A carrier panel

Abstract

The application provides a bearing carrier plate, which comprises an adsorption panel, a bottom plate and an intermediate plate arranged between the adsorption panel and the bottom plate, a plurality of adsorption holes penetrating through the adsorption panel are arranged on the adsorption panel, a gas transmission port is arranged on the bottom plate, the intermediate plate comprises a supporting frame and a weight-reducing part arranged in a hollow cavity formed by the supporting frame; a gas transmission part is arranged between the intermediate plate and the adsorption panel, a main gas channel is arranged on the supporting frame, the gas transmission port is communicated with the main gas channel, the main gas channel is communicated with the gas transmission part, and the gas transmission part is communicated with each adsorption hole on the adsorption panel. The weight-reducing part is arranged in the hollow cavity formed by the supporting frame, so that the weight-reducing part can support and reduce the weight of the bearing carrier plate at the same time; the gas transmission port is communicated with each adsorption hole through the main gas channel and the gas transmission part in sequence, so that the processed product can be adsorbed and fixed on the adsorption panel, and the processed product can be conveyed between various processes by moving the bearing carrier plate.

Description

Technical Field

[0001] This application belongs to the field of photovoltaic module manufacturing technology, specifically, it relates to a carrier plate. Background Technology

[0002] When processing products that are lightweight, thin, large in size, and highly flexible, fixed vacuum adsorption carriers are often used to support the product, allowing it to be flattened before undergoing high-precision multi-process machining. However, all processes must be completed on the same fixed vacuum adsorption carrier, and the processed product cannot be transferred between processes with the carrier. When the size of the processed product is large, the process requirements are numerous, and the production capacity requirements are high, traditional fixed vacuum adsorption carriers cannot meet the production needs. In addition, current carriers have a short service life, poor vacuum adsorption, and cannot clean the internal vacuum channels. Utility Model Content

[0003] In view of this, this application provides a carrier plate that can move between processes and can clean the vacuum passages inside it.

[0004] A carrier plate includes an adsorption panel, a base plate, and an intermediate plate disposed between the adsorption panel and the base plate. The adsorption panel is provided with a plurality of adsorption holes penetrating the adsorption panel. The base plate is provided with a gas transmission port. The intermediate plate includes a support frame and a weight reduction part disposed in the hollow cavity formed by the support frame.

[0005] A gas transmission section is provided between the intermediate plate and the adsorption panel. A main gas channel is provided on the support frame. The gas transmission port is connected to the main gas channel. The main gas channel is connected to the gas transmission section. The gas transmission section is connected to each adsorption hole on the adsorption panel.

[0006] Preferably, the weight-reducing section includes multiple hollow weight-reducing units that abut against each other.

[0007] Preferably, the main air passage has multiple first transmission air holes on the side facing the gas transmission section;

[0008] The gas transmission section includes multiple ventilation ducts that are spliced ​​together. The extension direction of the ventilation ducts intersects the extension direction of the main air duct. Each ventilation duct has a second transmission air hole on the side facing the main air duct that communicates with the corresponding first transmission air hole. Each ventilation duct has a third transmission air hole on the side facing the adsorption panel that communicates with the corresponding adsorption hole.

[0009] Preferably, it further includes a sealing part, and at least one end of each ventilation duct has an opening along the extension direction of the ventilation duct, and the opening is sealed by the sealing part.

[0010] Preferably, the sealing part includes a sealing strip and a pressure plate. A sealing strip is provided on the outside of each opening, and the pressure plate is provided on the outside of the sealing strip. The sealing strip is pressed against the end of each ventilation duct by the pressure plate.

[0011] Preferably, the sealing part includes multiple sealing plugs and a pressure plate. The sealing plugs are arranged one-to-one with the openings and have the same shape. The pressure plate is arranged on the outside of the sealing plugs and the sealing plugs are fixed and pressed into the openings by the pressure plate.

[0012] Preferably, the adsorption holes are staggered from the laser cutting path of the processed product.

[0013] Preferably, a flexible film layer is provided on the side of the adsorption panel away from the middle plate, the adsorption holes penetrate the flexible film layer, and the flexible film layer is provided with a clearance groove along the laser cutting path of the processed product.

[0014] Preferably, a patch is provided inside the clearance groove.

