A new type of steel bottle liquid level detection device

Abstract

The utility model provides a novel steel bottle liquid level detection device, including steel bottle, the top of steel bottle is provided with carrier gas inlet, pressure balance exhaust port and detection subassembly installation mouth, be provided with the flow guide detection tube in the steel bottle, be provided with liquid level sensor in the flow guide detection tube, and liquid level sensor passes through installation mouth electrically external signal receiver, the one end of flow guide detection tube towards installation mouth is first open end, the other end is second open end, and there is a certain distance between first open end and the inner top of steel bottle, and the edge of second open end is fixedly connected with the inner bottom of steel bottle. The utility model discloses a steel bottle liquid level detection device can still keep the measuring accuracy under the bubbling disturbance working condition, effectively solve the liquid level measurement problem of dynamic working condition, realize the real -time monitoring and early warning of the precursor balance, significantly improve the deposition process raw material utilization, provide reliable material monitoring guarantee for the thin film deposition quality of semiconductor manufacturing field, especially suitable for the precision manufacturing environment of strict requirement.

Description

Technical Field

[0001] This utility model belongs to the field of cylinder liquid level measurement technology, and relates to a novel cylinder liquid level detection device. Background Technology

[0002] In chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes, the precursor is typically encapsulated in a special steel container. After vaporization, the precursor vapor is introduced from the cylinder into the reaction chamber via a low-pressure delivery system or by using a carrier gas bubbling method, ultimately achieving thin film deposition.

[0003] Existing technology discloses an ultrasonic-based liquefied petroleum gas (LPG) cylinder level detection device. Its system architecture includes a core microcontroller unit (MCU) integrating analog-to-digital conversion (ADC), pulse width modulation (PWM), and external interrupt functions. Supporting modules include: a human-machine interface unit (including an LCD display, LED status indicators, and a buzzer), user input buttons, a power supply unit, an auxiliary lighting unit, an ultrasonic drive circuit, and a signal conditioning circuit. The ultrasonic transducer probe is connected to the drive and signal conditioning circuits. However, the core drawback of this solution is that it only focuses on static level measurement, completely neglecting the significant impact of dynamic operating conditions such as cylinder transportation, equipment integration, and diverse application scenarios on measurement accuracy, resulting in significant application limitations.

[0004] In the field of semiconductor precursor storage and transportation, existing cylinder systems have significant technical limitations: the standard container volume range is narrow (200-2500mL), and the thickened wall design to meet low-pressure operating conditions results in an excessively high proportion of container weight. This characteristic makes traditional monitoring methods based on mass changes insufficiently sensitive. Simultaneously, the limited container size (typical inner diameter <100mm) severely restricts the accuracy of conventional liquid level detection technologies (including float-type displacement sensing and ultrasonic echo measurement), and their resolution is insufficient to meet process requirements. Particularly in bubbling delivery mode, Rayleigh-Taylor instability caused by carrier gas injection leads to severe liquid level disturbances, rendering the residual level estimation method based on static liquid level measurement completely ineffective. This technical deficiency may result in precursor depletion going unnoticed, ultimately causing thin film deposition process failure.

[0005] Therefore, there is an urgent need to develop a new type of cylinder liquid level detection device to break through the constraints of existing technology and effectively meet the actual process monitoring needs of high precision. Utility Model Content

[0006] To address the monitoring needs of precursor storage and transportation in chemical vapor deposition and atomic layer deposition processes, this invention innovatively develops a novel cylinder liquid level detection device. This device employs multimodal sensing technology, overcoming the application bottlenecks of traditional measurement methods under special operating conditions, and is particularly suitable for conveying systems exhibiting gas bubbling effects.

[0007] Under dynamic operating conditions, including complex factors such as transport vibrations, carrier gas injection disturbances, and low-pressure environments, the system maintains stable measurement performance. Through advanced signal processing algorithms and anti-interference design, it enables precise monitoring of the remaining precursor quantity, effectively preventing coating failure due to material depletion. The application of this technology not only improves raw material utilization efficiency but also provides crucial assurance for the stability and repeatability of thin film deposition processes.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] This utility model provides a novel cylinder liquid level detection device. The cylinder liquid level detection device includes a cylinder, and the top of the cylinder is provided with a carrier gas inlet, a pressure balance exhaust port and a detection component mounting port. The carrier gas inlet is used to connect to a gas source.

