Transplanting trolley horizontal adjustment mechanism

Abstract

The utility model relates to the technical field of semiconductor handling equipment, especially points to a kind of transplanting crown block horizontal adjusting mechanism, including at least three flexible components, the handling dolly for grabbing wafer transfer box, with the driving assembly of flexible component driving connection and adjusting assembly, the adjusting assembly is connected with flexible component and handling dolly, when driving assembly releases or winding flexible component, handling unit is driven synchronous descent or rise to the required position;When the handling dolly is in inclined state, the adjusting assembly adjusts the sag of flexible component, so that handling dolly is in horizontal state;The utility model can make handling dolly adjust to horizontal state smoothly, it is convenient to prevent handling dolly inclination, to stabilize the gravity center of handling dolly, guarantee wafer transportation quality.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor handling equipment technology, and in particular to a horizontal adjustment mechanism for a transplanting crane. Background Technology

[0002] Automated Material Handling Systems (AMHS), also known as overhead crane systems, are widely used in semiconductor wafer fabs. They accurately and quickly transport wafer cassettes to process equipment and other destinations. AMHS mainly consists of tracks, overhead cranes (OHT), and a control system. OHT systems are widely used in industry, manufacturing, and warehousing. Currently, point-to-point wafer handling is achieved by using belt winches to lift the OHT trolleys, eliminating all ground-mounted mechanisms. The drive motor is placed on the roof, and one drive motor controls multiple winches. The winches extend from the belt and are fixed to the corners of the elevator. The rotation of the motor controls the belt, which drives the elevator to rise slowly.

[0003] In actual use, the initial pretension of the belts is inconsistent, or tension differences arise due to wear and stretching during use. Belts with excessive tension will tighten first, causing the corresponding angle to rise too quickly, while belts with insufficient tension may slip, resulting in a delayed corresponding angle. However, because it is not convenient to adjust the trolley horizontally, the center of gravity shifts when the trolley is tilted, causing the goods to slip or tip over, affecting the quality of wafer transportation. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by providing a horizontal adjustment mechanism for a transfer trolley, which enables the transport trolley to be smoothly adjusted to a horizontal state, preventing the transport trolley from tilting, thereby stabilizing the center of gravity of the transport trolley and ensuring the quality of wafer transportation.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a horizontal adjustment mechanism for a transplanting crane, including at least three flexible components, a transport trolley for gripping a wafer transport box, a drive assembly and an adjustment assembly that are driven and connected to the flexible components. The adjustment assembly is connected to the flexible components and the transport trolley. When the drive assembly releases or retracts the flexible components, it drives the transport unit to descend or rise synchronously to the desired position.

[0007] When the transport trolley is tilted, the adjustment component adjusts the sag of the flexible component to make the transport trolley horizontal.

[0008] It also includes a detection sensor. The transport trolley is equipped with a reflector. The detection sensor is optically coupled to the reflector. The light beam emitted by the detection sensor is reflected back to the detection sensor after passing through the reflector. The detection sensor can receive feedback signals.

[0009] When the transport trolley tilts, the detection sensor is decoupled from the optical path of the reflector, and the detection sensor does not receive a feedback signal.

[0010] The transport trolley is equipped with a disc level. When the transport trolley is tilted, the bubble on the disc level corresponds to one of the flexible components.

[0011] The adjustment assembly includes an adjustment support mounted on the transport trolley, an adjustment member rotatably connected to the adjustment support, and an adjustment locking member for locking the adjustment member to the adjustment support. One end of the flexible member is connected to the adjustment member.

[0012] When it is necessary to adjust the sag of the flexible component, force is applied to rotate the adjusting component so that the sag of the flexible component reaches the target value, and the adjusting locking component locks the adjusting component and the adjusting support.

[0013] The adjusting component includes an adjusting rotating body, an adjusting pressing plate, and a locking component for locking the adjusting rotating body and the pressing plate. The adjusting rotating body is rotatably connected to the adjusting support. One end of the flexible component is provided with a locking hole. The locking component passes through the locking hole and locks the end of the flexible component between the adjusting rotating body and the adjusting pressing plate.

