A cache cavity module

Abstract

The utility model relates to the technical field of semiconductor, especially point to a buffer cavity module, including cavity, install in the cavity and be used for supporting at least three supporting column of mask plate, the support seat of up and down sliding connection in the cavity and with the support seat of bearing frame of intercalation, the bearing frame is provided with and mask plate corresponds the accommodation mouth, the cavity is provided with transmission mouth, the bearing frame is installed at least three support body, at least two contact type sensors are installed in the cavity, two the support body is electrically conductive and with contact type sensor one -to -one correspondence, the support body is provided with contact part, the utility model discloses can quickly capture the slight gap or unevenness produced in the process of mask plate sticking, benefit satisfy EUV photoetching to nanometer level precision's strict requirement.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a buffer cavity module. Background Technology

[0002] With the rapid rise of industries such as intelligent manufacturing and electronic equipment, and the development of semiconductor technology, the market demand for chips is increasing day by day. The stability and production capacity of semiconductor equipment have become the focus of attention for various manufacturers. Semiconductor processing equipment is generally equipped with a loadlock chamber (LLC) to shorten the single-wafer process time and improve production capacity. The loadlock chamber is located between the front-end module (EFEM) and the transfer module (WHC) of the semiconductor processing equipment. After the wafer is coated in the reaction chamber connected to the transfer module, it is transferred to the loadlock chamber by a vacuum robot and cooled in the loadlock chamber. Then, an atmospheric robot removes the wafer from the loadlock chamber and transfers it to the cassette of the front-end module.

[0003] Traditional mask defect detection relies on optical or SEM technology, but its ability to monitor the bonding state at the micron / nanometer level in real time is limited. It is difficult to capture the subtle gaps or non-uniformities generated during the bonding process, such as invisible bonding abnormalities caused by differences in thermal expansion, which cannot meet the stringent requirements of EUV lithography for nanometer-level precision. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by providing a buffer cavity module that can quickly capture minute gaps or non-uniformities generated during the mask bonding process, thus meeting the stringent requirements of EUV lithography for nanometer-level precision.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a buffer cavity module, including a cavity, at least three support columns installed in the cavity and used to support a mask plate, a support seat slidably connected to the cavity and a carrier frame inserted into the support seat, wherein the carrier frame is provided with an accommodating opening corresponding to the mask plate and the cavity is provided with a transmission port;

[0007] The support frame is equipped with at least three supports, and at least two contact sensors are installed in the cavity. The two supports are conductive and correspond one-to-one with the contact sensors. The supports are provided with contact portions.

[0008] When a mask needs to be placed, the support base is moved upward, which moves the carrier frame upward to the required position to provide space for the mask.

[0009] When the mask is placed on the support column, the support seat moves the carrier frame downward. The support seat loses its support for the carrier frame, causing the contact part to abut against the mask. At least a portion of the mask extends into the receiving opening, so that the conductive support body corresponds to the contact sensor.

[0010] The cavity has a flip-up opening at its top end, a cavity cover hinged to the top end of the cavity, the cavity cover engaging with the flip-up opening, and a locking component installed in the cavity to lock the cavity cover.

[0011] The cavity cover is equipped with a light source that provides illumination to the cavity, and the bottom of the cavity is equipped with a vision lens for capturing information from the surface of the mask plate.

[0012] The support base is provided with at least three mating holes, and the support body is provided with a plug-in part, wherein the mating holes and the plug-in part cooperate.

[0013] Two of the supports are provided with annular grooves and detection surfaces, the detection surfaces extending horizontally;

[0014] When the mask plate and the contact part are accurately attached, the detection end of the contact sensor is in contact with the detection surface;

[0015] When the mask plate and the receiving port are not properly connected, the detection end of at least one of the contact sensors will come into contact with the annular groove line.

[0016] The locking component includes a locking rod with one end hinged to the cavity, a locking sleeve sleeved on the locking rod, and a bearing component threadedly connected to the locking rod.

[0017] When it is necessary to lock the cavity cover, force is applied to rotate the carrier component, which in turn moves the locking sleeve toward the cavity cover, so that the cavity cover is locked to the cavity.

[0018] The carrier is provided with an annular groove, and the locking sleeve is circumferentially connected with at least three positioning members, one end of which is inserted into the annular groove.

[0019] The locking sleeve is provided with a receiving cavity, and the portion of the carrier near the locking sleeve extends into the receiving cavity;

[0020] The bottom surface of the accommodating cavity is provided with a support portion, and one end of the bearing member abuts against the support portion.

[0021] The cavity is equipped with a support, and the support is provided with a limiting part;

[0022] When the other end of the locking rod swings away from the cavity to the desired position, the limiting part abuts against one side of the locking rod.

