Vertical furnace tube arrangement

Abstract

The utility model provides a kind of vertical furnace tube device, including furnace body;Cooling device is detachably connected with waste gas discharge port by flange kit;The cooling device includes curvedly extended waste gas cooling pipe, and cooling body is coated in the outside of waste gas cooling pipe;The path for cooling medium to flow is equipped in the cooling body, for the waste gas that passes through waste gas cooling pipe is cooled by indirect heat exchange.The utility model not only significantly improves the cooling efficiency and stability of high-temperature waste gas, but also is convenient for maintenance and cleaning through detachable connection structure, and the whole process uses indirect heat exchange mode to avoid secondary pollution, so that the temperature of waste gas can be effectively reduced before entering the waste gas treatment device (such as scrubbing tower), the evaporation and boiling of scrubbing liquid are avoided, the scrubbing efficiency is improved, and finally the waste gas treatment system can be safely and efficiently operated and the service life of the equipment is prolonged.

Description

Technical Field

[0001] This utility model relates to a vertical furnace tube device. Background Technology

[0002] Diffusion furnaces, operating at high temperatures (typically 600-1200℃), generate waste gas containing silanes, hydrogen chloride, and fluorides. This waste gas has an extremely high initial temperature, and direct treatment or discharge without cooling can cause multiple problems. Diffusion furnace waste gas is usually connected to a central waste gas treatment system. If the high-temperature waste gas directly enters the scrubbing tower of the central system, the scrubbing liquid (usually water or a chemical solution) will rapidly evaporate and boil, resulting in low efficiency, potential equipment damage, and even a dangerous pressure surge. Similarly, when using dry adsorption towers to treat waste gas, the internal adsorbents (such as activated carbon or specialized chemicals) typically have an upper operating temperature limit. Excessively high temperatures will reduce their adsorption efficiency, or even cause them to become ineffective or burn. Therefore, waste gas from diffusion processes needs to be cooled before entering the waste gas treatment system.

[0003] Existing exhaust gas cooling methods are divided into indirect cooling and direct cooling. Direct cooling involves spraying cooling water or introducing low-temperature inert gas into the exhaust gas, achieving rapid cooling through direct heat exchange. This method is highly efficient but generates wastewater containing pollutants, requiring additional treatment and increasing the burden on subsequent treatment processes. Indirect cooling is achieved through heat exchangers (such as shell-and-tube or plate heat exchangers). The exhaust gas and cooling water / air do not come into direct contact, preventing the dilution of exhaust gas components or the introduction of new impurities. However, due to the size limitations of existing heat exchangers, the cooling effect of existing indirect cooling methods is usually not ideal, making it difficult to achieve efficient cooling.

[0004] Therefore, how to achieve efficient cooling of high-temperature exhaust gas without introducing new pollutants has become an urgent problem to be solved in current vertical furnace tube equipment. Utility Model Content

[0005] This invention provides a vertical furnace tube device and construction method, which can effectively solve the above problems.

[0006] This utility model is implemented as follows:

[0007] A vertical furnace tube device, comprising a furnace body;

[0008] The cooling device is detachably connected to the exhaust port via a flange assembly;

[0009] The cooling device includes a curved exhaust gas cooling pipe and a cooling body covering the exterior of the exhaust gas cooling pipe; the cooling body has a path for the flow of cooling medium, which is used to cool the exhaust gas flowing through the exhaust gas cooling pipe through indirect heat exchange.

[0010] The beneficial effects of this utility model are:

[0011] (1) The present invention adopts a modular design of cooling device, wherein the curved and extended exhaust gas cooling pipe is combined with the external cooling body with cooling medium path, which maximizes the exhaust gas flow path and heat exchange area in a limited space. This not only significantly improves the cooling efficiency and stability of high temperature exhaust gas, but also facilitates maintenance and cleaning through the detachable connection structure. At the same time, the indirect heat exchange method is used throughout the process to avoid secondary pollution, ultimately ensuring that the exhaust gas treatment system can operate safely and efficiently and extend the service life of the equipment. Attached Figure Description

[0012] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0013] Figure 1 This is a cross-sectional view of the present invention.

[0014] Figure 2 This is a schematic diagram of the structure of the washing tower of this utility model.

[0015] Figure 3 This is a schematic diagram of the cooling device of this utility model.

[0016] Figure 4 This is a schematic diagram of the limiting tube of this utility model from another angle. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model.

[0018] In the description of this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0019] Reference Figure 1-4 As shown, a vertical furnace tube device includes a furnace body 10.

