A laser-vibration coupling assisted micro / nano-scratch testing device
By designing a laser-vibration coupling-assisted micro/nano scratch testing device, the problem of the immaturity of existing equipment was solved, and multi-dimensional composite energy field-assisted scratch testing was realized to explore the mechanical properties and deformation mechanism of materials, thereby improving the flexibility and accuracy of the test.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHANGCHUN UNIV OF TECH
- Filing Date
- 2025-04-08
- Publication Date
- 2026-07-07
AI Technical Summary
Existing multi-energy field coupled assisted micro-nano scratch testing equipment is not yet mature, making it difficult to conduct experimental research on the mechanical properties and deformation mechanisms of materials under optical-mechanical composite fields.
A laser-vibration coupled assisted micro/nano scratch testing device was designed, comprising an X/Y direction precision positioning platform, a Z direction precision positioning platform, a laser optical path adjustment unit, a microscopic observation unit, a Z direction vibration generation unit, and an X/Y direction vibration generation unit. These components enable vibration-assisted and laser-vibration-assisted scratch testing from one-dimensional to multi-dimensional.
It enables experimental investigation of the mechanical properties and deformation mechanism of materials under the action of optical-mechanical coupled energy field, improves the flexibility and accuracy of testing, and can carry out multi-dimensional composite energy field assisted scratch testing.
Smart Images
Figure CN224471468U_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of multi-energy field coupling assisted scratch testing technology, specifically to a laser-vibration coupling assisted micro / nano scratch testing device. Background Technology
[0002] In recent years, a large number of scholars have conducted in-depth research and exploration on the machinability of difficult-to-machine materials (such as hard-brittle materials and soft-brittle materials) using single energy field and coupled energy field assisted machining methods. The research results show that the auxiliary energy field method can effectively reduce cutting force, lower cutting temperature, improve tool life and improve workpiece surface quality. Therefore, this method is widely used in machining processes such as turning, milling, drilling and grinding.
[0003] According to publicly available reports, most multi-energy field coupled assisted micro / nano scratch testing devices are still in the theoretical verification stage, and no mature products have yet appeared on the market. Therefore, this paper proposes a laser-vibration coupled assisted micro / nano scratch testing device to realize micro / nano scratch testing experiments under the assistance of an opto-mechanical composite field. Summary of the Invention
[0004] The purpose of this invention is to provide a laser-vibration coupling-assisted micro / nano scratch testing device for experimentally investigating the mechanical properties and deformation mechanisms of materials under the action of an opto-mechanical coupling energy field.
[0005] This invention provides a laser-vibration coupled assisted micro / nano scratch testing device, comprising:
[0006] The system comprises an X / Y direction precision positioning platform, a Z direction precision positioning platform, a laser optical path adjustment unit, a microscopic observation unit, a Z direction vibration generation unit, and an X / Y direction vibration generation unit, among which:
[0007] The X / Y direction vibration generating unit is connected to the X / Y direction precision positioning platform by bolts. The platform is fixed on the marble base and on the air-floating platform. The Z direction vibration generating unit is fixed on the gantry by the Z direction precision positioning platform. The gantry structure is fixed on the marble base by bolts.
[0008] The laser path adjustment unit is fixed to the Z-direction precision positioning platform by bolts. By adjusting the X-direction laser adjustment knob and the Y-direction laser adjustment knob in the laser path adjustment unit, the laser focus can be adjusted in the X / Y plane.
[0009] The X-direction displacement sensor, Y-direction displacement sensor, and Z-direction displacement sensor are installed at the displacement output positions of the X / Y-direction vibration generating unit and the Z-direction vibration generating unit, respectively, to realize the acquisition of X, Y, and Z-direction displacements.
[0010] Force sensors are installed inside the vibration generating unit. Among them, the X-direction force sensor, Y-direction force sensor and Z-direction force sensor can realize the acquisition of forces in the X, Y and Z directions.
[0011] The microscopic observation unit consists of an electron microscope and a microscopic adjustment device. By adjusting the microscopic adjustment device, the image acquired by the electron microscope can reach a preset resolution, thereby enabling real-time observation of the scratching process.
[0012] The X / Y direction vibration generating unit, the Z direction vibration generating unit, and the laser optical path adjustment unit can realize single-dimensional to multi-dimensional vibration-assisted scratch testing, single-dimensional to multi-dimensional laser-vibration-assisted scratch testing, and single-dimensional to multi-dimensional in-situ vibration laser-assisted scratch testing. Attached Figure Description
[0013] To more clearly illustrate the technical solution of the present invention, the accompanying drawings required in the present invention will be briefly introduced below. The following drawings are merely embodiments of the present invention, and those skilled in the art can obtain other drawings based on the provided drawings.
