A carrier plate surface roughness detection platform

Abstract

This utility model relates to the field of carrier plate testing technology, and more specifically, to a carrier plate surface roughness testing platform. It includes a testing station for placing the carrier plate and a machine body. The machine body is equipped with a conveying system and a measuring instrument for testing the surface roughness of the carrier plate. The measuring instrument has an automatically retractable probe that contacts the surface of the carrier plate being tested. The conveying system is located at both ends of the testing station. A lifting system is located below the testing station and connected to it to drive the testing station to move vertically. A rangefinder for determining the position of the carrier plate is also located directly above the testing station. The testing platform also includes a controller, which is electrically connected to the conveying system, the measuring instrument, the rangefinder, and the lifting system. The height of the testing station in this utility model is adjustable to ensure that the surface of carrier plate products of different thicknesses can be positioned suitable for measurement, thus ensuring testing accuracy and the versatility of the testing platform.

Description

Technical Field

[0001] This utility model relates to the field of carrier plate testing technology, and more specifically, to a carrier plate surface roughness testing platform. Background Technology

[0002] For AMB carrier plate surface roughness automatic inspection platforms, especially when dealing with a large number of products, manually holding the surface roughness measuring instrument presents challenges. Because the thickness of different products varies, it's necessary to constantly change the shims to elevate the products and ensure the distance between the roughness measuring instrument and the inspected surface remains consistent. Furthermore, manual inspection can easily lead to contact with the product and equipment, resulting in inaccurate measurements. Traditional measurement methods cannot achieve stable and continuous measurements, and inaccurate data necessitates multiple measurements. For products of varying thicknesses, constantly adjusting the distance between the roughness measuring instrument and the inspected surface is inefficient and discontinuous. Adjustments are required for each product, leading to significant losses in cost, time, and output during mass production.

[0003] A Chinese invention, publication number CN116222373A, discloses a device and method for measuring the edge roughness of a carrier glass plate. The device includes a main panel electrically connected to a differential inductor coil wound around an iron core. The iron core is connected to a probe via a lever assembly, and a fixed probe is located at the tail end of the probe. A movable platform is located below the fixed probe, and a fixing component is mounted on the movable platform, which is electrically connected to the main panel. This device can quantify the edge roughness of the carrier glass plate, representing it as a roughness parameter. This invention solves the problem in existing carrier glass manufacturing processes where the inability to promptly detect a decline in the grinding effect of the abrasive wheel ultimately leads to the edge roughness of the carrier glass failing to meet usage standards and requirements.

[0004] However, in this technical solution, the mobile platform can only move the carrier plate on the horizontal plane and cannot adjust the position of the carrier plate in the vertical direction during measurement. This results in inconsistent positions of the carrier plate surface when measuring carrier plates of different thicknesses, leading to inaccurate roughness measurement. The process of adjusting the carrier plate height during measurement is complicated and difficult to achieve rapid adjustment to adapt to carrier plates of different thicknesses, thus reducing the versatility of the device. Utility Model Content

[0005] The purpose of this invention is to overcome the problem that existing platforms cannot be raised or lowered and are difficult to adapt to carrier plates of different thicknesses. It provides a carrier plate surface roughness detection platform. By setting up a lifting system, the height of the detection station can be adjusted as needed to ensure that the surface of carrier plate products of different thicknesses can be located in a position suitable for measurement by the measuring instrument, thus ensuring detection accuracy and the versatility of the detection platform.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a carrier plate surface roughness detection platform, including a detection station for placing the carrier plate and a machine body. The machine body is equipped with a conveying system and a measuring instrument for detecting the surface roughness of the carrier plate. The measuring instrument has an automatically retractable probe for contacting the measured surface of the carrier plate. The conveying system is located at both ends of the detection station. A lifting system is provided below the detection station and is connected to the detection station to drive the detection station to move vertically. A rangefinder for sending a distance measurement signal to the carrier plate is also fixedly installed directly above the detection station. The detection platform also includes a controller, which is electrically connected to the conveying system, the measuring instrument, the rangefinder, and the lifting system.