[0020] The cooling device 90 is detachably connected to the exhaust port 180 via a flange assembly; the flange assembly includes a second flange assembly 190 disposed at the exhaust port 180 and a first flange assembly 140 disposed at the inlet of the cooling device 90.

[0021] It also includes a washing tower 110, and the outlet of the cooling device 90 is connected to the washing tower 110 through a washing pipe 120. The washing pipe 120 is provided with a pipeline interface 130 for injecting the washing reaction medium.

[0022] The furnace body 10 includes a second base 70 for supporting the outer tube 20 and the inner tube 30, a lifting assembly 80 for lifting and lowering the first base 60 supporting the wafer 50, and a crystal boat 40. An exhaust port 180 is located on a limiting tube 170. The lifting assembly 80 has a raised position and a lowered position. When in the raised position, the first base 60 closes the bottom of the inner tube 30 to form a sealed reaction chamber. When in the lowered position, the crystal boat 40 is located outside the inner tube 30 for easy loading and unloading. The limiting tube 170 is also provided with an inlet 200 for introducing process gas and a gas injection tube 210 for introducing process gas into the inner tube 30.

[0023] Specifically, the outer tube 20, as the outer structure of the furnace body, is typically made of high-temperature resistant materials (such as quartz). Its top is a closed dome structure, while the bottom is open. The main function of the outer tube 20 is to support and position the heating components (such as resistance heating wires, not shown in the figure) surrounding it, forming a uniform and stable high-temperature environment cavity. Simultaneously, it structurally protects the more intricate inner tube 30, which constitutes the direct process reaction cavity. Reaction gases flow within this tube and chemically react with the wafer 50. This design, separating the reaction cavity (inner tube 30) from the heating cavity (the gap between the outer tube 20 and the inner tube 30), effectively reduces furnace wall contamination and improves the uniformity of process gas flow.

[0024] Furthermore, when the process begins, the lifting assembly 80 precisely raises the first base 60 and the crystal boat 40 until the upper surface of the first base 60 is level with and pressed against the upper surface of the second base 70. In this position, the first base 60 acts as the bottom cover of the inner tube 30, working together with the second base 70 to completely seal the bottom opening of the inner tube 30, thus forming a sealed high-temperature reaction chamber isolated from the outside environment. This sealed environment is crucial for the stable flow of process gases, temperature uniformity, and reaction consistency. When the process ends, the lifting assembly 80 drives the first base 60 and the crystal boat 40 to descend smoothly, completely removing the entire crystal boat 40 from the inner tube 30 and lowering it into the open space below the furnace. This position facilitates the loading and unloading of wafers by automated equipment or operators, achieving automation and batch processing of the process.

[0025] The limiting tube 170 is an integrated hub component for process gas input and process waste gas collection. The gas injection tube 210 extends upward from inside the limiting tube 170, with its outlet end passing through the second base 70 and extending into the bottom space of the inner tube 30. Its function is to inject the reaction gas entering from the inlet 200 into the bottom of the reaction chamber of the inner tube 30 in a directional and uniform manner, ensuring that the gas flows uniformly from bottom to top across the surface of the wafer 50. The waste gas discharge port 180 is located on the limiting tube 170 and is usually an opening opposite the inlet. During the process, the waste gas that has participated in the reaction and the unreacted residual gas flow downward under the push of the airflow, eventually collecting in the limiting tube 170 and being discharged through the waste gas discharge port 180. The exhaust gas here has an extremely high initial temperature (up to 600-1200℃) due to the high-temperature process, and contains corrosive and hazardous components such as silane, hydrogen chloride, and fluorides. To facilitate the subsequent connection of the cooling module, the exhaust outlet 180 integrates a second flange kit 190 to achieve a robust, sealed, and quick connection.

[0026] The cooling device 90 includes a curved exhaust gas cooling pipe 904 and a cooling body covering the exterior of the exhaust gas cooling pipe 904. The cooling body has an internal path for the flow of a cooling medium, used to cool the exhaust gas flowing through the exhaust gas cooling pipe 904 through indirect heat exchange. The cooling body has a split structure, including a first water-cooled plate 900 and a second water-cooled plate 902 that can be joined together. When joined, the first water-cooled plate 900 and the second water-cooled plate 902 form a chamber for accommodating the exhaust gas cooling pipe 904. The gap between the exhaust gas cooling pipe 904 and the first water-cooled plate 900 and the second water-cooled plate 902 is filled with a thermally conductive filler material, which is graphene. A water-cooled pipe 160 connected to a water cooling source is provided on the second water-cooled plate 902.

