A two-dimensional large-angle fast-reflecting mirror device based on PCB eddy current sensor

Abstract

This invention relates to the field of fast reflector technology, specifically to a two-dimensional large-angle fast reflector device based on a PCB eddy current sensor. The device includes: a flexible support assembly that enables the reflector assembly to deflect in a two-dimensional direction, and which, after angular displacement, returns to its original position through elastic deformation; and an eddy current sensor probe comprising multi-layer coils printed on an eddy current circuit board, with each pair of probes symmetrically arranged on the board. This invention, through the flexible support assembly and a moving-magnet drive structure, enables the reflector assembly to achieve large-angle deflection in two orthogonal directions. Compared to traditional micro-angle deflection structures, the maximum deflection angle is significantly increased, covering a wider field of view, making it suitable for applications such as large-field-of-view scanning, rapid target acquisition, and wide-angle beam control.

Description

Technical Field

[0001] This utility model relates to the field of fast reflector technology, specifically to a two-dimensional large-angle fast reflector device based on a PCB eddy current sensor. Background Technology

[0002] Fast reflector devices are key actuators widely used in high-precision optical control fields such as laser scanning, space communication, imaging systems, and target tracking. These devices primarily achieve rapid and precise control of the beam direction by deflecting a reflector through a drive mechanism. Existing fast reflector devices typically employ piezoelectric, electrostatic, or voice coil actuation to achieve minute angle deflections of the reflector. Traditional two-dimensional fast reflectors generally include four voice coil motors, with two motors forming a push-pull pair to create a rotation axis. Providing smooth and uniform torque to the reflector, they offer advantages such as small size, compact structure, high precision, high bandwidth, and high speed, and have been widely applied in important fields such as space laser communication, astronomical telescopes, adaptive optics, image shift compensation in aerial photography, high-precision laser processing equipment, and carrier laser systems.

[0003] Existing moving-magnetic fast reflectors use voice coil motors to drive the beam, achieving rapid beam deflection through a structure with a fixed coil and a movable magnet. However, most existing moving-magnetic fast reflectors have a relatively small deflection angle. Utility Model Content

[0004] (I) Purpose of the utility model

[0005] The purpose of this invention is to provide a two-dimensional large-angle fast reflector device based on a PCB eddy current sensor. This device uses a flexible support component with a cross-shaped structure and a moving magnetic drive structure to enable the reflector assembly to deflect at large angles in two orthogonal directions. The eddy current sensor adopts a printed multilayer coil structure, which can accurately monitor the two-dimensional angular displacement of the reflector assembly, realize closed-loop real-time feedback, and improve the accuracy and reliability of control.

[0006] (II) Technical Solution

[0007] To address the aforementioned problems, this utility model provides a two-dimensional large-angle fast-reflecting mirror device based on a PCB eddy current sensor, comprising:

[0008] Reflector assembly, flexible support assembly, moving magnet electromagnetic drive assembly, eddy current sensor assembly and base;

[0009] The reflector assembly, flexible support assembly, and base are connected sequentially along the axial direction; the flexible support assembly enables the reflector assembly to deflect in a two-dimensional direction, and after the reflector assembly undergoes angular displacement, it resets the reflector assembly through its own elastic deformation.

[0010] The moving magnet electromagnetic drive assembly and the eddy current sensor assembly are disposed around the center of the base; the moving magnet electromagnetic drive assembly drives the reflector assembly to deflect within a set angle;

[0011] The eddy current sensor assembly includes an eddy current circuit board and at least two pairs of eddy current sensor probes.

[0012] The eddy current sensor probe includes a multi-layer coil, which is printed on the eddy current circuit board. Each pair of eddy current sensor probes is symmetrically arranged on the eddy current circuit board. The eddy current sensor probe is used to detect the deflection angle of the reflector assembly.

