogen, which is fed into test furnace four to produce polysilicon rods for a predetermined time period of four.

[0046] Once the silicon rods in Test Furnace 1, Test Furnace 2, Test Furnace 3, and Test Furnace 4 reach the required size for testing, the furnaces are shut down.

[0047] The polycrystalline silicon rods in test furnaces 1, 2, 3 and 4 were disassembled and tested separately to determine whether the impurity content exceeded the preset target.

[0048] If the impurity content in a polycrystalline silicon rod exceeds the preset target, the test data of polycrystalline silicon rods produced by test furnace 1, test furnace 2, test furnace 3 and test furnace 4 are cross-compared to determine the raw material that caused the impurity content to exceed the standard.

[0049] Furthermore, the predetermined time length is 5-15 hours;

[0050] The second predetermined time length is 5-15 hours;

[0051] The predetermined time length is 5-15 hours;

[0052] The predetermined time length is 5-15 hours.

[0053] Furthermore, the predetermined time lengths one, two, three, and four are the same.

[0054] By employing the above technical solution, the system of this utility model for detecting the quality of polysilicon raw materials has at least the following advantages:

[0055] It can use the same raw material in different test furnaces for production, and can quickly identify problematic raw materials through cross-comparison, thereby improving testing efficiency and reducing losses after problems occur.

[0056] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0057] Figure 1 This is a schematic diagram of a system for detecting the quality of polycrystalline silicon raw materials, provided as an embodiment of the present invention.

[0058] As shown in the figure:

[0059] 1 is the first transfer pump, 2 is the first vaporizer, 3 is the first mixer, 4 is the first test furnace, 5 is the second vaporizer, 6 is the second mixer, 7 is the second test furnace, 8 is the second transfer pump, 9 is the third vaporizer, 10 is the third mixer, 11 is the third test furnace, 12 is the fourth vaporizer, 13 is the fourth mixer, 14 is the fourth test furnace, 15 is the exhaust gas pipeline, and 16 is the recycled material storage container. Detailed Implementation

[0060] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the specific implementation methods, structures, features, and effects according to this utility model application are described in detail below with reference to the accompanying drawings and preferred embodiments. In the following description, different "embodiments" or "embodiments" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0061] like Figure 1 As shown in the figure, an embodiment of this utility model proposes a system for detecting the quality of polysilicon raw materials, comprising: a transfer pump 1, a vaporizer 2, a mixer 3, a test furnace 4, a vaporizer 5, a mixer 6, a test furnace 7, a transfer pump 8, a vaporizer 9, a mixer 10, a test furnace 11, a vaporizer 4 12, a mixer 4 13, a test furnace 4 14, a tail gas pipeline 15, and a recycled material storage container 16; the inlet of the transfer pump 1 is connected to a fresh trichlorosilane pipeline; the fresh trichlorosilane pipeline is used to provide fresh trichlorosilane to the polysilicon production system, ensuring that the raw materials are consistent with those used in the polysilicon production system. The inlet of the vaporizer 2 is connected to the outlet of the transfer pump 1, vaporizing the fresh trichlorosilane. The inlet of mixer 3 is connected to the outlet of vaporizer 2; the inlet of mixer 3 is connected to the recovered hydrogen pipeline to mix fresh trichlorosilane with recovered hydrogen; the inlet of test furnace 4 is connected to the outlet of mixer 3 to pass the gas mixed by mixer 3 into test furnace 4 for silicon rod growth.

[0062] The inlet of vaporizer 2 5 is connected to the outlet of transfer pump 1 to vaporize fresh trichlorosilane; the inlet of mixer 2 6 is connected to the outlet of vaporizer 2 5; the inlet of mixer 2 6 is connected to a fresh hydrogen pipeline; the fresh hydrogen pipeline is used to supply fresh hydrogen to the polysilicon production system. Mixer 2 6 is used to mix fresh trichlorosilane and fresh hydrogen. The inlet of test furnace 2 7 is connected to the outlet of mixer 2 6 to allow the gas mixed by mixer 2 6 to be introduced into test furnace 2 7 for silicon rod growth.