[0014] Figure 1 This is a schematic diagram of the overall structure of the present invention;
[0015] Figure 2 This is a schematic diagram of the X / Y direction vibration generating unit of the present invention;
[0016] Figure 3 This is a schematic diagram of the X / Y direction precision positioning platform of the present invention;
[0017] Figure 4 This is a schematic diagram of the Z-direction precision positioning platform of the present invention;
[0018] Figure 5 This is a schematic diagram of the Z-direction vibration generating unit of the present invention;
[0019] Figure 6 This is a schematic diagram of the laser optical path adjustment unit of the present invention;
[0020] Figure 7 This is a schematic diagram of the microscopic observation unit of the present invention;
[0021] Figure 8 This is a schematic diagram of the overall appearance of the invention;
[0022] In the diagram: 1-Gantry; 2-Z-direction precision positioning platform; 3-Microscopic observation unit; 4-X / Y-direction precision positioning platform; 5-X / Y-direction vibration generating unit; 6-Z-direction vibration generating unit; 7-Laser optical path adjustment unit; 8-Workpiece; 9-Fixture; 10-X-direction displacement sensor; 11-X-direction piezoelectric ceramic stack; 12-X-direction force sensor; 13-Y-direction force sensor; 14-Y-direction piezoelectric ceramic stack; 15-Y-direction displacement sensor; 16-X-direction motor; 17-Y-direction motor; 18-Marble base; 19-Z-direction motor; 20-Z-direction positioning block; 21-Z-direction displacement sensor; 22-Cutting tool; 23-Z-direction piezoelectric ceramic stack; 24-Z-direction force sensor; 25-X-direction laser adjustment knob; 26-Laser fiber; 27-Y-direction laser adjustment knob; 28-Microscope adjustment device; 29-Microscope; 30-Dust cover; 31-Air float stage. Detailed Implementation
[0023] The structure and principle of the invention will now be described in detail with reference to the accompanying drawings. This invention enables multi-dimensional composite energy field-assisted scratch testing. Specific embodiments will be described below to demonstrate the flexibility and usability of the device.
[0024] Implementation Method 1:
[0025] Laser-assisted scratching: such as Figure 1As shown, 1-Gantry and 18-Marble base are connected to form the main structure of the device. 8-Workpiece is fixed to 9-Clamping fixture by screws. 9-Clamping fixture is fixed to 5-X / Y direction vibration generating unit. 16-X direction motor and 17-Y direction motor drive 4-X / Y direction precision positioning platform to move in the X and Y directions. 19-Z direction motor drives 22-Cut tool and 19-Z direction positioning block to move in the Z direction. The 16-X direction motor, 17-Y direction motor, and 19-Z direction motor work together to move 8-Workpiece and 22-Cut tool so that 22-Cut tool can scratch 8-Workpiece. The laser path adjustment device is equipped with 25-X direction laser adjustment knob and 27-Y direction laser adjustment knob, thereby realizing the micro-motion of 26-Laser fiber in the X and Y directions. Loosening the set screw on 26-Laser fiber sleeve allows for vertical adjustment of the laser so that the laser spot and the tool tip are on the same plane. Turning the 25-X direction laser adjustment knob moves the 26-laser fiber along the X direction, aligning the laser spot and the blade tip in a straight line for precise heating. Turning the 27-Y direction laser adjustment knob moves the 26-laser fiber along the Y direction, changing the distance between the blade tip and the laser spot. Since the 22-blade is an in-situ laser blade, changing the distance between the laser spot and the blade tip allows for both in-situ and off-site laser-assisted scratch testing. During testing, the 10-X direction displacement sensor, 15-Y direction displacement sensor, and 21-Z direction displacement sensor acquire X, Y, and Z direction displacements, while the 12-X direction force sensor, 13-Y direction force sensor, and 24-Z direction force sensor acquire X, Y, and Z direction forces. Adjusting the 28-micro adjustment device positions the microscope at the blade tip, enabling real-time observation during the scratching process.
[0026] Implementation Method Two:
[0027] Vibration-assisted scratching: Similarly, workpiece 8 is fixed to fixture 9 with screws, and the worktable moves in the X and Y directions driven by motors 16 (X-direction) and 17 (Y-direction). A signal is then given to the piezoelectric ceramic stacks 11 (X-direction) and 14 (Y-direction), causing workpiece 8 to vibrate in the X and Y directions. Due to the workpiece vibration, the conventional scratching experiment becomes two-dimensional vibration scratching. When a signal is given to the piezoelectric ceramic stack 23 (Z-direction), the tool 22 vibrates in the Z-direction, and combined with the workpiece vibration, three-dimensional vibration scratching is achieved. When only a signal is given to the piezoelectric ceramic stack 23 (Z-direction), Z-direction vibration is achieved, resulting in Z-direction vibration scratching. During Z-direction vibration scratching, displacement sensor 21 (Z-direction) and force sensor 24 (Z-direction) acquire Z-direction displacement and force, respectively. For two-dimensional vibration scratches, the 10-X displacement sensor and the 15-Y displacement sensor can acquire X and Y displacements, while the 12-X force sensor and the 13-Y force sensor can acquire X and Y force. For three-dimensional vibration scratches, the 10-X displacement sensor, the 15-Y displacement sensor, and the 21-Z displacement sensor can acquire X, Y, and Z displacements, while the 12-X force sensor, the 13-Y force sensor, and the 24-Z force sensor can acquire X, Y, and Z force.
