A sample stage for a vacuum coating apparatus

Abstract

The utility model provides a vacuum coating equipment's sample stage, include: object table, connecting plate, rotating electrical machine, tilt adjustment part. The object table is suitable for carrying or fixed plating sample; The connecting plate is fixed in the below of object table, is equipped with the axle hole in the center, is equipped with the control part at the edge; Rotating electrical machine includes mounting plate, motor shaft; The mounting plate is fixed in the below of connecting plate, motor shaft passes through axle hole, and the end is connected with object table fixedly, is suitable for making object table rotate; The tilt adjustment part is equipped in both sides of connecting plate, includes rotary joint, fixed connecting piece; One side of rotary joint is fixed with connecting plate, and the other side is fixed with fixed connecting piece, is suitable for making connecting plate relative fixed connecting piece rotate. Vacuum coating equipment's sample stage in the utility model, simple structure, small, high vacuum performance occupies space.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a sample stage for vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment is a device that uses vacuum conditions to cause physical processes such as evaporation and sputtering of metallic or non-metallic materials, depositing the material in atomic or molecular form onto the sample surface to form a thin film. When the sample is placed on the sample stage of the vacuum coating equipment for vacuum coating, the movable sample stage can adjust the position of the sample. For samples with non-planar structures such as curved surfaces, grooves, and porous structures, different sides of the sample can be alternately oriented towards the particle source to ensure that non-planar structures such as depressions or sides can also be uniformly coated. Therefore, compared with a fixed sample stage, a movable sample stage has a wider range of adaptability.

[0003] In existing technologies, to make the sample stage of a vacuum coating equipment movable, complex transmission and power mechanisms are usually required. This increases the space occupied by the sample stage's related structures. The limited internal space of the vacuum chamber, especially in small vacuum coating equipment, significantly restricts the application of movable sample stages. Furthermore, vacuum coating equipment has high sealing requirements, and external mechanisms of the movable sample stage would reduce the reliability of the seal.

[0004] Therefore, there is an urgent need to propose a sample stage for a vacuum coating equipment that is simple in structure, occupies little space, and has high vacuum performance. Utility Model Content

[0005] The present invention aims to provide a sample stage for a vacuum coating equipment to solve the problems of complex structure, large space occupation, and impact on sealing reliability of the sample stage in the existing vacuum coating equipment.

[0006] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0007] A sample stage for a vacuum coating apparatus, comprising:

[0008] A tray, the tray being adapted to hold or fix the sample to be coated;

[0009] A connecting plate is fixed below the loading tray, with a shaft hole at the center and a control part at the edge;

[0010] A rotary motor, comprising a mounting plate and a motor shaft; the mounting plate is fixed below the connecting plate, the motor shaft passes through the shaft hole, and its end is fixedly connected to the loading tray, suitable for rotating the loading tray;

[0011] The tilt adjustment part is provided on both sides of the connecting plate and includes a rotating connector and a fixed connector; one side of the rotating connector is fixed to the connecting plate and the other side is fixed to the fixed connector, which is suitable for the connecting plate to rotate relative to the fixed connector.

[0012] Preferably, the sample stage of the vacuum coating equipment further includes a housing; the housing has space to accommodate the connecting plate, the rotary motor, and the tilt adjustment unit.

[0013] Preferably, the top of the outer casing is open, and the bottom has an inwardly folded edge;

[0014] The end of the fixed connector is fixed to the inner folded edge of the outer shell.

[0015] Preferably, the sample stage of the vacuum coating equipment further includes a base; the base is located below the outer casing.

[0016] Preferably, the sample stage of the vacuum coating equipment further includes a height adjustment unit; the height adjustment unit is disposed between the outer shell and the base, and is adapted to adjust the relative position between the outer shell and the base.

[0017] Preferably, the height adjustment part includes an adjustment post and a set screw;

[0018] One end of the adjustment column is fixed to the edge of the base, and the other end passes through the inner folded edge;

[0019] The set screw is installed in the set screw hole on the side wall of the housing, and is suitable for tightening the adjusting column.

[0020] Preferably, the sample stage of the vacuum coating equipment further includes a sleeve; the inner wall of the sleeve is provided with threads suitable for fitting bolts;

[0021] The connecting plate is provided with a first mounting hole, which is suitable for bolting to the first end of the sleeve;

[0022] The mounting plate is provided with a second mounting hole, which is suitable for connection with the second end of the sleeve by bolts.

