An electrostatic cutter with efficient regulation

By coordinating the anode positioning pin and the cathode fine-tuning mechanism, along with the drive mechanism and the backlash compensation mechanism, the electrostatic cutter achieves efficient adjustment, solving the problems of low cathode and anode adjustment accuracy and efficiency, and meeting the needs of different energy beams.

CN224473471UActive Publication Date: 2026-07-07SHANGHAI AIPUQIANG PARTICLE EQUIP

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHANGHAI AIPUQIANG PARTICLE EQUIP
Filing Date
2025-08-06
Publication Date
2026-07-07

AI Technical Summary

Technical Problem

Existing electrostatic cutters suffer from problems such as large human error, low adjustment accuracy and efficiency in the adjustment of the cathode and anode, and the movement adjustment of the cutting blade is not precise enough.

Method used

The anode positioning pin works in conjunction with the cathode fine-tuning mechanism, and precise positioning and efficient adjustment are achieved through the drive mechanism and backlash compensation mechanism. The ultra-high vacuum linear introducer and servo motor drive adjustment components ensure the stability and precise movement of the moving plate.

Benefits of technology

It improves the adjustment accuracy and efficiency of the relative positions of the cathode and anode, reduces human error, meets the usage requirements of different energy beams, and enhances the overall adjustment accuracy and stability of the electrostatic cutter.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The application discloses a high-efficiency adjusted electrostatic cutter, relates to the field of electrostatic cutter adjustment, and comprises a moving plate and an anode pin hole formed in the moving plate, an anode positioning pin is threadedly connected on the anode pin hole, a cathode fine adjustment mechanism for fine adjustment of a cathode is arranged on the moving plate, two groups of adjusting pieces for adjusting the moving plate are arranged in parallel along the width direction of one side of the moving plate, a driving mechanism for driving the adjusting pieces is arranged outside the electrostatic cutter, and two groups of return difference compensation mechanisms for compensating the movement of the moving plate are arranged in parallel along the width direction of the other side of the moving plate. The anode pin hole, the anode positioning pin and the cathode fine adjustment mechanism are used for realizing high-efficiency adjustment of the relative position of the cathode and the anode; the driving mechanism and the adjusting pieces are used for realizing high-efficiency adjustment of a cutting piece; and the return difference compensation mechanisms are used for eliminating the return error of the moving plate.
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Description

Technical Field

[0001] This application relates to the field of electrostatic cutter adjustment, and in particular to a highly efficient adjustable electrostatic cutter. Background Technology

[0002] The injection and extraction system of a particle accelerator is a core component of the experimental setup, and its performance directly affects the beam transmission efficiency and the accuracy of experimental data. Currently, the electrostatic cutter, as a key component, deflects particle trajectories through an electrostatic field and is widely used in facilities such as synchrotron radiation sources and heavy ion accelerators.

[0003] In the use of electrostatic cutters, the relative positional relationship between the cathode and anode is extremely critical. The gap between them must be uniform to ensure a uniform electric field. Therefore, the relative positions of the cathode and anode need to be precisely adjusted during assembly. Furthermore, in actual use, the moving plate needs to be adjusted to change the position of the cutting blade to adapt to the needs of different energy beams.

[0004] In existing technologies, the adjustment of the cathode and anode is usually done by blindly pushing them manually to change their relative positions. However, the adjustment accuracy is limited by the operator's experience and is prone to human error, requiring repeated adjustments. The movement of the cutting disc is usually achieved by adjusting the moving plate with a thread, but the moving plate is movable, resulting in poor adjustment accuracy during the pushing and pulling process, requiring multiple adjustments and reducing efficiency. Utility Model Content

[0005] To address the issues of human error that easily arises when manually adjusting the cathode or anode, and the poor adjustment accuracy of the sliding plate during the pushing and pulling process when using a threaded adjustment mechanism, this application provides a highly efficient electrostatic cutter.

[0006] The high-efficiency adjustable electrostatic cutter provided in this application adopts the following technical solution:

[0007] A highly efficient adjustable electrostatic cutter includes a movable plate and an anode pin hole formed on the movable plate. An anode positioning pin is threaded onto the anode pin hole. The movable plate is provided with a cathode fine-tuning mechanism for fine-tuning the cathode. Two sets of adjusting components for adjusting the movable plate are arranged parallel to each other along the width direction of one side of the movable plate. A driving mechanism for driving the adjusting components is provided on the outside of the electrostatic cutter. Two sets of backlash compensation mechanisms for compensating for the movement of the movable plate are arranged parallel to each other along the width direction of the other side of the movable plate.