[0028] Implementation Method 3:
[0029] Laser-assisted composite scratching: A signal is given to the piezoelectric ceramic stacks in the 11-X direction, 14-Y direction, and 23-Z direction to vibrate the tool (22) and workpiece (8), transforming the device into a three-dimensional vibration generator. Adjusting the laser adjustment knobs in the 25-X and 27-Y directions aligns the laser spot and tool tip in a straight line, maintaining a certain distance, achieving off-site laser three-dimensional vibration composite scratching. Further adjustment of the 27-Y direction laser adjustment knob allows the laser spot to pass through the tool tip and irradiate the workpiece, achieving in-situ laser-assisted three-dimensional vibration composite scratching. When only a signal is given to the piezoelectric ceramic stacks in the 11-X and 14-Y directions, the workpiece vibrates in both the X and Y directions. Adjusting the laser adjustment knobs in the 25-X and 27-Y directions aligns the laser spot and tool tip in a straight line, maintaining a certain distance, achieving laser-assisted two-dimensional vibration composite scratching. Continue adjusting the 27-Y direction laser adjustment knob to allow the laser spot to pass through the tool tip and illuminate the workpiece, achieving in-situ laser-assisted two-dimensional vibration composite scratching. When only one signal is given to the 23-Z direction piezoelectric ceramic stack, the 22-tool vibrates in the Z direction. At this time, the device becomes a one-dimensional vibration generator in the Z direction. Adjust the 25-X direction and 27-Y direction laser adjustment knobs to align the laser spot and the tool tip in a straight line and maintain a certain distance, achieving laser-assisted one-dimensional vibration composite scratching. Continue adjusting the 27-Y direction laser adjustment knob to allow the laser spot to pass through the tool tip and illuminate the workpiece, achieving in-situ laser-assisted one-dimensional vibration composite scratching. During the test, the force and displacement are collected as in vibration-assisted scratching.
[0030] Implementation Method Four:
[0031] Constant and Variable Depth Scraping: This device can achieve both constant and variable depth scratching when performing laser-assisted scratching, vibration-assisted scratching, and combined vibration-laser scratching. During constant depth scratching, the 24-Z force sensor receives a force signal. Because the material cannot be guaranteed to be perfectly level, the signal received by the 24-Z force sensor varies during scratching. When the force increases, the 2-Z precision positioning platform moves the 22-tool away from the 8-workpiece; when the force decreases, the 2-Z precision positioning platform moves the 22-tool closer to the 8-workpiece, ultimately achieving constant depth scratching. During variable depth of cut scratching, the 24-Z direction force sensor will also send a force signal. During the scratching process, the signal received by the 24-Z direction force sensor gradually increases. When the force increases too much, the 2-Z direction precision positioning platform will cause the 22-tool to move away from the 8-workpiece. When the force increases too little, the 2-Z direction precision positioning platform will cause the 22-tool to move closer to the 8-workpiece, thus achieving variable depth of cut scratching.
Claims
1. A laser-vibration coupled assisted micro / nano scratch testing device, characterized in that it comprises: The X / Y direction precision positioning platform (4), the Z direction precision positioning platform (2), the microscopic observation unit (3), the laser light path adjusting unit (7), the Z direction vibration generating unit (6) and the X / Y direction vibration generating unit (5); wherein the X / Y direction vibration generating unit (5) is connected with the X / Y direction precision positioning platform (4) through bolts, the platform is fixed on the marble base (18) and is fixed on the air floating table (31); the Z direction vibration generating unit (6) is fixed on the gantry (1) through the Z direction precision positioning platform (2), the gantry is fixed on the marble base (18) through bolts; the laser light path adjusting unit (7) is fixed on the Z direction precision positioning platform (2) through bolts, the adjustment of the X direction laser adjusting knob (25) and the Y direction laser adjusting knob (27) in the laser light path adjusting unit (7) can realize the adjustment of the laser focal point in the X / Y plane; the X direction displacement sensor (10), the Y direction displacement sensor (15) and the Z direction displacement sensor (21) are respectively installed at the displacement output positions of the X / Y direction vibration generating unit (5) and the Z direction vibration generating unit (6), the collection of the X, Y and Z direction displacements can be realized; the force sensor is installed in the internal of the vibration generating unit, wherein the X direction force sensor (12), the Y direction force sensor (13) and the Z direction force sensor (24) can realize the collection of the X, Y and Z direction forces; the microscopic observation unit (3) is composed of an electron microscope (29) and a microscopic adjusting device (28), the real-time observation of the scratch process can be realized by adjusting the microscopic adjusting device (28); the vibration assisted scratch test from single dimension to multi-dimension, the laser-vibration assisted scratch test from single dimension to multi-dimension and the vibration in-situ laser assisted scratch test from single dimension to multi-dimension can be realized through the X / Y direction vibration generating unit (5), the Z direction vibration generating unit (6) and the laser light path adjusting unit (7).