[0013] In another aspect of this utility model, preferably, the base includes a base body and a base circuit board, the base circuit board being disposed at the end of the base body away from the reflector assembly; the eddy current circuit board being disposed at the end of the base body close to the reflector assembly;

[0014] The eddy current circuit board includes solder pins, and the base body is provided with solder pin through holes. The solder pins and solder pin through holes are adapted to each other, and the eddy current circuit board is connected to the base circuit board through the solder pins and solder pin through holes.

[0015] In another aspect of this utility model, preferably, the moving magnet type electromagnetic drive assembly includes two pairs of permanent magnets and two pairs of drive coils, wherein the drive coils and permanent magnets are arranged symmetrically in pairs around the central axis of the reflector assembly.

[0016] The two pairs of drive coils are vertically embedded in the mounting slots on the base body and distributed around the flexible support assembly, with the permanent magnets correspondingly arranged inside the drive coils.

[0017] In another aspect of this invention, preferably, the end of the permanent magnet away from the reflector assembly is configured as a conical structure, or as a structure combining a conical and an arc shape.

[0018] In another aspect of this invention, preferably, a connecting piece is included, wherein one end of the permanent magnet near the reflector assembly is connected to the reflector assembly via the connecting piece.

[0019] In another aspect of this invention, preferably, the flexible support component is configured as a cross-shaped flexible support hinge.

[0020] In another aspect of this utility model, preferably, the flexible support component includes two pairs of flexible hinge plates and two pairs of spring plates. The two pairs of flexible hinge plates are arranged in a cross shape, and each pair of flexible hinge plates is arranged opposite to each other to form a two-dimensional flexible support structure.

[0021] The two pairs of spring plates are respectively disposed between a pair of corresponding flexible hinge plates. The two spring plates in each pair are arranged in an orthogonal direction, and the upper and lower ends of the spring plates are respectively connected to the opposite surfaces of the pair of flexible hinge plates.

[0022] In another aspect of this utility model, preferably, the reflector assembly includes a reflector surface and a mirror support;

[0023] The mirror surface is fixedly connected to the mirror holder, and the moving magnet electromagnetic drive assembly drives the mirror holder to cause the mirror surface to deflect.

[0024] In another aspect of this utility model, preferably, the bottom of the lens holder is provided with a connecting groove, the position and number of the connecting grooves correspond to the connecting piece, and the moving magnet electromagnetic drive assembly is fixedly connected to the lens holder through the connecting piece and the connecting groove.

[0025] In another aspect, preferably, the present invention also includes a motor wire, the two ends of which are connected to a moving magnet electromagnetic drive assembly and a host computer. The motor wire includes four sets of control cables, each set including a positive wire and a negative wire.

[0026] (III) Beneficial Effects

[0027] The above-mentioned technical solution of this utility model has the following beneficial technical effects:

[0028] This invention utilizes a flexible support component in conjunction with a moving-magnetic drive structure, enabling the reflector assembly to achieve large-angle deflection in two orthogonal directions. Compared to traditional micro-angle deflection structures, the maximum deflection angle is significantly increased, covering a wider field of view. This makes it suitable for applications such as large-field-of-view scanning, rapid target acquisition, and wide-angle beam control. The moving-magnetic drive component is symmetrically arranged around the reflector, resulting in high driving efficiency and a uniform magnetic field. This allows the reflector assembly to complete rapid responses within milliseconds and possesses precise positioning capabilities down to the micro-radian level. The moving-magnetic drive component and the eddy current sensor component are integrated within the base, resulting in a highly integrated reflector, drive, detection, and support structure. This minimizes space requirements, facilitating application in compact optomechanical structures and promoting system miniaturization. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall structure of one embodiment of the present utility model;

[0030] Figure 2This is a cross-sectional view of the overall structure of one embodiment of the present invention;

[0031] Figure 3 This is a schematic diagram of a flexible support component structure according to an embodiment of the present invention;

[0032] Figure 4 This is a schematic diagram of the structure of an eddy current sensor assembly according to an embodiment of the present invention;