[0008] By adopting the above technical solution, the anode pin hole and anode positioning pin can be used to accurately position the anode, and the cathode fine-tuning mechanism can finely adjust the cathode position, making the gap width between the cathode and anode more uniform to ensure a uniform electric field. The adjusting component, drive mechanism, and hysteresis compensation mechanism work together. The drive mechanism drives the adjusting component to adjust the moving plate, and the hysteresis compensation mechanism compensates for the movement of the moving plate, improving the accuracy and efficiency of adjustment, reducing human error, and meeting the needs of different energy beams.

[0009] Preferably, the cathode fine-tuning mechanism includes a mounting plate fixed on a moving plate. A first fixing screw is threadedly connected to the middle of the mounting plate. A first block is ball-jointed at the end of the first fixing screw near the cathode. Second fixing screws are threadedly connected to both sides of the mounting plate. A second block is ball-jointed at the end of the second fixing screw near the cathode. The two second blocks are arranged in parallel and inclined on adjacent sides.

[0010] By adopting the above technical solution, the cathode can be precisely fine-tuned using a cathode fine-tuning mechanism. A half-turn rotation of the first fixing screw moves the first block by 0.5mm; a half-turn rotation of the second fixing screw moves the second block by 0.5mm. Rotating the first fixing screw, whose ball joint is connected to the first block, moves the cathode in the X direction, achieving fine-tuning in that direction. Rotating the second fixing screw, whose ball joint is connected to the second block, moves the cathode in the Y direction, achieving fine-tuning in that direction. This helps to further precisely control cathode fine-tuning, avoiding the accuracy limitations and human error problems caused by blind manual adjustment, and improving the accuracy and efficiency of cathode adjustment.

[0011] Preferably, the adjusting component is an ultra-high vacuum linear guide, which is fixed to the cylinder of the electrostatic cutter by a flange. One end of the ultra-high vacuum linear guide is fixed to a moving plate, and the other end of the ultra-high vacuum linear guide is located outside the electrostatic cutter.

[0012] By adopting the above technical solution, one end of the ultra-high vacuum linear guide is fixed on the moving plate, and the other end is located outside the electrostatic cutter. By driving the ultra-high vacuum linear guide through the drive mechanism, not only can the moving plate be adjusted, but the vacuum environment inside the electrostatic cutter can also be guaranteed.

[0013] Preferably, the drive mechanism includes a drive motor, a drive wheel fixed to the output end of the drive motor, and a driven wheel fixed to the ultra-high vacuum linear guide, wherein the drive wheel and the driven wheel are connected by a belt.

[0014] By adopting the above technical solution, in the highly efficient adjustable electrostatic cutter, a drive motor can be used to rotate the driving wheel, which in turn drives the driven wheel via belt transmission, thereby driving the ultra-high vacuum linear guide to rotate. The ultra-high vacuum linear guide converts the rotational motion of the motor into linear motion, realizing the adjustment of the moving plate, avoiding human error caused by blindly pushing the adjustment, and improving the accuracy and efficiency of adjustment.

[0015] Preferably, the backlash compensation mechanism includes a limiting rod fixed on the moving plate, a limiting plate fixed inside the electrostatic cutter, and a spring disposed between the moving plate and the limiting plate. The limiting rod passes through the limiting plate, the spring is sleeved on the limiting rod, one end of the spring is fixed on the moving plate, and the other end of the spring is fixed on the limiting plate.

[0016] By adopting the above technical solution, the limit rod, limit plate and spring in the backflip compensation mechanism can compensate for the movement of the moving plate, avoid position deviation caused by external force impact or motion inertia during the movement, ensure the stable and accurate movement of the moving plate, and improve the accuracy of the relative position adjustment of the cathode and anode.

[0017] Preferably, the bottom of the mobile flat plate is provided with a plurality of bullseye bearings, the tops of which abut against the bottom of the mobile flat plate.

[0018] By adopting the above technical solution, multiple bullseye bearings are set at the bottom of the moving plate, which can reduce the friction when the moving plate moves, making the adjustment of the moving plate smoother.

[0019] Preferably, a guide groove is provided at the bottom center of the mobile plate along the width direction of the mobile plate, and the top of the bullseye bearing in the center abuts in the guide groove.

