Vacuum coating device with uniform coating

Abstract

The utility model relates to vacuum coating technology field, and disclose a kind of vacuum coating device of uniform coating, it includes: coating box, the support mechanism is arranged in coating box inside.This vacuum coating device of uniform coating, by utilizing frame body inboard hook hang connection coating workpiece, then with knob screwing screw rod, make the blocking rod of screw rod end portion block hook opening, coating workpiece can be avoided in operation process suddenly falling, start drive motor, make carousel rotation by center shaft transmission, by annular gear, transmission gear, the linkage of auxiliary shaft, and frame body and auxiliary shaft fixed connection, frame body is fixedly connected between through fixed rod, realize frame body drive coating workpiece rotation together, complete revolution and rotation composite motion, so coating workpiece carries out revolution and rotation composite motion, can reduce the line speed difference of each point on product surface relative to evaporation source, and then improve the film thickness uniformity of coating.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a vacuum coating device for uniform coating. Background Technology

[0002] Vacuum coating is a technique that uses physical or chemical methods to deposit metallic or non-metallic materials onto the surface of a substrate to form a thin film under high vacuum conditions.

[0003] In traditional vacuum coating equipment, if the workpiece to be coated rotates in only one direction, such as only revolution or only rotation, the relative position and linear velocity of each point on the workpiece surface and the evaporation source will be significantly different, resulting in uneven film thickness. This can easily lead to situations such as thicker edges, thinner centers, or insufficient local deposition, which affects the coating effect. To address this issue, we propose a vacuum coating equipment for uniform coating to solve the above problems. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a vacuum coating apparatus for achieving uniform coating, thus solving the problems mentioned in the background.

[0005] This utility model provides the following technical solution: a vacuum coating device for uniform coating, comprising: a coating chamber, wherein a support mechanism is provided inside the coating chamber, the support mechanism includes a central shaft rotatably disposed on the inner wall of the coating chamber, a node seat fixedly installed on the side wall of the inner cavity of the coating chamber, and a drive motor fixedly installed on the top surface of the coating chamber; a turntable is fixedly installed at the end of the central shaft; a ring gear is fixedly connected to the side of the node seat; an auxiliary shaft is rotatably connected to the side of the turntable; a transmission gear meshing with the ring gear is fixedly installed on the outer surface of the auxiliary shaft; a hanging mechanism is provided at the end of the auxiliary shaft, the hanging mechanism includes a frame fixedly connected to the auxiliary shaft; a hook for hanging the coated workpiece is fixedly installed on the inner side of the frame; a screw is threadedly connected to the side wall of the frame; a knob and a screw are fixedly installed at both ends of the screw; a fixing rod is fixedly installed on the side of the frame; and the frames are fixedly connected to each other by the fixing rod.

[0006] Preferably, there are two turntables, and a connecting rod is provided between the two turntables, and the two turntables are also fixedly connected by the connecting rod.

[0007] Preferably, one of the turntables is located on the top surface of the coating chamber, and the other turntable is located on the bottom surface of the coating chamber. The turntable located on the top surface of the coating chamber is fixedly connected to the output shaft of the drive motor via a central shaft.

[0008] Preferably, there is a gap between the connecting rod and the transmission gear, and there are a total of four connecting rods.

[0009] Preferably, the stop bar is located at the end of the screw adjacent to the hook, and when the screw is tightened, the stop bar is located at the opening of the hook.

[0010] Preferably, the fixing rod is located at the center of the frame, and the centerline of the fixing rod coincides with the centerline of the auxiliary shaft.

[0011] Preferably, the surface of the ring gear is fixedly provided with a boss that mates with the node seat, and the boss has a threaded hole for easy installation.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] This vacuum coating device for uniform coating uses hooks inside the frame to hang the workpiece for coating. Tightening the screw with a knob causes a stop bar at the screw end to block the hook opening, preventing the workpiece from falling during operation. Starting the drive motor drives the turntable via the central shaft. Through the linkage of the ring gear, transmission gear, and auxiliary shaft, and the fixed connection between the frame and the auxiliary shaft, as well as the fixed connection between the frames via fixing rods, the frame drives the workpiece to rotate together, completing a composite motion of revolution and rotation. Therefore, this composite motion of revolution and rotation of the workpiece reduces the difference in linear velocity between different points on the product surface relative to the evaporation source, thereby improving the uniformity of the coating thickness. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the internal structure of the coating box of this utility model;

[0015] Figure 2 This is an isometric drawing of the support mechanism structure of this utility model;

[0016] Figure 3 This is a schematic diagram of the turntable structure of this utility model;

[0017] Figure 4 This is a schematic diagram of the frame structure of this utility model;

[0018] Figure 5 This is a top view of the support mechanism structure of this utility model.