[0010] The cylinder is equipped with a flow guiding detection tube, and a liquid level sensor is installed inside the flow guiding detection tube. The liquid level sensor is connected to an external electrical signal receiver through the detection assembly.

[0011] The flow guide detection tube has a first open end facing the installation port of the detection component, and a second open end. There is a certain distance between the first open end and the inner top of the cylinder, and the edge of the second open end is fixedly connected to the inner bottom of the cylinder.

[0012] This utility model's cylinder liquid level detection device uses a cylindrical pressure-resistant container (cylinder) as its basic structure. The top is equipped with three functional interfaces: a carrier gas inlet port, a pressure balance exhaust port, and a detection component mounting port. A flow-guiding detection tube is vertically installed inside the cylindrical pressure-resistant container, embedding a high-precision sensing module. The sensing signal is transmitted externally through the top interface. The flow-guiding detection tube features an open-end design at the top, maintaining a certain buffer distance from the container's top cover. The lower part is fixed to the container's bottom using spot welding. This unique double-ended opening structure ensures media flow. Through its innovative structural layout, this device achieves accurate liquid level monitoring under complex operating conditions, overcoming the limitations of traditional measurement methods in small, high-pressure containers.

[0013] Specifically, this invention innovatively develops a liquid level monitoring device for precursor storage and transportation containers suitable for semiconductor deposition processes. The device uses a cylindrical pressure-resistant container (steel cylinder) as its basic frame, with a three-channel interface assembly integrated at the top, including a process gas input channel, an exhaust pressure relief channel, and a sensor mounting channel. The system incorporates a vertical flow guide detection tube structure, internally integrating a MEMS liquid level sensing unit, and achieves data interaction through wireless power supply and signal transmission technology. A buffer isolation section is provided at the upper part of the flow guide detection tube to avoid interference from the gas phase space, and the lower part is dot-welded to the bottom of the steel cylinder to ensure the stability of the measurement reference plane. The unique dual-channel structure design ensures free flow of the medium. This solution maintains stable monitoring within a certain operating pressure range, particularly solving the liquid level measurement problem for some micro-sized containers. It can still achieve accurate measurement under bubbling disturbance conditions, realizing real-time monitoring and early warning of precursor balance. Through innovative structural design, this system significantly improves raw material utilization and provides reliable assurance for the quality of thin film deposition in the semiconductor manufacturing field.

[0014] Through the above-mentioned innovative liquid level measurement structure design, this utility model realizes the accurate measurement of the residual amount in the precursor cylinder, solves the technical problem that traditional liquid level gauges cannot measure bubbling cylinders, meets the demand for accurate liquid level measurement of the cylinder or the liquid inside the cylinder under dynamic working conditions, significantly improves the effective utilization rate of raw materials, and provides innovative technical guarantee for the quality stability of the deposition process.

[0015] Traditional liquid level monitoring technologies face significant challenges in the storage and transportation of precursors for chemical vapor deposition (CVD) processes. Conventional methods such as ultrasonic detection, float sensing, and mass measurement all suffer from data distortion under dynamic conditions, particularly during cylinder transport or carrier gas bubbling. This bottleneck directly leads to misjudgments of precursor replenishment timing; premature replacement results in material waste, while delayed replacement affects product quality. To address this problem, this solution innovatively employs a built-in flow guide tube measurement structure. Through precisely designed geometric parameters (including tube diameter, opening size, and installation position), a stable liquid level monitoring environment is established. The core technology principle is that the liquid precursor flows stably into the measuring tube through the bottom opening, while air bubble interference is physically isolated outside the tube, forming a static liquid column undisturbed by external forces inside the tube, achieving static measurement conditions under dynamic conditions. This technological breakthrough improves measurement accuracy, increases raw material utilization, and significantly enhances batch consistency, making it particularly suitable for demanding high-precision semiconductor coating processes. This innovative structural design fundamentally solves the real-time monitoring problem in precursor storage and transportation.