2. The laser-vibration coupling assisted micro / nano-scratch testing device according to claim 1, characterized in that: The X / Y direction vibration generating unit (5) includes a workpiece (8) and a clamp (9), an X direction displacement sensor (10), an X direction piezoelectric ceramic stack (11), an X direction force sensor (12), a Y direction displacement sensor (15), a Y direction piezoelectric ceramic stack (14) and a Y direction force sensor (13); wherein the X direction force sensor (12) is arranged at the rear end of the X direction piezoelectric ceramic stack (11) and is clamped through bolts, the Y direction force sensor (13) is arranged at the rear end of the Y direction piezoelectric ceramic stack (14) and is clamped through bolts, the X direction displacement sensor (10) and the Y direction displacement sensor (15) are fixed on the X / Y direction vibration generating unit (5), and the X / Y direction vibration generating unit (5) is connected with the X / Y direction precision positioningplatform (4) through screws. 3.The laser-vibration coupling assisted micro / nano-scratch testing device according to claim 1, wherein: The Z-direction vibration generating unit (6) comprises a Z-direction displacement sensor (21), a tool (22), a Z-direction piezoelectric ceramic stack (23), and a Z-direction force sensor (24). The tool (22) is fixed on the top end of the Z-direction vibration generating unit (6) by a bolt. The Z-direction force sensor (24) is arranged at the rear end of the Z-direction piezoelectric ceramic stack (23) and is clamped by a bolt. The Z-direction displacement sensor (21) is fixed on the Z-direction vibration generating unit (6) by a bolt. The Z-direction vibration generating unit (6) is connected to the Z-direction precision positioning platform (2) by a screw.
4. The laser-vibration coupling assisted micro / nano-scratch testing device according to claim 1, wherein: The laser light path adjusting unit (7) comprises an X-direction laser adjusting knob (25) and a Y-direction laser adjusting knob (27). The laser fiber (26) is fixed on the laser light path adjusting unit (7) by a set screw. The X-direction laser adjusting knob (25) and the Y-direction laser adjusting knob (27) can move the laser fiber (26) in the X and Y directions.
5. The laser-vibration coupling assisted micro / nano-scratch testing device according to claim 4, wherein: The laser light path adjusting unit (7) can realize three-dimensional adjustment. The laser fiber (26) can be adjusted in the Z direction by a set screw. The X-direction laser adjusting knob (25) and the Y-direction laser adjusting knob (27) can adjust the laser fiber (26) in the X and Y directions, thereby realizing spot size adjustment and in-situ / off-site laser conversion.
6. The laser-vibration coupling assisted micro / nano-scratch testing device according to claim 1, wherein: The microscopic observation unit (3) comprises an electron microscope (29) and a microscopic adjusting device (28). The image obtained by the electron microscope (29) can reach a preset clarity by adjusting the microscopic adjusting device (28), thereby realizing real-time observation of the scratching process.
7. The laser-vibration coupling assisted micro / nano-scratch testing device according to claim 1, wherein: The force is collected by the X-direction force sensor (12), the Y-direction force sensor (13), and the Z-direction force sensor (24). The displacement is collected by the X-direction displacement sensor (10), the Y-direction displacement sensor (15), and the Z-direction displacement sensor (21).
8. The laser-vibration coupling assisted micro / nano-scratch testing device according to claim 1, wherein: During the scratch test, when the Z-direction scratch depth is fixed, constant-depth scratching can be realized. When the Z-direction scratch depth is changed, variable-depth scratching test can be realized.
9. The laser-vibration coupling assisted micro / nano-scratch testing device according to claim 3, wherein, The device can collect real-time force and displacement signals during single-dimensional to multi-dimensional vibration-assisted scratching test, laser-vibration-assisted scratching test, and vibration in-situ laser-assisted scratching test by the X-direction force sensor (12), the Y-direction force sensor (13), the Z-direction force sensor (24), the X-direction displacement sensor (10), the Y-direction displacement sensor (15), and the Z-direction displacement sensor (21).