Spraying device and polishing apparatus

Abstract

The utility model discloses a kind of spraying device and polishing equipment, and spraying device is used for spraying polishing disc in polishing equipment, and spraying device includes: spraying arm, spraying arm extends along first direction, the inside of spraying arm has first spraying channel, second spraying channel and communicating hole, first spraying channel and second spraying channel are arranged in parallel, first spraying channel has liquid inlet end and liquid outlet end relatively arranged along its length direction, liquid inlet end is used to connect with liquid supply equipment, communicating hole is communicated between the side wall of first spraying channel and the side wall of second spraying channel;First spray head, first spray head is communicated with the liquid outlet end of first spraying channel;Second spray head, second spray head is communicated with second spraying channel, and the spraying position of second spray head is different from first spray head.

Description

Technical Field

[0001] This application relates to the field of chemical mechanical polishing equipment technology, and more particularly to a spraying device and polishing equipment. Background Technology

[0002] Integrated circuits are a core technology of modern industry, widely used in various electronic products and systems. However, my country has long relied on imports in this field, facing numerous risks, especially given the limitations in equipment technology. Achieving self-sufficiency and control over domestically produced equipment is therefore of paramount importance. Chemical mechanical polishing (CMP) equipment, as one of the key pieces of equipment in integrated circuit manufacturing, directly impacts the manufacturing quality of integrated circuits.

[0003] In existing technologies, the high-pressure water spraying devices in chemical mechanical polishing (CMP) equipment have significant shortcomings. These devices supply liquid from the rear end of the spray arm to the front end, providing high-pressure water to multiple nozzles through a single supply channel. This results in a higher flow rate for the nozzles at the rear end and a lower flow rate for those at the front end. Consequently, the polishing fluid in the center of the polishing disc cannot be effectively cleaned, leading to poor cleaning results, low cleaning efficiency, and reduced polishing quality. Furthermore, it diminishes the cleanliness and lifespan of the polishing equipment. Utility Model Content

[0004] This utility model discloses a spraying device and a polishing equipment, which have good cleaning effect and high cleaning efficiency.

[0005] To achieve the above objectives, the first aspect of this utility model discloses a spraying device for spraying a polishing disc, the spraying device comprising:

[0006] A spray arm extends along a first direction. The interior of the spray arm has a first spray channel, a second spray channel, and a connecting hole. The first spray channel and the second spray channel are arranged side by side. The first spray channel has an inlet end and an outlet end that are arranged opposite to each other along its own length direction. The inlet end is used to connect to a liquid supply device. The connecting hole connects between the side wall of the first spray channel and the side wall of the second spray channel.

[0007] The first spray head is connected to the liquid outlet end of the first spray channel;

[0008] The second spray head is connected to the second spray channel, and the spray position of the second spray head is different from that of the first spray head.

[0009] As an optional implementation, both the first spray channel and the second spray channel extend along the first direction.

[0010] As an optional implementation, along the first direction, the distance between the connecting hole and the liquid outlet end of the first spray channel is less than the distance between the connecting hole and the liquid inlet end of the first spray channel.

[0011] As an optional implementation, there is one connecting hole, and the diameter of the connecting hole is smaller than the inner diameter of the first spray channel; or, there are multiple connecting holes, which are arranged at intervals along the first direction, and the diameter of each connecting hole is smaller than the inner diameter of the first spray channel.

[0012] As an optional implementation, the cross-sectional area of ​​the spray orifice of the first spray head is larger than the cross-sectional area of ​​the spray orifice of any of the second spray heads, so that the flow rate of the first spray head is greater than the flow rate of the second spray head.

[0013] As an optional implementation, there are multiple second spray heads, which are spaced apart along the first direction on the spray arm.

[0014] As an optional implementation, in a plurality of second spray heads, the cross-sectional area of ​​the spray holes of the second spray head gradually decreases from the side away from the liquid inlet end to the side closer to the liquid inlet end.

[0015] As an optional implementation, the first spray channel and the second spray channel are arranged side by side in a vertical direction, with the first spray channel located above the second spray channel and the second spray head located on the side of the second spray channel opposite to the first spray channel.

[0016] As an optional implementation, the second spray head is configured to spray downwards, the spray direction of the first spray head is toward the side of the spray arm away from the liquid inlet end, and the spray direction of the first spray head forms an angle with the spray direction of the second spray head in the vertical direction, the angle being an acute angle.