[0016] This invention offers significant compatibility advantages in sensor selection, supporting various sensing principles (including capacitive, resistive, inductive, and ultrasonic). It only requires that the sensor's outer diameter be smaller than the inner diameter of the flow-guiding detection tube, while the gap design avoids capillary action. The data acquisition module can be integrated into the top of the container, employing a standardized electrical interface and providing real-time data display and processing capabilities. Technicians can freely select hardware configurations based on specific operating conditions. This solution is applicable to a wide range of container volumes (100mL–1000L), breaking through the traditional 25.4mm minimum pipe diameter limitation of level gauges, significantly reducing the minimum system capacity requirement to below 18L, and can be extended to various reaction vessels. Through modular architecture design, it achieves engineering freedom in sensor selection, ease of system integration, and adaptability to containers of different scales. Its technical indicators are significantly superior to traditional measurement solutions, making it particularly suitable for precision chemical and semiconductor manufacturing fields requiring flexible configuration.

[0017] As a preferred technical solution of this utility model, the gas cylinder is provided with a gas guide tube inside.

[0018] As a preferred technical solution of this utility model, one end of the gas guide tube is connected to the carrier gas inlet, and the other end is located near the bottom of the cylinder.

[0019] This utility model's gas guiding system adopts a modular design. The inlet end of the gas guiding pipe is directly connected to the gas inlet port on the top of the cylinder, and the outlet end extends to the bottom area of ​​the container, providing engineers with multiple configuration options. In terms of structural design, the system supports straight or curved pipeline layouts. The bending radius and direction can be freely designed according to actual needs, but a safe distance must be maintained between the gas outlet and the guiding detection pipe. Regarding material selection, the system supports various corrosion-resistant metal materials. The pipe diameter can be adjusted according to flow requirements, and the wall thickness parameter is determined according to the pressure rating. Installation technical requirements include: the bottom gas outlet must maintain a stable airflow distribution, the distance between it and the measuring conduit should avoid mutual interference, and the curved section must ensure smooth airflow passage.

[0020] As a preferred technical solution of this utility model, the maximum linear distance between the central axis of the air guide tube and the central axis of the flow detection tube is ≥2cm.

[0021] This invention proposes key design requirements for the internal spatial layout of the flow guiding system. Its core specification requires that the centerline distance between the air guide tube and the flow guiding detection tube must be ≥2cm (typical values ​​include 2cm, 2.5cm, 3cm, 4cm, 5cm, etc., and other values ​​within this range also apply). This technical parameter is established based on the following fluid dynamics considerations: when the distance between the two tubes is insufficient, the bubble dynamics phenomena (including turbulence and pressure fluctuations) generated by the air guide tube will be transmitted to the flow guiding detection tube through fluid coupling, causing unexpected oscillations in the internal liquid column, thus distorting the measurement data. This distance standard, verified through experiments, effectively isolates bubble interference, ensuring the stability of the measurement system. Its engineering value lies in establishing a reliable liquid level monitoring environment.

[0022] As a preferred technical solution of this utility model, the first opening end of the flow guiding detection tube is an open end, and the first opening end is set higher than the liquid level in the steel cylinder.

[0023] This invention employs a key optimization measure in the structural design of the measuring conduit: by designing the upper open end (first open end) of the flow guide detection tube as an open structure and ensuring that its open end is always above the working liquid surface, a pressure balance mechanism is achieved. This design continuously exposes the upper open end to the gas phase space, achieving dynamic pressure balance between the measuring tube and the main container, eliminating static pressure differences. In terms of structural features, an unobstructed straight-through opening design is adopted, with streamlined opening edges, and the height position can be set according to the maximum working liquid level. This technical feature effectively solves the pressure hysteresis problem common in closed measuring tubes by establishing a stable pressure reference system, avoiding false liquid level signals caused by gas pressure differences, ensuring that the measurement data accurately reflects the material inventory, reducing measurement errors, and providing the necessary physical conditions for accurate measurement. It is particularly suitable for monitoring the inventory of pressure-sensitive precursors.

[0024] As a preferred technical solution of this utility model, the certain distance is ≥1cm.

