A film production exhaust gas treatment device

Abstract

This utility model discloses a waste gas treatment device for thin film production, relating to the field of thin film production technology; it includes: a stone rotary adsorption device for concentrating low-concentration VOCs waste gas into high-concentration waste gas, connected to a waste gas preheating tank for preheating the high-concentration waste gas; a dehumidifying heating tank connected to the waste gas preheating tank for dehumidification and further heating of the waste gas; a combustion oxidation tower for combustion oxidation of waste gas, heat recovery of combustion generated gas, and spray denitrification before gas emission; the outlet of the dehumidifying heating tank merges with the outlet of the air treatment tank and is connected to the bottom air inlet of the combustion oxidation tower; this utility model recovers the heat of the combustion oxidation tower to form a closed loop, preheats cold air and waste gas, increases the initial temperature of the waste gas before combustion, and reduces energy consumption; this utility model also uses a ceramic particle stacking layer to form a porous structure, and the mixed gas is forced to disperse and mix when passing through the gap structure of this layer, which greatly improves the mixing uniformity and airflow stability.

Description

Technical Field

[0001] This utility model relates to the field of thin film production technology, specifically to a waste gas treatment device for thin film production. Background Technology

[0002] During the film production process, coating, drying and other processes generate a large amount of waste gas containing volatile organic compounds (VOCs), which is characterized by large volume, low concentration and high humidity.

[0003] Existing mainstream treatment technologies suffer from high energy consumption, the inability to utilize the heat generated by combustion in the waste gas treatment process, and incomplete mixing of fuel gas and waste gas, leading to combustion residue issues. These problems result in unsatisfactory treatment effects and high energy consumption. To address these issues, we provide a waste gas treatment device for thin-film production. Utility Model Content

[0004] The purpose of this invention is to provide a waste gas treatment device for thin film production to solve the above-mentioned problems.

[0005] This utility model can be achieved through the following technical solution: a waste gas treatment device for thin film production, comprising: a zeolite rotor adsorption device, used to concentrate low-concentration VOCs waste gas into high-concentration waste gas;

[0006] The waste gas preheating tank is connected to the zeolite rotor adsorption device and is used to preheat high-concentration waste gas.

[0007] The dehumidification heating tank is connected to the exhaust gas preheating tank. Inside, there are multiple rows of water-absorbing heating plates filled with sodium peroxide powder crystals, which are used for dehumidification and further heating of exhaust gas.

[0008] An air handling unit receives outside air from a fan and outputs it after filtration and preheating.

[0009] The combustion oxidation tower includes a combustion oxidation section, a heat recovery section, and a spray denitrification section from bottom to top, which are used for combustion oxidation of waste gas, heat recovery of combustion generated gas, and spray denitrification before gas emission, respectively; the outlet of the dehumidification heating tank and the outlet of the air treatment tank are connected to the air inlet at the bottom of the combustion oxidation tower.

[0010] A further technical improvement of this utility model is that: the horizontally staggered baffles inside the waste gas preheating tank form a serpentine gas channel, the tank is filled with preheating liquid, and a heating circulation pipe is embedded in its side wall.

[0011] A further technical improvement of this utility model is that: the air treatment tank has two activated carbon plate frames and a sponge layer in between, and a heating circulation pipe is embedded in the side wall of the tank.

[0012] A further technical improvement of this utility model is that: a gas supply ring is provided at the bottom of the combustion oxidation section, and multiple gas supply cone holes are uniformly provided on the outer wall of the combustion oxidation section covered by the gas supply ring, and a gas pipe is also connected to the outer side of the gas supply ring.

[0013] The combustion oxidation section is located above the air supply ring and has a porous media layer, which is formed by the accumulation of ceramic particles.

