A high-purity silane purification device
By using a device consisting of a medium-pressure dehydrogenation tower, a silane removal tower, and an atmospheric pressure dehydrogenation tower, combined with distillation and subcooling technologies, the problems of adsorbent blockage and low purity in the silane purification process have been solved, achieving efficient and high-purity silane purification.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHUHAI GONGTONG MECHANICAL EQUIP
- Filing Date
- 2025-06-27
- Publication Date
- 2026-07-07
AI Technical Summary
Existing silomethane purification methods suffer from problems such as adsorbent clogging, poor selectivity, and low purity, resulting in high extraction costs and difficulty in achieving high purity requirements.
The device, consisting of a medium-pressure dehydrogenation tower, a silane removal tower, and an atmospheric pressure dehydrogenation tower, separates hydrogen, silane, and silane by distillation, and further cools the silane by a subcooler to achieve high-purity purification.
It achieves high-purity purification of silanol, reaching a purity of 99.999%, reducing maintenance costs and improving production efficiency.
Smart Images
Figure CN224462281U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of mixture purification, and in particular to a high-purity silicone purification device. Background Technology
[0002] As a core raw material in the semiconductor and photovoltaic industries, the purity of silane directly affects chip performance and solar cell efficiency.
[0003] Currently, the purification of silane typically employs adsorption and membrane separation methods. In the adsorption method, the adsorbent is easily clogged by silane polymers during use, requiring frequent replacement of the packing material and incurring high downtime maintenance costs. Furthermore, when the diameters of silane and impurity gases are similar, the selective adsorption effect is limited, leading to a decrease in extraction purity. Membrane separation methods also yield silane with lower purity, making it difficult to meet usage requirements. Utility Model Content
[0004] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a high-purity silane purification device capable of extracting high-purity silane from a mixed gas.
[0005] A high-purity silane purification device according to an embodiment of the present invention includes: an inlet pipe, a medium-pressure dehydrogenation tower, a silane removal tower, and an atmospheric pressure dehydrogenation tower. The inlet pipe is used to input raw material gas into the device, and the raw material gas is a mixture of hydrogen, silane, and silane. The inlet end of the medium-pressure dehydrogenation tower is connected to the inlet pipe. The medium-pressure dehydrogenation tower is used to separate hydrogen from the raw material gas. The top of the medium-pressure dehydrogenation tower is connected to a first exhaust pipe, and the bottom of the medium-pressure dehydrogenation tower is connected to a first liquid discharge pipe. The first exhaust pipe is used to discharge the separated hydrogen, and the first liquid discharge pipe is used to discharge the remaining mixed liquid. The liquid inlet end of the silane removal tower is connected to the first liquid discharge pipe. The silane removal tower is used to separate silane from a mixed liquid. A second exhaust pipe is connected to the top of the silane removal tower to discharge silane from the mixed liquid. A second drain pipe is connected to the bottom of the silane removal tower to discharge the separated silane. The inlet of the atmospheric pressure dehydrogenation tower is connected to the second exhaust pipe. The atmospheric pressure dehydrogenation tower is used to separate residual hydrogen from the silane gas. A third exhaust pipe is provided at the top of the atmospheric pressure dehydrogenation tower to discharge residual hydrogen from the silane gas. A third drain pipe is connected to the bottom of the atmospheric pressure dehydrogenation tower to discharge silane.
[0006] It has at least the following beneficial effects: the inlet pipe is used to transmit the raw gas into this unit; the medium-pressure dehydrogenation tower is used to receive the mixed gas transmitted from the inlet pipe, and remove hydrogen from the mixed gas through distillation and discharge it through the first exhaust pipe; the remaining silane and silane are liquefied and flow into the silane removal tower through the first drain pipe; the silane removal tower vaporizes the silane through distillation and inputs it into the atmospheric dehydrogenation tower through the second exhaust pipe; the bottom of the silane removal tower is connected to the second drain pipe, which can be used to discharge the silane liquid obtained after distillation in the silane removal tower; the atmospheric dehydrogenation tower is used to remove the residual hydrogen in the silane; the silane without hydrogen is discharged through the third drain pipe, and the hydrogen is discharged through the third exhaust pipe; after distillation in the medium-pressure dehydrogenation tower, the silane removal tower, and the atmospheric dehydrogenation tower, the purity of the silane liquid discharged through the third drain pipe can meet the requirements for production use.
[0007] According to some embodiments of the present invention, the device further includes a subcooler, the liquid inlet of which is connected to the third drain pipe, and a fourth drain pipe is connected to the subcooler. The subcooler is used to further cool the liquid silane, and the fourth drain pipe is used to discharge the cooled silane from the subcooler and collect it.