[0027] Specifically, this design transforms the cooling unit into an independent, quickly replaceable "filter." When the exhaust gas cooling pipe 904 requires cleaning due to long-term use, or when scale buildup inside the water-cooled plate requires maintenance, the entire cooling module can be taken offline for maintenance without interfering with the main structure of the reaction chamber. A spare module can then be immediately installed, significantly reducing equipment downtime and improving production efficiency and maintainability. Furthermore, the exhaust gas cooling pipe 904 is a three-dimensionally curved serpentine or S-shaped pipe. This design greatly increases the flow path length of the exhaust gas within the pipe. A longer path directly means extended heat exchange time between the exhaust gas and the cold wall surface in the high-temperature region. Compared to straight pipes, curved pipes have a larger external surface area for the same projected area, providing more "windows" for heat dissipation.

[0028] The inner sides of the split-type first water-cooling plate 900 and second water-cooling plate 902 are precision-machined to create symmetrical grooves that perfectly match the outer shape of the exhaust gas cooling pipe 904. When the first water-cooling plate 900 and second water-cooling plate 902 are assembled, these grooves together form a sealed chamber that tightly encloses the exhaust gas cooling pipe 904. This design allows the cooling effect of the cooling medium (water) to be applied to the outer wall of the exhaust gas cooling pipe 360° without any dead angles through the water-cooling plate. Furthermore, in this invention, all gaps between the exhaust gas cooling pipe 904 and the grooves of the first water-cooled plate 900 and the second water-cooled plate 902 are filled with highly thermally conductive materials, such as graphene thermal paste, thermal grease, or metal thermal pads. These materials can effectively expel air and establish efficient "thermal bridges" between solid interfaces. They have thermal conductivity far higher than that of air, which can significantly reduce or even eliminate contact thermal resistance, ensuring that the heat absorbed by the exhaust gas cooling pipe 904 can be transferred to the entire water-cooled plate almost without loss and quickly. At the same time, a water-cooled pipe 160 connected to an external cooling system is provided on the second water-cooled plate 902 (or the first water-cooled plate). Cooling water, as a medium, flows into the pre-fabricated flow channels inside the water-cooled plate through the water-cooled pipe 160 for forced circulation. When the water flows through the water-cooled plate, it absorbs its heat and then flows out carrying the heat to an external heat exchanger (such as a cooling tower or chiller) for cooling. After that, it circulates back again. This process is continuous, thereby providing a stable low-temperature boundary for the water-cooled plate. Thus, after the high-temperature exhaust gas enters the curved exhaust gas cooling pipe 904, its heat is conducted through the pipe wall → the heat is efficiently transferred to the water-cooled plate via the highly thermally conductive filling material → the circulating cooling water ultimately carries the heat away from the water-cooled plate. Ultimately, through "extended path + full coverage + interface optimization + continuous cooling," efficient, safe, and reliable cooling of the high-temperature exhaust gas is achieved, successfully reducing the exhaust gas temperature to a range that can be safely and efficiently treated by the downstream scrubbing tower 110 or adsorption unit.

[0029] It should be noted that the scrubbing tower 110 is the core equipment for back-end processing. It is typically a vertical tower-shaped container filled with packing material, swirl plates, or equipped with a spray system to greatly increase the gas-liquid contact area and reaction efficiency. After being treated by the efficient indirect cooling module, the waste gas, whose temperature has been significantly reduced (e.g., from several hundred degrees Celsius to near room temperature or the scrubbing tower's allowable operating temperature), first enters the scrubbing pipe 120. At the same time, a pre-set scrubbing liquid is precisely injected into the gas flow in the scrubbing pipe through the pipe interface 130. The choice of scrubbing liquid depends on the composition of the waste gas: for acidic waste gases (such as HCl, HF), alkaline solutions (such as sodium hydroxide NaOH solution) are usually used; for silanes (SiH4), water or specific chemical solutions can hydrolyze and precipitate them. In the scrubbing pipe 120, the waste gas and the scrubbing liquid jet undergo preliminary mixing and chemical reaction, and the gas-liquid mixture then enters the scrubbing tower 110 from the bottom. Inside the tower: through the dispersion of the packing layer, the staged contact of the trays, or the encapsulation of the spray, the waste gas and scrubbing liquid are divided into extremely small units, maximizing the gas-liquid contact surface area. On this large contact surface, harmful components in the waste gas (such as HCl and SiH4) undergo sufficient absorption and neutralization chemical reactions with the scrubbing liquid. For example: HCl + NaOH → NaCl + H2O. Finally, the purified gas rises within the tower, passes through a demister to remove any carried droplets, and is discharged from the top of the tower into the atmosphere. The waste liquid that has participated in the reaction accumulates at the bottom of the tower and is periodically discharged through a drain pipe to the wastewater treatment system.