[0020] By adopting the above technical solution, a guide groove is opened in the middle of the bottom of the mobile plate along the width direction of the mobile plate, and the top of the bullseye bearing in the middle abuts in the guide groove, which can provide guidance for the movement of the mobile plate and help improve the stability and accuracy of the adjustment of the mobile plate.

[0021] Preferably, each of the flanges of the two ultra-high vacuum linear inductors is fixed with a receiving bracket, and the two drive motors are fixed one-to-one on the two receiving brackets.

[0022] By adopting the above technical solution, a support frame is set on the flange of the ultra-high vacuum linear inductor to fix the drive motor, which can stabilize the position of the drive motor, ensure the normal operation of the drive mechanism, and thus ensure that the ultra-high vacuum linear inductor is stably driven, improving the adjustment stability and reliability of the electrostatic cutter.

[0023] In summary, this application includes at least one of the following beneficial technical effects:

[0024] 1. By connecting the anode pin hole with the anode positioning pin thread, the anode position can be accurately determined. Combined with the cathode fine-tuning mechanism, the cathode can be finely adjusted, making the relative position adjustment of the cathode and anode more precise and avoiding human error.

[0025] 2. By using a drive mechanism to drive the adjustment components, the moving plate can be moved precisely and its position can be changed without blindly pushing by hand or adjusting by screws. This solves the problem of poor adjustment accuracy of the cutting disc and improves the accuracy of the cutting disc position adjustment.

[0026] 3. The backlash compensation mechanism can compensate for the movement of the moving plate, reduce deviations during the movement process, improve overall adjustment efficiency, and meet the usage requirements of different energy beams. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is an overall schematic diagram of the high-efficiency adjustable electrostatic cutter provided in the embodiments of this application;

[0029] Figure 2 This is a schematic diagram of the internal structure of the electrostatic cutter provided in the embodiments of this application;

[0030] Figure 3 This is an exploded view of the internal structure of the electrostatic cutter provided in the embodiments of this application, used to show the bullseye bearing;

[0031] Figure 4 This is a bottom view of the mobile flat panel provided in the embodiments of this application, used to show the lead groove;

[0032] Figure 5 This is a schematic diagram of the cathode fine-tuning mechanism provided in the embodiments of this application;

[0033] Figure 6 This is a schematic diagram of the drive mechanism provided in the embodiments of this application;

[0034] Figure 7 This is provided in the embodiments of this application. Figure 4 The enlarged view at point A in the middle is used to show the retrace difference compensation mechanism.

[0035] Reference numerals: 1. Moving plate; 2. Anode pin hole; 3. Anode positioning pin; 4. Cathode fine-tuning mechanism; 41. Mounting plate; 42. First fixing screw; 43. First piece; 44. Second fixing screw; 45. Second piece; 5. Ultra-high vacuum linear guide; 6. Drive mechanism; 61. Drive motor; 62. Driving wheel; 63. Driven wheel; 64. Belt; 7. Backlash compensation mechanism; 71. Limiting rod; 72. Limiting plate; 73. Spring; 8. Bullseye bearing; 9. Lead groove; 10. Receiving frame. Detailed Implementation

[0036] The following is in conjunction with the appendix Figure 1-7 This application will be described in further detail.

[0037] This application discloses a highly efficient adjustable electrostatic cutter.

[0038] Electrostatic cutters are used in the injection and extraction systems of particle accelerators. They deflect particles using an electrostatic field. The arc-shaped parallel gap between the cathode and anode, as shown in the diagram, represents the particle deflection trajectory. The anode has a U-shaped structure with a row of cutting blades on its side. These blades divide the electric field space into two parts: the arc-shaped gap contains a high-voltage, uniform electric field, through which particles are deflected by the electric force. The interior of the "U" has a zero-potential field, through which particles are not affected by the electric force.

[0039] Reference Figure 1 , Figure 2 and Figure 3 A highly efficient adjustable electrostatic cutter includes a movable plate 1, which is the basis for the entire adjustment process. Multiple bullseye bearings 8 are disposed below the movable plate 1, with the tops of the bearings abutting against the bottom of the plate 1. The bullseye bearings 8 not only support the movable plate 1 but also reduce friction during movement, making the adjustment of the plate 1 smoother.

