Printed electrode thickness detection device

Abstract

This application relates to a printed electrode thickness detection device, applied in the field of printed electrode inspection. It includes a detection frame, on which a support unit and a line laser ranging unit are respectively provided. The support unit includes a support plate for placing the substrate to be inspected. The detection end of the line laser ranging unit is positioned towards the support plate. The detection frame also includes a first power unit for driving the line laser ranging unit to move, and the moving path of the laser ranging unit is parallel to the support surface of the support plate facing the laser ranging unit. The technical advantage of this application is that it enables non-contact detection of the printed electrode thickness on a substrate, thereby improving the substrate yield.

Description

Technical Field

[0001] This application relates to the technical field of printed electrode detection, and in particular to a printed electrode thickness detection device. Background Technology

[0002] HTCC (High Temperature Co-fired Ceramic) is an advanced electronic packaging technology mainly used to manufacture high-temperature, high-frequency electronic devices. It typically uses high-melting-point metal materials such as tungsten and molybdenum, which are printed onto alumina or aluminum nitride ceramic substrates.

[0003] For substrates manufactured using HTCC technology, it is usually necessary to inspect the thickness of the printed electrodes on the substrate. In related technologies, height gauges are often used to perform destructive sampling inspections on the substrates. However, this destructive sampling inspection makes it impossible to inspect all substrates. Some defective substrates that are not sampled are difficult to detect in a timely manner, resulting in a low substrate pass rate. Summary of the Invention

[0004] To help solve the problem of low substrate yield, this application provides a printed electrode thickness detection device, which adopts the following technical solution: it includes a detection frame, on which a support unit and a line laser ranging unit are respectively provided. The support unit includes a support plate for placing the substrate to be detected. The detection end of the line laser ranging unit is arranged facing the support plate. The detection frame is also provided with a first power unit for driving the line laser ranging unit to move, and the moving path of the laser ranging unit is parallel to the support surface of the support plate facing the laser ranging unit.

[0005] In one specific implementation, the support unit further includes a vertical shaft disposed on a support plate, the support plate being located between the vertical shaft and the line laser ranging unit, the vertical shaft being rotatably connected to the detection frame, and the detection frame being provided with a second power unit for driving the vertical shaft to rotate.

[0006] In one specific implementation, the support plate is provided with an adsorption unit for fixing the substrate. The adsorption unit includes a vacuum pump disposed on the support plate. The support plate has a plurality of air grooves. The substrate to be tested covers the openings of the plurality of air grooves. The air pipe of the vacuum pump is connected to the plurality of air grooves.

[0007] In one specific implementation, the air groove is provided with a silicone ring that matches the air groove, and the silicone ring extends out of the air groove. The substrate to be tested is mounted on a plurality of the silicone rings.

[0008] In one specific implementation scheme, the second power unit includes a driven gear fixedly sleeved on a vertical shaft, and a first servo motor is provided on the detection frame. The output end of the first servo motor is fixedly sleeved with a driving gear, and the driving gear meshes with the driven gear.

[0009] In one specific implementation, the testing frame is provided with a stabilizing rod, and the end of the vertical shaft away from the support plate is rotatably connected to the stabilizing rod.

[0010] In one specific implementation, the first power unit includes a lead screw rotatably connected to the detection frame, a slider threaded onto the lead screw, a line laser ranging unit connected to the slider, the axis of the lead screw being parallel to the support surface of the support plate facing the laser ranging unit, and a drive assembly for driving the lead screw to rotate on the detection frame.

[0011] In one specific implementation, the drive assembly includes a second servo motor mounted on the testing frame, the output of which is coaxially connected to a lead screw.

[0012] In one specific implementation scheme, the detection frame is provided with a display unit, which is electrically connected to the line laser ranging unit, and the display unit is used to display the detection information of the line laser ranging unit.

[0013] In one specific implementation, the line laser ranging unit is a 3D line laser profile measuring instrument.