[0033] Figure 5 This is a bottom view of a mirror holder according to an embodiment of the present invention;

[0034] Figure 6 This is a cross-sectional view of the base according to an embodiment of the present invention;

[0035] Figure 7 This is a block diagram illustrating the input-output relationship of one embodiment of the present invention;

[0036] Figure 8 This is a schematic diagram of the electrical interface connection of a moving magnet electromagnetic drive assembly according to an embodiment of this utility model;

[0037] Figure 9 This is a schematic diagram of the signal output of an eddy current sensor assembly according to an embodiment of the present invention.

[0038] Figure label:

[0039] 1: Reflector assembly; 110: Reflector mirror surface; 120: Mirror holder;

[0040] 2: Flexible support component; 210: Flexible hinge piece; 220: Spring piece;

[0041] 3: Moving magnet type electromagnetic drive assembly; 310: Permanent magnet; 320: Drive coil.

[0042] 4: Eddy current sensor assembly; 410: Eddy current circuit board; 411: Solder pin; 420: Eddy current sensor probe.

[0043] 5: Base; 510: Base body; 520: Base circuit board;

[0044] 6: Connecting piece, 7: Motor wire, 8: Communication cable. Detailed Implementation

[0045] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0046] The accompanying drawings show schematic diagrams of layer structures according to embodiments of the present invention. These drawings are not to scale, and some details have been enlarged for clarity, and some details may have been omitted. The shapes of the various regions and layers shown in the drawings, as well as their relative sizes and positional relationships, are merely exemplary and may deviate from reality due to manufacturing tolerances or technical limitations. Furthermore, those skilled in the art can design regions / layers with different shapes, sizes, and relative positions as needed.

[0047] Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0048] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0049] The present invention will now be described in more detail with reference to the accompanying drawings. In the various drawings, the same elements are indicated by similar reference numerals. For clarity, the parts in the drawings are not drawn to scale.

[0050] Example 1

[0051] A two-dimensional large-angle fast-reflecting mirror device based on a PCB eddy current sensor. Figure 1 This is a schematic diagram of the overall structure of one embodiment of the present utility model; Figure 2 This is a cross-sectional view of the overall structure of one embodiment of the present invention; as shown... Figure 1 and Figure 2 As shown, it includes:

[0052] The device consists of a reflector assembly 1, a flexible support assembly 2, a moving magnet electromagnetic drive assembly 3, an eddy current sensor assembly 4, and a base 5. The reflector assembly 1 is used to carry and reflect the incident light beam and is the core execution unit of the entire device. The base 5 serves as the fixed support part of the device, providing a stable mounting foundation for the other components.