[0014] The adjusting rotating body includes an adjusting shaft and an adjusting sleeve fitted onto the adjusting shaft. The adjusting sleeve has a mounting plane extending axially along the adjusting shaft. The mounting plane has a first mounting hole. The adjusting shaft has a second mounting hole. The adjusting clamping plate has a clamping hole. The front end of the locking member passes through the clamping hole, the locking hole, and the first mounting hole and is then locked in the second mounting hole.

[0015] The adjusting shaft is provided with a limiting part, and the adjusting sleeve is provided with a positioning groove. When one side of the limiting part abuts against the inner sidewall of the positioning groove, the first mounting hole and the second mounting hole are aligned.

[0016] The adjusting support is provided with a plurality of tightening holes distributed circumferentially along the adjusting member. The adjusting locking member is threadedly connected to the tightening holes. The inner end of the tightening hole corresponds to the outer side of the adjusting member. The front end of the adjusting locking member presses against the outer side of the adjusting member.

[0017] The adjusting shaft has two ends that protrude from the adjusting support. One end of the adjusting shaft is provided with a positioning recess, and the other end of the adjusting shaft is provided with a positioning part. The inner side of the positioning part abuts against the side of the adjusting support, and the outer side of the positioning part is provided with a stepped hole.

[0018] The adjusting support is provided with a receiving cavity, the adjusting sleeve is located in the receiving cavity, and both ends of the adjusting sleeve abut against the side wall of the receiving cavity.

[0019] The beneficial effects of this utility model are:

[0020] When the transport trolley is tilted, the adjustment component adjusts the sag of the flexible component to smoothly adjust the transport trolley to a horizontal position, thereby preventing the transport trolley from tilting, stabilizing the center of gravity of the transport trolley, and ensuring the quality of wafer transportation. Attached Figure Description

[0021] Figure 1 This is a front view of the horizontal adjustment mechanism of the transplanting crane.

[0022] Figure 2 This is a three-dimensional diagram of the connection structure between the transport trolley and the flexible components.

[0023] Figure 3 This is a sectional view of the installation structure of the flexible components and adjustment parts.

[0024] Figure 4 This is a three-dimensional structural diagram of the adjustment component and the adjustment locking component.

[0025] Figure 5 An exploded three-dimensional view of the adjustment component.

[0026] Figure 6 This is a schematic diagram of the installation structure for adjusting the rotating shaft and the adjusting sleeve.

[0027] 1. Flexible component; 101. Locking hole; 2. Transport trolley; 21. Reflector; 22. Circular level; 3. Drive assembly;

[0028] 4. Adjustment components;

[0029] 41. Adjusting support; 411. Tightening hole; 412. Receiving cavity; 42. Adjusting component;

[0030] 421. Adjust the rotating body;

[0031] 4211. Adjust the rotating shaft;

[0032] 42111, Second mounting hole; 42112, Limiting part; 42113, Positioning recess; 42114, Positioning part; 42115, Stepped hole;

[0033] 4212, Adjusting sleeve; 42121, Mounting plane; 42123, Positioning groove;

[0034] 42122, First mounting hole;

[0035] 422. Adjusting pressure plate; 4221. Pressure hole; 423. Locking component;

[0036] 43. Adjust the locking mechanism; 5. Detect the sensor. Detailed Implementation

[0037] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0038] refer to Figures 1 to 6 As shown, this utility model provides a horizontal adjustment mechanism for a transplanting crane, including at least three flexible components 1, a transport trolley 2 for gripping a wafer transfer box, a drive assembly 3 and an adjustment assembly 4 that are driven and connected to the flexible components 1. The adjustment assembly 4 is connected to the flexible components 1 and the transport trolley 2. When the drive assembly 3 releases or retracts the flexible components 1, it drives the transport unit to descend or rise synchronously to the required position.

[0039] refer to Figure 1 , 2 As shown, in practical applications, the drive component 3 uses a winch, which is connected to the flexible component 1 for drive, thereby enabling the drive component 3 to release or retract the flexible component 1 so that the transport unit can synchronously descend or rise to the required position to meet the gripping requirements of the wafer transport box; when the transport trolley 2 is in an inclined state, the adjustment component 4 adjusts the sag of the flexible component 1 so that the transport trolley 2 can be smoothly adjusted to a horizontal state, which helps to prevent the transport trolley 2 from tilting, thereby stabilizing the center of gravity of the transport trolley 2 and ensuring the quality of wafer transport.