[0023] Preferably, the connecting plate has symmetrical arc-shaped notches on both sides; the tilt adjustment part is located at the arc-shaped notches;

[0024] The control unit is located on the straight line where the axes of symmetry of the two arc-shaped notches lie;

[0025] The first mounting hole is located on the straight line where the axes of symmetry of the two arc-shaped notches lie.

[0026] Preferably, the outer casing is provided with an operating port; the operating port is located at the extension of the control unit.

[0027] Preferably, the rotating connector includes a first hinge arm, a second hinge arm, and a damping hinge shaft; the first hinge arm is fixed to the connecting plate; the second hinge arm is fixed to the fixed connector; and the damping hinge shaft is adapted to allow the first hinge arm and the second hinge arm to be rotatably connected.

[0028] The above-described solution of this utility model has at least the following beneficial effects:

[0029] The sample stage of the vacuum coating equipment of this utility model includes: a carrying tray, a connecting plate, a rotary motor, and a tilt adjustment unit. The carrying tray is suitable for carrying or fixing the sample to be coated; the connecting plate is fixed below the carrying tray, with a shaft hole at the center and a control unit at the edge; the rotary motor includes a mounting plate and a motor shaft; the mounting plate is fixed below the connecting plate, the motor shaft passes through the shaft hole, and its end is fixedly connected to the carrying tray, suitable for rotating the carrying tray; the tilt adjustment unit is located on both sides of the connecting plate, including a rotating connector and a fixed connector; one side of the rotating connector is fixed to the connecting plate, and the other side is fixed to the fixed connector, suitable for rotating the connecting plate relative to the fixed connector. The sample stage of the vacuum coating equipment of this utility model, with the connecting plate located below the carrying tray and the rotary motor fixed by the connecting plate, and the tilt adjustment units located on both sides, can realize the rotation and tilt angle adjustment of the carrying tray. The above structures are simple, occupy little space, and can all be set together with the loading tray in the vacuum cavity. There is no need to set external transmission mechanism or power mechanism outside the vacuum cavity, thus avoiding the impact on the sealing reliability of the vacuum cavity and achieving high vacuum performance. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the sample stage of a vacuum coating apparatus according to an embodiment of the present invention;

[0031] Figure 2 yes Figure 1 A schematic diagram of the sample stage of a vacuum coating equipment without a loading tray installed;

[0032] Figure 3 A side view of the sample stage of a vacuum coating apparatus according to another embodiment of this utility model;

[0033] Figure 4 yes Figure 2 A schematic diagram of the internal structure of the sample stage housing of the vacuum coating equipment;

[0034] Figure 5 This is a schematic diagram of the structure of the vacuum coating equipment of this utility model with the tray in an untilted state;

[0035] Figure 6 This is a schematic diagram of the structure of the rotary motor of the sample stage of the vacuum coating equipment of this utility model;

[0036] Figure 7 This is a schematic diagram of the outer shell of the sample stage of the vacuum coating equipment of this utility model;

[0037] Figure 8 This is a partial structural diagram of the sample stage shell and tilt adjustment part of the vacuum coating equipment of this utility model;

[0038] Figure 9 This is a partial structural diagram of the sample stage shell and height adjustment part of the vacuum coating equipment of this utility model;

[0039] The components include: 1. Carrying tray; 2. Connecting plate; 21. Shaft hole; 22. Control unit; 23. First mounting hole; 24. Arc-shaped notch; 3. Rotary motor; 31. Mounting plate; 32. Motor shaft; 33. Second mounting hole; 4. Tilt adjustment unit; 41. Rotating connector; 411. First hinge arm; 412. Second hinge arm; 413. Damping hinge shaft; 42. Fixed connector; 5. Outer shell; 51. Inner folded edge; 52. Set screw hole; 53. Operating port; 6. Base; 7. Height adjustment unit; 71. Adjustment column; 8. Sleeve. Detailed Implementation

[0040] Exemplary embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0041] An embodiment of this utility model provides a sample stage for a vacuum coating apparatus, such as... Figure 1-9 As shown, it includes: a loading tray 1, a connecting plate 2, a rotary motor 3, and a tilt adjustment unit 4;