[0053] The reflector assembly 1, the flexible support assembly 2, and the base 5 are connected sequentially along the axial direction. The flexible support assembly 2 enables the reflector assembly to deflect in a two-dimensional direction, and after the reflector assembly undergoes angular displacement, it resets the reflector assembly 1 through its own elastic deformation. The flexible support assembly 2 is disposed between the base 5 and the reflector assembly 1. The top end of the flexible support assembly 2 is fixed to the reflector assembly 1, and the bottom end is fixed to the base 5, which enables two-dimensional rotation of the reflector assembly. Figure 3A schematic diagram of a flexible support component structure according to an embodiment of the present invention is shown, as follows: Figure 3 As shown, the flexible support component 2 is configured as a cross-shaped flexible support hinge. Further, in this embodiment, the flexible support component 2 includes two pairs of flexible hinge plates 210 and two pairs of spring plates 220. The two pairs of flexible hinge plates 210 are arranged in a cross shape, with each pair of flexible hinge plates 210 positioned opposite each other to form a two-dimensional flexible support structure. The two pairs of spring plates 220 are respectively disposed between corresponding pairs of flexible hinge plates. The two spring plates in each pair are arranged in orthogonal directions, with their upper and lower ends connected to the opposite surfaces of the pair of flexible hinge plates. Each pair of flexible hinge plates 210 is symmetrically disposed between the reflector assembly and the base. The upper end of each spring plate 220 is welded to the edge of the upper flexible hinge plate 210, and the lower end of each spring plate 220 is welded to the edge of the lower flexible hinge plate 210. Two flexible hinge plates 210 are stacked together via a pair of spring plates 220 to form a set of flexible hinges. The two sets of flexible hinges are arranged in a cross shape. When the fast reflector deflects, the flexible support assembly 2 applies a force to the mirror support reflector assembly 1 to return it to its mechanical zero position. This force reduces the overshoot phenomenon of the voice coil motor during closed-loop control. A protective shell is installed on the outside of each pair of spring plates to protect them. The spring plates 220 can be made of any elastic material such as cold-rolled 304 stainless steel, beryllium bronze, or spring steel. In this embodiment, cold-rolled 304 stainless steel is used to ensure no plastic deformation occurs during repeated deflections. Using a cross-shaped flexible support hinge enhances the deflection stability of the fast reflector and the mirror surface stability at its mechanical zero position. When the fast reflector deflects, the cross-shaped flexible support hinge applies a force to the mirror support to return it to its mechanical zero position. This force reduces the overshoot phenomenon of the voice coil motor during closed-loop control. Traditional bearings have friction and clearance, resulting in poor control characteristics, low speed, short lifespan, and a tendency to seize at low temperatures. Flexible supports offer long lifespan, zero clearance, high repeatability and positioning accuracy, no friction, no need for lubrication, and are unaffected by vacuum or low-temperature operating environments.

[0054] The moving magnet electromagnetic drive assembly 3 and the eddy current sensor assembly 4 are disposed around the center of the base 5; the moving magnet electromagnetic drive assembly 3 drives the reflector assembly 1 to deflect within a set angle.

[0055] Figure 4 A schematic diagram of an eddy current sensor assembly according to an embodiment of the present invention is shown, as follows: Figure 4 As shown, the eddy current sensor assembly 4 includes an eddy current circuit board 410 and at least two pairs of eddy current sensor probes 420.

[0056] The eddy current sensor probe 420 includes multi-layer coils, which are printed on the eddy current circuit board 410. Each pair of eddy current sensor probes 420 is symmetrically arranged on the eddy current circuit board 410. The eddy current sensor probes 420 are used to detect the deflection angle of the reflector assembly 1. The eddy current circuit board 410 is the carrier of the eddy current sensor assembly 4, responsible for supporting and connecting each eddy current sensor probe 420. The eddy current sensor probe 420 is a non-contact detection component for angular displacement, and its structure is composed of multi-layer micro-coils, integrated onto the surface of the eddy current circuit board 410 through precision printed circuit technology. Compared with traditional mechanical sensors, the design process is simple, the cost is low, and the consistency is good, making it particularly suitable for use in applications involving high-frequency vibration and rapid scanning. Each pair of eddy current sensor probes 420 is symmetrically arranged on the eddy current circuit board 410. In this embodiment, two pairs of probes are set vertically and distributed in a cross shape to sense the angular changes of the reflector assembly in two orthogonal directions. The symmetrical arrangement structure enables the eddy current sensor probe 420 to acquire angular offset information in two-dimensional direction in real time, and enhances the linearity and accuracy of the measurement through differential signal calculation.

[0057] Four sensor probes can measure the deflection of the reflector assembly in four directions, with the eddy current probe maintaining a first preset distance from the center of the reflector assembly. It should be noted that the number of sensors is not limited; the number of sensors can be increased as long as it is sufficient to measure and provide feedback on the deflection of the reflector assembly.

[0058] Figure 5 A bottom view of a mirror holder according to an embodiment of the present invention is shown, as follows: Figure 5 As shown, the reflector assembly 1 includes a reflector mirror 110 and a mirror support 120; the reflector mirror 110 is an element that realizes the optical reflection function, the reflector mirror 110 is fixedly connected to the mirror support 120, and the moving magnet type electromagnetic drive assembly 3 drives the mirror support 120 to drive the reflector mirror 110 to deflect.