[0015] Preferably, the adsorption panel is provided with multiple visual positioning parts; and / or,

[0016] The base plate has multiple positioning holes.

[0017] The beneficial effects of this application are: by placing the weight-reducing part within the hollow cavity formed by the support frame, the weight of the carrier plate can be reduced while providing support, and the flatness of the adsorption panel can be ensured. Negative pressure is sequentially transmitted through the gas transmission port, main air channel, and gas transmission section to each adsorption hole, allowing the processed product to be adsorbed and fixed onto the adsorption panel through each adsorption hole. The processed product can then be transferred between different processes by moving the carrier plate. Furthermore, the gas transmission section can be cleaned to prevent blockage of the vacuum passages inside the carrier plate. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or related technologies, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0019] The structures, proportions, sizes, etc., shown in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this application. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

[0020] Figure 1 A perspective view of the carrier plate provided in this application;

[0021] Figure 2 for Figure 1 A magnified view of part A in the middle;

[0022] Figure 3 An exploded view of one embodiment provided in this application;

[0023] Figure 4 for Figure 3 A magnified view of part B in the middle;

[0024] Figure 5 An exploded view of another embodiment provided in this application;

[0025] Figure 6 for Figure 5 A magnified view of part C in the middle;

[0026] Figure 7 This is a schematic diagram of the end structure of the ventilation duct.

[0027] In the diagram: 1-Adsorption panel; 11-Adsorption hole; 2-Intermediate plate; 21-Support frame; 211-Hollow cavity; 212-Outer frame; 213-Bracket; 22-Weight reduction section; 23-Main air duct; 231-First transmission air hole; 3-Base plate; 31-Gas transmission port; 4-Gas transmission section; 41-Ventilation air duct; 411-Opening; 5-Flexible membrane layer; 51-Avoidance groove; 52-Patch; 6-Sealing section; 61-Sealing strip; 62-Pressure plate; 63-Sealing plug; 64-Mounting plate; 7-Vision positioning section; 8-Positioning hole. Detailed Implementation

[0028] The embodiments of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0029] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] refer to Figure 1-7This application provides a carrier plate, including an adsorption panel 1, a bottom plate 3 and an intermediate plate 2 disposed between the adsorption panel 1 and the bottom plate 3. The adsorption panel 1 is provided with a plurality of adsorption holes 11 penetrating the adsorption panel 1, and the bottom plate 3 is provided with a gas transmission port 31. The intermediate plate 2 includes a support frame 21 and a weight reduction part 22 disposed in a hollow cavity 211 formed by the support frame 21.

[0031] A gas transmission section 4 is provided between the intermediate plate 2 and the adsorption panel 1. A main gas channel 23 is provided on the support frame 21. The gas transmission port 31 is connected to the main gas channel 23. The main gas channel 23 is connected to the gas transmission section 4. The gas transmission section 4 is connected to each adsorption hole 11 on the adsorption panel 1.

[0032] When it is necessary to adsorb and fix the processed product onto the carrier plate, the vacuum generator (not shown in the figure) is connected to the gas transmission port 31. The vacuum generator draws a vacuum to create a negative pressure in each adsorption hole 11, thereby adsorbing the processed product onto the carrier plate.

[0033] This application allows a vacuum generator to be installed on the base plate 3. The vacuum generator moves together with the carrier plate. During the process of the carrier plate being transferred between the processing stations of each process, the vacuum generator is always in the start state and is connected to the gas transmission port 31, so that the processed product is always adsorbed on the adsorption panel 1 during the transfer between each process.

[0034] Alternatively, along the conveying direction of the carrier plate, at least one gas transmission port 31 is provided at each end of the carrier plate, and a vacuum generator is provided at each processing station of each process, with two adjacent processing stations set up close to each other. Taking the transfer of the carrier plate between two adjacent processing stations as an example, this method is explained as follows: When the carrier plate is at the previous processing station, the gas transmission port 31 at one end is connected to the vacuum generator at that processing station. After processing, during the transfer from that processing station to the next processing station, the vacuum generator continuously evacuates the carrier plate. When the carrier plate is transferred to the next processing station, the gas transmission port 31 at the other end of the carrier plate is connected to the vacuum generator at that processing station, and the carrier plate is evacuated through the vacuum generator. At the same time, the gas transmission port 31 connected to the vacuum generator at the previous processing station is separated from the vacuum generator and sealed, so that the carrier plate can continue to be transferred forward. Thus, during the transfer between processing stations, the carrier plate is always in a vacuum state, and the processed product is always adsorbed on the carrier plate.