[0023] The beneficial effects of this utility model are:

[0024] In practical applications, two contact sensors detect the placement of the mask. When the mask is placed accurately and stably, it fits smoothly with the receiving port, achieving precise positioning of the mask. If the signals detected by the two contact sensors are inconsistent or the detection result of at least one contact sensor exceeds the preset value, it indicates an abnormal mask fit. This allows for the rapid detection of minute gaps or non-uniformities generated during the mask fit process, which helps to meet the stringent requirements of EUV lithography for nanometer-level precision. Attached Figure Description

[0025] Figure 1 This is a three-dimensional structural diagram of the buffer cavity module.

[0026] Figure 2 This is a partial three-dimensional view of the structure of this buffer cavity module.

[0027] Figure 3 This is an exploded view of the three-dimensional structure with a support frame and a mask plate.

[0028] Figure 4 This is an exploded view of the installation structure of the load-bearing frame and the support.

[0029] Figure 5 This is a schematic diagram of the three-dimensional structure of the contact sensor and its support.

[0030] Figure 6 This is a front view of the structure of this buffer cavity module.

[0031] Figure 7 This is an exploded view of the three-dimensional structure of the locking component.

[0032] Figure 8 This is a sectional view of the installation structure of the locking rod and the load-bearing component.

[0033] Figure 9 This is an exploded view of the three-dimensional structure with supports and locking components.

[0034] 01. Photomask;

[0035] 1. Cavity; 11. Support column; 12. Vision lens;

[0036] 2. Support base; 21. Connecting hole;

[0037] 3. Support frame; 301. Reception opening;

[0038] 31. Support body; 311. Contact part; 312. Insertion part;

[0039] 313. Annular groove; 314. Detection surface;

[0040] 4. Contact sensor;

[0041] 5. Cavity cover; 51. Light source;

[0042] 6. Locking components;

[0043] 61. Locking rod; 62. Locking sleeve; 621. Positioning element; 622. Receiving cavity; 623. Support part;

[0044] 63. Bearing component; 631. Annular groove;

[0045] 7. Support; 71. Limiting part. Detailed Implementation

[0046] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0047] refer to Figures 1 to 9 As shown, this utility model provides a buffer cavity module, including a cavity 1, at least three support columns 11 installed in the cavity 1 for supporting a mask plate 01, a support seat 2 slidably connected to the cavity 1, and a carrier frame 3 inserted into the support seat 2. The carrier frame 3 is provided with a receiving port 301 corresponding to the mask plate 01, and the cavity 1 is provided with a transmission port. The carrier frame 3 is equipped with at least three support bodies 31, and at least two contact sensors 4 are installed in the cavity 1. The two support bodies 31 are conductive and correspond one-to-one with the contact sensors 4. The support body 31 is provided with a contact part 311.

[0048] refer to Figure 1 , 2 As shown in Figures 3 and 6, in practical applications, a lifting module, such as a screw motor module, hydraulic cylinder, or electric cylinder, is installed on the outside of the cavity 1. The support base 2 is connected to the lifting module for drive, thereby enabling the support base 2 to move up and down and precisely control its position. The size of the receiving opening 301 is larger than that of the mask plate 01, which facilitates the accommodating of mask plates 01 with abnormal or accurate fit. When it is necessary to place the mask plate 01, the support base 2 is moved upward, which drives the carrier frame 3 to move upward to the required position, providing space for the mask plate 01. This allows the robot to place the mask plate 01 on the support column 11 through the transfer port, and also facilitates the picking and placing of the mask plate 01. (Reference) Figure 2 , 3As shown, when the mask 01 is placed on the support column 11, the support base 2 drives the carrier frame 3 to move downwards. The support base 2 loses its support for the carrier frame 3, causing the contact part 311 to abut against the mask 01. At least a portion of the mask 01 extends into the receiving opening 301, so that the conductive support 31 corresponds to the contact sensor 4. The placement of the mask 01 is detected by two contact sensors 4. When the mask 01 is accurately and stably placed, the mask 01 smoothly fits into the receiving opening 301, achieving precise positioning of the mask 01. When the signals detected by the two contact sensors 4 are inconsistent or the detection result of at least one contact sensor 4 exceeds a preset value, it indicates an abnormal fit of the mask 01, thereby quickly capturing the mask 01 overfitting. The minute gaps or non-uniformities generated during the process help meet the stringent requirements of EUV lithography for nanometer-level precision. The mask 01 can enter and exit the buffer cavity together with the carrier frame 3 through the transfer port, so that the mask 01 is always under the protection of the carrier frame 3. The carrier frame 3 is a visor sheet. After the mask 01 leaves the inside of the lithography machine, the visor sheet provides a physical barrier throughout the entire buffering, storage, transfer and detection process, which significantly reduces the risk of particle contamination and mechanical damage. Therefore, even if the cleanliness of the buffer cavity environment is slightly inferior, the visor sheet can effectively prevent most particles from falling directly onto the pattern surface of the mask 01, reducing the requirements for the environment. By reducing machine downtime or wafer scrap caused by mask 01 contamination, the overall production efficiency is improved.

