A suction nozzle assembly for use with a disc electrode chip

Abstract

The utility model relates to a kind of suction nozzle assemblies that can be used to adsorb disc electrode chip, including suction seat and at least three suction nozzles, suction hole is provided on the suction nozzle, the suction nozzle is installed on the suction seat, to make the suction hole be communicated to the suction seat;The suction nozzle assembly has a pair of concentric setting concentric circular ring line, the suction seat has a rotation axis line, the rotation axis line is the axis line of the concentric circular ring line, the suction seat is set around the rotation axis line rotation;Two concentric circular ring lines are respectively first concentric circular ring line and second concentric circular ring line, the suction hole is located between the first concentric circular ring line and the second concentric circular ring line, the first concentric circular ring line is coincided with the edge portion of at least three the suction hole simultaneously, the second concentric circular ring line is coincided with the edge portion of at least three the suction hole simultaneously.

Description

Technical Field

[0001] This utility model relates to the field of disc electrode chips, and in particular to a suction nozzle assembly that can be used to adsorb disc electrode chips. Background Technology

[0002] Vertical graphene, as a novel three-dimensional carbon material, has wide applications in chips for various physical and chemical sensors. These chips typically need to be mounted onto a PCB board using a pick-and-place machine, a process involving the transfer of the chip using a pick-and-place nozzle. In these chips, vertical graphene is grown on the substrate to form electrodes. However, due to the unique three-dimensional structure of vertical graphene, it is highly susceptible to contact damage on the substrate. Therefore, the pick-and-place nozzle must avoid the vertical graphene as much as possible during the chip adsorption process.

[0003] Among the many types of chips, there is a type called the disk electrode chip, which includes a substrate and multiple electrodes spaced apart on the substrate, one of which is a disk electrode. In this type of disk electrode chip, square areas are intentionally left on the left and right edges of the substrate for adsorption by a square suction nozzle.

[0004] When the disc electrode chips are in bulk, each chip is positioned at a different angle on the tray. Therefore, the square suction nozzle needs to be aligned with the square area at the edge of the substrate after being rotated by the motor at a certain angle before it can be used for adsorption. However, the motor's control precision over the rotation angle of the square suction nozzle is limited. In many cases, it is impossible to align the square suction nozzle well with the square area at the edge of the substrate. This causes the square suction nozzle to easily come into contact with the electrode, thereby damaging the upright graphene. Utility Model Content

[0005] Therefore, it is necessary to provide a nozzle assembly that can be used to adsorb the disk electrode chip, addressing the problem that the nozzle can easily come into contact with the electrodes on the disk electrode chip.

[0006] A suction nozzle assembly for adsorbing disc electrode chips includes an adsorption base and at least three suction nozzles, wherein each suction nozzle is provided with an adsorption hole and is mounted on the adsorption base such that the adsorption hole communicates with the adsorption base;

[0007] The suction nozzle assembly has a pair of concentric circular rings, and the suction seat has a rotation axis, which is the axis of the concentric circular rings. The suction seat is arranged to rotate around the rotation axis.

[0008] The two concentric rings are the first concentric ring and the second concentric ring, respectively. The adsorption hole is located between the first concentric ring and the second concentric ring. The first concentric ring coincides with the edge portion of at least three of the adsorption holes, and the second concentric ring coincides with the edge portion of at least three of the adsorption holes.

[0009] In some embodiments, the first concentric annular line coincides with the edge portions of all the adsorption pores, and / or, the second concentric annular line coincides with the edge portions of all the adsorption pores.

[0010] In some embodiments, the number of suction nozzles is three, the shape of the suction holes is a circle, and the three suction holes are respectively located at the three vertices of an equilateral triangle.

[0011] In some embodiments, the suction nozzle assembly further includes a rotating base on which the suction seat is rotatably disposed about the axis of rotation.

[0012] In some embodiments, the suction nozzle is further provided with an exhaust groove and an exhaust hole. The adsorption hole and the exhaust hole are respectively located at both ends of the exhaust groove. The exhaust hole is connected to the adsorption seat. In the direction from the exhaust hole to the adsorption hole, the cross-sectional area of ​​the exhaust groove first decreases and then remains unchanged.

[0013] In some embodiments, in the direction from the exhaust port to the adsorption port, the inner wall surface of the exhaust groove sequentially includes a frustum inner wall surface and a cylindrical inner wall surface.

[0014] In some embodiments, the adsorption seat is provided with an exhaust chamber, and the adsorption holes are connected in parallel to the exhaust chamber.

[0015] In some embodiments, the disk electrode chip includes a substrate and at least two electrodes spaced apart on the substrate, one of which is a circular electrode. The axis of rotation passes through the center of the circular electrode and is perpendicular to the circular electrode. All the adsorption holes are arranged around the periphery of the circular electrode and spaced apart from the electrode.