[0014] In summary, this application has the following beneficial technical effects:

[0015] 1. When it is necessary to inspect the printed electrodes on the substrate, the substrate to be inspected can be placed on the support plate. Then, the first power unit drives the linear laser ranging unit to detect the thickness of the substrate at different positions on the support plate. Based on the substrate thickness detection information, the thickness of the printed electrodes on the substrate can be calculated, thereby realizing non-contact inspection of the substrate. Since this non-contact inspection does not damage the substrate, the staff can inspect the substrate through full inspection, thereby reducing the situation where some defective substrates are not detected in time and improving the overall pass rate of the substrate.

[0016] 2. During the substrate inspection process, the vertical shaft will drive the support plate to rotate under the drive of the second power unit. The rotating support plate can then drive the substrate to rotate synchronously, so that the line laser ranging unit can move in only one direction to perform complete inspection of the substrate, thereby further improving the efficiency of substrate inspection.

[0017] 3. The vacuum pump on the support plate can fix the substrate on the support plate during the substrate inspection process, thereby improving the stability of the substrate during the inspection process and further improving the substrate inspection effect. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application.

[0019] Figure 2 This is a schematic diagram illustrating the calculation of the printed electrode thickness in an embodiment of this application.

[0020] Figure 3 This is a schematic diagram of the support plate in an embodiment of this application.

[0021] Reference numerals in the attached diagram: 1. Detection frame; 2. Line laser ranging unit; 3. Support plate; 4. First power unit; 5. Vertical shaft; 6. Second power unit; 7. Adsorption unit; 8. Vacuum pump; 9. Air groove; 10. Silicone ring; 11. Driven gear; 12. First servo motor; 13. Drive gear; 14. Stabilizer bar; 15. Slider; 16. Second servo motor; 17. Display unit. Detailed Implementation

[0022] The following is in conjunction with the appendix Figure 1-3 This application will be described in further detail.

[0023] This application discloses a printing electrode thickness detection device.

[0024] Reference Figure 1The printed electrode thickness detection device includes a detection frame 1, on which a support unit and a line laser ranging unit 2 are respectively arranged. The support unit includes a support plate 3 for placing the substrate to be detected. The support plate 3 has a disk structure. The detection end of the line laser ranging unit 2 is arranged towards the support plate 3. The detection frame 1 is also provided with a first power unit 4 for driving the line laser ranging unit 2 to move. The moving path of the laser ranging unit is parallel to the support surface of the support plate 3 facing the laser ranging unit. Specifically, in this embodiment, the support plate 3 is arranged horizontally and the line laser ranging unit 2 is arranged directly above the support plate 3 as an example. The support plate 3 is arranged horizontally and the moving path of the laser ranging unit is also horizontal. The direction of movement ensures that the distance between the laser ranging unit and the upper surface of the support plate 3 remains constant. Therefore, when it is necessary to inspect the printed electrodes on the substrate, the substrate to be inspected can be placed on the support plate 3, and then the first power unit 4 is activated to drive the linear laser ranging unit 2 to detect the thickness of the substrate at different positions on the support plate 3. Based on the substrate thickness detection information, the thickness of the printed electrodes on the substrate can be calculated, thereby achieving non-contact inspection of the substrate. Since this non-contact inspection does not damage the substrate, it allows the staff to inspect the substrate through a full inspection, thereby reducing the situation where some defective substrates are not detected in time and improving the overall pass rate of the substrate.

[0025] It should be noted that, referring to Figure 2 In the figure, a is the distance between the detection end of the line laser ranging unit 2 and the upper surface of the support plate 3, b is the thickness of the substrate itself, c is the distance between the detection end of the line laser ranging unit 2 and the upper printed electrode of the substrate, and d is the thickness of the printed electrode on the substrate, and the thickness of the printed electrode on the substrate is d=abc; where, since the distance between the line laser ranging unit 2 and the support plate 3 is constant (a is a fixed value) and b is a known fixed value, the thickness d of the printed electrode on the substrate can be quickly calculated based on the detection value c of the line laser ranging unit 2.