[0040] refer to Figure 1 As shown, this embodiment also includes a detection sensor 5. The transport trolley 2 is equipped with a reflector 21. The detection sensor 5 is optically coupled to the reflector 21. The light beam emitted by the detection sensor 5 is reflected back to the detection sensor 5 after passing through the reflector 21. The detection sensor 5 can receive feedback signals. In practical applications, when the transport trolley 2 is tilted, the detection sensor 5 is decoupled from the reflector 21, and the detection sensor 5 does not receive feedback signals, thereby detecting that the transport trolley 2 is tilted. This facilitates timely adjustment of the placement state of the transport trolley 2 and smoothly transmits the placement state of the transport trolley 2 to external communication via electrical signals, which is beneficial for real-time and accurate detection of the transport trolley 2.

[0041] refer to Figure 1 , 2As shown in this embodiment, the transport trolley 2 is equipped with a disc level 22. When the transport trolley 2 is tilted, the bubble on the disc level 22 corresponds to one of the flexible components 1. The flexible component 1 indicated by the bubble when the transport trolley 2 is tilted indicates that the sag of the flexible component 1 at that point is too low. The sag of the flexible component 1 that is too low can be increased until the bubble on the disc level 22 is centered, making it consistent with the sag of the remaining flexible components 1, thereby making the transport trolley 2 level. Alternatively, the remaining flexible components 1 that are not indicated by the bubble can be adjusted, and the sag of the flexible components that is too high can be reduced until the bubble on the disc level 22 is centered, making the sag of the flexible components 1 consistent. This makes it easy to accurately know whether the sag of the flexible component 1 is too low or too high, which is beneficial for the user to adjust quickly.

[0042] refer to Figure 3 , 4 As shown, in this embodiment, the adjustment assembly 4 includes an adjustment support 41 installed on the transport trolley 2, an adjustment member 42 rotatably connected to the adjustment support 41, and an adjustment locking member 43 for locking the adjustment member 42 to the adjustment support 41. One end of the flexible member 1 is connected to the adjustment member 42. In actual application, when it is necessary to adjust the sag of the flexible member 1, force is applied to drive the adjustment member 42 to rotate so that the sag of the flexible member 1 reaches the target value. The adjustment locking member 43 locks the adjustment member 42 and the adjustment support 41, and smoothly adjusts the transport trolley 2 to a horizontal position, which is convenient for stabilizing the center of gravity of the transport trolley 2.

[0043] refer to Figure 3 , 5 As shown, in this embodiment, the adjusting member 42 includes an adjusting rotating body 421, an adjusting pressing plate 422, and a locking member 423 for locking the adjusting rotating body 421 and the pressing plate. The adjusting rotating body 421 is rotatably connected to the adjusting support 41. One end of the flexible member 1 is provided with a locking hole 101. The locking member 423 passes through the locking hole 101 and accurately positions the end of the flexible member 1 through the locking hole 101 to prevent the end of the flexible member 1 from falling off. The locking member 423 locks the end of the flexible member 1 between the adjusting rotating body 421 and the adjusting pressing plate 422, and stably locks the flexible member 1 to the adjusting member 42.

[0044] refer to Figure 3 , 5As shown, in this embodiment, the adjusting rotating body 421 includes an adjusting shaft 4211 and an adjusting sleeve 4212 sleeved on the adjusting shaft 4211. The adjusting sleeve 4212 is provided with an installation plane 42121 extending axially along the adjusting shaft 4211. Through the installation plane 42121, the flexible member 1 can be smoothly wound around the circumference of the adjusting member 42. The winding space of the flexible member 1 is independent of the installation space of the locking member 423 and the adjusting pressure plate 422, ensuring the structural integrity of the flexible member 1. The installation plane 42121 is provided with a first installation hole 42122. The adjusting shaft 4211 is provided with a second installation hole 42111. The adjusting pressure plate 422 is provided with a pressure hole 4221. The front end of the locking member 423 passes through the pressure hole 4221, the locking hole 101, and the first installation hole 42122 and is locked in the second installation hole 42111, thereby realizing the locking of the adjusting rotating body 421 and the pressure plate.