[0063] The inlet of transfer pump 28 is connected to the recovered trichlorosilane pipeline; the recovered trichlorosilane pipeline is used to provide recovered trichlorosilane to the polysilicon production system, ensuring that the raw materials are consistent with those used in the polysilicon production system. The inlet of vaporizer 39 is connected to the outlet of transfer pump 28, used to vaporize the recovered trichlorosilane; inlet 1 of mixer 310 is connected to the outlet of vaporizer 39; inlet 2 of mixer 310 is connected to the recovered hydrogen pipeline; the recovered hydrogen pipeline is used to provide recovered hydrogen to the polysilicon production system. Mixer 310 is used to mix the recovered trichlorosilane and recovered hydrogen. The inlet of test furnace 311 is connected to the outlet of mixer 310; so that the gas mixed by mixer 310 is introduced into test furnace 311 for silicon rod growth.

[0064] The inlet of vaporizer 4 12 is connected to the outlet of transfer pump 2 8, used to vaporize the recovered trichlorosilane; the inlet 1 of mixer 4 13 is connected to the outlet of vaporizer 4 12; the inlet 2 of mixer 4 13 is connected to a fresh hydrogen pipeline; the fresh hydrogen pipeline is used to supply fresh hydrogen to the polysilicon production system; mixer 4 13 is used to mix the vaporized recovered trichlorosilane and fresh hydrogen. The inlet of test furnace 4 14 is connected to the outlet of mixer 4 13, so that the gas mixed by mixer 4 13 is introduced into test furnace 4 14 for silicon rod growth.

[0065] The exhaust gas pipeline 15 is connected to the gas outlets of test furnace 1 (4), test furnace 2 (7), test furnace 3 (11), and test furnace 4 (14) respectively, for exhaust gas discharge. The recovered material storage container 16 is connected to the liquid outlets of test furnace 1 (4), test furnace 2 (7), test furnace 3 (11), and test furnace 4 (14) respectively, for material replacement; each of the exhaust gas pipeline 15 and the gas outlets of test furnace 1 (4), test furnace 2 (7), test furnace 3 (11), and test furnace 4 (14) is equipped with a valve to control the opening and closing of the connected pipeline.

[0066] The outlet of the recycled material storage container 16 is connected to the distillation system. Before production, the residual trichlorosilane material from the previous furnace in test furnaces 4, 7, 11, and 14 can be replaced. The replaced material then enters the distillation system for recycling. Valves 2 are installed on the connecting pipes between the recycled material storage container 16 and the liquid outlets of test furnaces 4, 7, 11, and 14 to control the on / off state of the connecting pipes.

[0067] One embodiment of this utility model proposes a system for detecting the quality of polycrystalline silicon raw materials. This system can use the same raw materials in different test furnaces for production. By cross-comparison, problematic raw materials can be quickly identified, thereby improving detection efficiency and reducing losses after problems occur.

[0068] As a preferred embodiment of the above, the first pump 1 is connected to the fresh trichlorosilane pipeline via pipe 1; a control valve 1 is installed on pipe 1 to regulate the flow rate of pipe 1; the second pump 8 is connected to the recovered trichlorosilane pipeline via pipe 2; a control valve 2 is installed on pipe 2 to regulate the flow rate of pipe 2; the first vaporizer 2 is connected to the first pump 1 via pipe 3; a control valve 3 is installed on pipe 3 to regulate the flow rate of pipe 3; the second vaporizer 5 is connected to the first pump 1 via pipe 4; a control valve 4 is installed on pipe 4 to regulate the flow rate of pipe 4; the third vaporizer 9 is connected to the second pump 8 via pipe 5; a control valve 5 is installed on pipe 5 to regulate the flow rate of pipe 5; the fourth vaporizer 12 is connected to the second pump 8 via pipe 6; a control valve 6 is installed on pipe 6 to regulate the flow rate of pipe 6, so as to facilitate the adjustment and control of each pipeline.

[0069] As a preferred embodiment of the above, mixer 13 is connected to the recovered hydrogen pipeline via pipeline 7; pipeline 7 is equipped with a control valve 7 for regulating the flow rate of pipeline 7; mixer 26 is connected to the fresh hydrogen pipeline via pipeline 8; pipeline 8 is equipped with a control valve 8 for regulating the flow rate of pipeline 8; mixer 310 is connected to the recovered hydrogen pipeline via pipeline 9; pipeline 9 is equipped with a control valve 9 for regulating the flow rate of pipeline 9; mixer 413 is connected to the fresh hydrogen pipeline via pipeline 10; pipeline 10 is equipped with a control valve 10 for regulating the flow rate of pipeline 10.