[0026] Reference Figure 1 To further improve the substrate inspection efficiency, the support unit also includes a vertical shaft 5 fixedly connected to a support plate 3 at one end. The vertical shaft 5 is coaxially connected to the support plate 3, and the support plate 3 is located between the vertical shaft 5 and the line laser ranging unit 2. The vertical shaft 5 is vertically oriented and passes through and is rotatably connected to the inspection frame 1. The inspection frame 1 is also equipped with a second power unit 6 for driving the vertical shaft 5 to rotate. Therefore, when inspecting the substrate, the support plate 3 can remain rotated under the drive of the second power unit 6. This allows the line laser ranging unit 2 to move only in one direction during the inspection of the printed electrode thickness on the substrate. By coordinating with the rotation of the substrate, different positions on the substrate can be inspected, thereby further improving the substrate inspection efficiency.

[0027] Reference Figure 1 The second power unit 6 can be specifically configured as follows: it includes a driven gear 11 fixedly sleeved on the vertical shaft 5, a first servo motor 12 fixedly connected to the detection frame 1, and a driving gear 13 fixedly sleeved on the output end of the first servo motor 12, with the driving gear 13 meshing with the driven gear 11. Therefore, when the first servo motor 12 starts, it can drive the driving gear 13 to rotate the driven gear 11, and then the vertical shaft 5 will drive the support plate 3 and the substrate to rotate synchronously under the drive of the driven gear 11, so that the substrate can maintain a slow rotation state during the detection process. In order to further improve the stability of the vertical shaft 5 during the rotation process, a stabilizing rod 14 can also be set on the detection frame 1, and the end of the vertical shaft 5 away from the support plate 3 can be rotatably connected to the stabilizing rod 14, so that the vertical shaft 5 is not easy to shake under the action of external force during the rotation process, further improving the stability of the support plate 3 driving the substrate to rotate during the detection process.

[0028] Reference Figure 1 and Figure 3 To further improve the stability of the substrate during rotational testing, an adsorption unit 7 for fixing the substrate is provided on the support plate 3. The adsorption unit 7 includes a vacuum pump 8 mounted on the support plate 3. Several air grooves 9 are formed on the support plate 3, and silicone rings 10 matching the air grooves 9 are fixedly mounted inside the air grooves 9. The silicone rings 10 extend out of the air grooves 9, that is, the upper end surface of the silicone rings 10 is slightly higher than the upper end surface of the support plate 3. The suction end of the air pipe of the vacuum pump 8 is located at the inner edge of the silicone rings 10 and is connected to the several air grooves 9. The substrate to be tested is placed on the several silicone rings 10. Therefore, during the rotational testing process, the vacuum pump 8 can be activated to adsorb the substrate onto the silicone pad above the support plate 3, so that the substrate can remain stable during the rotational testing process. The silicone pad enhances the sealing between the substrate and the air grooves 9, improves the adsorption effect of the vacuum pump 8 on the substrate, and avoids direct contact between the substrate and the support plate 3, reducing the possibility of the substrate being scratched by the support plate 3, thus protecting the substrate.

[0029] Reference Figure 1 The first power unit 4 can be specifically configured as follows: it includes a lead screw rotatably connected to the detection frame 1, the axis of the lead screw being parallel to the support surface of the support plate 3 facing the line laser ranging unit 2, a slider 15 threadedly connected to the lead screw, the line laser ranging unit 2 being connected to the slider 15, and a drive assembly for driving the lead screw to rotate on the detection frame 1; specifically, the drive assembly can be a second servo motor 16, the output end of the second servo motor 16 being coaxially and fixedly connected to the lead screw. Therefore, when the second servo motor 16 is started, it can drive the lead screw to rotate, and then, driven by the slider 15, the line laser ranging unit 2 can reciprocate along the direction of the lead screw axis, thereby performing thickness detection at different positions of the substrate below.

[0030] Reference Figure 1 To facilitate timely access to substrate thickness testing information for staff, a display unit 17 is fixedly installed on the testing frame 1. The display unit 17 can be a computer with a display screen, and the line laser ranging unit 2 can be a 3D line laser profile measuring instrument. The line laser ranging unit 2 is electrically connected to the computer to transmit the test values ​​back to the computer in real time. The computer can then process the received test information and display it on the display screen, allowing staff to intuitively see the substrate thickness testing information through the information displayed on the screen.