[0016] A suction nozzle assembly for adsorbing disc electrode chips includes a suction base and a suction nozzle, wherein the suction nozzle is provided with a suction hole and is mounted on the suction base so that the suction hole communicates with the suction base;

[0017] The suction nozzle assembly has a pair of concentric circular rings, and the suction seat has a rotation axis, which is the axis of the concentric circular rings. The suction seat is arranged to rotate around the rotation axis.

[0018] The two concentric rings are the first concentric ring and the second concentric ring, respectively. The adsorption hole is located between the first concentric ring and the second concentric ring. The adsorption hole extends circumferentially along the axis of rotation. Part of the edge of the first concentric ring coincides with the edge of the adsorption hole, and part of the edge of the second concentric ring coincides with the edge of the adsorption hole.

[0019] In some embodiments, the disk electrode chip includes a substrate and at least two electrodes spaced apart on the substrate, one of which is a circular electrode. The axis of rotation passes through the center of the circular electrode and is perpendicular to the circular electrode. All the adsorption holes are arranged around the periphery of the circular electrode and spaced apart from the electrode.

[0020] In some embodiments, the first concentric ring line is located inside the second concentric ring line;

[0021] The radial inner edge profile of the adsorption pore is an arc, so that the portion of the radial inner edge of the adsorption pore that coincides with the first concentric annular line is also an arc; and / or

[0022] The radial outer edge profile of the adsorption hole is an arc, so that the shape of the overlapping part of the radial outer edge of the adsorption hole and the second concentric annular line is an arc.

[0023] The beneficial effects of this utility model are as follows:

[0024] In the suction nozzle assembly provided by this utility model, the suction hole is confined between the first and second concentric annular lines. When adsorbing the disk electrode chip, the electrode between the first and second concentric annular lines is only a part of the disk electrode. Therefore, regardless of the deflection angle, the suction hole can avoid the remaining part of the disk electrode and other electrodes besides the disk electrode. Furthermore, by rotating the suction seat, the suction hole can avoid the portion of the disk electrode between the first and second concentric annular lines.

[0025] During the adsorption process of the disk electrode chip, since the electrode located between the first concentric ring line and the second concentric ring line is only a part of the disk electrode, in other words, there is almost no electrode between the first concentric ring line and the second concentric ring line, even if there is a certain deviation in the rotation angle of the adsorption seat, as long as the deviation is not too large, the adsorption hole will hardly come into contact with the disk electrode.

[0026] Therefore, compared with the prior art, the suction nozzle assembly of this utility model improves the avoidance effect of the suction hole on the electrode, and greatly reduces or avoids the damage of the suction nozzle to the electrode structure. Attached Figure Description

[0027] Figure 1 A schematic diagram of the result of the disk electrode chip in the prior art provided by this utility model;

[0028] Figure 2 A diagram showing the fit between the square suction nozzle and the disc electrode chip in an ideal working state in the prior art provided by this utility model;

[0029] Figure 3 A diagram showing the relationship between the square suction nozzle and the disc electrode chip in a non-ideal working state in the prior art provided for this utility model;

[0030] Figure 4 This is a schematic diagram of the main structure of the suction nozzle assembly in Embodiment 1 of this utility model;

[0031] Figure 5 This is a cross-sectional structural diagram of the suction nozzle in Embodiment 1 of this utility model;

[0032] Figure 6 This is a planar positional relationship diagram of the adsorption hole, the first concentric annulus, and the second concentric annulus in Embodiment 1 of this utility model;

[0033] Figure 7 This diagram illustrates the fit between the suction nozzle and the disc electrode chip under ideal working conditions in Embodiment 1 of this utility model.

[0034] Figure 8 This diagram illustrates the interaction between the suction nozzle and the disc electrode chip in a non-ideal working state in Embodiment 1 of this utility model.

[0035] Figure 9 This is a planar positional relationship diagram of the adsorption hole, the first concentric annulus, and the second concentric annulus in Embodiment 2 of this utility model;

[0036] Figure 10 This diagram illustrates the fit between the suction nozzle and the disc electrode chip under ideal working conditions in Embodiment 2 of this utility model.

[0037] Figure 11 This diagram illustrates the interaction between the suction nozzle and the disc electrode chip in a non-ideal working state in Embodiment 2 of this utility model.

[0038] Figure 12 This diagram illustrates the fit between the suction nozzle and the disc electrode chip in an ideal working state in Embodiment 3 of this utility model.

[0039] Figure 13 This diagram illustrates the interaction between the suction nozzle and the disc electrode chip in a non-ideal working state in Embodiment 3 of this utility model.