[0007] In this technical solution, the machine body is equipped with a testing station for inspecting a carrier plate. A surface roughness measuring instrument is installed at the testing station. When the surface roughness of the carrier plate needs to be measured, the carrier plate is simply moved to the testing station, and then the measuring instrument is activated. The measuring instrument has an automatically retractable probe. When the carrier plate moves to a preset position, the probe extends and contacts the upper surface of the carrier plate. The probe then slowly retracts into the measuring instrument. Throughout this process, the probe slides on the upper surface of the carrier plate and moves up and down with the undulations of the surface. The probe records the information of this up-and-down movement, ultimately obtaining the surface roughness of the carrier plate. Conveying systems are installed at both ends of the testing station. One conveyor system transports the carrier plate to be inspected to the testing station for inspection, and the other conveyor system removes the carrier plate from the testing station and transports it to another location after inspection. This process eliminates the need for manual placement of the carrier plate, and the carrier plate flows unidirectionally during inspection, enabling a streamlined inspection process that significantly improves the efficiency of carrier plate surface roughness inspection. In normal production processes, various thicknesses of carrier plates are encountered. For a surface roughness measuring instrument to achieve ideal measurement results, the measured surface of the carrier plate and the measuring instrument must be in a fixed relative position at the initial stage of measurement (ideally, the measuring instrument should be at zero point when the probe contacts the measured surface). If the inspection station cannot be raised or lowered, when a thicker carrier plate is placed, the zero point of the measuring instrument will drift when the probe contacts the thicker surface, affecting measurement accuracy. Therefore, carrier plates of different thicknesses require different placement heights, ensuring the measuring instrument is at zero point when the measured surface of the carrier plate just makes contact with the probe. Setting up separate inspection platforms for carrier plate products of different thicknesses would significantly increase the procurement cost of related equipment. Therefore, a lifting device is also installed below the inspection station. This device can drive the inspection station to move vertically to accommodate different thicknesses of carrier plates, ensuring that the relative position of the inspection surface of the carrier plate to the measuring instrument remains unchanged, unaffected by the thickness of the carrier plate. This ensures the accuracy of the measurement results and makes the inspection platform more versatile. A rangefinder for determining the position of the carrier plate is also installed directly above the inspection station. When the carrier plate is transported to the inspection station, the rangefinder is positioned directly above the upper surface of the carrier plate. A controller is also provided, electrically connected to the conveying system, measuring instrument, rangefinder, and lifting system. The rangefinder measures the distance between the upper surface of the carrier plate and the rangefinder and transmits this distance information to the controller. Ideally, the distance D measured by the rangefinder between the upper surface of the carrier plate and the rangefinder is stored in the controller.In actual operation, the distance H between the rangefinder and the upper surface of the carrier plate is measured. After receiving the data H, the controller calculates HD=d. If d=0, it indicates that the upper surface of the carrier plate is in the ideal detection position. If d≠0, the controller controls the lifting system to move the plate upwards a distance d. The controller determines whether the upper surface of the carrier plate is in the ideal detection position based on the rangefinder information, and can uniformly control the conveying system, measuring instrument, and lifting system, coordinating the actions of each component. This setup improves the automation level of the detection platform and reduces the manual labor load.

[0008] Preferably, the lifting system includes a lead screw and a motor, the output shaft of the motor is connected to one end of the lead screw, the lead screw is installed vertically and threadedly connected to the detection station, the detection station is slidably connected to the machine body vertically, and the motor is electrically connected to the controller.

[0009] Preferably, the motor is further provided with a speed sensor, which is electrically connected to the controller.

[0010] Preferably, it also includes a vacuum system capable of adsorbing a carrier plate, the vacuum system having a housing with a vacuum chamber inside, the housing being connected below the detection station and connected to the telescopic end of the lifting system.

[0011] Preferably, the housing is provided with an air pipe interface connected to the air pump, and the air pipe interface is connected to the vacuum chamber inside the housing; the detection station is connected to the top of the housing, and the detection station is densely covered with adsorption holes connected to the vacuum chamber; the air pump is electrically connected to the controller.