[0070] As a preferred embodiment of the above embodiments, one embodiment of the present invention provides a system for detecting the quality of polycrystalline silicon raw materials, which further includes: a control system; the control system is connected to control valve one, control valve two, control valve three, control valve four, control valve five, control valve six, control valve seven, control valve eight, control valve nine and control valve ten respectively, for outputting control signals to facilitate the control system to control the flow rate.

[0071] As a preferred embodiment of the above, one-way valves are respectively provided on pipes seven, eight, nine and ten to ensure unidirectional flow of materials.

[0072] As a preferred embodiment of the above, test furnace 4 is a polycrystalline silicon reduction furnace with 1 or 2 pairs of rods; test furnace 7 is a polycrystalline silicon reduction furnace with 1 or 2 pairs of rods; test furnace 11 is a polycrystalline silicon reduction furnace with 1 or 2 pairs of rods; and test furnace 14 is a polycrystalline silicon reduction furnace with 1 or 2 pairs of rods, used to produce polycrystalline silicon rods required for testing.

[0073] This invention provides a system for detecting the quality of polysilicon raw materials, which can be implemented through the following methods:

[0074] The mixture of fresh trichlorosilane and recycled hydrogen used in the polysilicon production system is fed into test furnace 1 to produce polysilicon rods for a predetermined time period.

[0075] The mixture of fresh trichlorosilane and fresh hydrogen used in the polysilicon production system is fed into test furnace two to produce polysilicon rods for a predetermined time length two.

[0076] The mixture of recycled trichlorosilane and recycled hydrogen used in the polysilicon production system is fed into test furnace three to produce polysilicon rods for a predetermined time length three.

[0077] The polysilicon production system uses a mixture of recycled trichlorosilane and fresh hydrogen, which is fed into test furnace four to produce polysilicon rods for a predetermined time period of four.

[0078] Once the silicon rods in Test Furnace 1, Test Furnace 2, Test Furnace 3, and Test Furnace 4 reach the required size for testing, the furnaces are shut down.

[0079] The polycrystalline silicon rods in test furnaces 1, 2, 3 and 4 were disassembled and tested separately to determine whether the impurity content exceeded the preset target.

[0080] If the impurity content in a polycrystalline silicon rod exceeds the preset target, the test data of polycrystalline silicon rods produced by test furnace 1, test furnace 2, test furnace 3 and test furnace 4 are cross-compared to determine the raw material that caused the impurity content to exceed the standard.

[0081] In this embodiment, the predetermined time lengths are preferably 5-15 hours, 5-15 hours, 5-15 hours, and 5-15 hours respectively. After the reduction reaction lasts 5-15 hours, the polycrystalline silicon rod will grow to the predetermined size for testing. Preferably, the predetermined time lengths 1, 2, 3, and 4 are all 10 hours. According to our current equipment testing, after 10 hours of operation, the silicon rod diameter is sufficient to meet the sampling requirements.

[0082] In this preferred embodiment, the predetermined time lengths one, two, three, and four are the same, so that the silicon rods in the four test furnaces can be tested simultaneously.

[0083] This invention provides a system for detecting the quality of polysilicon raw materials. After implementing the above method, the polysilicon testing time is reduced from more than 90 hours to about 10 hours, providing timely testing data for production adjustments. Continuous testing of four raw materials can detect the quality of polysilicon rods in a timely and accurate manner, improving testing efficiency and reducing losses after problems occur.

[0084] To further clarify, while the terms "first," "second," etc., may be used herein to describe various elements, these terms should not limit the elements. These terms are used only to distinguish one element from another. For example, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element; these terms are used only to distinguish one element from another. This does not depart from the scope of the exemplary embodiments. Similarly, "element one," "element two," and so on do not represent the order of elements; these terms are used only to distinguish one element from another. As used herein, the term "and / or" includes any and all combinations of one or more associated listed items.

[0085] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0086] All standard parts used in this utility model can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here.