[0059] Furthermore, in this embodiment, a connecting piece 6 is also included. A connecting groove is provided at the bottom of the mirror holder 120. The position and number of the connecting grooves correspond to the connecting piece 6. The moving magnet type electromagnetic drive assembly 3 is fixedly connected to the mirror holder 120 through the connecting piece 6 and the connecting groove.

[0060] The reflector mirror 110 can be fixed to the upper surface of the mirror holder 120 by bonding, screwing, or pressing, forming a stable and rigid integral structure. The bonding between the reflector mirror 110 and the mirror holder 120 can be, but is not limited to, using epoxy resin, polyurethane, acrylic, silicone, or other fixing adhesives. In this embodiment, silicone adhesive is used to bond the reflector mirror 110 and the mirror holder 120. In this embodiment, the reflector mirror diameter is 40mm ± 0.05mm. The mirror thickness can be selected from 1.8mm, 2mm, 2.2mm, etc., with a further thickness of 1.8mm ± 0.05mm. The substrate material of the reflector mirror 110 can be any reflector material such as fused silica, K9, or aluminum. In this embodiment, the reflector mirror 110 uses fused silica, and the reflector mirror is silver-plated. The mirror holder 120 is connected to the moving-magnetic drive assembly 3 by four hexagonal head screws, which are fixed using thread-locking adhesive. The lens holder 120 is bonded to the pin hole of the cross-shaped flexible support hinge by injecting epoxy resin adhesive. The lens holder 120 can be made of one of the following materials: aluminum alloy, such as AL6061-T6; titanium alloy, such as Ti-6Al-4V; beryllium aluminum alloy, such as AlBeMet; carbon fiber composite material, CFRP; Invar alloy; Invar, such as Fe-Ni36%; etc. In this embodiment, the lens holder 120 is made of aluminum alloy AL6061-T6.

[0061] The mirror holder 120 serves as a support and transmission structure for the reflector assembly. It supports the reflector surface 110 on one hand and acts as a actuator for driving force on the other. In this embodiment, the bottom of the mirror holder 120 has several connecting slots for rigid connection with the moving-magnetic drive assembly 3 via connecting pieces 6. The number and position of these connecting slots correspond one-to-one with the connecting pieces 6, arranged symmetrically to ensure uniform distribution of driving force on the mirror holder and prevent uneven loading or imbalance of the mirror surface. The connecting pieces 6 are made of high-strength, low-weight metal or composite materials. One end is mechanically fastened to the moving-magnetic drive assembly, such as with screws, rivets, or by adhesive bonding, while the other end is inserted into or fixed in a connecting slot of the mirror holder 120, thereby achieving effective transmission of electromagnetic driving force to the mirror holder.

[0062] Figure 6 A cross-sectional view of the base according to an embodiment of the present invention is shown, as follows: Figure 6 As shown, the base 5 includes a base body 510 and a base circuit board 520. The base circuit board 520 is disposed at the end of the base body 510 away from the reflector assembly 1. The eddy current circuit board 410 is disposed at the end of the base body 510 close to the reflector assembly 1. The base 5 further includes a base cover plate to seal the base circuit board 520.

[0063] The eddy current circuit board 410 includes a solder pin 411. A solder pin through-hole is provided on the base body 510. The solder pin 411 and the solder pin through-hole are adapted to each other. The eddy current circuit board 410 is connected to the base circuit board 520 through the solder pin 411 and the solder pin through-hole. The base body 510 has solder pin through-holes around its perimeter that match the size of the solder pin. The solder pin passes through the solder pin through-hole and is connected to the base circuit board 520 by soldering. The base circuit board 520 is used to receive the electromagnetic signals collected by the eddy current sensor probe 420 and convert them into electrical signals, which are then output for data feedback via the communication cable 8.