[0017] As an optional implementation, the sidewall of the second spray channel has a plurality of liquid outlet holes arranged at intervals along the first direction. The liquid outlet holes are correspondingly arranged with the second spray head, and the liquid outlet holes are connected to the inner cavity of the second spray channel. Each second spray head is connected to the corresponding liquid outlet hole.

[0018] The second aspect of this utility model discloses a polishing device, which includes: a mounting frame; a polishing disc; and a spraying device. The spraying device is the same as the spraying device described in the first aspect of this utility model. The spraying device is disposed on the mounting frame and located above the polishing disc. The spraying device is used to spray the polishing disc, and the first spray head in the spraying device is disposed corresponding to the center of the polishing disc.

[0019] Compared with the prior art, the beneficial effects of this application are:

[0020] The spray device provided in this application optimizes the internal channel design of the spray arm, sets up a first spray channel and a second spray channel in parallel, and opens a connecting hole between the side walls of the first spray channel and the second spray channel. This allows the spray liquid to be supplied to the first spray channel first to meet the cleaning needs of the central area of ​​the polishing pad, and then to the second spray channel through the connecting hole. This improves the cleaning effect and efficiency, extends the service life of the polishing pad, ensures the polishing quality of the polishing equipment, and improves the overall performance and reliability of the polishing equipment. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a spray device in the prior art;

[0023] Figure 2 This is a schematic diagram of the structure of the spraying device provided in the embodiments of this application;

[0024] Figure 3 This is a schematic diagram of the polishing equipment provided in the embodiments of this application.

[0025] Explanation of reference numerals in the attached figures:

[0026] a-Spray pipe; b-Nozzle; 100-Spray device; 200-Polishing equipment; 201-Mounting bracket; 202-Polishing disc; 1-Spray arm; 11-First spray channel; 12-Second spray channel; 121-Liquid outlet; 13-Connecting hole; 2-First spray head; 3-Second spray head; X-First direction. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0028] In this application, the terms "upper," "lower," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0029] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0030] Furthermore, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0031] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0032] Integrated circuits are a core technology of modern industry, widely used in various electronic products and systems. However, my country has long relied on imports in this field, facing numerous risks, especially given the limitations in equipment technology. Achieving self-sufficiency and control over domestically produced equipment is therefore of paramount importance. Chemical mechanical polishing (CMP) equipment, as one of the key pieces of equipment in integrated circuit manufacturing, directly impacts the manufacturing quality of integrated circuits.

[0033] In integrated circuit manufacturing, due to the complexity of multilayer wiring and interconnect structures, microscopic and macroscopic unevenness forms on the wafer surface between different process steps. Polishing equipment, through chemical mechanical polishing (CMP), can smooth out these uneven areas on the wafer surface, ensuring that subsequent processes can be performed on a smooth surface, thereby improving the precision and performance of chip manufacturing. Polishing slurry is used to assist in the polishing process. However, polishing slurry residue remains on the polishing pads and discs after polishing. The spray system in the polishing equipment effectively cleans these residues, ensuring the cleanliness and lifespan of the polishing pads, while preventing the polishing slurry from interfering with subsequent processes.

[0034] However, as Figure 1 As shown, Figure 1 This is a schematic diagram of a spray device in the prior art. In the existing technology, the high-pressure water spray device for chemical mechanical polishing equipment has significant shortcomings. The spray device uses a method of supplying liquid from the rear end of the spray arm to the front end, providing high-pressure water to multiple nozzles b through only one spray channel a. This results in a higher flow rate for the nozzles located at the rear end and a lower flow rate for the nozzles located at the front end. The lower flow rate of the nozzles located at the center of the polishing disc means that the polishing liquid in the center of the polishing disc cannot be effectively cleaned. This not only results in poor cleaning effect and low cleaning efficiency, but also affects the polishing quality, and reduces the cleanliness and service life of the polishing equipment.

[0035] In view of this, embodiments of this application disclose a spraying device and a polishing equipment. By optimizing the internal channel design of the spraying arm and adopting a dual-channel liquid supply system of a first spraying channel and a second spraying channel, the distribution of the first spraying head flow rate being greater than that of the second spraying head is achieved, which meets the demand for high-flow cleaning at the center of the polishing disc and improves the cleaning effect and efficiency.