[0045] refer to Figure 5 , 6 As shown, in this embodiment, the adjusting shaft 4211 is provided with a limiting part 42112, and the adjusting sleeve 4212 is provided with a positioning groove 42123. When one side of the limiting part 42112 abuts against the inner sidewall of the positioning groove 42123, the first mounting hole 42122 and the second mounting hole 42111 are aligned. In actual application, the adjusting sleeve 4212 is fitted onto the adjusting shaft 4211, and the adjusting sleeve 4212 rotates circumferentially relative to the adjusting shaft 4211 to align the first mounting hole 42122 and the second mounting hole 42111, which facilitates accurate positioning of the adjusting shaft 4211 and the adjusting sleeve 4212 and improves the assembly efficiency of the adjusting sleeve 4212 and the adjusting shaft 4211.

[0046] refer to Figure 4 , 5 As shown, in this embodiment, the adjusting support 41 is provided with a plurality of tightening holes 411 distributed circumferentially along the adjusting member 42. The adjusting locking member 43 is threadedly connected to the tightening holes 411. The inner end of the tightening hole 411 corresponds to the outer side of the adjusting member 42. The front end of the adjusting locking member 43 presses against the outer side of the adjusting member 42. In actual application, the adjusting locking member 43 moves away from the adjusting member 42, and the adjusting locking member 43 loses its squeezing of the adjusting member 42. Applying force to drive the adjusting member 42 to rotate can adjust the sag of the flexible member 1, thereby adjusting the transport trolley 2 to a horizontal position. When the transport trolley 2 is adjusted to a horizontal position, the adjusting locking member 43 moves closer to the adjusting member 42, and the front end of the adjusting locking member 43 presses against the outer side of the adjusting member 42, thereby locking the transport trolley 2 in a horizontal position.

[0047] refer to Figure 4 , 5As shown, in this embodiment, both ends of the adjusting shaft 4211 protrude from the adjusting support 41. One end of the adjusting shaft 4211 is provided with a positioning recess 42113, and the other end of the adjusting shaft 4211 is provided with a positioning part 42114. The inner side of the positioning part 42114 abuts against the side of the adjusting support 41, and the outer side of the positioning part 42114 is provided with a stepped hole 42115. In actual application, an external tool is used to abut against the positioning recess 42113. The axial positioning of the adjusting shaft 4211 is achieved through the positioning part 42114 and the external tool, so that the axial movement of the adjusting shaft 4211 is smoothly restricted when it rotates. Then, the appropriate component is inserted into the stepped hole 42115, and the force is applied to drive the component to rotate, which synchronously drives the adjusting shaft 4211 to rotate, thereby smoothly adjusting the sag of the flexible component 1.

[0048] refer to Figure 4 , 5 As shown, in this embodiment, the adjusting support 41 is provided with a receiving cavity 412, and the adjusting sleeve 4212 is located in the receiving cavity 412. Both ends of the adjusting sleeve 4212 abut against the side wall of the receiving cavity 412. The structure is compact and convenient for limiting the two ends of the adjusting sleeve 4212 and accurately positioning the relative position of the adjusting sleeve 4212 and the adjusting shaft 4211.

[0049] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A horizontal adjustment mechanism for a transplanting crane, characterized in that, It includes at least three flexible components (1), a transport trolley (2) for gripping wafer transport boxes, a drive assembly (3) and an adjustment assembly (4) that are driven and connected to the flexible components (1). The adjustment assembly (4) is connected to the flexible components (1) and the transport trolley (2). When the drive assembly (3) releases or retracts the flexible components (1), it drives the transport unit to descend or rise synchronously to the required position. When the transport trolley (2) is in an inclined state, the adjustment component (4) adjusts the sag of the flexible component (1) so that the transport trolley (2) is in a horizontal state.