[0042] The tray 1 is suitable for carrying or fixing the sample to be coated; the connecting plate 2 is fixed below the tray 1, with a shaft hole 21 at the center and a control part 22 at the edge; the rotary motor 3 includes a mounting plate 31 and a motor shaft 32; the mounting plate 31 is fixed below the connecting plate 2, and the motor shaft 32 passes through the shaft hole 21 and is fixedly connected to the tray 1 at its end, suitable for rotating the tray 1; the tilt adjustment part 4 is provided on both sides of the connecting plate 2, including a rotating connector 41 and a fixed connector 42; one side of the rotating connector 41 is fixed to the connecting plate 2, and the other side is fixed to the fixed connector 42, suitable for rotating the connecting plate 2 relative to the fixed connector 42.

[0043] In this embodiment, as Figure 1-2 As shown in Figure 6, the sample stage of the vacuum coating equipment has a connecting plate 2 below the loading tray 1, and the rotary motor 3 is fixed through the connecting plate 2. When the rotary motor 3 is started, the motor shaft 32 rotates, driving the loading tray 1 to rotate, thereby realizing the rotation of the loading tray 1. At the same time, the tilt adjustment part 4 is provided on both sides of the connecting plate 2, so that the loading tray 1, the connecting plate 2, and the rotary motor 3 are integrated into a single structure, which can tilt and rotate relative to the fixed connecting part 42 of the tilt adjustment part 4. When the operator adjusts the tilt angle of the connecting plate 2 through the control part 22, the connecting plate 2, the loading tray 1 connected to the connecting plate 2, and the rotary motor 3 rotate relative to the fixed connecting part 42, thereby adjusting the tilt angle of the loading tray 1. The above structure is simple, occupies little space, and can all be set together with the loading tray 1 in the vacuum chamber of the vacuum coating equipment. There is no need to set an external transmission mechanism or power mechanism outside the vacuum chamber, avoiding the impact on the sealing reliability of the vacuum chamber, and the vacuum performance is high.

[0044] To prevent the connecting plate 2 from being affected by the rotation of the motor shaft 32, the diameter of the shaft hole 21 is larger than the outer diameter of the motor shaft 32, and the shaft hole 21 does not contact the motor shaft 32. As an alternative implementation in this embodiment, a bearing can also be provided between the shaft hole 21 and the motor shaft 32.

[0045] As a preferred design in this embodiment, such as Figure 3-5 The sample stage of the vacuum coating equipment also includes a housing 5; the housing 5 has space to accommodate the connecting plate 2, the rotary motor 3, and the tilt adjustment part 4.

[0046] For achieving the purpose of this utility model, the design of the outer shell 5 is not unique. In this embodiment, such as... Figure 7-8As shown, the top of the outer casing 5 is open, and the bottom has an inner folded edge 51; the end of the fixing connector 42 is fixed to the inner folded edge 51 of the outer casing 5. This arrangement facilitates the installation of the connecting plate 2, the rotary motor 3, and the tilt adjustment part 4 inside the outer casing 5. By fixing the fixing connector 42 to the outer casing 5, the tilt angle of the loading tray 1 relative to the outer casing 5 can be adjusted accordingly when the tilt angle of the connecting plate 2 is adjusted by the control part 22.

[0047] To facilitate the fixed installation of the sample stage of the vacuum coating equipment within the vacuum chamber, the sample stage of the vacuum coating equipment further includes a base 6; the base 6 is located below the outer shell 5.

[0048] It should be noted that the vacuum chamber refers to a sealed space that forms a vacuum environment, and its components may include a top plate, side walls, and a bottom plate. In this embodiment, the base 6 can serve as a component that fixes the sample stage of the vacuum coating equipment to the inner wall of the bottom plate of the vacuum chamber, or it can directly serve as the bottom plate of the vacuum chamber, as long as it can fix the sample stage of the vacuum coating equipment inside the vacuum chamber.