[0036] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0037] Please see Figure 2 , Figure 2This is a schematic diagram of the structure of the spray device 100 provided in the embodiment of this application. The first aspect of this utility model discloses a spray device 100 for spraying a polishing disc 202. The spray device 100 includes: a spray arm 1 extending along a first direction X, the spray arm 1 having a first spray channel 11, a second spray channel 12 and a connecting hole 13 inside, the first spray channel 11 and the second spray channel 12 being arranged side by side, the first spray channel 11 having an inlet end and an outlet end arranged opposite to each other along its own length direction, the inlet end being used to connect to a liquid supply device, and the connecting hole 13 connecting between the side wall of the first spray channel 11 and the side wall of the second spray channel 12; a first spray head 2 connected to the outlet end of the first spray channel 11; and a second spray head 3 connected to the second spray channel 12, the second spray head 3 and the first spray head 2 having different spraying positions.

[0038] It is understandable that the spray arm 1 extends along the first direction X so that the spray arm 1 can cover the polishing disk 202 in a suitable manner, ensuring that the spray liquid can be sprayed to all parts of the polishing disk 202 during the rotation of the polishing disk 202, ensuring the comprehensiveness of the cleaning, and providing a good foundation for subsequent cleaning work.

[0039] Through the first spray channel 11 and the second spray channel 12 provided inside the spray arm 1, and the first spray head 2 connected to the first spray channel 11 and the second spray head 3 connected to the second spray channel 12, the spray device 100 can perform targeted spraying on different areas of the polishing disc 202. The first spray channel 11 is specifically used to supply liquid to the first spray head 2, and the second spray channel 12 supplies liquid to the second spray head 3.

[0040] Optionally, the first spray head 2 can be used to clean the central area of ​​the polishing disc 202, while the second spray head 3 is responsible for cleaning other radial areas of the polishing disc 202 that are not covered by the first spray head 2. This division of labor ensures that each area receives a suitable spraying effect, avoiding the problem of uneven flow distribution in different areas under the traditional single-channel spraying method.

[0041] Specifically, the polishing disc 202 is a circular polishing disc 202, and the spraying device 100 is set to correspond to the radius of the polishing disc 202. During the cleaning process of the polishing disc 202, the polishing disc 202 can rotate around the center. The spraying device 100 can spray cleaning liquid onto the polishing disc 202 when it rotates, thereby forming a dynamic cleaning surface during the rotation process to ensure the cleaning effect of the polishing disc.

[0042] Furthermore, the spraying range of the first spray head 2 and the second spray head 3 corresponds to the position from the center to the edge of the polishing disk 202, so that the dynamic spraying range of the spraying device 100 completely covers the entire polishing disk 202 during rotation.

[0043] Optionally, the liquid inlet of the first spray channel 11 can be connected to the liquid supply equipment via a connector. The connector can be a perfluoroalkoxy (PFA) connector. PFA connectors have excellent chemical stability and can withstand almost all chemical reagents, including strong acids, strong alkalis and organic solvents, so that PFA connectors will not be corroded when handling various chemical substances, thus ensuring the long-term stable operation of the spray device 100.

[0044] The first spray head 2 is connected to the liquid outlet of the first spray channel 11 and is used to spray the central area of ​​the polishing disc 202. It can be understood that during the cleaning process, the cleaning fluid on the polishing disc 202 can flow towards the edge of the polishing disc under the action of centrifugal force, thereby covering the area from the center to the edge of the polishing disc 202. By specifically designing the first spray head 2 to clean the central area, and by connecting the first spray head 2 to the liquid outlet of the first spray channel 11, it is ensured that the first spray head 2 has sufficient flow to provide spray cleaning for the central area, effectively removing residual polishing fluid and improving the cleanliness of the polishing disc 202. Compared with the prior art, under the same time and the same polishing disc 202 rotation speed, the solution of the above embodiment can provide more cleaning fluid to the central area. Correspondingly, more cleaning fluid flows from the center to the edge when the polishing disc 202 rotates, thereby improving the cleaning efficiency and cleaning effect of the central area.