2. The horizontal adjustment mechanism of the transplanting crane according to claim 1, characterized in that, It also includes a detection sensor (5), the transport trolley (2) is equipped with a reflector (21), the detection sensor (5) is optically coupled to the reflector (21), the light beam emitted by the detection sensor (5) is reflected back to the detection sensor (5) after passing through the reflector (21), and the detection sensor (5) can receive feedback signals; When the transport trolley (2) tilts, the detection sensor (5) is decoupled from the optical path of the reflector (21), and the detection sensor (5) does not receive a feedback signal.

3. The horizontal adjustment mechanism of the transplanting crane according to claim 1, characterized in that, The transport trolley (2) is equipped with a disc level (22). When the transport trolley (2) is tilted, the bubble on the disc level (22) corresponds to one of the flexible components (1).

4. The horizontal adjustment mechanism of the transplanting crane according to claim 1, characterized in that, The adjustment assembly (4) includes an adjustment support (41) installed on the transport trolley (2), an adjustment member (42) rotatably connected to the adjustment support (41), and an adjustment locking member (43) for locking the adjustment member (42) to the adjustment support (41). One end of the flexible member (1) is connected to the adjustment member (42). When it is necessary to adjust the sag of the flexible component (1), force is applied to drive the adjusting component (42) to rotate so that the sag of the flexible component (1) reaches the target value, and the adjusting locking component (43) locks the adjusting component (42) and the adjusting support (41).

5. The horizontal adjustment mechanism of the transplanting crane according to claim 4, characterized in that, The adjusting component (42) includes an adjusting rotating body (421), an adjusting pressing plate (422), and a locking component (423) for locking the adjusting rotating body (421) and the pressing plate. The adjusting rotating body (421) is rotatably connected to the adjusting support (41). One end of the flexible component (1) is provided with a locking hole (101). The locking component (423) passes through the locking hole (101) and locks the end of the flexible component (1) between the adjusting rotating body (421) and the adjusting pressing plate (422).

6. The horizontal adjustment mechanism of the transplanting crane according to claim 5, characterized in that, The adjusting rotating body (421) includes an adjusting shaft (4211) and an adjusting sleeve (4212) sleeved on the adjusting shaft (4211). The adjusting sleeve (4212) is provided with a mounting plane (42121) extending axially along the adjusting shaft (4211). The mounting plane (42121) is provided with a first mounting hole (42122). The adjusting shaft (4211) is provided with a second mounting hole (42111). The adjusting clamping plate (422) is provided with a clamping hole (4221). The front end of the locking member (423) passes through the clamping hole (4221), the locking hole (101), and the first mounting hole (42122) and is locked in the second mounting hole (42111).

7. The horizontal adjustment mechanism of the transplanting crane according to claim 6, characterized in that, The adjusting shaft (4211) is provided with a limiting part (42112), and the adjusting sleeve (4212) is provided with a positioning groove (42123). When one side of the limiting part (42112) abuts against the inner sidewall of the positioning groove (42123), the first mounting hole (42122) and the second mounting hole (42111) are aligned.

8. The horizontal adjustment mechanism for the transplanting crane according to claim 4, characterized in that, The adjusting support (41) is provided with a plurality of tightening holes (411) distributed circumferentially along the adjusting member (42). The adjusting locking member (43) is threadedly connected to the tightening holes (411). The inner end of the tightening hole (411) corresponds to the outer side of the adjusting member (42), and the front end of the adjusting locking member (43) presses against the outer side of the adjusting member (42).

9. The horizontal adjustment mechanism of the transplanting crane according to claim 6, characterized in that, The two ends of the adjusting shaft (4211) respectively pass through the adjusting support (41). One end of the adjusting shaft (4211) is provided with a positioning recess (42113), and the other end of the adjusting shaft (4211) is provided with a positioning part (42114). The inner side of the positioning part (42114) abuts against the side of the adjusting support (41), and the outer side of the positioning part (42114) is provided with a stepped hole (42115).

10. The horizontal adjustment mechanism of the transplanting crane according to claim 6, characterized in that, The adjusting support (41) is provided with a receiving cavity (412), and the adjusting sleeve (4212) is located inside the receiving cavity (412). Both ends of the adjusting sleeve (4212) abut against the side wall of the receiving cavity (412).

Images