[0012] Preferably, a flow meter for detecting gas flow is provided at the gas pipe interface, and the flow meter is electrically connected to the controller.

[0013] Preferably, the machine body has a scale line on one side of the testing station in a vertical direction for observing the height of the testing station.

[0014] Preferably, photoelectric sensors for detecting the position of the carrier plate are provided at both ends of the detection station, and the photoelectric sensors are electrically connected to the controller.

[0015] Preferably, the inspection station side is further provided with a robotic arm for moving the carrier plate between the conveying system and the inspection station, and the robotic arm is electrically connected to the controller.

[0016] Preferably, a dust cover is provided outside the testing station.

[0017] Compared with existing technologies, the advantages of this utility model are as follows: The lifting system allows for adjustment of the inspection station height as needed, ensuring that the surface of carrier plates of different thicknesses is level with the surface roughness measuring instrument, thus ensuring inspection accuracy and the versatility of the inspection platform. The lifting system consists of a lead screw and a motor; the speed of lifting using the lead screw is relatively stable, allowing for stepless adjustment during the lifting process. A vacuum system is provided, which can fix the carrier plate product in place during inspection by vacuum adsorption, ensuring that product displacement during inspection does not affect inspection accuracy. A photoelectric sensor is provided to detect the position of the carrier plate product to coordinate the work of other components. A robotic arm is provided for loading and unloading the carrier plate product, improving the automation level of the inspection platform. A dust cover is provided to ensure that dust on the carrier plate surface does not affect the inspection results during the inspection process. Attached Figure Description

[0018] Figure 1 This is a top view of the carrier plate surface roughness detection platform of this utility model;

[0019] Figure 2 This is a partial cross-sectional view of the carrier plate surface roughness detection platform of this utility model.

[0020] In the attached diagram: 1. Inspection station; 2. Conveying system; 3. Measuring instrument; 4. Lifting system; 5. Controller; 6. Vacuum system; 7. Photoelectric sensor; 8. Robotic arm; 9. Dust cover; 10. Machine body; 11. Rangefinder; 41. Lead screw; 42. Motor; 61. Housing; 62. Cover plate; 63. Adsorption hole. Detailed Implementation

[0021] The accompanying drawings are for illustrative purposes only and should not be construed as limiting this patent. To better illustrate this embodiment, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings. The positional relationships described in the drawings are for illustrative purposes only and should not be construed as limiting this patent.

[0022] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," "right," "long," and "short" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0023] The technical solution of this utility model will be further described in detail below through specific embodiments and with reference to the accompanying drawings:

