Foldable storage semiconductor production plant material cart

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, concretely to a collapsible storage's semiconductor production workshop material trolley, include: support bottom shell, store material subassembly, including baffle and slide rail no.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically a foldable and retractable material trolley for semiconductor production workshops. Background Technology

[0002] In semiconductor manufacturing, workshops need to frequently transfer and temporarily store materials of various specifications. Traditional material carts have the following problems: fixed storage space, making it difficult to adapt to materials of different sizes, resulting in low space utilization; lack of flexible classification structure, leading to damage or confusion due to mixed placement of materials; most carts cannot be folded or height adjusted, occupying a large amount of workshop space when idle, affecting production flow efficiency; and cumbersome manual adjustment operation, making it difficult to quickly adapt to the material storage needs of different production stages.

[0003] A search revealed existing technology (publication number: CN114735055B), which describes "an electronic trolley for wafer handling." This utility model includes a mobile platform with shock-absorbing wheels, a battery, and a controller. The mobile platform has a support platform with a positioning ring, a weighing sensor connected to the controller, and a reader. It is surrounded by a partitioned grille, and one side has a gantry structure push-pull handle with a display module (including a camera) and an arc-shaped handle. The display module and the push-pull handle are connected by C-type buckles and locking mechanisms. The wafer cassette is placed on the support platform and has an electronic tag. The shock-absorbing wheels have electronic braking components.

[0004] However, the device lacks folding and storage functionality, resulting in low space utilization. Furthermore, it lacks a flexible and adjustable storage area partition structure, limiting its adaptability. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a foldable and retractable material trolley for semiconductor manufacturing workshops.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a foldable and retractable material trolley for semiconductor production workshops, comprising: a supporting base shell; a storage assembly, including a partition and a slide rail one, the partition being slidably connected inside the supporting base shell, the slide rail one being connected to the inner wall of the supporting base shell by bolts, and the slide rail one being provided with multiple positioning holes; and a placement assembly, including a telescopic sleeve, a slide rail two, and a support plate, two telescopic sleeves being provided and centrally symmetrical about the center of the supporting base shell, the telescopic sleeves being welded to the supporting base shell, one end of the slide rail two being connected to the top end of the telescopic sleeve through a connecting plate, and the support plate being slidably connected to the slide rail two.

[0007] As a further description of the above technical solution:

[0008] The top of the supporting base shell is provided with a top cover, which is connected to the supporting base shell by a snap fastener.

[0009] As a further description of the above technical solution:

[0010] Four support plates are welded to the bottom of the support shell. The support plates are located at the four corners of the support shell, and two of them are equipped with fixing pins for placing and fixing the top cover.

[0011] As a further description of the above technical solution:

[0012] The storage assembly further includes: a control rod, which is slidably connected to the partition; and a locking block, which is slidably connected to the bottom of the partition and engages with the positioning hole.

[0013] As a further description of the above technical solution:

[0014] The telescopic sleeve has three stages, with each stage slidingly connected to the previous stage and prevented from rotating by a protrusion.

[0015] As a further description of the above technical solution:

[0016] The placement assembly further includes: a drive motor, which is connected to the bottom of the support base shell by bolts and is located inside the telescopic sleeve; an adjusting screw, which is keyed to the output shaft of the drive motor and threaded to the second-stage telescopic sleeve; and a threaded sleeve, which is slidably connected to the adjusting screw by a protrusion, the protrusion preventing the threaded sleeve from rotating relative to the adjusting screw, and threaded to the third-stage telescopic sleeve.

[0017] As a further description of the above technical solution:

[0018] The placement assembly further includes: a locking pin, rotatably connected to the side wall of the support plate; a torsion spring, disposed inside the locking pin, with its two ends welded to the support plate and the locking pin respectively; and a locking plate, which is L-shaped, welded to the side wall of the slide rail and slidably connected to the locking pin.

[0019] This utility model has the following beneficial effects:

[0020] This material trolley uses adjustable partitions and a support plate, combined with slide rails, to achieve multi-zone classified storage of materials. At the same time, the lifting function of the telescopic sleeve can flexibly adjust the carrying height to meet the storage needs of materials of different specifications and improve space utilization. In addition, the support plate is equipped with a wafer fixing structure, which can be adapted to wafers of different sizes, making it convenient to transport different materials.

[0021] The locking structure secures the partition, support plate, and telescopic sleeve, ensuring stable material placement. Each component can be folded and stored, reducing space occupation when not in use, thus meeting the requirements of semiconductor manufacturing workshops for efficient and standardized material transportation and storage. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the structure of this utility model in its folded state;

[0024] Figure 3 This is a schematic diagram of the material discharge assembly of this utility model;

[0025] Figure 4 This is a schematic diagram of the telescopic sleeve of this utility model;

[0026] Figure 5 This is a structural schematic diagram of the locking support plate assembly of this utility model;

[0027] Figure 6 for Figure 3 Enlarged view of point A in the middle.