[0040] Figure label:

[0041] 1. Adsorption seat; 2. Nozzle; 21. Adsorption hole; 22. Exhaust groove; 221. Inner wall of frustum; 222. Inner wall of cylinder; 23. Exhaust hole; 3. Rotating seat; 101. First concentric ring line; 102. Second concentric ring line; 201. Substrate; 202. Circular electrode; 202a. Circular part; 202b. Straight part; 203. Auxiliary electrode; 204. First adsorption area; 205. Second adsorption area; 206. Square nozzle; 207. Annular clearance area. Detailed Implementation

[0042] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0043] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0044] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0045] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0046] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0047] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0048] Existing technology

[0049] like Figure 1 As shown, the disk electrode chip includes a substrate 201 and at least two electrodes, which are spaced apart on the substrate 201. One electrode is a circular electrode 202, and the other electrodes are auxiliary electrodes 203. A first adsorption region 204 is located near the left and right edges of the upper surface of the substrate 201. The first adsorption region 204 is generally rectangular and is spaced apart from any of the electrodes. However, it is worth noting that a large number of auxiliary electrodes 203 are usually distributed around the first adsorption region 204, and the spacing between the first adsorption region 204 and the auxiliary electrodes 203 is small.

[0050] like Figure 2As shown, in the prior art, the substrate 201 is typically adsorbed using two square suction nozzles 206. The shapes of these two square suction nozzles 206 are respectively matched with the shapes of the two first adsorption regions 204. These two square suction nozzles 206 are deflected on the substrate 201 under the control of a motor, thereby aligning and contacting the two first adsorption regions 204 respectively. Then, these two square suction nozzles 206 can adsorb the substrate 201 while avoiding the electrodes, preventing the square suction nozzles 206 from damaging the electrodes of the upright graphene material.

[0051] like Figure 1 and Figure 2 As shown, in some cases, a second adsorption area 205 can be further left on the upper surface of the substrate 201 near the edge. The second adsorption area 205 can be adsorbed by a third square suction nozzle 206 that is adapted to the shape of the second adsorption area 205. By increasing the number of adsorption points on the substrate 201, the stability of the substrate 201 when adsorbed is improved.

[0052] The above-described working mode of the square suction nozzle 206 represents an ideal working state.

[0053] It is worth noting that, such as Figure 3 As shown, under real-world non-ideal working conditions, the deflection control precision of the motor on the square suction nozzle 206 is insufficient. Therefore, in most cases, the square suction nozzle 206 is difficult to align precisely with the first adsorption area 204 and the second adsorption area 205. In addition, the auxiliary electrodes 203 are densely distributed, and even a slight deviation in the deflection angle of the square suction nozzle 206 will cause it to come into contact with the auxiliary electrodes 203, resulting in damage to the auxiliary electrodes 203.

[0054] Of particular note is that, due to the additional second adsorption area 205, the number of square suction nozzles 206 has increased from two to three. The deflection of the three square suction nozzles 206 is synchronously controlled by the same motor. Therefore, in a non-ideal situation, all three square suction nozzles 206 will come into contact with the auxiliary electrode 203. In other words, increasing the number of square suction nozzles 206 not only fails to improve the stability of the substrate 201 when it is adsorbed, but also causes further damage to the auxiliary electrode 203.

[0055] Example 1:

[0056] like Figure 4 As shown, this embodiment provides a suction nozzle assembly that can be used to adsorb disc electrode chips based on the problems existing in the prior art, including an adsorption seat 1, a rotating seat 3 and at least three suction nozzles 2.

[0057] A rotating seat 3 is mounted on top of the adsorption seat 1. The adsorption seat 1 has a rotating axis that passes through it, allowing it to rotate on the rotating seat 3 around the axis. This rotation can be controlled by a motor. A suction nozzle 2 is mounted on the bottom of the adsorption seat 1. The bottom of the nozzle 2 has an adsorption hole 21 that connects to the adsorption seat 1. The adsorption seat 1 can evacuate air from the nozzle 2, creating a negative pressure at the adsorption hole 21. Since the rotating axis does not pass through the adsorption hole 21, the adsorption hole 21 revolves around the axis as the adsorption seat 1 rotates.

[0058] like Figure 6 As shown, the suction nozzle assembly in this embodiment has a pair of concentrically arranged concentric rings. It is worth noting that the concentric rings are not solid structures. Specifically, the two concentric rings are a first concentric ring 101 and a second concentric ring 102, with the first concentric ring 101 located inside the second concentric ring 102.

