A conveying mechanism for semiconductor wafer carrier assembly production

Abstract

The utility model relates to conveying mechanism technical field, concretely relates to a conveying mechanism for semiconductor wafer carrier accessory production, including conveying module, conveying module is provided with drive module, the top of conveying module is provided with the protection frame, the inside fixed connection of protection frame has a plurality of transparent plastic plates, the top of conveying module is provided with two ion fan, the bottom of conveying module is provided with two adjusting module. In the utility model, through the screwing disc and adjusting screw rod screwing connection, can rotate screwing disc, make adjusting screw rod move upwards or downwards along screwing disc inside, adjusting screw rod can be moved with connecting rod two drive sliding rod, make sliding rod move in support rod inside, adjust the inclination degree of conveying module, like this can adjust the height of conveying module bottom according to need, make conveying module bottom correspond to the platform of subsequent carrier accessory processing equipment, be favorable to the versatility of conveying mechanism.

Description

Technical Field

[0001] This utility model relates to the field of conveying mechanism technology, specifically a conveying mechanism for the production of semiconductor wafer carrier accessories. Background Technology

[0002] Semiconductor wafers refer to silicon wafers used to fabricate silicon semiconductor circuits. During the semiconductor wafer transport process, corresponding carrier components are typically used to limit and maintain the position of the semiconductor wafers. In the carrier component production process, conveyor mechanisms are usually used to transport the carrier components. However, existing conveyor mechanisms used in carrier component production are usually at a fixed height. Since carrier component production lines have various processing equipment with different platform heights, the adaptability of the conveyor mechanisms is relatively poor. Utility Model Content

[0003] The purpose of this invention is to provide a conveying mechanism for the production of semiconductor wafer carrier accessories, so as to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A conveying mechanism for semiconductor wafer carrier component production includes a conveying module, a driving module, a protective frame on top, several transparent plastic plates fixedly connected inside the protective frame, two ion fans on top of the conveying module, and two adjusting modules at the bottom of the conveying module. Each adjusting module includes two support rods, with sliding rods slidably connected inside each support rod. A connecting rod one is fixedly connected to the two support rods, and a connecting rod two is fixedly connected to the two sliding rods. The two support rods are interconnected via connecting rod one, and the two sliding rods are interconnected via connecting rod two. An adjusting screw is fixedly connected to connecting rod two. A rotating disc, which is screwed into the adjusting screw, is rotatably connected to connecting rod one. The adjusting screw passes through the interior of connecting rod one.

[0006] Furthermore, a connecting frame is provided between the two adjustment modules, and the connecting frame is fixedly connected to the side of the support rod.

[0007] Furthermore, the bottom end of the support rod is fixedly connected to a universal self-locking wheel.

[0008] Furthermore, the conveying module includes two side rods one and two side rods two. The protective frame is fixedly connected to the two side rods one. The driving module is located at the bottom of one side rod two. The ion fan has mounting rods fixedly connected to the top of the adjacent side rods one on both sides. Conveying rollers are rotatably connected between the two side rods one and the two side rods two. The two conveying rollers are driven by a conveyor belt. Two abutting rods are provided at the corner of the conveyor belt. One abutting rod is rotatably located between the two side rods two, and the top of the abutting rod contacts the inner top surface of the conveyor belt. Protective seats are fixedly connected to the bottom of the two side rods two. The protective seats have two fixed seats fixedly connected to the adjacent side rods two inside. The other abutting rod is rotatably located between the two fixed seats, and the top of the other abutting rod contacts the bottom surface of the conveyor belt.

[0009] The drive module includes a drive frame and a shielding frame. A drive motor is installed inside the drive frame. The output end of the drive motor is connected to a drive shaft that is rotatably connected to the shielding frame. The drive shaft and the conveying roller located on the second side rod are both fixedly fitted with pulleys, and the two pulleys are connected by belt drive. Both pulleys are located inside the shielding frame.