[0008] According to some embodiments of the present invention, a vaporizer is provided on the second drain pipe, the vaporizer being used to vaporize the liquid silane in the second drain pipe.
[0009] According to some embodiments of the present invention, a first reboiler is provided at the bottom of the medium-pressure dehydrogenation tower, and a first condenser is provided at the top of the medium-pressure dehydrogenation tower. The first reboiler is used to heat the mixed liquid, and the first condenser is used to liquefy silanane and silane gases into liquid and reflux them to the bottom of the medium-pressure dehydrogenation tower.
[0010] According to some embodiments of the present invention, a second reboiler is provided at the bottom of the silane removal tower, and a second condenser is provided at the top of the silane removal tower. The second reboiler is used to heat the mixed liquid of silane and silane to make it evaporate, and the second condenser is used to liquefy the silane gas into a liquid state and make it flow back to the bottom of the silane removal tower.
[0011] According to some embodiments of the present invention, a third reboiler is provided at the bottom of the atmospheric dehydrogenation tower, and a third condenser is provided at the top of the atmospheric dehydrogenation tower. The third reboiler is used to heat the mixed liquid of silanium and residual hydrogen to evaporate it, and the third condenser is used to liquefy the silanium gas into a liquid state and reflux it back to the bottom of the atmospheric dehydrogenation tower.
[0012] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:
[0014] Figure 1 This is a simplified structural diagram of a high-purity silanium methane purification device according to an embodiment of the present invention;
[0015] Reference numerals: Intake pipe 100, Compressor 110;
[0016] Medium-pressure dehydrogenation tower 200, first exhaust pipe 210, first liquid discharge pipe 220, first reboiler 230, first condenser 240;
[0017] 300 silane removal tower, 310 second exhaust pipe, 320 second liquid drain pipe, 330 second reboiler, 340 second condenser;
[0018] Atmospheric dehydrogenation tower 400, third exhaust pipe 410, third liquid discharge pipe 420, third reboiler 430, third condenser 440;
[0019] Subcooler 500, fourth drain pipe 510;
[0020] Carburetor 600. Detailed Implementation
[0021] In the description of this utility model, the use of "first" and "second" is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features or the order of the technical features.
[0022] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.
[0023] Reference Figure 1 This utility model discloses a high-purity silane purification device, comprising: an inlet pipe 100, a medium-pressure dehydrogenation tower 200, a silane removal tower 300, and an atmospheric pressure dehydrogenation tower 400. The inlet pipe 100 is used to input the raw material gas into the device. The raw material gas is a mixture of hydrogen, silane, and silane. One end of the inlet pipe 100 is connected to a mixed gas storage device, and the other end of the inlet pipe 100 is connected to the medium-pressure dehydrogenation tower 200. The inlet pipe 100 is a conventional device and will not be described in detail. It can be understood that a compressor 110 is installed on the inlet pipe 100. The compressor 110 is used to pressurize the mixed gas in the inlet pipe 100. A valve is installed on the inlet pipe 100, and the valve is a conventional device.
[0024] The gas inlet of the medium-pressure dehydrogenation tower 200 is connected to the gas inlet pipe 100. The medium-pressure dehydrogenation tower 200 is used to separate hydrogen from the raw gas. The top of the medium-pressure dehydrogenation tower 200 is connected to the first exhaust pipe 210, and the bottom of the medium-pressure dehydrogenation tower 200 is connected to the first liquid drain pipe 220. The first exhaust pipe 210 is used to discharge the separated hydrogen, and the first liquid drain pipe 220 is used to discharge the remaining mixed liquid. The mixed gas enters the medium-pressure dehydrogenation tower 200. The top of the medium-pressure dehydrogenation tower 200 is equipped with a first condenser 240. The mixed gas is cooled by the first condenser 240 and pressurized by the compressor 110. The silanol and silane in the mixed gas reach the liquefaction conditions. The silanol and silane are liquefied and slowly flow into the bottom of the medium-pressure dehydrogenation tower 200 by gravity. The bottom of the medium-pressure dehydrogenation tower 200 is equipped with a first reboiler 230. The first reboiler 230 heats the mixture of silanol and silane. The liquefied liquid mixture allows residual hydrogen to escape from the silanine and silane mixture. The liquefied gas rises to the medium-pressure dehydrogenation tower 200 and encounters the first condenser 240. The silanine and silane liquefy upon cooling and return to the medium-pressure dehydrogenation tower 200, while the hydrogen is discharged through the first exhaust pipe 210. This process continuously reduces the hydrogen molecule content in the gas mixture. After this process is maintained for a period of time, the valve on the first drain pipe 220 is opened, and the silanine and silane mixture at the bottom of the medium-pressure dehydrogenation tower 200 is transferred through the first drain pipe 220 into the silane removal tower 300. It should be noted that the gas pressure inside the medium-pressure dehydrogenation tower 200 should be sufficient to liquefy the gaseous silanine. While ensuring safety, the gas pressure should be as high as possible. The higher the pressure, the higher the temperature required for the liquefaction of silanine and silane, which may save energy and reduce costs.