[0045] Optionally, the first spray head 2 and the second spray head 3 can be connected to the spray arm 1 by threads. The first spray head 2 and the second spray head 3, and the spray arm 1, are respectively machined with matching internal and external threads. Rotating the spray head allows for a tight connection with the spray arm 1. Alternatively, the first spray head 2 and the second spray head 3 can be connected to the spray arm 1 by a ferrule. The ferrule and nut are used to fix the first spray head 2 and the second spray head 3 to the spray arm 1. The ferrule deforms under the pressure of the nut, tightly fitting the first spray head 2 and the second spray head 3 to the spray arm 1, forming a seal.

[0046] The connecting hole 13 connects the sidewall of the first spray channel 11 and the sidewall of the second spray channel 12, enabling liquid flow and pressure balance between the first spray channel 11 and the second spray channel 12. The liquid used for spraying is supplied from the liquid supply device to the inlet end of the first spray channel 11 of the spray arm 1, and flows along the channel to the outlet end. During this process, some of the spray liquid enters the second spray channel 12 through the connecting hole 13, thereby ensuring that the liquid supply to the first spray channel 11 is prioritized over the second spray channel 12.

[0047] Specifically, the first spray head 2 is directly connected to the liquid outlet of the first spray channel 11, enabling it to obtain sufficient spray liquid immediately and clean the central area of ​​the polishing pad 202 at a relatively high flow rate. The second spray head 3, on the other hand, obtains spray liquid from the second spray channel 12 and is used to clean the radial areas of the polishing pad 202 not covered by the first spray head 2. This ensures that the cleaning needs of the central area are prioritized, improving cleaning efficiency and effectiveness, extending the service life of the polishing pad, and enhancing the overall performance of the polishing equipment 200.

[0048] Thus, the spray device 100 provided in this application embodiment optimizes the internal channel design of the spray arm 1, sets up a first spray channel 11 and a second spray channel 12 in parallel, and opens a connecting hole 13 between the side walls of the first spray channel 11 and the second spray channel 12, so that the spray liquid is preferentially supplied to the first spray channel 11 to meet the cleaning needs of the central area of ​​the polishing pad 202, and the second spray channel 12 is supplied with liquid through the connecting hole 13, thereby improving the cleaning effect and efficiency, extending the service life of the polishing pad, ensuring the polishing quality of the polishing equipment 200, and improving the overall performance and reliability of the polishing equipment 200.

[0049] Please see Figure 2 In some embodiments, both the first spray channel 11 and the second spray channel 12 extend along a first direction X. The first spray channel 11 and the second spray channel 12 extending in the same direction help to simplify the structure of the spray arm 1, making the spray arm 1 easier to manufacture and maintain, thereby optimizing the performance of the spray device 100, improving the cleaning effect and efficiency, and enhancing the overall reliability and maintainability of the spray device 100.

[0050] Please see Figure 2 In some embodiments, along the first direction X, the distance between the connecting hole 13 and the liquid outlet end of the first spray channel 11 is less than the distance between the connecting hole 13 and the liquid inlet end of the first spray channel 11.

[0051] Specifically, the connecting hole 13 is closer to the liquid outlet of the first spray channel 11, allowing the spray liquid to flow preferentially to the liquid outlet in the first spray channel 11. This ensures that the first spray head 2 receives sufficient spray liquid to meet the cleaning needs of the central area of ​​the polishing disc 202. This prevents the spray liquid from prematurely flowing into the second spray channel 12 through the connecting hole 13 after entering the first spray channel 11, thus guaranteeing the cleaning effect of the central area.

[0052] Meanwhile, the connecting hole 13 is closer to the liquid outlet end of the first spray channel 11. The liquid outlet pressure and other parameters inside the first spray channel 11 are less affected by the connecting hole 13, which helps to maintain the pressure stability inside the first spray channel 11. This results in the spray liquid sprayed from the first spray head 2 having a higher flow rate and pressure, improving cleaning efficiency, enhancing the adaptability of the spray device 100 to the cleaning needs of different areas of the polishing disc 202, and further improving the cleaning effect and reliability of the entire spray device 100.

[0053] Please see Figure 2 In some embodiments, there is one connecting hole 13, and the diameter of the connecting hole 13 is smaller than the inner diameter of the first spray channel 11.