[0010] Furthermore, the side rod 1 is fixedly connected to a fixing plate, the fixing plate has two arc-shaped grooves 1, the arc-shaped grooves 1 are provided with two threaded blocks 1 that are fixedly connected to the adjacent side rod 2, the threaded blocks 1 are screwed to a threaded cap 1, and the threaded cap 1 abuts against the fixing plate.

[0011] Preferably, the top of the sliding rod is provided with an L-shaped seat, and a threaded rod passing through the interior of the adjacent L-shaped seat is fixedly connected to the top of the sliding rod. The threaded rod is screwed with a threaded block, and the threaded block abuts against the L-shaped seat. The two L-shaped seats at the bottom are fixedly provided at the bottom of the adjacent side rod, and the top surfaces of the two L-shaped seats at the top are provided with limiting grooves. The limiting grooves are provided with two threaded blocks three fixedly connected to the adjacent side rod. The threaded blocks three are screwed with threaded caps three, and the threaded caps abut against the adjacent L-shaped seats.

[0012] Furthermore, the L-shaped seat has an arc-shaped groove, and a threaded block is fixedly connected to the adjacent sliding rod inside the arc-shaped groove. The threaded block is screwed onto a threaded cap.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. The adjusting screw is screwed into the rotating disc. The support rod supports the adjusting screw through the connecting rod one and the rotating disc. The adjusting screw supports the sliding rod through the connecting rod two, thereby supporting the conveying module. The rotating disc can be rotated to move the adjusting screw up or down along the inside of the rotating disc. The adjusting screw can drive the sliding rod to move through the connecting rod two, allowing the sliding rod to move inside the support rod and adjust the tilt of the conveying module. This allows the height of the bottom of the conveying module to be adjusted as needed, so that the bottom of the conveying module corresponds to the platform of the subsequent carrier accessory processing equipment. The overall height of the conveying module can be adjusted through the two adjusting modules, which helps to improve the versatility of the conveying mechanism.

[0015] 2. An ion fan is installed on the top of the conveying module. When the carrier parts are conveyed through the conveying module, the ion fan blows ion air onto the carrier parts to remove dust and static electricity, which facilitates the subsequent processing of the carrier parts. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of a conveying mechanism for the production of semiconductor wafer carrier accessories according to this utility model;

[0017] Figure 2 This is a schematic diagram of the conveying module structure in this utility model;

[0018] Figure 3 This is a schematic diagram of the adjustment module structure in this utility model;

[0019] Figure 4 This is a schematic diagram of the L-shaped seat structure in this utility model.

[0020] In the diagram: 1. Conveying module; 11. Side rod one; 12. Side rod two; 13. Conveyor belt; 14. Fixing plate; 15. Arc groove one; 16. Threaded block one; 17. Threaded cap one; 2. Protective frame; 3. Ionizing fan; 31. Mounting rod; 4. Drive module; 41. Drive frame; 42. Shielding frame; 5. Protective seat; 51. Fixing seat; 6. Adjustment module; 61. Support rod; 611. Universal self-locking wheel; 62. Sliding rod; 621. Threaded rod; 63. Connecting rod one; 64. Connecting rod two; 65. Coiling disc; 66. Adjusting screw; 7. Connecting frame; 8. L-shaped seat; 81. Arc groove two; 82. Threaded block two; 83. Threaded cap two; 9. Limiting groove; 91. Threaded block three; 92. Threaded cap three. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-4 In this embodiment of the present invention, a conveying mechanism for the production of semiconductor wafer carrier accessories includes a conveying module 1, a driving module 4, a protective frame 2 on the top of the conveying module 1, several transparent plastic plates fixedly connected inside the protective frame 2, two ion fans 3 on the top of the conveying module 1, the protective frame 2 located between the two ion fans 3, and two adjusting modules 6 at the bottom of the conveying module 1. Each adjusting module 6 includes two support rods 61, with universal self-locking wheels 611 fixedly connected to the bottom of each support rod 61. A connecting frame 7 is provided between the two adjusting modules 6, and the connecting frame 7 is fixedly connected to the side of the support rods 61. A sliding connection is provided inside the support rods 61. The sliding rod 62 is fixedly connected to two support rods 61 by a connecting rod 63, and the two sliding rods 62 are fixedly connected to a connecting rod 64. The two support rods 61 are interconnected through the connecting rod 63, and the two sliding rods 62 are interconnected through the connecting rod 64. The connecting rod 64 is fixedly connected to an adjusting screw 66. The connecting rod 63 is rotatably connected to a rotating disc 65 that is screwed into the adjusting screw 66. The adjusting screw 66 passes through the interior of the connecting rod 63. The support rods 61 can support the adjusting screw 66 through the connecting rod 63 and the rotating disc 65. The adjusting screw 66 can support the sliding rods 62 through the connecting rod 64, thereby supporting the conveying module 1.