[0059] The adsorption hole 21 is located between the first concentric annular line 101 and the second concentric annular line 102, and the adsorption hole 21, the first concentric annular line 101, and the second concentric annular line 102 are located in the same plane. In this embodiment, the axis of rotation is the axis of the concentric annular line, so the adsorption hole 21 will not detach from the space between the first concentric annular line 101 and the second concentric annular line 102 when it revolves around the axis of rotation.

[0060] In this embodiment, the first concentric ring line 101 needs to coincide with the edge portions of at least three adsorption holes 21 simultaneously, and the second concentric ring line 102 also needs to coincide with the edge portions of at least three adsorption holes 21 simultaneously. Thus, the radii of the first and second concentric ring lines 101 can be determined through the adsorption holes 21.

[0061] For example, in this embodiment, the adsorption holes 21 can be circular holes, wherein at least three adsorption holes 21 are externally tangent to the first concentric annular line 101, and at least three adsorption holes 21 are internally tangent to the second concentric annular line 102. In this way, the radii of the first concentric annular line 101 and the second concentric annular line 102 can be finally determined by the size, shape and position of each adsorption hole 21 on the adsorption seat 1.

[0062] As an example, this embodiment has three suction nozzles 2. Therefore, all three suction holes 21 are externally tangent to the first concentric annular line 101, and all three suction holes 21 are internally tangent to the second concentric annular line 102. In other words, in this embodiment, the first concentric annular line 101 coincides with the edge portion of all suction holes 21, and the second concentric annular line 102 also coincides with the edge portion of all suction holes 21.

[0063] Therefore, by changing the number, distribution, and size of the adsorption pores 21, the radii of the first concentric annulus 101 and the second concentric annulus 102 can be adjusted.

[0064] like Figure 7 As shown, the disk electrode chip in this embodiment includes a substrate 201 and at least two electrodes, which are spaced apart on the substrate 201. One of the electrodes is a circular electrode 202, and the other electrodes are auxiliary electrodes 203.

[0065] The circular electrode 202 further includes a circular portion 202a and a straight portion 202b. The circular portion 202a is generally located in the middle of the upper surface of the substrate 201, and the two ends of the straight portion 202b are located at the edges of the circular portion 202a and the upper surface of the substrate 201, respectively. It can be understood that the circular portion 202a and the straight portion 202b are disposed at intervals on all auxiliary electrodes 203.

[0066] Therefore, it can be seen that the structure of the disk electrode chip in this embodiment is completely consistent with that of the disk electrode chip in the prior art.

[0067] Based on the existing structural features of the circular portion 202a and the straight portion 202b, a ring-shaped clearance area 207 can be defined around the periphery of the circular portion 202a. The ring-shaped clearance area 207 is a standard annular region, that is, the outer edge and the inner edge of the ring-shaped clearance area 207 are both standard circles. There will only be a part of the straight portion 202b in the ring-shaped clearance area 207, and there will be no circular portion 202a and auxiliary electrode 203. At the same time, the ring-shaped clearance area 207 is also concentrically arranged with the circular portion 202a.

[0068] When dividing the annular clearance area 207, the inner and outer diameters of the annular clearance area 207 can vary within a certain range, meaning that the division method of the annular clearance area 207 is not unique. Specifically, the minimum inner diameter of the annular clearance area 207 is the diameter of the circular portion 202a, and the outer diameter of the annular clearance area 207 is larger than the inner diameter. When the outer diameter of the annular clearance area 207 reaches its maximum value, the outer edge of the annular clearance area 207 is tangent to the auxiliary electrode 203, but the auxiliary electrode 203 will not fall inside the annular clearance area 207.

[0069] In this embodiment, by designing the number, size, and distribution of the adsorption holes 21, the diameter of the first concentric annular line 101 matches the inner diameter of the annular clearance area 207, while the diameter of the second concentric annular line 102 matches the outer diameter of the annular clearance area 207.

[0070] In this embodiment, before adsorbing the disc electrode chip, the suction nozzle assembly is first moved so that the rotation axis of the adsorption seat 1 passes through the center of the circular electrode 202 (specifically, the center of the circular portion 202a). At the same time, the rotation axis of the adsorption seat 1 is perpendicular to the circular electrode 202 and the substrate 201. This allows the first concentric ring line 101 to coincide with the inner edge of the annular clearance area 207, and the second concentric ring line 102 to coincide with the outer edge of the annular clearance area 207. As a result, the positions of all the adsorption holes 21 are confined within the annular clearance area 207, and all the adsorption holes 21 are arranged around the periphery of the circular portion 202a. Thus, all the adsorption holes 21 can avoid the circular portion 202a and all the auxiliary electrodes 203. Then, by controlling all the adsorption holes 21 to revolve synchronously around the axis through the motor, all the adsorption holes 21 further avoid the straight part 202b, so that all the adsorption holes 21 can adsorb the substrate 201 in the annular avoidance area 207 while maintaining a distance from the electrode.