[0064] Furthermore, in this embodiment, the moving-magnetic electromagnetic drive assembly 3 includes two pairs of permanent magnets 310 and two pairs of drive coils 320. The drive coils 320 and the permanent magnets 310 are arranged symmetrically in pairs around the central axis of the reflector assembly 1. Each pair of permanent magnets and one pair of drive coils constitutes an independent drive unit. The two pairs of drive units are respectively arranged on both sides of the central axis of the reflector assembly 1, and are orthogonally symmetrically distributed as a whole, forming an independent drive system in two dimensions. This arrangement ensures that the reflector assembly has equal response capabilities in both the X and Y axes, enabling two-dimensional free rotation.

[0065] Two pairs of drive coils 320 are vertically embedded in mounting slots on the base body 510, bonded to the sidewalls of the mounting slots by epoxy resin injection, and distributed around the flexible support assembly 3. The drive coils 320 are made of high-conductivity copper wire and are vertically embedded in pre-set mounting slots on the base body 510, with the slot positions symmetrical to the center of the reflector assembly. The drive coils 320 are evenly distributed around the outer perimeter of the flexible support assembly 2, forming a complete two-dimensional excitation magnetic field distribution. When the drive coils are energized, they generate an induced magnetic field, which interacts with the permanent magnets 310 located inside, thereby generating a directionally controllable electromagnetic driving torque. The permanent magnets 310 are correspondingly arranged inside the drive coils 320. The permanent magnet 310 and the driving coil 320 are respectively disposed in the coil cavity, serving as the main body for electromagnetic force response. The magnet is made of magnetic materials such as AlNiCo, FeChCrCo, ferrite, Samarium Cobalt, and Neodymium Iron Boron. Preferably, in this embodiment, Neodymium Iron Boron is used as the permanent magnet material to ensure high remanence, high coercivity, and stable magnetic properties. The driving coil 320 can be made of conductive materials such as copper, aluminum, iron, silver, and gold. Preferably, in this embodiment, copper enameled wire is used as the coil material. Furthermore, in this embodiment, the end of the permanent magnet 310 furthest from the reflector assembly 1 is configured as a conical structure, or a combination of conical and arc-shaped structures, which provides greater operating space and a wider deflection range. The approximately conical magnet provides ample movement space, preventing collisions between the magnet and the coil due to excessive deflection angles when the reflector deflects at large angles. The vertically placed coil reduces assembly difficulty and costs.

[0066] The permanent magnet 310 is connected to the reflector assembly 1 at one end near the reflector assembly 1 via a connecting piece 6, which is attached by adhesive. The connecting piece 6 is fixed vertically to the connecting groove of the corresponding connecting piece in the mirror holder 120 by a symmetrical countersunk hexagonal screw with a diameter of 2mm and a nominal length of 4mm.

[0067] In this embodiment, the base circuit board 520 has functions such as differential output, signal amplification, and noise filtering. The eddy current sensor probe 420, in conjunction with the base circuit board 520, acquires the deflection information of the reflector assembly and converts it into an electrical signal. Then, through the communication cable 8, the rotation angle information of the fast reflector is directly fed back to the user as an analog signal.

[0068] Figure 7 An input-output relationship block diagram of one embodiment of the present invention is shown, as follows: Figure 7 As shown,

[0069] The host computer outputs control commands to the moving magnet electromagnetic drive component 3 through the motor line 7. The eddy current sensor probe 420 detects the deflection signal and transmits it to the base circuit board 520. The base circuit board 520 generates an analog signal and transmits it to the host computer through the communication cable for closed-loop control.