[0024] Example 1

[0025] like Figure 1 , Figure 2As shown, a carrier plate surface roughness detection platform includes a detection station 1 for placing the carrier plate and a machine body 10. The machine body 10 is equipped with a conveying system 2 and a measuring instrument 3 for detecting the surface roughness of the carrier plate. The measuring instrument 3 has an automatically retractable probe for contacting the measured surface of the carrier plate. The conveying system 2 is located at both ends of the detection station 1. A lifting system is provided below the detection station 1 and is connected to the detection station 1 to drive the detection station 1 to move vertically. A rangefinder 11 for sending a distance measurement signal to the carrier plate is also fixedly installed directly above the detection station 1. The detection platform also includes a controller 5, which is electrically connected to the conveying system 2, the measuring instrument 3, the rangefinder 11, and the lifting system 4. The machine body 10 is equipped with a testing station 1 for inspecting a carrier plate. A measuring instrument 3 for measuring surface roughness is installed at testing station 1. When the surface roughness of the carrier plate needs to be measured, the carrier plate is simply moved to testing station 1, and then the measuring instrument 3 is activated. The measuring instrument 3 has an automatically retractable probe. When the carrier plate moves to a preset position, the probe in the measuring instrument 3 extends and contacts the upper surface of the carrier plate. The probe then slowly retracts into the measuring instrument 3. Throughout this process, the probe slides on the upper surface of the carrier plate and moves up and down with the undulations of the upper surface. The probe records the information of its up-and-down movement, ultimately obtaining the surface roughness of the carrier plate. Conveying systems 2 are installed at both ends of testing station 1. One conveying system 2 can transport the carrier plate to be inspected to testing station 1 for inspection, and after inspection, the other conveying system 2 can remove the carrier plate from testing station 1 and transport it to another location. This process eliminates the need for manual placement of the carrier plate, and the carrier plates flow unidirectionally throughout the inspection process, enabling a streamlined inspection of the carrier plates and significantly improving the efficiency of carrier plate surface roughness detection. In normal production, carrier plate products of varying thicknesses are encountered. For the measuring instrument 3 used to detect carrier plate surface roughness to achieve ideal measurement conditions, the measured surface of the carrier plate and the measuring instrument 3 must be in a fixed relative position at the initial stage of measurement (i.e., ideally, the measuring instrument 3 is at zero point when the probe contacts the measured surface). If the inspection station 1 cannot be raised or lowered, when placing a thicker carrier plate, the zero point of the measuring instrument 3 will drift when the probe contacts the thicker measured surface, affecting the measurement accuracy. Therefore, carrier plates of different thicknesses require different placement heights, ensuring that the measuring instrument 3 is at zero point when the measured surface of the carrier plate just contacts the probe. Setting up separate inspection platforms for carrier plate products of different thicknesses would significantly increase the procurement cost of related equipment. Therefore, a lifting device is also provided under the inspection station 1. The lifting device can drive the inspection station 1 to move in the vertical direction to adapt to the different thicknesses of different carrier products. This ensures that the relative position of the inspection surface of the carrier product with the measuring instrument 3 remains unchanged and is not affected by the thickness of the carrier, thus ensuring the accuracy of the measurement results and making the inspection platform more versatile.A rangefinder 11 for determining the position of the carrier plate is installed directly above the inspection station 1. When the carrier plate is transported to the inspection station 1, the rangefinder 11 is positioned directly above the upper surface of the carrier plate. A controller 5 is also provided, electrically connected to the conveyor system 2, the measuring instrument 3, the rangefinder 11, and the lifting system 4. The rangefinder 11 measures the distance between the upper surface of the carrier plate and the rangefinder 11, and transmits this distance information to the controller 5. Ideally, the distance measured by the rangefinder 11 is D, and this distance D is stored in the controller 5. In actual operation, the actual distance detected by the rangefinder 11 is H. After receiving the data H, the controller 5 calculates HD=d. If d=0, it indicates that the upper surface of the carrier plate is in the ideal inspection position. If d≠0, the controller 5 controls the lifting system 4 to move the plate upwards by the distance d. Since the rangefinder 11 is fixedly installed on the inspection station 1, after the carrier plate enters the inspection station 1, the rangefinder 11 sends a measurement signal to the carrier plate. This signal can be considered as measuring the distance between the rangefinder 11 and the carrier plate. Even if this signal is not considered as the distance between the rangefinder 11 and other unmeasured positions on the carrier plate, the measured data will not affect the final data d result. The controller 5 determines whether the upper surface of the carrier plate is in the ideal inspection position based on the information from the rangefinder 11, and can uniformly control the conveying system 2, the measuring instrument 3, and the lifting system 4, coordinating the actions between the various components. This setup improves the automation level of the inspection platform and reduces the manual labor load.

[0026] like Figure 2 As shown, the lifting system 4 includes a lead screw 41 and a motor 42. The output shaft of the motor 42 is connected to one end of the lead screw 41. The lead screw 41 is installed vertically and threadedly connected to the detection station 1. The detection station 1 is slidably connected to the machine body 10 vertically. The motor 42 is electrically connected to the controller 5. The motor 42 can drive the lead screw 41 to rotate. Since the lead screw 41 is threadedly connected to the detection station 1, when the lead screw 41 rotates, it will drive the detection station 1, which is threadedly connected to it, to move along the length of the lead screw 41. This realizes the conversion of the torque output by the motor 42 into the movement of the detection station 1 along the length of the lead screw 41. Compared with using the motor 42 to directly pull the detection station 1, the process of moving the detection station 1 through the lead screw 41 is more stable. The lead screw 41 is vertically installed below the inspection station 1, allowing the inspection station 1 to move vertically. This allows for adjustments to the height of the inspection station 1, ensuring the inspection surface of the carrier plate is positioned suitable for measurement by the measuring instrument 3, thus guaranteeing product accuracy and improving the versatility of the inspection platform. The motor 42 is electrically connected to the controller 5, and its operation is controlled by the controller 5, which coordinates the operation of the motor 42 with other components.