[0071] The above process also represents the ideal working state of nozzle 2. For example... Figure 8 As shown, under the non-ideal working condition of the suction nozzle 2, the motor's control precision for the rotation of the suction hole 21 is insufficient, resulting in the deflection angle of the suction hole 21 being different from that of the nozzle. Figure 7 A certain deviation occurred. However, since the electrode present in the annular avoidance area 207 is only a part of the straight portion 202b, even if the deflection angle of the adsorption hole 21 has a certain deviation, it is difficult for the adsorption hole 21 to make contact with the straight portion 202b. In other words, under non-ideal working conditions, when the adsorption hole 21 adsorbs the substrate 201, it can still avoid all electrodes with a very high probability.

[0072] It is easy to understand that, compared with the prior art, this application can still make the suction nozzle 2 avoid all electrodes with a relatively high probability even when there is a certain deviation in the deflection angle of the motor-controlled suction nozzle 2. On the basis of satisfying the suction nozzle 2's avoidance effect on all electrodes, the number of adsorption points of the suction nozzle assembly on the substrate 201 can be controlled to be more than three, which greatly increases the adsorption stability of the suction nozzle assembly on the substrate 201.

[0073] Preferably, in this embodiment, the three adsorption holes 21 are located at the three vertices of an equilateral triangle. This arrangement ensures that the nozzle assembly can achieve relatively stable adsorption of the substrate 201 regardless of whether it is in an ideal working state. Furthermore, this arrangement allows for sufficient gaps between adjacent adsorption holes 21. Figure 7 For example, under ideal operating conditions, both adsorption holes 21 adjacent to the straight section 202b maintain a large distance from the straight section 202b. Based on this large distance, see further... Figure 8Under non-ideal working conditions, even if the deflection angle error of the adsorption hole 21 is large, it is still difficult for the adsorption hole 21 to contact the straight part 202b. In other words, the design of having the three adsorption holes 21 located at the three vertices of an equilateral triangle can appropriately increase the allowable deflection angle error of the adsorption holes 21.

[0074] It is easy to understand that the larger the radial width of the annular clearance region 207, the larger the size of the adsorption hole 21 that can be accommodated. Correspondingly, the adsorption area of ​​a single adsorption hole 21 on the substrate 201 is also larger, and the adsorption stability of the adsorption hole 21 on the substrate 201 is higher. Therefore, as a preferred embodiment, when dividing the annular clearance region 207, the inner edge of the annular clearance region 207 can be made to coincide with the edge of the circular portion 202a, and the outer edge of the annular clearance region 207 can be tangent to the auxiliary electrode 203, thereby maximizing the radial width of the annular clearance region 207.

[0075] Based on the above working principle, this embodiment further provides a design method for a suction nozzle assembly, which specifically includes the following steps:

[0076] Step S1: Obtain the shape, size and spatial distribution information of the circular electrode 202 and auxiliary electrode 203 in the disc electrode chip targeted by the suction nozzle assembly, and then divide the circumference of the circular part 202a into an annular clearance area 207 with the largest possible radial width.

[0077] Step S2: Obtain the inner and outer diameters of the divided annular clearance area 207, and then determine the diameters of the first concentric annular line 101 and the second concentric annular line 102;

[0078] Step S3: Based on the diameters of the first concentric ring line 101 and the second concentric ring line 102, design the shape, size, and distribution of all adsorption holes 21 so that all adsorption holes 21 are located between the first concentric ring line 101 and the second concentric ring line 102, the first concentric ring line 101 coincides with the edge portion of at least three adsorption holes 21, and the second concentric ring line 102 coincides with the edge portion of at least three adsorption holes 21.

[0079] like Figure 5 As shown, the suction nozzle 2 is also provided with an exhaust groove 22 and an exhaust hole 23. The adsorption hole 21 and the exhaust hole 23 are located at both ends of the exhaust groove 22, and the adsorption hole 21 is connected to the adsorption seat 1 through the exhaust groove 22 and the exhaust hole 23 in sequence.

[0080] Preferably, in the direction from the vent 23 to the adsorption hole 21, the cross-sectional area of ​​the vent groove 22 first decreases and then remains constant. For example, in the direction from the vent 23 to the adsorption hole 21, the inner wall surface of the vent groove 22 sequentially includes a frustum inner wall surface 221 and a cylindrical inner wall surface 222, with the vent 23 located at the upper end of the frustum inner wall surface 221 and the adsorption hole 21 located at the lower end of the cylindrical inner wall surface 222.