[0054] The presence of only one connecting hole 13 ensures a more concentrated and controllable path for the spray liquid flowing from the first spray channel 11 to the second spray channel 12, thereby improving the utilization efficiency of the spray liquid. The diameter of the connecting hole 13 is smaller than the inner diameter of the first spray channel 11, guaranteeing sufficient flow space for the spray liquid within the first spray channel 11. This prioritizes the supply of liquid to the first spray head 2, ensuring effective cleaning of the central area of ​​the polishing disc 202. When the spray liquid enters the first spray channel 11 from the supply device, due to the smaller diameter of the connecting hole 13, the spray liquid preferentially flows along the first spray channel 11 towards its outlet, thus prioritizing supply to the first spray head 2 and ensuring that the cleaning needs of the central area are met.

[0055] Meanwhile, the smaller diameter of the connecting hole 13 compared to the inner diameter of the first spray channel 11 allows for a stable liquid supply to the second spray channel 12 without affecting the main liquid supply function of the first spray channel 11, thus ensuring the cleaning effect of the second spray head 3. Furthermore, the single connecting hole 13 and its smaller diameter help simplify the internal structure of the spray arm 1, reduce manufacturing difficulty and cost, and improve the overall strength and reliability of the spray arm 1.

[0056] Please see Figure 2 In some embodiments, there are multiple connecting holes 13, which are arranged at intervals along the first direction X, and the diameter of each connecting hole 13 is smaller than the inner diameter of the first spray channel 11.

[0057] The arrangement of multiple connecting holes 13 allows the spray liquid to flow more quickly from the first spray channel 11 to the second spray channel 12. The diameter of each connecting hole 13 is smaller than the inner diameter of the first spray channel 11, ensuring sufficient spray liquid flow in the first spray channel 11, thereby prioritizing the liquid supply needs of the first spray head 2.

[0058] In addition, the design of the multi-connecting holes 13 can increase the total cross-sectional area of ​​the spray liquid flowing from the first spray channel 11 to the second spray channel 12, thereby providing a more sufficient supply of spray liquid to the second spray channel 12 while ensuring priority supply to the first spray head 2, which helps to clean the polishing disc 202 more efficiently and further improve the cleaning effect.

[0059] Please see Figure 2 In some embodiments, the first spray channel 11 and the second spray channel 12 are arranged side by side in a vertical direction, with the first spray channel 11 located above the second spray channel 12, and the second spray head 3 located on the side of the second spray channel 12 away from the first spray channel 11.

[0060] By arranging the first spray channel 11 and the second spray channel 12 side by side in the vertical direction, with the first spray channel 11 located above and the second spray channel 12 located below, and placing the second spray head 3 on the side of the second spray channel 12 away from the first spray channel 11, efficient distribution and spraying of the spray liquid are achieved.

[0061] The first spray channel 11 and the second spray channel 12 are arranged side by side in the vertical direction, which helps to reduce mutual interference of the spray liquid in the spray channel, improve the flow efficiency of the spray liquid, ensure that each spray head can work stably, thereby extending the service life of the spray device 100 and improving the reliability and maintenance convenience of the spray device 100.

[0062] Please see Figure 2 In some embodiments, the second spray head 3 is configured to spray downwards, the spray direction of the first spray head 2 is toward the side of the spray arm 1 away from the liquid inlet end, and the spray direction of the first spray head 2 forms an angle with the spray direction of the second spray head 3 in the vertical direction, the angle being an acute angle.

[0063] The first spray head 2 faces the side of the spray arm 1 away from the liquid inlet end, and forms an acute angle vertically with the spray direction of the second spray head 3. This allows the first spray head 2 to effectively cover the central area of ​​the polishing disk 202, while the second spray head 3 covers the radial areas of the polishing disk 202 that have not been cleaned by the first spray head 2. The acute angle ensures that the spray liquid forms a certain spray angle in both the vertical and horizontal directions, thereby more comprehensively covering the surface of the polishing disk 202 and improving cleaning efficiency.

[0064] The spraying directions of the first spray head 2 and the second spray head 3 form an acute angle in the vertical direction, avoiding direct confrontation between the first spray head 2 and the second spray head 3, reducing mutual interference of the spray liquids, and ensuring that the spraying effect of each spray head is not affected. The spraying direction of the first spray head 2 is towards the center of the polishing disk 202, and the spraying direction of the second spray head 3 is downward. This design allows the spray liquids to independently cover the target area, avoiding mutual interference.