[0040] Reference Figure 3 In this embodiment, five bullseye bearings 8 are provided. One bullseye bearing 8 is located in the center of the bottom of the moving plate 1, and two bullseye bearings 8 are located on each side of the bottom of the moving plate 1. This arrangement allows the moving plate 1 to bear more even force, and the bullseye bearing 8 in the middle can bear part of the vertical load of the plate. The bullseye bearings 8 symmetrically arranged on both sides provide auxiliary support from the left and right sides, preventing the moving plate 1 from tilting or deforming due to uneven force, thereby ensuring that the moving plate 1 maintains a stable posture during adjustment and use. In addition, using five bullseye bearings 8 to directly support the moving plate 1 gives the moving plate 1 four degrees of freedom during adjustment.

[0041] Reference Figure 2Let the length direction of the moving plate 1 be defined as the X direction, and the width direction of the moving plate 1 be defined as the Y direction. Since the moving plate 1 will rotate during adjustment in the Y direction, an unknown offset may occur in the X direction.

[0042] Reference Figure 3 A guide groove 9 is provided at the bottom center of the movable plate 1, running along the width direction of the movable plate 1, and the top of the bullseye bearing 8 located in the center abuts against the guide groove 9. The guide groove 9 does not affect the degree of freedom of the movable plate 1, and can also constrain the movable plate 1 to avoid unknown displacement in the X direction, which would lead to positional deviation.

[0043] The use of electrostatic cutters requires a very high degree of precision in the relative positional relationship between the cathode and anode. The gap between the two must be uniform to ensure a uniform electric field. During the assembly process, the relative positions of the cathode and anode need to be precisely adjusted.

[0044] Reference Figure 4 An anode pin hole 2 is provided on the movable plate 1, and an anode positioning pin 3 can be threadedly connected to the anode pin hole 2. A cathode fine-tuning mechanism 4 for fine-tuning the cathode is also provided on the movable plate 1.

[0045] Reference Figure 2 and Figure 5 The cathode fine-tuning mechanism 4 includes a mounting plate 41, a first fixing screw 42, a first block 43, two second fixing screws 44, and two second blocks 45. The mounting plate 41 is fixed to the movable plate 1, typically by welding or fixing screws, to securely install it in the designated position. The first fixing screw 42 is threaded into the middle of the mounting plate 41, with its end near the cathode making ball contact with the first block 43. In this embodiment, the first block 43 is square-shaped with a smooth surface to reduce friction when in contact with the cathode. The two second fixing screws 44 are threaded onto both sides of the mounting plate 41, with their ends near the cathode making ball contact with the second blocks 45. In this embodiment, the second blocks 45 are trapezoidal, and the inclined surfaces of adjacent sides of the two second blocks 45 are parallel and inclined, allowing for more precise fine-tuning of the cathode position during adjustment.

[0046] In addition, the first fixing screw 42, the first piece 43, the second fixing screw 44, and the second piece 45 are all made of PEEK engineering plastic to prevent high-voltage arcing between them and the cathode. The first fixing screw 42 and the second fixing screw 44 both have a built-in locking function.

[0047] Reference Figure 5By machining the thread of the first fixing screw 42, rotating the first fixing screw 42 half a turn causes the first block 43 to move the cathode 0.5mm in the X direction, thereby achieving fine adjustment of the cathode in the X direction. When fine adjustment of the cathode in the X direction is required, the number of turns of the first fixing screw 42 needed to be calculated according to the required fine adjustment distance. Then, the first fixing screw 42 is rotated to the corresponding number of turns, causing the first block 43 to move the cathode. A laser rangefinder is used to measure whether the cathode is adjusted to the correct position in the X direction. If the adjustment is correct, the adjustment stops; if not, the adjustment continues until it is correct, thus achieving fine adjustment of the cathode in the X direction.

[0048] Reference Figure 5 By machining the threads of the second fixing screw 44 and the inclined surface of the second block 45, rotating the second fixing screw 44 half a turn causes the second block 45 to move the cathode 0.5mm in the Y direction, thereby achieving fine adjustment of the cathode in the Y direction. When fine adjustment of the cathode in the Y direction is required, the number of turns of the second fixing screw 44 needed to be calculated according to the required fine adjustment distance. Then, the second fixing screw 44 is rotated to the corresponding number of turns, causing the second block 45 to move the cathode. A laser rangefinder is used to measure whether the cathode is adjusted to the correct position in the Y direction. If the adjustment is correct, the adjustment is stopped; if not, the adjustment continues until it is correct, thus achieving fine adjustment of the cathode in the Y direction.