[0023] Specifically, the rotating disc 65 of an adjustment module 6 can be rotated to move the adjusting screw 66 up or down along the inside of the rotating disc 65. The adjusting screw 66 can drive the sliding rod 62 to move through the connecting rod 64, so that the sliding rod 62 moves inside the support rod 61. In this way, the height of the bottom of the conveying module 1 can be adjusted as needed, and the tilt of the conveying module 1 can be changed so that the bottom of the conveying module 1 corresponds to the platform of the subsequent carrier accessory processing equipment. Furthermore, the rotating discs 65 of the two adjustment modules 6 can be rotated one after the other, so that the overall height of the conveying module 1 can be adjusted, which is beneficial to improving the versatility of the conveying mechanism.

[0024] After adjustment, the carrier parts can be placed on top of the conveying module 1 by the robotic arm. Then, the carrier parts can be gradually conveyed forward by the conveying module 1. The carrier parts can pass through the bottom of one ion fan 3, the inside of the protective frame 2, and the bottom of another ion fan 3 in sequence. During the conveying process of the carrier parts by the conveying module 1, the protective frame 2 and the transparent plastic plate on it can play a certain protective role for the carrier parts. Ion wind can be blown out by the ion fan 3. When the carrier parts pass through the bottom of the ion fan 3, the dust and static electricity on the carrier parts can be removed by the ion wind, which is convenient for subsequent processing of the carrier parts.

[0025] Example 1

[0026] like Figure 1 and Figure 2 As shown, in this embodiment, the conveying module 1 includes two side rods 11 and two side rods 12. The side rods 11 are inclined, and the side rods 12 are horizontal. The protective frame 2 is fixedly connected to the two side rods 11. The drive module 4 is located at the bottom of one side rod 12. The ion fan 3 has mounting rods 31 fixedly connected to the top of the adjacent side rods 11 on both sides. Conveying rollers are rotatably connected between the two side rods 11 and the two side rods 12. The two conveying rollers are driven by a conveyor belt 13. Two abutting rods are provided at the corner of the conveyor belt 13. One abutting rod is rotatably set between the two side rods 12, and the top of the other abutting rod is flush with the inside of the conveyor belt 13. The top surface is in contact with the two side rods 12, and the bottom of the two side rods 12 are fixedly connected to the protective seats 5. The protective seats 5 are provided with two fixed seats 51 that are fixedly connected to the adjacent side rods 12. Another abutting rod is rotatably set between the two fixed seats 51, and the top of the other abutting rod is in contact with the bottom surface of the conveyor belt 13. The conveyor belt 13 can be opened by the two conveyor rollers, and the two abutting rods respectively abut against the inner top surface and bottom surface of the conveyor belt 13, so that the part of the conveyor belt 13 corresponding to the side rod 12 is set horizontally, and the part of the conveyor belt 13 corresponding to the side rod 11 is tilted. The two fixed seats 51 can limit the other abutting rod, and the protective seats 5 can protect the other abutting rod.

[0027] The drive module 4 includes a drive frame 41 and a shielding frame 42. The drive frame 41 is equipped with a drive motor and can protect the drive motor. The output end of the drive motor is connected to a drive shaft that is rotatably connected to the shielding frame 42. The drive shaft and the conveying roller located on the side rod 12 are both fixedly sleeved with pulleys, and the two pulleys are connected by belt drive. Both pulleys are located inside the shielding frame 42 and are protected by the shielding frame 42.