[0025] The inlet of the silane removal tower 300 is connected to the first drain pipe 220. The silane removal tower 300 is used to separate silane from the mixed liquid. The top of the silane removal tower 300 is connected to the second exhaust pipe 310, which is used to discharge silanium from the mixed liquid. The bottom of the silane removal tower 300 is connected to the second drain pipe 320, which is used to discharge the separated silane. The mixed liquid of silanium and silane enters the silane removal tower 300. The top of the silane removal tower 300 is equipped with a second condenser 340, and the bottom of the silane removal tower 300 is equipped with a second reboiler 330. The silane-ethylene mixture vaporizes the silane in the second reboiler 330. The gaseous silane rises to the top and encounters the second condenser 340, which liquefies the silane gas contained in the silane gas. The silane liquid flows to the bottom of the silane removal tower 300. After this process is maintained for a period of time, the valves of the second drain pipe 320 and the second exhaust pipe 310 are opened. The silane liquid is discharged from the silane removal tower 300 through the second drain pipe 320, and the silane gas enters the atmospheric dehydrogenation tower 400 through the second exhaust pipe 310. The silane removal tower 300 can effectively remove the silane from the silane-ethylene mixture.
[0026] The inlet of the atmospheric dehydrogenation tower 400 is connected to the second exhaust pipe 310. The atmospheric dehydrogenation tower 400 is used to separate the residual hydrogen in the silanium gas. A third exhaust pipe 410 is installed at the top of the atmospheric dehydrogenation tower 400 to discharge the residual hydrogen in the silanium gas. A third drain pipe 420 is connected to the bottom of the atmospheric dehydrogenation tower 400 to discharge the silanium. A third condenser 440 is installed at the top of the atmospheric dehydrogenation tower 400, and a third reboiler 430 is installed at the bottom of the atmospheric dehydrogenation tower 400. Entering the atmospheric dehydrogenation tower 400, the silanol encounters the third condenser 440, where it is liquefied and flows to the bottom of the tower. Hydrogen is distilled out and discharged from the tower through the third exhaust pipe 410. The silanol liquid is discharged and collected through the third drain pipe 420. Through the above device and process, silanol is purified from the mixed feed gas to a purity of 99.999%, which can be directly used in industrial production. Furthermore, the intermediate products hydrogen and silane produced during the purification process can also be used as raw materials in other industrial activities.
[0027] In some embodiments, the device further includes a subcooler 500, the inlet of which is connected to a third drain pipe 420, and a fourth drain pipe 510 connected to the subcooler 500. The subcooler 500 is used to further cool the liquid silane, and the fourth drain pipe 510 is used to discharge the cooled silane from the subcooler 500 and collect it. The subcooler 500 is used to cool the liquid silane so that its temperature is lower than the saturation temperature under the condensation pressure, which facilitates transportation stability and storage. It is understood that the subcooler 500 can also be configured as other cooling devices.
[0028] In some embodiments, a vaporizer 600 is provided on the second drain pipe 320. The vaporizer 600 is used to vaporize the liquid silane in the second drain pipe 320. The gaseous silane can be directly used in industrial production activities. The vaporizer 600 is a conventional installation.
[0029] In some embodiments, a first reboiler 230 is provided at the bottom of the medium-pressure dehydrogenation tower 200, and a first condenser 240 is provided at the top of the medium-pressure dehydrogenation tower 200. The first reboiler 230 is used to heat the mixed liquid, and the first condenser 240 is used to liquefy the silanane and silane gases into liquid and reflux them to the bottom of the medium-pressure dehydrogenation tower 200. The medium-pressure dehydrogenation tower 200 is a kind of distillation tower. The medium-pressure dehydrogenation tower 200 separates hydrogen from the mixed gas through distillation. Here, the separation of hydrogen by the medium-pressure dehydrogenation tower 200 is a preliminary separation. At this point, most of the hydrogen is separated. The dehydrogenation process and effect of the medium-pressure dehydrogenation tower 200 have been described above and will not be repeated.