[0019] In the diagram: 1. Coating box; 2. Support mechanism; 21. Node seat; 22. Turntable; 23. Central shaft; 24. Ring gear; 25. Transmission gear; 26. Auxiliary shaft; 27. Connecting rod; 28. Drive motor; 3. Hanging mechanism; 31. Frame; 32. Fixing rod; 33. Knob; 34. Screw; 35. Stop bar; 36. Hook. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figure 1-5 A vacuum coating apparatus for uniform coating includes: a coating chamber 1, a support mechanism 2 disposed inside the coating chamber 1, the support mechanism 2 including a central shaft 23 rotatably disposed on the inner wall of the coating chamber 1, a node seat 21 fixedly installed on the side wall of the inner cavity of the coating chamber 1, and a drive motor 28 fixedly installed on the top surface of the coating chamber 1. A turntable 22 is fixedly installed at the end of the central shaft 23, and a ring gear 24 is fixedly connected to the side of the node seat 21 as the drive source for rotation. 5 meshes with the ring gear 24. When the turntable 22 revolves, the transmission gear 25 rotates under the constraint of the ring gear 24, thereby driving the auxiliary shaft 26 to rotate, ensuring the synchronization of rotation and revolution, and high motion precision. The auxiliary shaft 26 is rotatably connected to the side of the turntable 22, and the transmission gear 25 that meshes with the ring gear 24 is fixedly installed on the outer surface of the auxiliary shaft 26. There are two turntables 22 in total, and a connecting rod 27 is set between the two turntables 22. The two turntables 22 are also connected by... The connecting rods 27 are fixedly connected to form a rigid structure with symmetrical upper and lower parts, which enhances the overall stability and avoids swaying or vibration caused by unilateral force. One turntable 22 is located on the top surface of the coating chamber 1, and the other turntable 22 is located on the bottom surface of the coating chamber 1. The turntable 22 located on the top surface of the coating chamber 1 is fixedly connected to the output shaft of the drive motor 28 through the central shaft 23. The drive motor 28 drives the central shaft 23 to rotate, providing a power source for the entire support mechanism 2, realizing the revolution of the turntable 22, and ensuring that the workpiece rotates along a fixed trajectory in the coating chamber 1. A gap is provided between the connecting rods 27 and the transmission gear 25 to prevent motion interference and ensure that the transmission gear 25 can rotate freely. There are four connecting rods 27 in total. The surface of the ring gear 24 is fixedly provided with a boss that cooperates with the node seat 21 to provide fixed support and ensure its position is stable. The boss has a threaded hole for easy installation. The threaded hole on the boss can also facilitate the installation and disassembly of the ring gear 24, improving the equipment maintenance efficiency.

[0022] The auxiliary shaft 26 is provided with a hanging mechanism 3 at its end. The hanging mechanism 3 includes a frame 31 fixedly connected to the auxiliary shaft 26. A hook 36 for hanging the workpiece for coating is fixedly installed on the inner side of the frame 31. A screw 34 is threadedly connected to the side wall of the frame 31. A knob 33 and a screw 34 are fixedly installed at both ends of the screw 34, respectively. A fixing rod 32 is fixedly installed on the side of the frame 31. The frames 31 are fixedly connected to each other through the fixing rod 32. Multiple frames 31 are connected through the fixing rod 32 to form a rigid structure. Overall, to ensure that all workpieces move synchronously, the stop bar 35 is located at the end adjacent to the screw 34 and the hook 36. When the screw 34 is tightened, the stop bar 35 is located at the opening of the hook 36, forming a physical block to prevent the workpiece from falling off due to centrifugal force or collision during rotation. The fixing rod 32 is located at the center of the frame 31, and the axis of the fixing rod 32 coincides with the axis of the auxiliary shaft 26, avoiding unbalanced movement or vibration due to eccentricity. In addition, the central symmetry design of the overall structure balances the centrifugal force during rotation and reduces equipment vibration.