[0070] Figure 8 This is a schematic diagram of the electrical interface connection of a moving magnet electromagnetic drive assembly according to an embodiment of this utility model; Figure 9 This is a schematic diagram of the signal output of an eddy current sensor assembly according to an embodiment of the present invention, as shown below. Figure 8 and Figure 9 As shown, it also includes a motor cable 7, which connects to the moving magnet electromagnetic drive assembly 3 and the host computer at both ends. The motor cable 7 includes four sets of control cables, each set including one positive wire and one negative wire. The moving magnet electromagnetic drive assembly 3 is controlled by the host computer. The motor cable includes four sets of cables: X red wire, X black wire, Y red wire, and Y black wire, which control the coils in the X+, X-, Y+, and Y- directions, respectively. Each set of cables contains two cables, one positive and one negative, for a total of eight cables. These cables are assembled with a DLL-5557-8Y connector to control the voice coil motor. The DLL-5557-8Y connector has eight interfaces, arranged in four groups of two, one above the other. Each group of interfaces corresponds to one set of cables, which connect to the X red wire, X black wire, Y red wire, and Y black wire from left to right.

[0071] The sensor assembly integrates the measured rotation angle information of the fast-reflecting mirror into the FH62S-10S-0.5SH connector via a circuit board. The FPC communication cable (9) is connected to the connector to directly feed back the angle information to the user as an analog signal. The FH62S-10S-0.5SH connector contains ten interfaces. Interfaces 1, 3, 5, and 8 are grounded, interfaces 2 and 4 are connected to -5.5V and +5.5V voltages respectively, and interfaces 6, 7, 9, and 10 output ADY-, ADY+, ADX-, and ADX+ signals respectively.

[0072] This invention utilizes a flexible support component in conjunction with a moving-magnetic drive structure, enabling the reflector assembly to achieve large-angle deflection in two orthogonal directions. Compared to traditional micro-angle deflection structures, the maximum deflection angle is significantly increased, covering a wider field of view. This makes it suitable for applications such as large-field-of-view scanning, rapid target acquisition, and wide-angle beam control. The moving-magnetic drive component is symmetrically arranged around the reflector, resulting in high driving efficiency and a uniform magnetic field. This allows the reflector assembly to complete rapid responses within milliseconds and possesses precise positioning capabilities down to the micro-radian level. The moving-magnetic drive component and the eddy current sensor component are integrated within the base, resulting in a highly integrated reflector, drive, detection, and support structure. This minimizes space requirements, facilitating application in compact optomechanical structures and promoting system miniaturization.

[0073] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within its protection scope. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

[0074] The above description does not provide detailed explanations of the technical aspects of each layer's patterning and etching. However, those skilled in the art should understand that various methods existing in the prior art can be used to form layers and regions of the desired shape. Furthermore, to form the same structure, those skilled in the art can also design methods that are not entirely identical to those described above.

[0075] The present invention has been described above with reference to embodiments thereof. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the present invention, and all such substitutions and modifications should fall within the scope of the present invention.

[0076] Although the embodiments of the present invention have been described in detail, it should be understood that various changes, substitutions and modifications can be made to the embodiments of the present invention without departing from the spirit and scope of the present invention.

[0077] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A two-dimensional large-angle fast steering mirror device based on PCB eddy current sensor, characterized in that, include: The components include a reflector assembly (1), a flexible support assembly (2), a moving magnet electromagnetic drive assembly (3), an eddy current sensor assembly (4), and a base (5). The reflector assembly (1), the flexible support assembly (2) and the base (5) are connected in sequence along the axial direction; the flexible support assembly (2) enables the reflector assembly to deflect in a two-dimensional direction, and after the reflector assembly undergoes angular displacement, it resets the reflector assembly (1) through its own elastic deformation. The moving magnet type electromagnetic drive assembly (3) and the eddy current sensor assembly (4) are arranged around the center of the base (5); the moving magnet type electromagnetic drive assembly (3) drives the reflector assembly (1) to deflect within a set angle; The eddy current sensor assembly (4) includes an eddy current circuit board (410) and at least two pairs of eddy current sensor probes (420); The eddy current sensor probe (420) includes a multi-layer coil, which is printed on the eddy current circuit board (410). Each pair of eddy current sensor probes (420) is symmetrically arranged on the eddy current circuit board (410). The eddy current sensor probe (420) is used to detect the deflection angle of the reflector assembly (1).