[0025] As a preferred technical solution of this utility model, the edge of the second opening end is dot-welded to the bottom of the inner cylinder, and the distance between the second opening end and the bottom of the inner cylinder is ≤1cm.

[0026] As a preferred technical solution of this utility model, the second opening end is a mesh opening end, and the mesh number of the mesh opening end is 5 mesh to 400 mesh.

[0027] This invention employs an innovative design in the bottom connection structure of the flow guide detection tube. A 0.5-2mm positioning boss is formed through a multi-point discrete welding process (3-8 weld points), with adjustable weld point spacing (20-50mm range), achieving a reliable mechanical anchoring effect. The bottom gap is controlled within ≤1cm, and parameters such as 10mm, 8mm, 6mm, 4mm, and 2mm can be selected according to different operating conditions. The bottom of the flow guide detection tube is equipped with a multi-stage filter (5-400 mesh), ensuring relatively stable liquid levels inside the tube and eliminating pressure differences between the inside and outside. It provides multiple filtration options from coarse filtration (5 / 10 / 50 mesh) to fine filtration (100 / 200 mesh) and even ultra-fine filtration (300 / 400 mesh). This design significantly improves the performance of the measuring device, increasing installation and positioning accuracy, enhancing vibration resistance, reducing bubble interference, and improving measurement stability. It is particularly suitable for liquid level monitoring applications in high-precision, high-vibration environments.

[0028] As a preferred technical solution of this utility model, the liquid level sensor is disposed through the middle of the flow guide detection tube.

[0029] In this invention, the liquid level sensor is installed through the middle of the flow guide detection tube, which provides more accurate measurement compared to a sensor designed on the side wall inside the flow guide detection tube.

[0030] As a preferred technical solution of this utility model, the flow guiding detection tube is a stainless steel tube or a titanium alloy tube.

[0031] This invention offers significant advantages in material selection and performance optimization for the flow guide detection tube. The main body of the flow guide detection tube is made of electrochemically polished stainless steel or titanium alloy, effectively suppressing metal ion precipitation and ensuring precursor purity meets semiconductor-grade standards. This structural design is compatible with multiple sensing technologies, and the stable liquid column formed inside creates ideal conditions for high-precision measurement—a crucial characteristic for accurate control of CVD / ALD processes. The entire device integrates intelligent monitoring functions, automatically triggering a replenishment program when the liquid level drops to a preset threshold (set to 5-10% of total capacity), enabling unattended continuous operation. This automation solution reduces the fluctuation range of process parameters, improves product yield, and reduces raw material loss. By establishing a closed-loop control system, it not only eliminates process interruptions caused by traditional manual bottle changing (downtime reduced to zero), but also ensures the continuous stability of the deposition environment, providing a reliable guarantee for batch-to-batch consistency of nanoscale thin films.

[0032] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0033] This invention successfully overcomes the technical bottleneck of precursor inventory monitoring in bubbling conveyor systems through an innovative detection device, achieving improved anti-interference capability and accurate measurement under dynamic operating conditions. This solution breaks through the measurement limitations of traditional level gauges in gas-liquid two-phase flows, improving raw material utilization, enhancing deposition thickness uniformity, reducing batch-to-batch variations, and increasing product yield. By establishing a continuous and stable process monitoring system and fully automated material replenishment control, it provides reliable material support for semiconductor-grade thin film deposition, fundamentally solving the process failure problem caused by precursor depletion. Attached Figure Description

[0034] Figure 1 A schematic diagram of a novel cylinder liquid level detection device provided for a specific embodiment of this utility model;

[0035] Among them, A-Gas delivery tube; B-Signal receiver; C-Gas cylinder; D-Liquid level sensor; E-Flow detection tube. Detailed Implementation

[0036] All descriptive terms relating to spatial orientation in this utility model (including but not limited to "axial direction," "radial axis," "vertical direction," "horizontal direction," "upper part," "lower part," "bottom," "forward," "reverse," "inner side," "outer side," etc.) are based on the standard orientation shown in the technical drawings. Such expressions are only for the purpose of clarifying the utility model and should not be construed as mandatory limitations on the structure or operation of the device. Special Note: Any limitations on the implementation method based on the literal interpretation of the orientation terms are not included in the determination of the scope of protection of this patent.