[0023] Working principle: First, the workpiece to be coated is hung on the hook 36 inside the frame 31. Then, the screw 34 is tightened by the knob 33, so that the stop bar 35 at the end of the screw 34 blocks the opening of the hook 36, thus preventing the workpiece from falling suddenly. Then, the drive motor 28 is started, and the turntable 22 rotates synchronously under the transmission of the central shaft 23. The inner side of the ring gear 24 fixed inside the coating box 1 is meshed with the transmission gear 25. The auxiliary shaft 26 fixed at the center of the transmission gear 25 is connected to the rotating... The turntable 22 is rotatably connected, so after the turntable 22 rotates, the transmission gear 25 rotates synchronously, and the frame 31 is fixedly connected to the auxiliary shaft 26. The frames 31 are also fixedly connected to each other through the fixing rod 32. Thus, the frame 31 can drive the coated workpiece hanging inside it to rotate together. Then, the coating box 1 is started to perform coating, realizing the revolution and rotation of the coated workpiece. Through the compound motion, the difference in linear velocity of each point on the product surface relative to the evaporation source is reduced, so as to improve the uniformity of film thickness.

[0024] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum coating apparatus for uniform coating, characterized in that, include: A coating chamber (1) is provided with a support mechanism (2) inside the coating chamber (1). The support mechanism (2) includes a central shaft (23) rotatably disposed on the inner wall of the coating chamber (1), a node seat (21) fixedly installed on the side wall of the inner cavity of the coating chamber (1), and a drive motor (28) fixedly installed on the top surface of the coating chamber (1). A turntable (22) is fixedly installed at the end of the central shaft (23). A ring gear (24) is fixedly connected to the side of the node seat (21). An auxiliary shaft (26) is rotatably connected to the side of the turntable (22). A transmission gear (25) meshing with the ring gear (24) is fixedly installed on the outer surface of the auxiliary shaft (26). The auxiliary shaft (26) is provided with a hooking mechanism (3) at its end. The hooking mechanism (3) includes a frame (31) fixedly connected to the auxiliary shaft (26). A hook (36) for hanging the workpiece for coating is fixedly installed on the inner side of the frame (31). A screw (34) is threadedly connected to the side wall of the frame (31). A knob (33) and a screw (34) are fixedly installed at both ends of the screw (34). A fixing rod (32) is fixedly installed on the side of the frame (31). The frame (31) is fixedly connected to the frame (31) through the fixing rod (32).

2. The vacuum coating apparatus for uniform coating according to claim 1, characterized in that, There are two turntables (22), and a connecting rod (27) is provided between the two turntables (22), and the two turntables (22) are also fixedly connected by the connecting rod (27).

3. The vacuum coating apparatus for uniform coating according to claim 2, characterized in that, One of the turntables (22) is located on the top surface of the coating chamber (1), and the other turntable (22) is located on the bottom surface of the coating chamber (1). The turntable (22) located on the top surface of the coating chamber (1) is fixedly connected to the output shaft of the drive motor (28) through the central shaft (23).

4. The vacuum coating apparatus for uniform coating according to claim 2, characterized in that, There is a gap between the connecting rod (27) and the transmission gear (25), and there are four connecting rods (27) in total.

5. The vacuum coating apparatus for uniform coating according to claim 1, characterized in that, The stop bar (35) is located at the end of the screw (34) adjacent to the hook (36). When the screw (34) is tightened, the stop bar (35) is located at the opening of the hook (36).

6. The vacuum coating apparatus for uniform coating according to claim 1, characterized in that, The fixing rod (32) is located at the center of the frame (31), and the center line of the fixing rod (32) coincides with the center line of the auxiliary shaft (26).

7. The vacuum coating apparatus for uniform coating according to claim 1, characterized in that, The surface of the ring gear (24) is fixedly provided with a boss that mates with the node seat (21), and the boss has a threaded hole for easy installation.

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