2. The PCB-based eddy current sensor based two-dimensional large-angle fast steering mirror device of claim 1, wherein, The base (5) includes a base body (510) and a base circuit board (520). The base circuit board (520) is disposed at one end of the base body (510) away from the reflector assembly (1). The eddy current circuit board (410) is disposed at one end of the base body (510) close to the reflector assembly (1). The eddy current circuit board (410) includes a solder pin (411), and the base body (510) is provided with a solder pin through hole. The solder pin (411) and the solder pin through hole are adapted to each other. The eddy current circuit board (410) is connected to the base circuit board (520) through the solder pin (411) and the solder pin through hole.

3. The PCB-based eddy current sensor based two-dimensional large-angle fast steering mirror device of claim 2, wherein, The moving magnet type electromagnetic drive assembly (3) includes two pairs of permanent magnets (310) and two pairs of drive coils (320). The drive coils (320) and the permanent magnets (310) are arranged symmetrically in pairs around the central axis of the reflector assembly (1). Two pairs of drive coils (320) are vertically embedded in the mounting slots on the base body (510) and distributed around the flexible support assembly (2). The permanent magnets (310) are correspondingly arranged inside the drive coils (320).

4. The PCB-based eddy current sensor based two-dimensional large-angle fast steering mirror apparatus of claim 3, wherein, The end of the permanent magnet (310) away from the reflector assembly (1) is configured as a conical structure, or as a structure combining a conical and an arc shape.

5. The PCB-based eddy current sensor based two-dimensional large-angle fast steering mirror apparatus of claim 3, wherein, It also includes a connecting piece (6), and one end of the permanent magnet (310) near the reflector assembly (1) is connected to the reflector assembly (1) via the connecting piece (6).

6. The two-dimensional large-angle fast-reflecting mirror device based on a PCB eddy current sensor according to claim 1, characterized in that, The flexible support component (2) is configured as a cross-shaped flexible support hinge.

7. The PCB-based eddy current sensor based two-dimensional large-angle fast steering mirror apparatus of claim 1, wherein, The flexible support assembly (2) includes two pairs of flexible hinge plates (210) and two pairs of spring plates (220). The two pairs of flexible hinge plates (210) are arranged in a cross shape, and each pair of flexible hinge plates (210) is arranged opposite to each other to form a two-dimensional flexible support structure. The two pairs of spring plates (220) are respectively disposed between a pair of corresponding flexible hinge plates. The two spring plates in each pair are arranged in an orthogonal direction, and the upper and lower ends of the spring plates are respectively connected to the opposite surfaces of the pair of flexible hinge plates.

8. The PCB-based eddy current sensor based two-dimensional large-angle fast steering mirror apparatus of claim 5, wherein, The mirror assembly (1) includes a mirror surface (110) and a mirror holder (120); The mirror surface (110) is fixedly connected to the mirror holder (120), and the moving magnetic electromagnetic drive assembly (3) drives the mirror holder (120) to cause the mirror surface (110) to deflect.

9. The PCB-based eddy current sensor based two-dimensional large-angle fast steering mirror apparatus of claim 8, wherein, The bottom of the mirror holder (120) is provided with a connection slot, the position and number of which correspond to the connecting piece (6). The moving magnet electromagnetic drive assembly (3) is fixedly connected to the mirror holder (120) through the connecting piece (6) and the connection slot.

10. The two-dimensional large-angle fast-reflecting mirror device based on a PCB eddy current sensor according to claim 1, characterized in that, It also includes a motor wire (7), which connects the moving magnet type electromagnetic drive component (3) and the host computer at both ends. The motor wire (7) includes four sets of control cables, each set including a positive wire and a negative wire.

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