[0037] Furthermore, the ordinal numbers used in this utility model (such as "first," "second," etc.) serve only as distinguishing identifiers for technical features and do not have a limiting meaning in terms of level or quantity. Related features may include one or more implementation methods (explicit or implicit), where "multiple" specifically refers to a quantity ≥ 2. Descriptive terms regarding structural relationships (such as "assembly," "coupling," "interconnection," etc.) should be interpreted broadly, including but not limited to: permanent connections and separable connections, integral molding and modular assembly, physical connections and electrical connections, direct docking and intermediate transfer, internal penetration and external docking, etc., covering various forms such as chemical connections like welding / adhesion, mechanical connections like threads / clamps, contact connections like plug-in / crimping, and indirect connections via transition pieces. Those skilled in the art should understand the specific meaning of the terms based on the actual utility model; related interpretations should not constitute a limitation on the scope of protection. Unless otherwise specified, the above terms all adopt their broadest technical meaning.

[0038] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0039] The structural schematic diagram of the novel C-level detection device for steel cylinders provided by this utility model (as shown in the figure) Figure 1 As shown in the diagram, its core component is the vertically mounted flow guide detection tube E inside the gas cylinder C. This flow guide detection tube E houses a liquid level sensor D and establishes a data link with the signal receiver B through a multi-functional interface assembly integrated at the top (including a carrier gas inlet, a pressure balance exhaust port, and a detection component mounting port). The flow guide detection tube E employs a unique dual-channel design: the upper open end maintains a buffer distance with the container top cover, while the lower open end is mechanically fixed to the bottom of the container, ensuring free flow of the medium while achieving real-time pressure balance. This innovative layout effectively isolates bubble interference, maintaining stable measurement even under dynamic operating conditions, significantly improving measurement accuracy, and is particularly suitable for demanding precursor inventory monitoring applications in semiconductor manufacturing.

[0040] In chemical vapor deposition (CVD) processes, traditional liquid level monitoring technologies (including ultrasonic detection, float sensing, and mass measurement) face significant technical bottlenecks. These methods cannot provide accurate liquid level data under dynamic conditions, primarily due to their inability to adapt to surface turbulence caused by carrier gas bubbling, leading to errors in precursor replenishment timing. This invention employs a built-in flow guide detection tube E, achieving a breakthrough through a unique fluid control design: a bottom opening allows free liquid entry and exit, a top buffer space isolates bubble interference, and a rigid connection ensures stable measurement reference. This solution improves dynamic measurement accuracy, increases raw material utilization, reduces product yield fluctuations, and enables unattended continuous monitoring. This innovative physical isolation principle establishes a stable measurement environment in the gas-liquid two-phase flow, providing a reliable process control method for semiconductor-grade thin film deposition.

[0041] The following is a detailed explanation of the novel C-level detection device for steel cylinders according to this utility model:

[0042] Firstly (Selection of Liquid Level Sensor D): This invention does not impose strict requirements on the specific model, specifications, and dimensions of the liquid level sensor D. Those skilled in the art can select an appropriate sensor based on actual application needs. Optional sensor types include capacitive, resistive, inductive, and multi-point surface ultrasonic types. A key constraint is that the sensor diameter must be smaller than the inner diameter of the flow-guiding detection tube E, and the gap between the two must avoid capillary effects.

[0043] Secondly (configuration of signal receiver B): Signal receiver B can be mounted on the top of cylinder C and electrically connected to level sensor D for reading and displaying level data. This invention does not limit the specific model or dimensions of signal receiver B; those skilled in the art can make adaptive configurations according to actual needs.

[0044] Thirdly (the applicable range of the cylinder C level detection device): The level detection device of this utility model has excellent size adaptability and can be matched with cylinder C and reactors with a capacity range of 100mL to 1000L. For reference, the application conditions of traditional float-type level gauges or surface reflection ultrasonic level gauges are more demanding, requiring the diameter of the flow guide detection tube E to be greater than 1 inch, and the capacity of cylinder C to be 18 liters or more.