[0028] Legend:

[0029] 1. Support base shell; 11. Top cover; 12. Support plate; 2. Storage assembly; 21. Partition plate; 22. Control rod; 23. Locking block; 24. Slide rail one; 3. Placement assembly; 31. Drive motor; 32. Telescopic sleeve; 33. Adjusting screw; 34. Threaded sleeve; 35. Slide rail two; 36. Bearing plate; 37. Locking pin; 38. Torsion spring; 39. Locking plate. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The utility model will be further described in detail below with reference to the accompanying drawings.

[0032] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0033] Example 1:

[0034] like Figures 1 to 6 As shown, this embodiment provides a foldable and retractable semiconductor manufacturing workshop material trolley, comprising: a supporting base shell 1; a storage assembly 2, including a partition 21 and a slide rail 24, the partition 21 being slidably connected inside the supporting base shell 1, the slide rail 24 being connected to the inner wall of the supporting base shell 1 by bolts, and the slide rail 24 having multiple positioning holes; and a placement assembly 3, including a telescopic sleeve 32, a slide rail 35, and a support plate 36, two telescopic sleeves 32 being provided and centrally symmetrical about the center of the supporting base shell 1, the telescopic sleeves 32 being welded to the supporting base shell 1, one end of the slide rail 35 being connected to the top end of the telescopic sleeve 32 by a connecting plate, and the support plate 36 being slidably connected to the slide rail 35.

[0035] Specifically, a top cover 11 is provided on the top of the supporting base shell 1, and the top cover 11 is connected to the supporting base shell 1 by a snap fastener.

[0036] Specifically, four support plates 12 are welded to the bottom of the support base shell 1. The support plates 12 are located at the four corners of the support base shell 1, and two of them are provided with fixing pins for placing and fixing the top cover 11.

[0037] The supporting base 1 can hold items such as raw materials for production, and the bearing plate 36 can be used to hold wafers.

[0038] Furthermore, there are no restrictions on the items that can be placed in either of the two components mentioned above.

[0039] In this embodiment, the supporting base shell 1, the storage component 2, and the placement component 3 constitute a foldable and retractable semiconductor manufacturing workshop material trolley according to this application.

[0040] Example 2:

[0041] Specifically, the storage assembly 2 also includes: a control rod 22, which is slidably connected to the partition 21; and a locking block 23, which is slidably connected to the bottom of the partition 21 and cooperates with the positioning hole.

[0042] The locking block 23 is connected to the partition plate 21 by a spring.

[0043] In this embodiment, the control rod 22 drives the locking block 23 to slide, the locking block 23 is inserted into the positioning hole to fix the partition 21, and is unlocked by spring reset, thus fixing or adjusting the position of the partition 21.

[0044] Example 3:

[0045] In some embodiments, two-stage telescopic guide columns are provided at the other two corners inside the supporting base shell 1.

[0046] Specifically, the telescopic sleeve 32 is provided with three stages, with each stage slidingly connected to the previous stage and prevented from rotating by a protrusion limiting it.

[0047] Specifically, the placement component 3 also includes: a drive motor 31, which is connected to the bottom of the support base 1 by bolts and is located inside the telescopic sleeve 32; an adjusting screw 33, which is keyed to the output shaft of the drive motor 31 and threaded to the second-stage telescopic sleeve 32; and a threaded sleeve 34, which is slidably connected to the adjusting screw 33 by a protrusion, the protrusion preventing the threaded sleeve 34 from rotating relative to the adjusting screw 33, and threaded to the third-stage telescopic sleeve 32.

[0048] In addition, all drive motors 31 are electrically connected to the controller, which is located on the side wall of the supporting base 1.

[0049] It should also be noted that the fixed clamping block is connected to the bearing plate 36 by bolts, the slider clamping block is slidably connected to the bearing plate 36 by a sliding rail, and the sliding clamping block has a groove inside. The Y-shaped control block is slidably connected in the groove of the sliding clamping block, and a clamping screw is rotatably connected to one side of the Y-shaped control block.

[0050] Specifically, the placement component 3 also includes: a locking pin 37, which is rotatably connected to the side wall of the support plate 36; a torsion spring 38, which is disposed inside the locking pin 37 and whose two ends are welded to the support plate 36 and the locking pin 37 respectively; and a locking plate 39, which is L-shaped and welded to the side wall of the slide rail 35, and is slidably connected to the locking pin 37.