[0027] like Figure 2As shown, a speed sensor is also installed on the motor 42, and the speed sensor is electrically connected to the controller 5. The speed sensor can provide timely feedback of the speed output by the motor 42 to the controller 5, so that the controller 5 can adjust the operation of the motor 42 in a timely manner, ensuring that the movement of the detection station 1 is smooth and the position is accurate.

[0028] Example 2

[0029] This embodiment is similar to Embodiment 1 above, except that, as Figure 2 As shown, it also includes a vacuum system 6 that can adsorb the carrier plate. The vacuum system 6 has a housing 61 with a vacuum chamber inside. The housing 61 is connected to the bottom of the detection station 1 and is connected to the telescopic end of the lifting system 4. When detecting the surface roughness of the carrier plate, it is necessary to ensure that the position of the carrier plate does not change. If the position of the carrier plate moves during this process, it will cause the position of the carrier plate surface detected by the measuring instrument 3 to change, and it will not accurately reflect the roughness information of the original position, resulting in measurement errors by the measuring instrument 3. Therefore, a device for fixing the carrier plate is required. A vacuum system 6 that can adsorb the carrier plate is also provided below the detection station 1. The vacuum system has a housing 61. The carrier plate is placed on the housing 61. By evacuating the air from the housing 61, the carrier plate is firmly pressed on the top of the housing 61 under atmospheric pressure and cannot move, thus fixing the position of the carrier plate. The housing 61 is connected to the bottom of the detection station 1 and is connected to the telescopic end of the lifting system 4. The housing 61 can move in the vertical direction to drive the detection station 1 to move in the vertical direction, realizing the function of adjusting the height of the detection station 1.

[0030] like Figure 2 As shown, the housing 61 is equipped with an air pipe interface connected to the air pump, which is connected to the vacuum chamber inside the housing 61. The detection station 1 is connected to the top of the housing 61, and the detection station 1 is densely covered with adsorption holes 63 that communicate with the vacuum chamber. The air pump is electrically connected to the controller 5. When the carrier plate is transported above the vacuum system 6, the controller 5 starts the air pump, which extracts the air from the vacuum chamber in the housing 61, creating a vacuum inside the housing 61. The cover plate 62 is used to support the carrier plate being tested, and the cover plate 62 is densely covered with adsorption holes 63. Under atmospheric pressure, the adsorption holes 63 that communicate with the vacuum chamber 61 firmly adhere to the bottom surface of the carrier plate, preventing it from moving.

[0031] like Figure 2 As shown, a flow meter for detecting gas flow is installed at the gas pipe interface, and the flow meter is electrically connected to the controller 5. The flow meter can reflect the vacuum level of the vacuum chamber 61 to the controller 5 through the gas flow, so as to adjust the operation of the air pump and avoid excessive adsorption force of the adsorption hole 63, which could damage the surface of the carrier plate.

[0032] like Figure 2As shown, the machine body 10 has a scale line on one side of the detection station 1 in the vertical direction for observing the height of the detection station 1. This scale line can intuitively reflect the height of the vacuum system and is convenient for users to observe and operate.

[0033] Example 3

[0034] This embodiment is similar to Embodiment 1 above, except that, as Figure 1 As shown, photoelectric sensors 7 for detecting the position of the carrier plate are installed at both ends of the detection station 1. The photoelectric sensors 7 are electrically connected to the controller 5. The photoelectric sensors 7 can detect the position of the carrier plate and feed back the position information of the carrier plate to the controller 5, so that the controller 5 can control the operation of other components.