[0081] As the air flows from the exhaust groove 22 to the adsorption seat 1, the cross-sectional area of ​​the exhaust hole 23 is large, the air velocity is low, and the pressure is high. Conversely, the cross-sectional area of ​​the exhaust groove 22 at the junction of the inner wall surface 221 of the frustum and the inner wall surface 222 of the cylinder is small, resulting in a high air velocity and low pressure. Furthermore, since the cross-sectional area of ​​the exhaust groove 22 at the inner wall surface 222 of the cylinder is fixed, the pressure at the junction of the exhaust groove 22 at the junction of the inner wall surface 221 of the frustum and the inner wall surface 222 of the cylinder is approximately equal to the pressure at the adsorption hole 21. In other words, a negative pressure environment can be better formed at the adsorption hole 21, thereby adsorbing the substrate 201.

[0082] In the direction from the exhaust port 23 to the exhaust groove 22 located at the junction of the inner wall surface 221 of the frustum and the inner wall surface 222 of the cylinder, the pressure continuously decreases. Therefore, the pressure at the junction of the inner wall surface 221 of the frustum and the inner wall surface 222 of the cylinder is relatively unstable. The portion of the exhaust groove 22 at the inner wall surface 222 of the cylinder can stabilize the airflow, thereby keeping the air pressure at the adsorption port 21 relatively stable at a low level, thus creating a more stable negative pressure environment.

[0083] Preferably, in this embodiment, an exhaust chamber is provided in the adsorption seat 1, and all adsorption holes 21 are connected in parallel to the exhaust chamber. By evacuating the exhaust chamber, the air pressure of all adsorption holes 21 can be reduced at the same time, so that all adsorption holes 21 can adsorb the substrate 201 at the same time, thereby improving the adsorption efficiency of the nozzle assembly on the disc electrode chip.

[0084] Example 2:

[0085] This embodiment also provides a suction nozzle assembly that can be used to adsorb disc electrode chips, including a suction seat 1, a suction nozzle 2, and a rotating seat 3.

[0086] A rotating seat 3 is mounted on top of the adsorption seat 1. The adsorption seat 1 has a rotating axis that passes through it, allowing it to rotate on the rotating seat 3 around the axis. This rotation can be controlled by a motor. A suction nozzle 2 is mounted on the bottom of the adsorption seat 1. The bottom of the nozzle 2 has an adsorption hole 21 that connects to the adsorption seat 1. The adsorption seat 1 can evacuate air from the nozzle 2, creating a negative pressure at the adsorption hole 21. Since the rotating axis does not pass through the adsorption hole 21, the adsorption hole 21 revolves around the axis as the adsorption seat 1 rotates.

[0087] like Figure 9 As shown, the suction nozzle assembly in this embodiment has a pair of concentrically arranged concentric rings. It is worth noting that the concentric rings are not solid structures. Specifically, the two concentric rings are a first concentric ring 101 and a second concentric ring 102, with the first concentric ring 101 located inside the second concentric ring 102.

[0088] The adsorption hole 21 is located between the first concentric annular line 101 and the second concentric annular line 102, and the adsorption hole 21, the first concentric annular line 101, and the second concentric annular line 102 are located in the same plane. In this embodiment, the axis of rotation is the axis of the concentric annular line, so the adsorption hole 21 will not detach from the space between the first concentric annular line 101 and the second concentric annular line 102 when it revolves around the axis of rotation.

[0089] Unlike Embodiment 1, in this embodiment, the number of suction nozzles 2 can be one, two, or more than three, and the corresponding number of suction holes 21 can also be one, two, or more than three. Furthermore, the suction holes 21 are arc-shaped holes, extending circumferentially along the axis of rotation. The radially inner edge of the suction hole 21 partially coincides with the first concentric ring line 101, and the radially outer edge of the suction hole 21 partially coincides with the second concentric ring line 102. With this configuration, the diameters of the first and second concentric ring lines 101 can be determined by the edges of the suction holes 21.

[0090] For example, in this embodiment, there are two adsorption holes 21, and the two adsorption holes 21 are symmetrical about the center of the first concentric annulus 101 and the second concentric annulus 102.

[0091] Preferably, in this embodiment, the radial inner edge profile of the adsorption hole 21 is an arc, and the diameter of the arc is the same as the diameter of the first concentric annular line 101. Therefore, the shape of the overlapping part of the radial inner edge of the adsorption hole 21 and the first concentric annular line 101 is an arc, which can increase the overlap length of the radial inner edge of the adsorption hole 21 and the first concentric annular line 101.

[0092] Preferably, in this embodiment, the radial outer edge profile of the adsorption hole 21 is an arc, and the diameter of the arc is the same as the diameter of the second concentric annular line 102. Therefore, the shape of the overlapping part of the radial outer edge of the adsorption hole 21 and the second concentric annular line 102 is an arc, which can increase the overlap length of the radial outer edge of the adsorption hole 21 and the second concentric annular line 102.