[0051] In this embodiment, the subsequent telescopic sleeve 32 slides along the inner wall of the previous stage, and the protrusion is embedded in the groove for limiting, realizing the telescopic function, preventing rotation and ensuring stability. The drive motor 31 drives the adjusting screw 33 to rotate, and the adjusting screw 33 drives the second-stage telescopic sleeve 32 to rise and fall. At the same time, the protrusion drives the threaded sleeve 34 to rotate, driving the third-stage telescopic sleeve 32 to rise and fall. The telescopic sleeve 32 is electrically controlled to extend and retract, adjusting the height of the support plate 36. The fixed clamping block and the sliding clamping block are used to fix the wafer. The locking pin 37 is inserted into the hole of the locking plate 39 under the action of the torsion spring 38 to fix the support plate 36. Rotating the locking pin 37 can unlock it, fixing the position of the support plate 36 and preventing slippage.

[0052] In actual use, when the staff uses the device, they first remove the top cover 11, then place the top cover 11 on the support plate 12 and fix the top cover 11 with the fixing pin. Then, they start the drive motor 31 to raise the placement component 3, then pull the control lever 22 to adjust the space inside the support base 1 to facilitate the placement of items. Then, they rotate the clamping screw to adjust the spacing of the clamping blocks to match the size of the wafer. When it is necessary to place the wafer on the lower layer, they move the locking pin 37 to release the locking state of the carrier plate 36, then pull out the carrier plate 36, and then fix the wafer between the clamping blocks.

[0053] It should be noted that all electrical components mentioned in this article are connected to an external main controller and 220V AC mains power. The main controller can be a conventional known device that can be controlled by a computer or other means. The detailed description of known functions and known components is omitted in the specific implementation of this disclosure. In order to ensure the compatibility of the device, the operating methods used are consistent with the parameters of commercially available instruments.

[0054] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A foldable and retractable material trolley for semiconductor manufacturing workshops, characterized in that: include: Supporting the bottom shell (1); The storage assembly (2) includes a partition (21) and a slide rail (24). The partition (21) is slidably connected to the inside of the supporting base shell (1). The slide rail (24) is connected to the inner wall of the supporting base shell (1) by bolts. The slide rail (24) is provided with multiple positioning holes. The placement component (3) includes a telescopic sleeve (32), a slide rail (35), and a support plate (36). There are two telescopic sleeves (32) and they are centrally symmetrical about the center of the supporting base shell (1). The telescopic sleeves (32) are welded to the supporting base shell (1). One end of the slide rail (35) is connected to the top of the telescopic sleeve (32) through a connecting plate. The support plate (36) is slidably connected to the slide rail (35).

2. The foldable and retractable semiconductor manufacturing workshop material trolley according to claim 1, characterized in that: The top of the supporting base shell (1) is provided with a top cover (11), and the top cover (11) is connected to the supporting base shell (1) by a snap fastener.

3. The foldable and retractable semiconductor manufacturing workshop material trolley according to claim 1, characterized in that: The bottom of the supporting base shell (1) is welded with four supporting plates (12), which are located at the four corners of the supporting base shell (1). Two of them are provided with fixing pins for placing and fixing the top cover (11).

4. The foldable and retractable semiconductor manufacturing workshop material trolley according to claim 1, characterized in that: The storage assembly (2) further includes: The control lever (22) is slidably connected to the partition (21); The locking block (23) is slidably connected to the bottom of the partition (21) and engages with the positioning hole.

5. A foldable and retractable semiconductor manufacturing workshop material trolley according to claim 1, characterized in that: The telescopic sleeve (32) is provided with three stages, with each stage slidingly connected to the previous stage and prevented from rotating by a protrusion.

6. A foldable and retractable semiconductor manufacturing workshop material trolley according to claim 1, characterized in that: The placement component (3) also includes: The drive motor (31) is connected to the bottom of the support base (1) by bolts and is located inside the telescopic sleeve (32); The adjusting screw (33) is keyed to the output shaft of the drive motor (31) and threaded to the second-stage telescopic sleeve (32); The threaded sleeve (34) is slidably connected to the adjusting screw (33) via a protrusion. The protrusion prevents the threaded sleeve (34) from rotating relative to the adjusting screw (33). It is threadedly connected to the third-stage telescopic sleeve (32).

7. A foldable and retractable semiconductor manufacturing workshop material trolley according to claim 1, characterized in that: The placement component (3) also includes: Locking pin (37) is rotatably connected to the side wall of the bearing plate (36); A torsion spring (38) is disposed inside the locking pin (37), and its two ends are welded to the bearing plate (36) and the locking pin (37) respectively; The locking plate (39) is L-shaped and welded to the side wall of the slide rail (35), and is slidably connected to the locking pin (37).

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