[0049] refer to Figure 1 As shown, in this embodiment, the top of the cavity 1 is provided with a flip-out opening, and the top of the cavity 1 is hinged with a cavity cover 5. The cavity cover 5 cooperates with the flip-out opening, and the cavity 1 is equipped with a locking member 6 for locking the cavity cover 5. In actual application, the cavity cover 5 is flipped by applying force or by an external mechanism, which facilitates the inspection and maintenance of the cavity 1 or the internal equipment or components of the cavity 1. The cavity cover 5 is locked by the locking member 6, which helps to maintain the internal sealing of the cavity 1.

[0050] refer to Figure 6 As shown, in this embodiment, the cavity cover 5 is equipped with a light source 51 that provides illumination to the cavity 1, and a vision lens 12 for capturing surface information of the mask plate 01 is installed at the bottom of the cavity 1. The light source 51 ensures uniform illumination of the entire detection area, avoiding misjudgment caused by uneven illumination. The vision lens 12 compares the image captured on the mask plate 01 with the reference image, automatically identifying defects such as particles, stains, scratches, and missing / excessive patterns, detecting and preventing contaminated mask plates 01 from entering, and ensuring that the robot can accurately and safely grasp and place the mask plate 01.

[0051] refer to Figure 3 , 4As shown in Figure 5, in this embodiment, the support base 2 is provided with at least three docking holes 21, and the support body 31 is provided with a plug-in part 312. The docking holes 21 and the plug-in part 312 cooperate to facilitate accurate positioning of the bearing frame 3.

[0052] refer to Figure 4 , 5 As shown, in this embodiment, two of the supports 31 are provided with annular grooves 313 and detection surfaces 314, with the detection surfaces 314 extending horizontally. In actual application, the mask plate 01 is placed on the support column 11. Before the support seat 2 moves the carrier frame 3 downward, the contact sensor 4 is located below the carrier frame 3. During the movement of the carrier frame 3, the support seat 2 loses its support for the carrier frame 3, causing the contact portion 311 to abut against the mask plate 01. At least a portion of the mask plate 01 extends into the receiving opening 301, so that the conductive support 31 corresponds to the contact sensor 4. Specifically, the detection end of the contact sensor 4 uses a resistance wire. During the descent of the carrier frame 3, the resistance wire first contacts the annular groove 313. After the resistance wire separates from the annular groove 313, it recovers to its natural state through its own elasticity. The resistance wire is brought into contact with the detection surface 314, allowing direct detection of object contact. The results are clear, unaffected by optical interference, and the electrical signal response is extremely fast. When the mask plate 01 is accurately fitted with the contact part 311, the detection ends of the contact sensors 4 are in contact with the detection surface 314, and the contact areas of the detection ends of the two contact sensors 4 are equal, making it easy to immediately determine that the mask plate 01 is accurately fitted. When the mask plate 01 is abnormally inserted into the receiving port 301, at least one detection end of the contact sensor 4 is in line contact with the annular groove 313. The greater the resistance of the resistance wire during line contact, the more obvious the difference in the results of the two contact sensors 4, making it easy to quickly detect abnormal placement of the mask plate 01. The robot arm removes the abnormally placed mask plate 01, facilitating the rapid detection of minute gaps and quick response of detection results.

[0053] refer to Figure 1 , 7 As shown, in this embodiment, the locking member 6 includes a locking rod 61 with one end hinged to the cavity 1, a locking sleeve 62 sleeved on the locking rod 61, and a bearing member 63 threadedly connected to the locking rod 61. In actual application, when it is necessary to lock the cavity cover 5, a rotational torque is applied to the bearing member 63, which drives the bearing member 63 to rotate and move along the axial direction of the locking rod 61 toward the locking sleeve 62, so that the cavity cover 5 is locked to the cavity 1.

[0054] refer to Figure 7As shown, in this embodiment, the carrier 63 is provided with an annular groove 631, and the locking sleeve 62 is circumferentially connected with at least three positioning elements 621. One end of the positioning element 621 is inserted into the annular groove 631. In actual application, the positioning element 621 has a cylindrical structure, so that there is a line contact between the positioning element 621 and the annular groove 631. The stable force can be transmitted axially through at least three line contacts, which can effectively reduce structural wear and extend service life. The carrier 63 can be removed by disassembling the positioning element 621, which is convenient for replacing and maintaining the carrier 63.