[0014] A further technical improvement of this utility model is that a heat recovery water channel is provided inside the side wall of the heat recovery section, which is connected to the second heating circulation pipe and the first heating circulation pipe in sequence to form a closed loop.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] This invention connects the water circuit of the heat recovery section of the combustion oxidation tower with the heating circulation pipes embedded in the air handling tank and the waste gas preheating tank to form a closed loop, recovering the waste heat from combustion. It also utilizes the priority preheating of cold air followed by preheating of waste gas, thereby increasing the initial temperature of the waste gas before combustion, reducing dependence on external heat sources, and reducing the use of fuel gas. On the other hand, a chemical dehumidification scheme is used to absorb moisture from the waste gas and release oxygen and heat, further increasing the temperature of the waste gas before combustion and supplementing the oxygen demand for combustion, thus improving the completeness of subsequent combustion. The sodium hydroxide produced by the chemical reaction can be collected for subsequent degreasing treatment of the membrane.

[0017] In addition, this invention also improves the mixing uniformity and enhances the supply stability of the mixed gas flow by pre-injecting the combustion gas in a multi-directional manner in the combustion oxidation section and mixing it with the exhaust gas and oxygen. A porous structure is formed by a ceramic particle stack layer. When the mixed gas passes through the gap structure of this layer, it is forced to disperse and mix, which greatly improves the mixing uniformity and enhances the supply stability of the mixed gas flow. Attached Figure Description

[0018] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.

[0019] Figure 1 This is a schematic diagram of the overall external structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the internal structure of the waste gas preheating tank of this utility model;

[0021] Figure 3 This is a schematic diagram of the internal structure of the dehumidifying heating tank of this utility model;

[0022] Figure 4 This is a schematic diagram of the internal structure of the air handling tank of this utility model;

[0023] Figure 5This is a diagram of the combustion oxidation section of this utility model.

[0024] In the diagram: 1. Zeolite rotor adsorption device; 2. Waste gas preheating tank; 3. Dehumidification heating tank; 4. Air treatment tank; 5. Fan; 6. Combustion oxidation tower; 201. Baffle; 202. Heating circulation pipe one; 301. Water absorption heating plate; 401. Activated carbon plate frame; 402. Sponge layer; 403. Heating circulation pipe two; 601. Air supply ring; 602. Air supply cone hole; 603. Ceramic particles. Detailed Implementation

[0025] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.

[0026] Please see Figure 1-5 As shown, a waste gas treatment device for thin film production includes a zeolite rotor adsorption device 1, which converts VOCs in a large volume of low-concentration waste gas into concentrated VOCs waste gas with a small volume of high concentration. The concentrated VOCs waste gas is sent to a waste gas preheating tank 2 for preheating. The preheated VOCs waste gas enters a dehumidification heating tank 3 for further heating and dehumidification. At the same time, cold air from the external environment is drawn in by a fan 5 and sent to an air handling tank 4 for preheating, dehumidification, and dust removal. The resulting relatively clean hot air is then combined with a mixture of VOCs waste gas and oxygen output from the dehumidification heating tank 3 and introduced into a combustion oxidation tower 6. The gas entering the bottom of the combustion oxidation tower 6 is uniformly mixed with the injected fuel gas, ignited, and the VOCs waste gas is oxidized at high temperature. After denitrification treatment, the gas is discharged.

[0027] Specifically, a heating circulation pipe 202 is embedded in the side wall of the exhaust gas preheating tank 2. The tank contains preheating liquid. In this embodiment, water is selected as the preheating liquid. The inner wall of the tank is also horizontally equipped with multiple baffles 201. Each pair of adjacent baffles 201 are staggered to form a continuous serpentine gas overflow channel.

[0028] Multiple rows of water-absorbing heating plates 301 are arranged in parallel inside the dehumidifying heating tank 3. The water-absorbing heating plates 301 are filled with sodium peroxide powder crystals. The VOCs exhaust gas preheated by the exhaust gas preheating tank 2 contains moisture. When it passes through the water-absorbing heating plates 301, the moisture combines with the sodium peroxide powder crystals to form oxygen and release heat, forming a heated mixed gas.