[0065] Meanwhile, by optimizing the spray direction and angle, the spray liquid can be sprayed more accurately onto the area that needs to be cleaned, reducing liquid waste and improving the utilization efficiency of the spray liquid. No additional mechanical structure or complex control system is required to adjust the spray angle, which simplifies the design and maintenance of the spray device 100 and reduces the complexity and cost of the spray device 100.

[0066] Please see Figure 2 In some embodiments, there are multiple second spray heads 3, which are spaced apart along the first direction X on the spray arm 1; the sidewall of the second spray channel 12 has multiple liquid outlet holes 121 arranged at intervals along the first direction X, the liquid outlet holes 121 and the second spray heads 3 are correspondingly arranged, and the liquid outlet holes 121 and the inner cavity of the second spray channel 12 are connected, and each second spray head 3 is connected to the corresponding liquid outlet hole 121.

[0067] The spray device 100 achieves comprehensive cleaning of the polishing disc 202 by arranging multiple second spray heads 3 at intervals along the first direction X on the spray arm 1 and correspondingly arranging multiple liquid outlet holes 121 on the side wall of the second spray channel 12. Each second spray head 3 is connected to its corresponding liquid outlet hole 121. This ensures complete coverage of the polishing disc 202 with the spray liquid, avoiding incomplete cleaning caused by the limited spray range of a single second spray head 3. Simultaneously, the multiple liquid outlet holes 121 are connected to the inner cavity of the second spray channel 12, ensuring a stable supply of spray liquid to each second spray head 3 and improving the cleaning effect of the polishing disc 202.

[0068] Furthermore, the spaced arrangement of multiple second spray heads 3 enhances the adaptability and flexibility of the entire spray system, enabling them to better meet the cleaning needs of polishing discs 202 of different sizes and shapes. By adjusting the number and spacing of the spray heads, the distribution range and density of the spray liquid can be precisely controlled, further optimizing the cleaning effect. This improves the cleaning efficiency of the polishing discs 202 and also enhances the reliability and stability of the spray device 100, ensuring good cleaning performance under various operating conditions.

[0069] Please see Figure 2In some embodiments, the spray hole cross-sectional area of ​​the first spray head 2 is larger than the spray hole cross-sectional area of ​​any second spray head 3, so that the flow rate of the first spray head 2 is greater than the flow rate of the second spray head 3.

[0070] The cross-sectional area of ​​the spray nozzle of the first spray head 2 is larger than that of any of the spray nozzles of the second spray head 3, thus ensuring that the flow rate of the first spray head 2 is greater than that of the second spray head 3. This allows the first spray head 2 to spray the central area of ​​the polishing disc 202 with a larger flow rate, meeting the demand of the central area for a large amount of spray liquid, effectively removing residual polishing liquid in the area, and ensuring the cleaning effect.

[0071] Meanwhile, the second spray head 3 cleans with a relatively small flow rate, which meets the cleaning needs of the polishing disc 202 while avoiding excessive use of the spray liquid, thus improving the utilization efficiency of the spray liquid. Through this differentiated design of the spray hole cross-sectional area, the entire spray device 100 can perform precise cleaning according to the characteristics of different areas of the polishing disc 202, optimize the distribution of the spray liquid, improve the cleaning effect and efficiency, reduce liquid waste, and enhance the economy and practicality of the spray device 100.

[0072] Please see Figure 2 In some embodiments, among the plurality of second spray heads 3, the cross-sectional area of ​​the spray holes of the second spray head 3 gradually decreases from the side away from the liquid inlet end to the side closer to the liquid inlet end.

[0073] The cross-sectional area of ​​the spray orifice of the second spray head 3 gradually decreases from the side furthest from the liquid inlet end to the side closer to the liquid inlet end, which helps to optimize the distribution of the spray liquid. By adjusting the cross-sectional area of ​​the spray orifice of each spray head, the flow rate of the spray liquid can be reasonably allocated according to the actual cleaning needs, thereby achieving efficient utilization of the spray liquid and reducing waste.

[0074] The gradient spray nozzle cross-sectional area design further improves cleaning efficiency and effectiveness. Along the radial direction of the polishing disc 202, the closer to the center of the polishing disc 202, the more cleaning fluid is supplied; that is, the smaller the centrifugal force, the more cleaning fluid is supplied, thus improving the overall cleaning efficiency and effect of the polishing disc 202.