[0035] like Figure 1 As shown, a robotic arm 8 is also provided on the side of the inspection station 1 for transporting the carrier plate between the conveying system 2 and the inspection station 1. The robotic arm 8 is electrically connected to the controller 5. Before inspection, the photoelectric sensor 7 located at the input end detects the carrier plate, and then the controller controls the robotic arm 8 to pick up the carrier plate from the conveying system 2 at the input end and place it on the inspection station 1. After inspection, the controller 5 controls the robotic arm 8 to extend into the inspection station 1 and pick up the carrier plate, placing it on the conveying system 2 located at the output end. After the photoelectric sensor 7 located at that end detects the carrier plate, the conveying system 2 starts to transport the carrier plate out, realizing the automation of the loading and unloading processes in the inspection process and reducing the manual labor load.

[0036] like Figure 2 As shown, a dust cover 9 is installed outside the testing station 1. The dust cover 9 ensures that the test results are not affected by dust on the surface of the carrier plate during the testing process.

[0037] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A carrier plate surface roughness detection platform, characterized in that, The system includes a testing station (1) for placing a carrier plate and a machine body (10). The machine body (10) is equipped with a conveying system (2) and a measuring instrument (3) for detecting the surface roughness of the carrier plate. The measuring instrument (3) has an automatically extendable probe for contacting the surface of the carrier plate. The conveying system (2) is located at both ends of the testing station (1). A lifting system (4) is provided below the testing station (1). The lifting system (4) is connected to the testing station (1) to drive the testing station (1) to move vertically. A rangefinder (11) for sending a distance measurement signal to the carrier plate is also fixedly installed directly above the testing station (1). The testing platform also includes a controller (5). The controller (5) is electrically connected to the conveying system (2), the measuring instrument (3), the rangefinder (11), and the lifting system (4).

2. The carrier plate surface roughness detection platform according to claim 1, characterized in that, The lifting system (4) includes a lead screw (41) and a motor (42). The output shaft of the motor (42) is connected to one end of the lead screw (41). The lead screw (41) is installed vertically and threadedly connected to the detection station (1). The detection station (1) is slidably connected to the machine body (10) vertically. The motor (42) is electrically connected to the controller (5).

3. The carrier plate surface roughness detection platform according to claim 2, characterized in that, The motor (42) is also equipped with a speed sensor, which is electrically connected to the controller (5).

4. The carrier plate surface roughness detection platform according to claim 1, characterized in that, It also includes a vacuum system (6) that can adsorb a carrier plate, the vacuum system (6) having a housing (61) with a vacuum chamber inside, the housing (61) being connected below the detection station (1) and connected to the telescopic end of the lifting system (4).

5. The carrier plate surface roughness detection platform according to claim 4, characterized in that, The housing (61) is provided with an air pipe interface connected to the air pump, and the air pipe interface is connected to the vacuum chamber inside the housing (61); the detection station (1) is connected to the top of the housing (61), and the detection station (1) is densely covered with adsorption holes (63) connected to the vacuum chamber; the air pump is electrically connected to the controller (5).

6. The carrier plate surface roughness detection platform according to claim 5, characterized in that, A flow meter for detecting gas flow is installed at the gas pipe interface, and the flow meter is electrically connected to the controller (5).

7. The carrier plate surface roughness detection platform according to claim 1, characterized in that, The machine body (10) has a scale line on one side of the detection station (1) in the vertical direction for observing the height of the detection station (1).

8. The carrier plate surface roughness detection platform according to claim 1, characterized in that, The detection station (1) is equipped with photoelectric sensors (7) at both ends to detect the position of the carrier plate, and the photoelectric sensors (7) are electrically connected to the controller (5).

9. The carrier plate surface roughness detection platform according to claim 1, characterized in that, The testing station (1) is also provided with a robotic arm (8) for moving the carrier plate between the conveying system (2) and the testing station (1), and the robotic arm (8) is electrically connected to the controller (5).

10. A carrier plate surface roughness detection platform according to claim 1, characterized in that, The testing station (1) is equipped with a dust cover (9).

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