[0049] After the cathode position is adjusted to the correct position by the cathode fine-tuning mechanism 4, the first fixing screw 42 and the second fixing screw 44 are locked respectively to fix the relative position between the cathode and the anode onto the moving plate 1, thus completing the adjustment of the relative position between the anode and the cathode.

[0050] A row of cutting blades is fixedly arranged on the side of the anode closest to the cathode. These blades divide the electric field space into two parts: an arc-shaped gap containing a high-voltage, uniform electric field, through which particles are deflected by the electric field force. Therefore, in actual use, the cathode and anode need to be moved together as a whole to adjust the position of the cutting blades and adapt to the needs of beams with different energies.

[0051] Reference Figure 2 and Figure 6 Two sets of adjusting components for adjusting the moving plate 1 are arranged parallel to each other along the width direction of one side of the moving plate 1. Two sets of backlash compensation mechanisms 7 for compensating for the movement of the moving plate 1 are arranged parallel to each other along the width direction of the other side of the moving plate 1. A drive mechanism 6 for driving the adjusting components is provided outside the electrostatic cutter.

[0052] Reference Figure 6The drive mechanism 6 includes a drive motor 61, a drive pulley 62, a driven pulley 63, and a belt 64. The drive motor 61 is a servo motor, capable of rapidly adjusting its rotation speed and direction. The drive pulley 62 is fixed to the output end of the servo motor, and the driven pulley 63 is fixed to the adjusting component. The drive pulley 62 and the driven pulley 63 are connected by the belt 64. When the servo motor is started, the adjusting component rotates under the action of the belt 64.

[0053] Reference Figure 1 and Figure 6 The adjusting component is an ultra-high vacuum linear guide 5, which is fixed to the cylinder of the electrostatic cutter via a flange. The ultra-high vacuum linear guide 5 can convert the rotary motion of the servo motor into linear motion while ensuring a vacuum seal. One end of the ultra-high vacuum linear guide 5 is fixed to the moving plate 1, and the other end of the ultra-high vacuum linear guide 5 is located outside the electrostatic cutter, with the driven wheel 63 fixed to its external end.

[0054] The servo motor is activated, and under the action of the ultra-high vacuum linear introducer 5, the moving plate 1 moves, thereby driving the adjusting component to deflect the entire cutting blade, precisely adjusting the inlet and outlet positions of the cutting blade, thus improving the flow efficiency of the beam during injection and extraction. The adjusted moving plate 1 is then secured with bolts to prevent movement during use of the electrostatic cutter, which could affect its operation.

[0055] Reference Figure 6 A mounting bracket 10 is fixed to the flange of the ultra-high vacuum linear introducer 5, and the servo motor is fixed to the mounting bracket 10. The mounting bracket 10 provides a mounting base for the servo motor, ensuring the stable operation of the servo motor.

[0056] When the servo motor is started to adjust the position of the cutting blade, various error factors such as thread clearance, assembly clearance, and motor shaft clearance may cause the moving plate 1 to fail to return to its original position when it moves forward and then back. Therefore, the backlash compensation mechanism 7 ensures that all clearances are kept in a compressed state during the process of the servo motor driving the moving plate 1, thereby eliminating backlash error and improving adjustment accuracy.

[0057] Reference Figure 7 The backlash compensation mechanism 7 includes a limiting rod 71, a limiting plate 72, and a spring 73. The limiting rod 71 is fixed to the moving plate 1, and the limiting plate 72 is fixed inside the electrostatic cutter, with the limiting rod 71 passing through the limiting plate 72. The spring 73 is positioned between the moving plate 1 and the limiting plate 72, with one end of the spring 73 fixed to the moving plate 1 and the other end fixed to the limiting plate 72.

[0058] Reference Figure 6 and Figure 7 When the moving plate 1 moves, the spring 73 acts as a buffer and compensation mechanism, keeping all gaps in a compressed state to eliminate the return error of the moving plate 1 and improve the adjustment accuracy. When the servo motor is started to push the moving plate 1 forward and then back, the return error compensation mechanism 7 ensures that the moving plate 1 can return to its original position, so as not to affect the adjustment accuracy of the moving plate 1 when the servo motor is started next time.