[0030] In some embodiments, a second reboiler 330 is provided at the bottom of the silane removal tower 300, and a second condenser 340 is provided at the top of the silane removal tower 300. The second reboiler 330 is used to heat the mixture of silane and silane to evaporate it, and the second condenser 340 is used to liquefy the silane gas into a liquid state and reflux it back to the bottom of the silane removal tower 300. The silane removal tower 300 separates silane and silane through distillation, and the silane is discharged through the second drain pipe 320. The process and effect of silane removal in the silane removal tower 300 have been described above and will not be repeated.
[0031] In some embodiments, a third reboiler 430 is provided at the bottom of the atmospheric dehydrogenation tower 400, and a third condenser 440 is provided at the top of the atmospheric dehydrogenation tower 400. The third reboiler 430 is used to heat the mixture of silanium and residual hydrogen to evaporate it, and the third condenser 440 is used to liquefy the silanium gas into a liquid state and reflux it to the bottom of the atmospheric dehydrogenation tower 400. The atmospheric dehydrogenation tower 400 further removes the residual hydrogen from the silanium through distillation, and the silanium liquid is discharged through the third drain pipe 420. The dehydrogenation process and effect of the atmospheric dehydrogenation tower 400 have been described above and will not be repeated.
[0032] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0033] Of course, this utility model is not limited to the above-described embodiments. Those skilled in the art can make equivalent modifications or substitutions without departing from the spirit of this utility model. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.
Claims
1. A high purity silane purification apparatus, characterized by comprising: include: The inlet pipe (100) is used to input the raw material gas into the device. The raw material gas is a mixture of hydrogen, silane and silane. A medium-pressure dehydrogenation tower (200) is provided, with its inlet end connected to the inlet pipe (100). The medium-pressure dehydrogenation tower (200) is used to separate hydrogen from the raw material gas. A first exhaust pipe (210) is connected to the top of the medium-pressure dehydrogenation tower (200), and a first liquid drain pipe (220) is connected to the bottom of the medium-pressure dehydrogenation tower (200). The first exhaust pipe (210) is used to discharge the separated hydrogen, and the first liquid drain pipe (220) is used to discharge the remaining mixed liquid. A silane removal tower (300) is provided, wherein the inlet end of the silane removal tower (300) is connected to the first drain pipe (220), the silane removal tower (300) is used to separate silane from the mixed liquid, the top of the silane removal tower (300) is connected to a second exhaust pipe (310), the second exhaust pipe (310) is used to discharge silane from the mixed liquid, and the bottom of the silane removal tower (300) is connected to a second drain pipe (320), the second drain pipe (320) is used to discharge the separated silane; An atmospheric dehydrogenation tower (400) is provided with its inlet end connected to a second exhaust pipe (310). The atmospheric dehydrogenation tower (400) is used to separate the hydrogen gas remaining in the silane gas. A third exhaust pipe (410) is provided at the top of the atmospheric dehydrogenation tower (400) to discharge the hydrogen gas remaining in the silane gas. A third drain pipe (420) is connected at the bottom of the atmospheric dehydrogenation tower (400) to discharge the silane gas.
2. The high purity silane purification apparatus according to claim 1, wherein It also includes a subcooler (500), the inlet of which is connected to the third drain pipe (420), and a fourth drain pipe (510) is connected to the subcooler (500). The subcooler (500) is used to further cool the liquid silane, and the fourth drain pipe (510) is used to discharge the cooled silane from the subcooler (500) and collect it.
3. The high purity silane purification apparatus of claim 1, wherein A vaporizer (600) is provided on the second drain pipe (320), the vaporizer (600) being used to vaporize the liquid silane in the second drain pipe (320).
4. The high purity silane purification apparatus of claim 1, wherein The medium-pressure dehydrogenation tower (200) is provided with a first reboiler (230) at the bottom and a first condenser (240) at the top. The first reboiler (230) is used to heat the mixed liquid, and the first condenser (240) is used to liquefy silane and silane gas into liquid and reflux them to the bottom of the medium-pressure dehydrogenation tower (200).
5. The high purity silane purification apparatus of claim 1, wherein The bottom of the silane removal tower (300) is provided with a second reboiler (330), and the top of the silane removal tower (300) is provided with a second condenser (340). The second reboiler (330) is used to heat the mixture of silane and silane to make it evaporate, and the second condenser (340) is used to liquefy the silane gas into a liquid state and make it flow back to the bottom of the silane removal tower (300).
6. The high purity silane purification apparatus of claim 1, wherein The atmospheric dehydrogenation tower (400) is equipped with a third reboiler (430) at the bottom and a third condenser (440) at the top. The third reboiler (430) is used to heat the mixture of silane and residual hydrogen to evaporate it, and the third condenser (440) is used to liquefy the silane gas into a liquid state and reflux it back to the bottom of the atmospheric dehydrogenation tower (400).