[0093] This design maximizes the size of the adsorption pore 21.

[0094] The specific shape, size, specifications, and other parameters of the disc electrode chip in this embodiment are consistent with those in Embodiment 1 and the prior art, so they will not be described again in this embodiment.

[0095] Similarly, in this embodiment, by designing the number, size, and distribution of the adsorption holes 21, the diameter of the first concentric annular line 101 matches the inner diameter of the annular clearance area 207, while the diameter of the second concentric annular line 102 matches the outer diameter of the annular clearance area 207.

[0096] like Figure 10 As shown, in this embodiment, before adsorbing the disc electrode chip, the suction nozzle assembly is first moved so that the rotation axis of the adsorption seat 1 passes through the center of the circular electrode 202 (specifically, the center of the circular portion 202a). At the same time, the rotation axis of the adsorption seat 1 is perpendicular to the circular electrode 202 and the substrate 201. This allows the first concentric ring line 101 to coincide with the inner edge of the annular clearance area 207, and the second concentric ring line 102 to coincide with the outer edge of the annular clearance area 207. Thus, the positions of all the adsorption holes 21 are confined within the annular clearance area 207, and all the adsorption holes 21 are arranged around the periphery of the circular portion 202a. Therefore, all the adsorption holes 21 can avoid the circular portion 202a and all the auxiliary electrodes 203. Then, by controlling all the adsorption holes 21 to revolve synchronously around the axis through the motor, all the adsorption holes 21 further avoid the straight part 202b, so that all the adsorption holes 21 can adsorb the substrate 201 in the annular avoidance area 207 while maintaining a distance from the electrode.

[0097] The above process also represents the ideal working state of nozzle 2. For example... Figure 11 As shown, under the non-ideal working condition of the suction nozzle 2, the motor's control precision for the rotation of the suction hole 21 is insufficient, resulting in the deflection angle of the suction hole 21 being different from that of the nozzle. Figure 10 A certain deviation occurred. However, since the electrode present in the annular avoidance area 207 is only a part of the straight portion 202b, even if the deflection angle of the adsorption hole 21 has a certain deviation, it is difficult for the adsorption hole 21 to make contact with the straight portion 202b. In other words, under non-ideal working conditions, when the adsorption hole 21 adsorbs the substrate 201, it can still avoid all electrodes with a very high probability.

[0098] Based on the above working principle, this embodiment further provides a design method for a suction nozzle assembly, which specifically includes the following steps:

[0099] Step S1: Obtain the shape, size and spatial distribution information of the circular electrode 202 and auxiliary electrode 203 in the disc electrode chip targeted by the suction nozzle assembly, and then divide the circumference of the circular part 202a into an annular clearance area 207 with the largest possible radial width.

[0100] Step S2: Obtain the inner and outer diameters of the divided annular clearance area 207, and then determine the diameters of the first concentric annular line 101 and the second concentric annular line 102;

[0101] Step S3: Based on the diameters of the first concentric ring line 101 and the second concentric ring line 102, design the shape, size and distribution of all adsorption holes 21 so that all adsorption holes 21 are located between the first concentric ring line 101 and the second concentric ring line 102, the radial inner edge of the adsorption hole 21 partially coincides with the first concentric ring line 101, and the radial outer edge of the adsorption hole 21 partially coincides with the second concentric ring line 102.

[0102] Example 3:

[0103] like Figure 12 As shown, the difference between this embodiment and embodiment 2 is that there are three adsorption holes 21, and the three adsorption holes 21 are arranged in a ring array with the center of the first concentric ring line 101 as the center.

[0104] like Figure 13 As shown, under the non-ideal working condition of the suction nozzle 2, the motor's control precision for the rotation of the suction hole 21 is insufficient, resulting in the deflection angle of the suction hole 21 being different from that of the nozzle. Figure 12 A certain deviation occurred. However, since the electrode present in the annular avoidance area 207 is only a part of the straight portion 202b, even if the deflection angle of the adsorption hole 21 has a certain deviation, it is difficult for the adsorption hole 21 to make contact with the straight portion 202b. In other words, under non-ideal working conditions, when the adsorption hole 21 adsorbs the substrate 201, it can still avoid all electrodes with a very high probability.