[0059] The implementation principle of the high-efficiency adjustable electrostatic cutter according to this application embodiment is as follows: The anode is initially positioned by the cooperation of the anode positioning pin 3 and the anode pin hole 2. The cathode is then finely adjusted by the cathode fine-tuning mechanism 4, thereby accurately adjusting the relative position between the cathode and anode. The drive mechanism 6 provides power to the ultra-high vacuum linear guide 5, causing the moving plate 1 to be adjusted according to specific installation requirements. This allows the cathode and anode to move together as a whole, precisely adjusting the inlet and outlet positions of the cutting blade to adapt to the needs of different energy beams. During the adjustment of the moving plate 1 by the servo motor, the backlash compensation mechanism 7 ensures that all gaps are always compressed, thereby eliminating the backlash error of the moving plate 1 and improving adjustment accuracy. Overall, the various mechanisms work together to greatly improve the accuracy and efficiency of adjusting the relative position of the cathode and anode and the position of the moving plate 1, solving the problems of poor adjustment efficiency and easy introduction of errors in the prior art.

[0060] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," "third," and similar terms used in this application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. The terms "an" or "a" and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including" and similar terms mean that the elements or objects preceding "comprising" or "including" encompass the elements or objects listed following "comprising" or "including" and their equivalents, and do not exclude other elements or objects. "Above," "below," "left," "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0061] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A highly efficient adjustable electrostatic cutter, characterized in that: The device includes a movable plate (1) and an anode pin hole (2) opened on the movable plate (1). An anode positioning pin (3) is threaded onto the anode pin hole (2). A cathode fine-tuning mechanism (4) for fine-tuning the cathode is provided on the movable plate (1). Two sets of adjusting components for adjusting the movable plate (1) are arranged parallel to each other along the width direction of one side of the movable plate (1). A driving mechanism (6) for driving the adjusting components is provided on the outside of the electrostatic cutter. Two sets of backlash compensation mechanisms (7) for compensating for the movement of the movable plate (1) are arranged parallel to each other along the width direction of the other side of the movable plate (1).

2. The high-efficiency adjustable electrostatic cutter according to claim 1, characterized in that: The cathode fine-tuning mechanism (4) includes a mounting plate (41) fixed on a movable plate (1). A first fixing screw (42) is threadedly connected to the middle of the mounting plate (41). A first block (43) is ball-jointed at the end of the first fixing screw (42) near the cathode. A second fixing screw (44) is threadedly connected to both sides of the mounting plate (41). A second block (45) is ball-jointed at the end of the second fixing screw (44) near the cathode. The two second blocks (45) are arranged in parallel and inclined on adjacent sides.

3. The high-efficiency adjustable electrostatic cutter according to claim 1, characterized in that: The adjusting component is an ultra-high vacuum linear inlet (5), which is fixed to the cylinder of the electrostatic cutter by a flange. One end of the ultra-high vacuum linear inlet (5) is fixed on the moving plate (1), and the other end of the ultra-high vacuum linear inlet (5) is located outside the electrostatic cutter.

4. The high-efficiency adjustable electrostatic cutter according to claim 1, characterized in that: The drive mechanism (6) includes a drive motor (61), a drive wheel (62) fixed on the output end of the drive motor (61), and a driven wheel (63) fixed on the ultra-high vacuum linear guide (5). The drive wheel (62) and the driven wheel (63) are connected by a belt (64).

5. The high-efficiency adjustable electrostatic cutter according to claim 1, characterized in that: The backlash compensation mechanism (7) includes a limiting rod (71) fixed on the moving plate (1), a limiting plate (72) fixed inside the electrostatic cutter, and a spring (73) disposed between the moving plate (1) and the limiting plate (72). The limiting rod (71) passes through the limiting plate (72), and the spring (73) is sleeved on the limiting rod (71). One end of the spring (73) is fixed on the moving plate (1), and the other end of the spring (73) is fixed on the limiting plate (72).

6. The high-efficiency adjustable electrostatic cutter according to claim 1, characterized in that: The bottom of the mobile plate (1) is provided with a plurality of bullseye bearings (8), and the top of the plurality of bullseye bearings (8) abuts against the bottom of the mobile plate (1).

7. The high-efficiency adjustable electrostatic cutter according to claim 6, characterized in that: The bottom center of the mobile plate (1) is provided with a guide groove (9) along the width direction of the mobile plate (1), and the top of the bullseye bearing (8) in the center abuts in the guide groove (9).

8. The high-efficiency adjustable electrostatic cutter according to claim 4, characterized in that: Each of the two ultra-high vacuum linear inductors (5) has a receiving frame (10) fixed on its flange, and the two drive motors (61) are fixed on the two receiving frames (10) respectively.