[0049] As a preferred design in this embodiment, such as Figure 3 , 4 As shown in Figure 9, the sample stage of the vacuum coating equipment also includes a height adjustment unit 7; the height adjustment unit 7 is located between the outer shell 5 and the base 6, and is suitable for adjusting the relative position between the outer shell 5 and the base 6. Through the provision of the height adjustment unit 7, the sample stage of the vacuum coating equipment can achieve a third dimension of movement adjustment of the sample tray 1 within the vacuum chamber. That is, in addition to the rotatable and tiltable angle adjustable sample tray 1 relative to the base 6, it can also be height-adjusted.

[0050] The specific design of the height adjustment part 7 is not unique, as long as it can adjust the relative position between the outer shell 5 and the base 6. In this embodiment, a preferred design is provided, wherein the height adjustment part 7 includes an adjustment post 71 and a set screw; one end of the adjustment post 71 is fixed to the edge of the base 6, and the other end passes through the inner folded edge 51; the set screw is installed in the set screw hole 52 on the side wall of the outer shell 5, suitable for tightening the adjustment post 71. When it is necessary to adjust the relative position between the outer shell 5 and the base 6, that is, when it is necessary to make the height of the tray 1 relative to the base 6 at a specific position, the set screw can be removed from the set screw hole 52. At this time, the outer shell 5 can move up and down along the adjustment post 71. The operator manually moves the outer shell 5 to the desired position, inserts the set screw into the set screw hole 52 and tightens it, so that the set screw tightens the adjustment post 71, thereby limiting the position of the outer shell 5 after the height adjustment, so that the tray 1 is fixed in a specific position with the outer shell 5.

[0051] To facilitate the fixing of the rotary motor 3 to the connecting plate 2, the sample stage of the vacuum coating equipment further includes a sleeve 8; the inner wall of the sleeve 8 is provided with threads suitable for use with bolts; the connecting plate 2 is provided with a first mounting hole 23, suitable for bolting to the first end of the sleeve 8; the mounting plate 31 is provided with a second mounting hole 33, suitable for bolting to the second end of the sleeve 8. In this embodiment, the rotary motor 3 is fixed to the lower part of the connecting plate 2 by means of the sleeve 8. Those skilled in the art can also use other methods, as long as the rotary motor 3 can be fixed to the lower part of the connecting plate 2.

[0052] To make the sample stage of the vacuum coating equipment more compact and reduce space waste, the connecting plate 2 is provided with symmetrical arc-shaped notches 24 on both sides; the tilt adjustment part 4 is provided at the arc-shaped notches 24; the control part 22 is provided on the straight line where the two arc-shaped notches 24 are symmetrical; the first mounting hole 23 is provided on the straight line where the two arc-shaped notches 24 are symmetrical.

[0053] In this embodiment, the control unit 22 is a control plate extending from the edge of the connecting plate 2. The operator can adjust the tilt angle of the tray 1 by manually moving the control unit 22. To facilitate the operator's adjustment of the tilt angle of the tray 1, the outer casing 5 is provided with an operation port 53; the operation port 53 is located at the extension of the control unit 22. The provision of the operation port 53 can prevent the outer casing 5 from obstructing the control unit 22.

[0054] As a preferred design in this embodiment, the rotating connector 41 can be a damped hinge. The damped hinge allows the tray 1 to be suspended at its tilt angle after adjustment. Figure 3 As shown, this is a schematic diagram of the structure of the loading tray 1 tilted at a certain angle. Figure 5 The diagram shows the loading tray 1 in a horizontal position. The damping hinge can be a conventional damping hinge from the prior art. In this embodiment, a specific installation method is provided: the rotating connector 41 includes a first hinge arm 411, a second hinge arm 412, and a damping hinge pivot 413; the first hinge arm 411 is fixed to the connecting plate 2; the second hinge arm 412 is fixed to the fixed connector 42; the damping hinge pivot 413 is adapted to allow the first hinge arm 411 and the second hinge arm 412 to be rotatably connected.

[0055] The sample stage of the vacuum coating equipment described in this utility model operates as follows:

[0056] During vacuum coating, the sample to be coated is placed on the carrier disk 1.

[0057] When the tray 1 needs to rotate, the rotary motor 3 is started, causing the motor shaft 32 to rotate, which in turn drives the tray 1 to rotate.

[0058] When the tray 1 needs to be at a specific angle relative to the base 6, the operator manually moves the control unit 22 to tilt the connecting plate 2. At this time, the connecting plate 2 rotates about the damping hinge shaft 413 and is suspended in that position, thereby realizing the adjustment of the tilt angle of the tray 1.