[0087] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. A system for detecting the quality of a polysilicon feedstock, characterized by, Includes: transfer pump 1, vaporizer 1, mixer 1, test furnace 1, vaporizer 2, mixer 2, test furnace 2, transfer pump 2, vaporizer 3, mixer 3, test furnace 3, vaporizer 4, mixer 4, test furnace 4, exhaust gas pipeline and recycled material storage container; The inlet of the first conveying pump is connected to the fresh trichlorosilane pipeline; the inlet of the first vaporizer is connected to the outlet of the first conveying pump. The inlet one of the mixer one is connected to the outlet of the vaporizer one; the inlet two of the mixer one is connected to the hydrogen recovery pipeline. The feed inlet of the test furnace is connected to the outlet of the mixer. The inlet of the vaporizer 2 is connected to the outlet of the delivery pump 1; The inlet 1 of the mixer 2 is connected to the outlet of the vaporizer 2; the inlet 2 of the mixer 2 is connected to the fresh hydrogen pipeline. The feed inlet of the second test furnace is connected to the outlet of the second mixer; The inlet of the second conveying pump is connected to the trichlorosilane recovery pipeline; The inlet of the vaporizer three is connected to the outlet of the conveying pump two; The inlet 1 of the mixer 3 is connected to the outlet of the vaporizer 3; the inlet 2 of the mixer 3 is connected to the hydrogen recovery pipeline. The feed inlet of the test furnace three is connected to the outlet of the mixer three; The inlet of the vaporizer four is connected to the outlet of the conveying pump two; The inlet 1 of the mixer 4 is connected to the outlet of the vaporizer 4; the inlet 2 of the mixer 4 is connected to the fresh hydrogen pipeline. The feed inlet of the test furnace four is connected to the outlet of the mixer four; The exhaust gas pipeline is connected to the gas outlets of test furnace one, test furnace two, test furnace three and test furnace four respectively; The recycled material storage container is connected to the liquid outlets of test furnace one, test furnace two, test furnace three and test furnace four respectively; the discharge port of the recycled material storage container is connected to the distillation system.

2. The system for detecting the quality of polycrystalline silicon raw materials according to claim 1, characterized in that, The delivery pump is connected to the fresh trichlorosilane pipeline via a pipe; a control valve is installed on the pipe. The second delivery pump is connected to the trichlorosilane recovery pipeline via a second pipeline; a second control valve is installed on the second pipeline. The vaporizer 1 is connected to the delivery pump 1 via pipe 3; a control valve 3 is installed on pipe 3; The vaporizer 2 is connected to the delivery pump 1 via pipe 4; a control valve 4 is installed on pipe 4. The vaporizer three is connected to the delivery pump two via pipe five; a control valve five is installed on pipe five. The vaporizer four is connected to the delivery pump two via a pipeline six; a control valve six is ​​installed on the pipeline six.

3. The system for detecting the quality of polycrystalline silicon raw materials according to claim 2, characterized in that, The mixer is connected to the hydrogen recovery pipeline via a pipe seven; a control valve seven is installed on the pipe seven. The mixer 2 is connected to the fresh hydrogen pipeline via pipe 8; a control valve 8 is installed on pipe 8. The mixer three is connected to the recovered hydrogen pipeline via pipe nine; a control valve nine is installed on pipe nine. The mixer four is connected to the fresh hydrogen pipeline through pipe ten; a control valve ten is installed on pipe ten.

4. The system for detecting quality of a polysilicon feedstock material of claim 3, wherein, Also includes: Control system; The control system is connected to control valve one, control valve two, control valve three, control valve four, control valve five, control valve six, control valve seven, control valve eight, control valve nine and control valve ten respectively, and is used to output control signals.

5. The system for detecting the quality of polycrystalline silicon raw materials according to claim 4, characterized in that, One-way valves are respectively installed on pipes seven, eight, nine and ten.

6. The system for detecting the quality of polycrystalline silicon raw materials according to claim 1, characterized in that, Valve 1 is installed on the connecting pipes between the exhaust gas pipeline and the gas outlets of test furnace 1, test furnace 2, test furnace 3 and test furnace 4; Valve 2 is installed on the connecting pipeline between the recycled material storage container and the liquid outlets of test furnace 1, test furnace 2, test furnace 3 and test furnace 4.

7. The system for detecting the quality of polycrystalline silicon raw materials according to claim 1, characterized in that, The test furnace is a polycrystalline silicon reduction furnace with one or two pairs of rods; The second test furnace is a polycrystalline silicon reduction furnace with one or two pairs of rods; The test furnace three is a polycrystalline silicon reduction furnace with one or two pairs of rods; The test furnace four is a polycrystalline silicon reduction furnace with one or two pairs of rods.

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