[0028] Side rod 11 is fixedly connected to a fixing plate 14. The fixing plate 14 has two arc-shaped grooves 15. Inside the arc-shaped grooves 15 are two threaded blocks 16 that are fixedly connected to the adjacent side rod 12. The threaded blocks 16 are screwed to threaded caps 17. The threaded caps 17 abut against the fixing plate 14. The fixing plate 14 is fixed to the side rod 11 by bolts or the like.

[0029] In specific implementation, the threaded cap 17 is pressed against the fixed plate 14, which restricts the rotation of the threaded block 16 relative to the fixed plate 14. In turn, the fixed plate 14 restricts the angle of the side rod 12. The side rod 12 is fixed to the side rod 11 by the fixed plate 14. The drive motor can drive the transmission shaft to rotate. The transmission shaft can drive the conveyor roller on the side rod 12 to rotate through the pulley. The conveyor roller can drive the conveyor belt 13 to rotate. In this way, when the vehicle parts fall on the horizontal section of the conveyor belt 13, the vehicle parts can be transported by the conveyor belt 13. When the vehicle parts pass through the bend of the conveyor belt 13, the vehicle parts can be transported diagonally downward by the conveyor belt 13.

[0030] After adjusting the angle and height of the conveying module 1 through the two adjustment modules 6, the threaded cap 17 can be loosened so that it no longer abuts against the fixed plate 14. At this time, the threaded block 16 can slide in the arc groove 15, causing the side rod 12 to rotate relative to the side rod 11, thereby adjusting the angle of the side rod 12 and bringing it back to a horizontal state. Then, the threaded cap 17 can be tightened again so that it abuts against the fixed plate 14. The position of the threaded block 16 is restricted again by the threaded cap 17, thereby restricting the angle of the side rod 12.

[0031] like Figure 3 and Figure 4 As shown, in this embodiment, an L-shaped seat 8 is provided at the top of the sliding rod 62. A threaded rod 621 passing through the interior of an adjacent L-shaped seat 8 is fixedly connected to the top of the sliding rod 62. The L-shaped seat 8 can be connected to the top of the sliding rod 62 via the threaded rod 621. A threaded block is screwed onto the threaded rod 621, and the threaded block abuts against the L-shaped seat 8. Two L-shaped seats 8 located at the bottom are fixedly provided at the bottom of an adjacent side rod 11, and two L-shaped seats 8 located at the top have limit grooves 9 on their top surfaces. The limit grooves 9 are provided with a fixed connection to the adjacent side rod 11. The two threaded blocks 91 are screwed together with threaded caps 92. The threaded caps 92 abut against the adjacent L-shaped seats 8. After tightening the threaded caps 92, the position of the threaded blocks 91 relative to the L-shaped seats 8 can be restricted. The L-shaped seats 8 located at the top of the side rod 11 are fixed to the side rod 11 by the threaded blocks 91 and the threaded caps 92. The two L-shaped seats 8 located at the bottom of the side rod 11 are fixed to the side rod 11 by bolts, etc. In this way, the sliding rod 62 can support and limit the adjacent side rod 11 through the L-shaped seats 8.

[0032] In practice, before adjusting the angle of the conveying module 1, the threaded block and the threaded cap 92 can be loosened first. When adjusting the angle of the conveying module 1, the L-shaped seat 8 will rotate relative to the sliding rod 62 with the threaded rod 621 as the center, and the top L-shaped seat 8 will slide relative to the side rod 11, so that the threaded block 91 moves in the limiting groove 9. After the adjustment is completed, the threaded block and the threaded cap 92 can be tightened again so that the threaded block abuts against the L-shaped seat 8 and the threaded cap 92 abuts against the top of the L-shaped seat 8. Then, the L-shaped seat 8 is re-secured to the top of the sliding rod 62, and the top L-shaped seat 8 is re-fixed to the bottom of the side rod 11.

[0033] Example 2

[0034] Based on Example 1, such as Figure 4 As shown, in this embodiment, the L-shaped seat 8 has an arc-shaped groove 81, and a threaded block 82 is fixedly connected to the adjacent sliding rod 62 inside the arc-shaped groove 81. The threaded block 82 is screwed with a threaded cap 83, which can abut against the side wall of the L-shaped seat 8.