[0030] Working principle:

[0031] The high-temperature exhaust gas generated during the process is first discharged from the exhaust gas outlet 180 at the bottom of the furnace and immediately enters the modular high-efficiency cooling device 90 connected by flanges 140 / 190. Simultaneously, in this device, the exhaust gas flows through the internally three-dimensionally curved exhaust gas cooling pipe 904, and its heat is conducted through the pipe wall to the external cooling body composed of split water-cooled plates 900 / 902. Furthermore, to significantly improve thermal conductivity, the gap between the exhaust gas cooling pipe 904 and the water-cooled plates 900 / 902 is filled with a highly thermally conductive material. Meanwhile, cooling water flows through water-cooled pipe 16... The exhaust gas continuously circulates inside the water-cooled plate to forcibly remove heat, thereby achieving efficient indirect cooling of the exhaust gas in a limited space. After being fully cooled, the exhaust gas then enters the scrubbing pipe 120, mixes with the scrubbing liquid injected through the pipe interface 130, and then enters the bottom of the scrubbing tower 110. In the scrubbing tower 110, a full gas-liquid reaction takes place, which effectively reduces the temperature of the exhaust gas before it enters the exhaust gas treatment device (such as the scrubbing tower), avoids the evaporation and boiling of the scrubbing liquid, improves the scrubbing efficiency, and ultimately removes harmful substances, achieving clean and safe emissions that meet standards.

[0032] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vertical furnace tube device, characterized in that, include Furnace body (10); The cooling device (90) is detachably connected to the exhaust port (180) via a flange assembly; The cooling device (90) includes a curved exhaust gas cooling pipe (904) and a cooling body covering the exterior of the exhaust gas cooling pipe (904); the cooling body has a path for the flow of cooling medium inside, which is used to cool the exhaust gas flowing through the exhaust gas cooling pipe (904) through indirect heat exchange.

2. The vertical furnace tube device according to claim 1, characterized in that, The cooling body has a split structure, including a first water-cooled plate (900) and a second water-cooled plate (902) that can be joined together. The first water-cooled plate (900) and the second water-cooled plate (902) are joined together to form a chamber for accommodating the exhaust gas cooling pipe (904).

3. A vertical furnace tube device according to claim 2, characterized in that, The gap between the exhaust gas cooling pipe (904) and the first water-cooled plate (900) and the second water-cooled plate (902) is filled with a thermally conductive filling material.

4. A vertical furnace tube device according to claim 3, characterized in that, The thermally conductive filler material is graphene.

5. A vertical furnace tube device according to claim 2, characterized in that, The second water-cooled plate (902) is provided with a water-cooled pipe (160) connected to the water-cooling source.

6. A vertical furnace tube device according to claim 1, characterized in that, The exhaust gas cooling pipe (904) is a three-dimensional curved serpentine pipe or an S-shaped pipe.

7. A vertical furnace tube device according to claim 1, characterized in that, The flange assembly includes a second flange assembly (190) disposed at the exhaust port (180) and a first flange assembly (140) disposed at the inlet of the cooling device (90).

8. A vertical furnace tube device according to claim 1, characterized in that, It also includes a washing tower (110), the outlet of the cooling device (90) is connected to the washing tower (110) through a washing pipe (120), and the washing pipe (120) is provided with a pipeline interface (130) for injecting washing reaction medium.

9. A vertical furnace tube device according to claim 1, characterized in that, The furnace body (10) includes a second base (70) for supporting the outer tube (20) and the inner tube (30), a lifting assembly (80) for lifting the first base (60) for supporting the wafer (50), and a crystal boat (40). The exhaust port (180) is provided on the limiting tube (170). The lifting assembly (80) has a raised position and a lowered position; when in the raised position, the first base (60) closes the bottom of the inner tube (30) to form a sealed reaction chamber; when in the lowered position, the crystal boat (40) is located outside the inner tube (30) for easy loading and unloading.

10. A vertical furnace tube device according to claim 9, characterized in that, The limiting tube (170) is also provided with an air inlet (200) for introducing process gas and a gas injection tube (210) for introducing process gas into the inner tube (30).

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