[0059] When the tray 1 needs to be at a specific height relative to the base 6, the operator removes the set screw from the set screw hole 52, allowing the outer shell 5 to move up and down along the adjusting column 71. The operator manually moves the outer shell 5 to the desired position, inserts and tightens the set screw from the set screw hole 52, so that the set screw presses against the adjusting column 71, thereby limiting the position of the outer shell 5 after adjustment, so that the tray 1 is fixed in a specific position along with the outer shell 5, thereby realizing the adjustment of the height of the tray 1.

[0060] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A sample stage for a vacuum coating apparatus, characterized in that, include: A sample tray (1) is adapted to carry or fix the sample to be coated; A connecting plate (2) is fixed below the loading tray (1), with a shaft hole (21) at the center and a control part (22) at the edge; A rotary motor (3) includes a mounting plate (31) and a motor shaft (32); the mounting plate (31) is fixed below the connecting plate (2), and the motor shaft (32) passes through the shaft hole (21) and is fixedly connected at its end to the loading tray (1), which is suitable for rotating the loading tray (1); The tilt adjustment part (4) is provided on both sides of the connecting plate (2) and includes a rotating connector (41) and a fixed connector (42). One side of the rotating connector (41) is fixed to the connecting plate (2) and the other side is fixed to the fixed connector (42), which is suitable for making the connecting plate (2) rotate relative to the fixed connector (42).

2. The sample stage of the vacuum coating equipment according to claim 1, characterized in that, It also includes a housing (5); the housing (5) has space to accommodate the connecting plate (2), the rotary motor (3), and the tilt adjustment part (4).

3. The sample stage of the vacuum coating equipment according to claim 2, characterized in that, The top of the outer shell (5) is open, and the bottom has an inward folded edge (51); The end of the fixed connector (42) is fixed to the inner folded edge (51) of the outer shell (5).

4. The sample stage of the vacuum coating equipment according to claim 3, characterized in that, It also includes a base (6); the base (6) is located below the outer shell (5).

5. The sample stage of the vacuum coating equipment according to claim 4, characterized in that, It also includes a height adjustment part (7); the height adjustment part (7) is disposed between the outer shell (5) and the base (6), and is adapted to adjust the relative position between the outer shell (5) and the base (6).

6. The sample stage of the vacuum coating equipment according to claim 5, characterized in that, The height adjustment part (7) includes an adjustment post (71) and a set screw; One end of the adjusting column (71) is fixed to the edge of the base (6), and the other end passes through the inner folded edge (51); The set screw is installed in the set screw hole (52) on the side wall of the housing (5) and is adapted to press the adjusting column (71) against it.

7. The sample stage of the vacuum coating equipment according to claim 1, characterized in that, It also includes a sleeve (8); the inner wall of the sleeve (8) is provided with threads suitable for fitting the bolt; The connecting plate (2) is provided with a first mounting hole (23), which is suitable for bolting to the first end of the sleeve (8); The mounting plate (31) is provided with a second mounting hole (33), which is suitable for connecting to the second end of the sleeve (8) by bolts.

8. The sample stage of the vacuum coating equipment according to claim 7, characterized in that, The connecting plate (2) has symmetrical arc-shaped notches (24) on both sides; the tilt adjustment part (4) is located at the arc-shaped notches (24); The control unit (22) is located on the straight line where the axes of symmetry of the two arc-shaped notches (24) lie; The first mounting hole (23) is located on the straight line where the axes of symmetry of the two arc-shaped notches (24) lie.

9. The sample stage of the vacuum coating equipment according to claim 2, characterized in that, The outer casing (5) is provided with an operation port (53); the operation port (53) is located at the extension of the control unit (22).

10. The sample stage of the vacuum coating equipment according to claim 1, characterized in that, The rotating connector (41) includes a first hinge arm (411), a second hinge arm (412), and a damping hinge shaft (413); the first hinge arm (411) is fixed to the connecting plate (2); the second hinge arm (412) is fixed to the fixed connector (42); the damping hinge shaft (413) is adapted to allow the first hinge arm (411) and the second hinge arm (412) to be rotatably connected.

Images