[0029] Two activated carbon plates 401 are arranged side by side inside the air handling tank 4, and a sponge layer 402 is filled between the two activated carbon plates 401 to absorb dust and moisture in the air. A heating circulation pipe 403 is embedded in the side wall of the air handling tank 4 to preheat the cold air and obtain treated hot air.

[0030] The combustion oxidation tower 6 consists of three sections, from bottom to top: the combustion oxidation section, the heat recovery section, and the spray denitrification section. The bottom of the combustion oxidation section is equipped with an air inlet for the mixed gas and hot air to enter.

[0031] An air supply ring 601 is provided above the air inlet. A gas input pipe is connected to one side of the air supply ring 601. Multiple air supply cone holes 602 are evenly provided on the outer wall of the combustion oxidation section covered by the air supply ring 601.

[0032] A certain thickness of ceramic particles 603 are deposited above the air supply ring 601 in the combustion oxidation section;

[0033] The mixed gas, hot air and fuel gas are mixed below the ceramic particle layer and further mixed evenly through the porous gaps formed by the accumulation of ceramic particles 603, and then ignited above the ceramic particle layer for combustion and oxidation.

[0034] The heat recovery section has a heat recovery water channel embedded in its side wall to recover part of the heat generated by combustion, and the spray denitrification section is used to spray ammonia water to denitrify the generated gas.

[0035] More specifically, after the heat recovery water flows out of the heat recovery section, it enters the second heating circulation pipe 403 to heat the cold air, and then enters the first heating circulation pipe 202 in the exhaust gas preheating tank 2. After that, it flows out and returns to the heat recovery water in the heat recovery section. The water flow driving force is provided by a water pump (not shown in the figure).

[0036] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A waste gas treatment device for thin film production, characterized in that, include: Zeolite rotor adsorption device (1) is used to concentrate low-concentration VOCs waste gas into high-concentration waste gas; Waste gas preheating tank (2) is connected to the zeolite rotor adsorption device (1) and is used to preheat high-concentration waste gas; The dehumidifying heating tank (3) is connected to the exhaust gas preheating tank (2) and has multiple rows of water-absorbing heating plates (301) filled with sodium peroxide powder crystals inside, which are used for dehumidification and further exhaust gas heating. Air handling tank (4) receives external air input from fan (5) and outputs it after filtration and preheating; The combustion oxidation tower (6) includes a combustion oxidation section, a heat recovery section and a spray denitrification section from bottom to top, which are used for combustion oxidation of waste gas, heat recovery of combustion generated gas and spray denitrification before gas emission, respectively; the outlet of the dehumidification heating tank (3) and the outlet of the air treatment tank (4) are connected to the bottom air inlet of the combustion oxidation tower (6).

2. The waste gas treatment device for thin film production according to claim 1, characterized in that, The waste gas preheating tank (2) has horizontally staggered baffles (201) inside the tank to form a serpentine gas channel. The tank is filled with preheating liquid, and a heating circulation pipe (202) is embedded in its side wall.

3. The waste gas treatment device for thin film production according to claim 2, characterized in that, The air treatment tank (4) has two activated carbon plate frames (401) and a sponge layer in between, and a heating circulation pipe (403) is embedded in the side wall of the tank.

4. The waste gas treatment device for thin film production according to claim 1, characterized in that, The bottom of the combustion oxidation section is provided with a gas supply ring (601), and the outer wall of the combustion oxidation section covered by the gas supply ring (601) is uniformly provided with multiple gas supply cone holes (602). The outer side of the gas supply ring (601) is also connected to a gas pipe. The combustion oxidation section is located above the gas supply ring (601) and has a porous media layer, which is formed by the accumulation of ceramic particles (603).

5. The waste gas treatment device for thin film production according to claim 3, characterized in that, The heat recovery section has a heat recovery water channel inside its side wall that connects heating circulation pipe two (403) and heating circulation pipe one (202) in sequence to form a closed loop.

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