[0075] Please see Figure 3 , Figure 3 This is a schematic diagram of the structure of the polishing device 200 provided in the embodiments of this application. The second aspect of the embodiments of this application provides a polishing device 200, which includes: a mounting frame 201; a polishing disc 202; and a spraying device 100. The spraying device 100 is the spraying device 100 of the first aspect of this utility model. The spraying device 100 is disposed on the mounting frame 201 and located above the polishing disc 202. The spraying device 100 is used to spray the polishing disc 202. The first spray head 2 in the spraying device 100 is disposed at the center of the polishing disc 202.

[0076] Specifically, the spray arm 1 of the spray device 100 may be provided with a connecting part, and the connecting part may be provided with a connecting hole. The connecting hole is fitted onto the mounting frame 201 so that the spray arm 1 is fixed to the mounting frame 201 to ensure the stability of the spray device 100.

[0077] Optionally, a water supply pipeline may be installed inside the mounting bracket 201. One end of the water supply pipeline is connected to the liquid supply equipment, and the other end of the water supply pipeline is connected to the spray device 100 to provide spray liquid to the first spray pipeline of the spray device 100.

[0078] Since the polishing equipment 200 provided in this application embodiment includes the spraying device 100 provided in the first aspect embodiment of this application, the polishing equipment 200 has the beneficial effects of any of the above-mentioned spraying devices 100, which will not be repeated here.

[0079] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A spraying device for spraying a polishing disc, characterized in that, The spraying device includes: A spray arm extends along a first direction. The interior of the spray arm has a first spray channel, a second spray channel, and a connecting hole. The first spray channel and the second spray channel are arranged side by side. The first spray channel has an inlet end and an outlet end that are arranged opposite to each other along its own length direction. The inlet end is used to connect to a liquid supply device. The connecting hole connects between the side wall of the first spray channel and the side wall of the second spray channel. The first spray head is connected to the liquid outlet end of the first spray channel; The second spray head is connected to the second spray channel, and the spray position of the second spray head is different from that of the first spray head.

2. The spraying device according to claim 1, characterized in that, Along the first direction, the distance between the connecting hole and the liquid outlet end of the first spray channel is less than the distance between the connecting hole and the liquid inlet end of the first spray channel.

3. The spraying device according to claim 2, characterized in that, There is one connecting hole, and the diameter of the connecting hole is smaller than the inner diameter of the first spray channel; or, The number of the connecting holes is multiple, and the multiple connecting holes are arranged at intervals along the first direction. The diameter of each connecting hole is smaller than the inner diameter of the first spray channel.

4. The spraying device according to claim 1, characterized in that, The cross-sectional area of ​​the spray orifice of the first spray head is larger than the cross-sectional area of ​​the spray orifice of any of the second spray heads, so that the flow rate of the first spray head is greater than the flow rate of the second spray head.

5. The spraying device according to any one of claims 1-4, characterized in that, The number of second spray heads is multiple, and the multiple second spray heads are spaced apart along the first direction on the spray arm.

6. The spraying device according to claim 5, characterized in that, In the plurality of second spray heads, the cross-sectional area of ​​the spray holes of the second spray head gradually decreases from the side away from the liquid inlet end to the side closer to the liquid inlet end.

7. The spraying device according to any one of claims 1-4, characterized in that, The first spray channel and the second spray channel are arranged side by side in a vertical direction, with the first spray channel located above the second spray channel and the second spray head located on the side of the second spray channel opposite to the first spray channel.

8. The spraying device according to claim 7, characterized in that, The second spray head is configured to spray downwards, and the spray direction of the first spray head is toward the side of the spray arm away from the liquid inlet end. The spray direction of the first spray head forms an angle with the spray direction of the second spray head in the vertical direction, and the angle is an acute angle.

9. The spraying device according to claim 5, characterized in that, The sidewall of the second spray channel has a plurality of liquid outlet holes arranged at intervals along the first direction. The liquid outlet holes are correspondingly provided with the second spray head, and the liquid outlet holes are connected to the inner cavity of the second spray channel. Each second spray head is connected to the corresponding liquid outlet hole.

10. A polishing device, characterized in that, The polishing equipment includes: Mounting rack; Polishing disc; A spraying device, wherein the spraying device is the spraying device according to any one of claims 1-9, the spraying device is disposed on the mounting frame and located above the polishing disc, the spraying device is used to spray the polishing disc, and the first spray head in the spraying device is disposed corresponding to the center of the polishing disc.

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