[0035] In practice, before adjusting the angle of the conveying module 1, the threaded cap 83 can be loosened. When adjusting the angle of the conveying module 1 so that the L-shaped seat 8 rotates relative to the sliding rod 62, the arc groove 81 will slide relative to the threaded block 82. After the adjustment is completed, the threaded cap 83 can be tightened again so that the threaded cap 83 abuts against the side wall of the L-shaped seat 8, limiting the position of the threaded block 82 relative to the L-shaped seat 8, which helps to improve the stability of the connection between the L-shaped seat 8 and the sliding rod 62.

[0036] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0037] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A conveying mechanism for producing semiconductor wafer carrier accessories, comprising a conveying module (1), wherein the conveying module (1) is provided with a driving module (4), and a protective frame (2) is provided on the top of the conveying module (1), wherein a plurality of transparent plastic plates are fixedly connected inside the protective frame (2), characterized in that, The top of the conveying module (1) is provided with two ion fans (3), and the bottom of the conveying module (1) is provided with two adjustment modules (6). The adjustment module (6) includes two support rods (61), and a sliding rod (62) is slidably connected inside the support rod (61). The two support rods (61) are fixedly connected to a connecting rod one (63), and the two sliding rods (62) are fixedly connected to a connecting rod two (64). The connecting rod two (64) is fixedly connected to an adjusting screw (66), and the connecting rod one (63) is rotatably connected to a rotating disc (65) that is screwed into the adjusting screw (66).

2. The conveying mechanism for semiconductor wafer carrier component production according to claim 1, characterized in that, A connecting frame (7) is provided between the two adjustment modules (6), and the connecting frame (7) is fixedly connected to the side of the support rod (61).

3. The conveying mechanism for semiconductor wafer carrier component production according to claim 1, characterized in that, The bottom end of the support rod (61) is fixedly connected to a universal self-locking wheel (611).

4. The conveying mechanism for semiconductor wafer carrier component production according to any one of claims 1-3, characterized in that, The conveying module (1) includes two side rods (11) and two side rods (12). The protective frame (2) is fixedly connected to the two side rods (11). The drive module (4) is located at the bottom of one side rod (12). The ion fan (3) is fixedly connected to the top of the adjacent side rod (11) on both sides. The two side rods (11) and the two side rods (12) are rotatably connected to conveying rollers. The two conveying rollers are connected to a conveyor belt (13). Two abutment rods are provided at the corner of the conveyor belt (13).

5. The conveying mechanism for semiconductor wafer carrier component production according to claim 4, characterized in that, The side rod 1 (11) is fixedly connected to a fixing plate (14). The fixing plate (14) has two arc-shaped grooves (15). Inside the arc-shaped grooves (15) are two threaded blocks (16) that are fixedly connected to the adjacent side rod 2 (12). The threaded blocks (16) are screwed together with threaded caps (17).

6. The conveying mechanism for semiconductor wafer carrier component production according to claim 4, characterized in that, The top of the sliding rod (62) is provided with an L-shaped seat (8), and the top of the sliding rod (62) is fixedly connected with a threaded rod (621) that passes through the interior of the adjacent L-shaped seat (8). The threaded rod (621) is screwed with a threaded block. The two L-shaped seats (8) at the bottom are fixedly provided at the bottom of the adjacent side rod (11), and the top surfaces of the two L-shaped seats (8) at the top are provided with a limiting groove (9). The limiting groove (9) is provided with two threaded blocks (91) that are fixedly connected to the adjacent side rod (11). The threaded blocks (91) are screwed with a threaded cap (92).

7. The conveying mechanism for semiconductor wafer carrier component production according to claim 6, characterized in that, The L-shaped seat (8) has an arc-shaped groove (81), and a threaded block (82) is fixedly connected to the adjacent sliding rod (62) inside the arc-shaped groove (81). The threaded block (82) is screwed with a threaded cap (83).

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