[0031] The implementation principle of this application embodiment is as follows: When it is necessary to detect the thickness of the printed electrodes on the substrate, the operator can place the substrate to be detected on the support plate 3, and then start the vacuum pump 8 to adsorb and fix the substrate on the support plate 3. Then, the first servo motor 12 and the second servo motor 16 are started simultaneously. The first servo motor 12 will drive the 3D line laser profile measuring instrument to move slowly in the horizontal direction, and the second servo motor 16 will drive the vertical shaft 5 to drive the substrate on the support plate 3 to rotate slowly, thereby achieving the effect of continuous detection of the thickness of the printed electrodes at different positions on the substrate. Moreover, the non-contact detection of the substrate using the 3D line laser profile measuring instrument does not damage the substrate, allowing the operator to inspect the substrate through full inspection, thereby reducing the situation where some defective substrates are not detected in time and improving the overall pass rate of the substrate.

[0032] This specific embodiment is merely an explanation of the present invention and is not intended to limit the invention. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A printing electrode thickness detection device, characterized in that: The test includes a test frame (1), on which a support unit and a line laser ranging unit (2) are respectively provided. The support unit includes a support plate (3) for placing the substrate to be tested. The testing end of the line laser ranging unit (2) is arranged in the direction of the support plate (3). The test frame (1) is also provided with a first power unit (4) for driving the line laser ranging unit (2) to move. The moving path of the laser ranging unit is parallel to the support surface of the support plate (3) facing the laser ranging unit.

2. The printed electrode thickness detection device according to claim 1, characterized in that: The support unit also includes a vertical shaft (5) disposed on the support plate (3). The support plate (3) is located between the vertical shaft (5) and the line laser ranging unit (2). The vertical shaft (5) is rotatably connected to the detection frame (1). The detection frame (1) is also provided with a second power unit (6) for driving the vertical shaft (5) to rotate.

3. The printed electrode thickness detection device according to claim 2, characterized in that: The support plate (3) is provided with an adsorption unit (7) for fixing the substrate. The adsorption unit (7) includes a vacuum pump (8) provided on the support plate (3). The support plate (3) has several air grooves (9). The substrate to be tested covers the opening of several air grooves (9). The air pipe of the vacuum pump (8) is connected to several air grooves (9).

4. The printed electrode thickness detection device according to claim 3, characterized in that: The air groove (9) is provided with a silicone ring (10) that matches the air groove (9). The silicone ring (10) extends out of the air groove (9) and the substrate to be tested is mounted on several of the silicone rings (10).

5. The printed electrode thickness detection device according to claim 2, characterized in that: The second power unit (6) includes a driven gear (11) fixedly sleeved on the vertical shaft (5), and a first servo motor (12) is provided on the detection frame (1). The output end of the first servo motor (12) is fixedly sleeved with a driving gear (13), and the driving gear (13) meshes with the driven gear (11).

6. The printed electrode thickness detection device according to claim 2, characterized in that: The testing frame (1) is provided with a stabilizing rod (14), and the end of the vertical shaft (5) away from the support plate (3) is rotatably connected to the stabilizing rod (14).

7. The printed electrode thickness detection device according to claim 1, characterized in that: The first power unit (4) includes a lead screw rotatably connected to the detection frame (1), a slider (15) threadedly connected to the lead screw, the line laser ranging unit (2) connected to the slider (15), the axis of the lead screw being parallel to the support surface of the support plate (3) facing the laser ranging unit, and the detection frame (1) being provided with a drive assembly for driving the lead screw to rotate.

8. The printed electrode thickness detection device according to claim 7, characterized in that: The drive assembly includes a second servo motor (16) mounted on the detection frame (1), and the output end of the second servo motor (16) is coaxially connected to the lead screw.

9. The printed electrode thickness detection device according to claim 1, characterized in that: The detection frame (1) is provided with a display unit (17), which is electrically connected to the line laser ranging unit (2). The display unit (17) is used to display the detection information of the line laser ranging unit (2).

10. The printed electrode thickness detection device according to claim 1, characterized in that: The line laser ranging unit (2) is a 3D line laser profile measuring instrument.

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