[0055] refer to Figure 7 , 8 As shown, in this embodiment, the locking sleeve 62 is provided with a receiving cavity 622, and the portion of the bearing member 63 near the end of the locking sleeve 62 extends into the receiving cavity 622. The structure is compact and saves space. The bottom surface of the receiving cavity 622 is provided with a support portion 623, and one end of the bearing member 63 abuts against the support portion 623. The support portion 623 increases the force transmission area between the bearing member 63 and the locking sleeve 62, effectively disperses the force of the bearing member 63, prevents local stress concentration, and improves structural reliability.

[0056] refer to Figure 1 , 9 As shown, in this embodiment, the cavity 1 is equipped with a support 7, and the support 7 is provided with a limiting part 71; when the other end of the locking rod 61 swings away from the cavity 1 to the desired position, the limiting part 71 abuts against one side of the locking rod 61; in actual application, when the cavity cover 5 is not needed to be locked, the other end of the locking rod 61 is swung away from the cavity 1 to the desired position, and the limiting part 71 abuts against one side of the locking rod 61, so that the locking rod 61 can be easily released from the locked state, which facilitates accurate positioning of the locking rod 61.

[0057] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A cache cavity module, characterized by, It includes a cavity (1), at least three support columns (11) installed in the cavity (1) and used to support the mask plate (01), a support seat (2) slidably connected to the cavity (1) and a carrier frame (3) inserted into the support seat (2), the carrier frame (3) is provided with a receiving port (301) corresponding to the mask plate (01), and the cavity (1) is provided with a transmission port; The support frame (3) is equipped with at least three supports (31), and at least two contact sensors (4) are installed in the cavity (1). The two supports (31) are conductive and correspond one-to-one with the contact sensors (4). The supports (31) are provided with contact parts (311). When it is necessary to place the mask plate (01), the support base (2) is moved upward, which drives the carrier frame (3) to move upward to the required position to provide space for placing the mask plate (01); When the mask plate (01) is placed on the support column (11), the support seat (2) drives the carrier frame (3) to move downward. The support seat (2) loses its support for the carrier frame (3), causing the contact part (311) to abut against the mask plate (01). At least part of the mask plate (01) extends into the receiving port (301) so that the conductive support body (31) corresponds to the contact sensor (4).

2. The cache plenum module of claim 1, wherein, The top of the cavity (1) is provided with a flip-out opening, and the top of the cavity (1) is hinged with a cavity cover (5). The cavity cover (5) cooperates with the flip-out opening, and the cavity (1) is equipped with a locking member (6) for locking the cavity cover (5).

3. The buffer cavity module according to claim 2, characterized in that, The cavity cover (5) is equipped with a light source (51) that provides illumination to the cavity (1), and a visual lens (12) for capturing information on the surface of the mask plate (01) is installed at the bottom of the cavity (1).

4. The buffer cavity module according to claim 1, characterized in that, The support base (2) is provided with at least three docking holes (21), and the support body (31) is provided with a plug-in part (312), and the docking holes (21) cooperate with the plug-in part (312).

5. The buffer cavity module according to claim 1, characterized in that, Two of the supports (31) are provided with annular grooves (313) and detection surfaces (314), the detection surfaces (314) extending horizontally; When the mask plate (01) and the contact part (311) are accurately attached, the detection end of the contact sensor (4) is in contact with the detection surface (314). When the mask plate (01) and the receiving port (301) are not properly connected, the detection end of at least one of the contact sensors (4) will come into contact with the annular groove (313).

6. The buffer cavity module according to claim 2, characterized in that, The locking member (6) includes a locking rod (61) with one end hinged to the cavity (1), a locking sleeve (62) sleeved on the locking rod (61), and a bearing member (63) threadedly connected to the locking rod (61). When it is necessary to lock the cavity cover (5), force is applied to rotate the bearing (63), which in turn moves the locking sleeve (62) toward the cavity cover (5) so that the cavity cover (5) is locked with the cavity (1).

7. The buffer cavity module according to claim 6, characterized in that, The bearing member (63) is provided with an annular groove (631), and the locking sleeve (62) is circumferentially connected with at least three positioning members (621), one end of the positioning member (621) being inserted into the annular groove (631).

8. The buffer cavity module according to claim 6, characterized in that, The locking sleeve (62) is provided with a receiving cavity (622), and the portion of the bearing member (63) near the end of the locking sleeve (62) extends into the receiving cavity (622); The bottom surface of the accommodating cavity (622) is provided with a support part (623), and one end of the bearing member (63) abuts against the support part (623).

9. The buffer cavity module according to claim 6, characterized in that, The cavity (1) is equipped with a support (7), and the support (7) is provided with a limiting part (71). When the other end of the locking rod (61) swings away from the cavity (1) to the desired position, the limiting part (71) abuts against one side of the locking rod (61).

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