[0105] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0106] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A suction nozzle assembly for adsorbing disc electrode chips, characterized in that, It includes an adsorption base (1) and at least three suction nozzles (2), each suction nozzle (2) having an adsorption hole (21), and the suction nozzle (2) is mounted on the adsorption base (1) so that the adsorption hole (21) is connected to the adsorption base (1). The suction nozzle assembly has a pair of concentric circular rings, and the suction seat (1) has a rotation axis, which is the axis of the concentric circular rings. The suction seat (1) is arranged to rotate around the rotation axis. The two concentric ring lines are a first concentric ring line (101) and a second concentric ring line (102), respectively. The adsorption hole (21) is located between the first concentric ring line (101) and the second concentric ring line (102). The first concentric ring line (101) coincides with the edge portion of at least three of the adsorption holes (21), and the second concentric ring line (102) coincides with the edge portion of at least three of the adsorption holes (21).

2. The suction nozzle assembly for adsorbing disk electrode chips according to claim 1, characterized in that, The first concentric ring line (101) coincides with the edge portion of all the adsorption holes (21), and / or the second concentric ring line (102) coincides with the edge portion of all the adsorption holes (21).

3. The suction nozzle assembly for adsorbing disk electrode chips according to claim 1, characterized in that, The number of suction nozzles (2) is three, and the shape of the suction hole (21) is a round hole. The three suction holes (21) are located at the three vertices of an equilateral triangle.

4. The suction nozzle assembly for adsorbing disk electrode chips according to claim 1, characterized in that, The suction nozzle assembly also includes a rotating seat (3), and the suction seat (1) is arranged to rotate around the axis of rotation on the rotating seat (3).

5. The suction nozzle assembly for adsorbing disk electrode chips according to claim 1, characterized in that, The suction nozzle (2) is also provided with an exhaust groove (22) and an exhaust hole (23). The adsorption hole (21) and the exhaust hole (23) are located at the two ends of the exhaust groove (22), respectively. The exhaust hole (23) is connected to the adsorption seat (1). In the direction from the exhaust hole (23) to the adsorption hole (21), the cross-sectional area of ​​the exhaust groove (22) first decreases and then remains unchanged.

6. The suction nozzle assembly for adsorbing disk electrode chips according to claim 5, characterized in that, In the direction from the exhaust hole (23) to the adsorption hole (21), the inner wall surface of the exhaust groove (22) includes a frustum inner wall surface (221) and a cylindrical inner wall surface (222).

7. The suction nozzle assembly for adsorbing disk electrode chips according to claim 1, characterized in that, An exhaust chamber is provided inside the adsorption seat (1), and the adsorption hole (21) is connected in parallel to the exhaust chamber.

8. The suction nozzle assembly for adsorbing disk electrode chips according to any one of claims 1-7, characterized in that, The disk electrode chip includes a substrate (201) and at least two electrodes spaced apart on the substrate (201), one of which is a circular electrode (202). The axis of rotation passes through the center of the circular electrode (202) and is perpendicular to the circular electrode (202). All the adsorption holes (21) are arranged around the periphery of the circular electrode (202) and spaced apart from the electrode.

9. A suction nozzle assembly for adsorbing disc electrode chips, characterized in that, It includes an adsorption base (1) and a suction nozzle (2). The suction nozzle (2) is provided with an adsorption hole (21). The suction nozzle (2) is installed on the adsorption base (1) so that the adsorption hole (21) is connected to the adsorption base (1). The suction nozzle assembly has a pair of concentric circular rings, and the suction seat (1) has a rotation axis, which is the axis of the concentric circular rings. The suction seat (1) is arranged to rotate around the rotation axis. The two concentric rings are a first concentric ring (101) and a second concentric ring (102), respectively. The adsorption hole (21) is located between the first concentric ring (101) and the second concentric ring (102). The adsorption hole (21) extends circumferentially along the axis of rotation. Part of the edges of the first concentric ring (101) and the adsorption hole (21) coincide, and part of the edges of the second concentric ring (102) and the adsorption hole (21) coincide.

10. The suction nozzle assembly for adsorbing disk electrode chips according to claim 9, characterized in that, The disk electrode chip includes a substrate (201) and at least two electrodes spaced apart on the substrate (201), one of which is a circular electrode (202). The axis of rotation passes through the center of the circular electrode (202) and is perpendicular to the circular electrode (202). All the adsorption holes (21) are arranged around the periphery of the circular electrode (202) and spaced apart from the electrode.

11. The suction nozzle assembly for adsorbing disk electrode chips according to claim 9, characterized in that, The first concentric ring (101) is located inside the second concentric ring (102); The radial inner edge profile of the adsorption hole (21) is an arc, so that the shape of the portion where the radial inner edge of the adsorption hole (21) coincides with the first concentric annular line (101) is an arc; and / or The radial outer edge profile of the adsorption hole (21) is an arc, so that the shape of the overlapping part of the radial outer edge of the adsorption hole (21) and the second concentric annular line (102) is an arc.

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