[0045] In a specific implementation, a gas guide pipe A is installed inside the gas cylinder C, with its inlet end connected to the carrier gas inlet and its outlet end extending to the area near the bottom of the gas cylinder C. Details such as the material and specifications of the gas guide pipe A can be adapted to the application requirements by those skilled in the art, and no rigid regulations are specified.

[0046] In one embodiment, the central axis of the air guide tube A and the flow detection tube E should maintain a maximum linear distance of ≥2cm (the selectable value range is 2cm to 5cm, such as 2cm, 2.5cm, 3cm, 3.5cm, 4cm, 4.5cm, 5cm, etc., and other values ​​within the range are valid).

[0047] In one embodiment, the upper opening of the flow guide detection tube E is designed as an open end, the key feature of which is that its installation height must be higher than the precursor liquid level inside the gas cylinder C. The principle behind this design is that by making the upper opening higher than the liquid level, any pressure difference that may exist between the tube and the gas phase space inside the gas cylinder C can be eliminated, thereby avoiding interference with the actual liquid level measurement. The aforementioned "certain distance" is also defined as ≥1cm, and its numerical range and applicability are the same as above.

[0048] In one embodiment, the bottom opening of the flow guide detection tube E is fixed to the inner bottom of the steel cylinder C by spot welding, and the vertical distance between the end face and the bottom is limited to ≤1cm (the optional value range is 0.1cm to 1cm, such as 0.1cm, 0.2cm, 0.4cm, 0.6cm, 0.8cm, 1cm, etc., other values ​​within the range are valid).

[0049] In one embodiment, the bottom opening of the flow guide detection tube E is designed as a mesh structure, with a mesh density required to be between 5 mesh and 400 mesh (representative mesh counts include 5 mesh, 10 mesh, 50 mesh, 100 mesh, 200 mesh, 300 mesh, 400 mesh, etc., and other mesh counts within this range meet the requirements).

[0050] In one embodiment, the liquid level sensor D is typically installed in the middle region of the flow detection tube E. The flow detection tube E is made of stainless steel or titanium alloy and can be electropolished to reduce roughness. The core purpose is to suppress the dissolution of metal impurities and ensure the high purity of the precursor.

[0051] This invention offers high compatibility with various types of liquid level sensors (D). Its core advantage lies in the stable liquid surface environment formed within the flow guide detection tube (E), providing a foundation for high-precision measurements by various sensors. This characteristic is crucial for the stable control of precision deposition processes such as CVD / ALD, significantly improving product yield and optimizing manufacturing costs. More importantly, high-precision liquid level monitoring enables automated precursor supply: by setting a low liquid level threshold, the system can achieve real-time automatic replenishment of precursors, completely eliminating the need to change cylinder C during the process and the associated interruption risks. This design not only ensures the continuity of the deposition process and the stability of the system state but also has a profound and positive impact on the uniformity and consistency of thin film deposition and the final product quality.

[0052] Example 1

[0053] This embodiment provides a novel cylinder C-level detection device, wherein:

[0054] The cylinder C level detection device uses cylinder C as its main body, with a carrier gas inlet (for gas source connection), a pressure balance exhaust port, and a detection component mounting port on its top. The core component inside cylinder C is the flow guide detection tube E, which integrates a level sensor D. Sensor D is electrically connected to an external signal receiver B through the mounting port.

[0055] The flow guide detection tube E adopts a double-opening design: the upper open end (open mouth) of the flow guide detection tube E is located on the installation port side, and its height must be higher than the liquid level inside the steel cylinder C, with a pre-reserved gap between it and the top of the steel cylinder C; the lower open end of the flow guide detection tube E is fixed to the bottom of the steel cylinder C by spot welding, and the distance between this end face and the bottom is 10mm. This lower open end adopts a mesh structure with a mesh size of 400. A gas guide tube A is simultaneously arranged inside the steel cylinder C, with its inlet end connected to the carrier gas inlet at the top of the steel cylinder C, and its outlet end near the bottom of the steel cylinder C.

[0056] The key dimensional requirements for the structural configuration are as follows: the maximum horizontal distance between the central axes of the air guide tube A and the flow detection tube E is 20mm; the liquid level sensor D is located in the middle of the flow detection tube E; and the flow detection tube E is made of stainless steel.

[0057] The application of the novel C-level detection device for steel cylinders in this embodiment includes:

[0058] In the semiconductor industry, using tetrakis(dimethylamino)titanium (TDMAT) as a precursor to prepare titanium nitride (TiN) nanofilms via chemical vapor deposition (CVD) for use as a barrier layer in metal conductors is a fundamental and widely applied process. During operation, high-purity TDMAT liquid is placed in a 1200mL steel cylinder C. A gas delivery tube A transports process gas to the bottom of cylinder C, introducing the precursor vapor into the CVD reaction chamber through bubbling, ultimately depositing a TiN film on a silicon wafer. However, current technology faces challenges in monitoring the remaining precursor level in cylinder C: real-time accurate determination is difficult, or the process must be paused and bubbling stopped before liquid level readings can be performed.

[0059] The liquid level detection solution provided in this embodiment is designed to achieve real-time and accurate monitoring of the liquid level, and can work collaboratively with the supply system, supporting a one-to-many supply configuration. With this solution, the CVD process can be freed from interruptions due to the replacement of the precursor cylinder C; the supply system can use a large-capacity cylinder C, and its replacement process does not interrupt the process, significantly improving production efficiency while eliminating the potential risk of pipeline contamination when replacing a small-capacity cylinder C.

[0060] Ultimately, this invention, with its unique cylinder C level detection device design, can accurately quantify the residual amount of precursor cylinder C. This design is particularly suitable for bubbling cylinder C, which cannot be effectively measured by traditional level gauges. It can meet the requirements for accurate level measurement of cylinder C or its internal liquid under dynamic conditions, helping to optimize raw material utilization and ensure the quality stability of the deposition process.

[0061] The above description is only a specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model fall within the protection and disclosure scope of the present utility model.

Claims

1. A novel cylinder liquid level detection device, characterized in that, The cylinder liquid level detection device includes a cylinder, and the top of the cylinder is provided with a carrier gas inlet, a pressure balance exhaust port and a detection component mounting port. The carrier gas inlet is used to connect to a gas source. The cylinder is equipped with a flow guiding detection tube, and a liquid level sensor is installed inside the flow guiding detection tube. The liquid level sensor is connected to an external electrical signal receiver through the detection assembly. The flow guide detection tube has a first open end facing the installation port of the detection component, and a second open end. There is a certain distance between the first open end and the inner top of the cylinder, and the edge of the second open end is fixedly connected to the inner bottom of the cylinder.

2. The novel cylinder liquid level detection device according to claim 1, characterized in that, The gas cylinder is equipped with a gas delivery tube inside.

3. The novel cylinder liquid level detection device according to claim 2, characterized in that, One end of the gas guide tube is connected to the carrier gas inlet, and the other end is located near the bottom of the cylinder.

4. The novel cylinder liquid level detection device according to claim 2 or 3, characterized in that, The maximum linear distance between the central axis of the air guide tube and the central axis of the flow detection tube is ≥2cm.

5. The novel cylinder liquid level detection device according to claim 1, characterized in that, The first opening end of the flow guiding detection tube is an open end, and the first opening end is set above the liquid level in the cylinder.

6. The novel cylinder liquid level detection device according to claim 1, characterized in that, The specified distance is ≥1cm.

7. The novel cylinder liquid level detection device according to claim 1, characterized in that, The edge of the second opening is dot-welded to the bottom of the cylinder, and the distance between the second opening and the bottom of the cylinder is ≤1cm.

8. The novel cylinder liquid level detection device according to claim 1, characterized in that, The second opening end is a mesh opening end, and the mesh size of the mesh opening end is 5 to 400 mesh.

9. The novel cylinder liquid level detection device according to claim 1, characterized in that, The liquid level sensor is installed through the middle of the flow guide detection tube.

10. The novel cylinder liquid level detection device according to claim 1, characterized in that, The flow guiding detection tube is a stainless steel tube or a titanium alloy tube.

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