[0035] The structure of the supporting frame 21 can be as follows: Figure 3The diagram shows an outer frame 212 and multiple parallel supports 213 arranged within and connected to the outer frame 212 along a first direction. Hollow cavities 211 are formed between the supports 213 and between the outermost support 213 and the outer frame 212. Alternatively, multiple parallel supports 213 can be arranged within the outer frame 212 along a second direction, forming hollow cavities 211 between the supports 213 and between the outermost support 213 and the outer frame 212. The first and second directions are perpendicular to each other in the same plane.

[0036] Each hollow cavity 211 is provided with a weight reduction part 22. Through the cooperation of the support frame 21 and the weight reduction part 22, the weight of the load-bearing plate can be reduced while providing support, ensuring the flatness of the load-bearing plate, and facilitating the movement of the load-bearing plate between processes.

[0037] Each weight-reducing section 22 includes multiple hollow weight-reducing units, forming a honeycomb-like structure. In a preferred embodiment, the top and bottom of each weight-reducing unit are not sealed, that is, each weight-reducing unit 211 is only enclosed by sidewalls, and adjacent weight-reducing units 211 abut against each other. For example, the sidewalls of adjacent weight-reducing units 211 may abut against each other, or each weight-reducing section 22 may be an integrally formed structure, with adjacent weight-reducing units 211 sharing the same sidewall.

[0038] The processed products can be relatively thin and flexible, such as copper foil, aluminum foil and other metal foils.

[0039] The carrier plate of this application can be used to laser cut metal foil (i.e., the processed product is metal foil), and then the laser-cut metal foil is transferred to the subsequent processes for corresponding processing.

[0040] In a preferred embodiment, the adsorption hole 11 is staggered from the laser cutting path of the processed product. This allows the effective metal foil to continue to be adsorbed on the carrier plate after laser cutting, while the waste metal foil formed after cutting is not adsorbed on the carrier plate, so that the waste metal foil can be removed in the subsequent process.

[0041] In a preferred embodiment, refer to Figure 1-2 A flexible film layer 5 is provided on the side of the adsorption panel 1 away from the middle plate 2. The adsorption hole 11 penetrates the flexible film layer 5. The flexible film layer 4 is provided with a clearance groove 51 along the laser cutting path of the processed product. More preferably, a patch 52 is provided in the clearance groove 51.

[0042] If the processed product is directly in contact with the adsorption panel 1 and is adsorbed and fixed on the adsorption panel 1, the short-term local high temperature generated by the laser during the laser cutting process will cause the processed product to produce a large irreversible thermal stress deformation, which will cause gaps to form between the processed product and the adsorption holes 11 on the adsorption panel 1, resulting in vacuum leakage and a decrease in the adsorption between the processed product and the adsorption panel 1. It may even cause the position of the processed product to shift during the processing or during the movement of the carrier plate.

[0043] Therefore, the flexible film layer 5 allows the processed product to not directly contact the adsorption panel 1, but to directly contact the flexible film layer 5 during adsorption. This results in a better adsorption and fixation effect between the processed product and the carrier plate, ensuring that the processed product is always adsorbed and fixed on the carrier plate during the processing and movement of the carrier plate, thus ensuring the processing accuracy of the processed product.

[0044] Furthermore, the flexible membrane layer 5 can be made of materials such as rubber, polyimide, or Teflon.

[0045] Continue to refer to Figure 2 This application processes an avoidance groove 51 along the laser cutting path on the flexible film layer 5, and places a patch 52 within the avoidance groove 51. This avoids damage to the adsorption panel 1 caused by fumes and laser action during laser cutting, thus ensuring the flatness of the adsorption panel 1 and extending its service life. Furthermore, processing the avoidance groove 51 on the flexible film layer 5 significantly reduces the time and cost of processing the avoidance groove 51 compared to directly processing it on the adsorption panel 1. The patch 52 within the avoidance groove 51 also avoids the maintenance and cleaning difficulties caused by the gradual accumulation of molten metal slag generated during laser cutting. In addition, during prolonged laser cutting, the patch 52 and the flexible film layer 5 can be replaced periodically to prevent damage to the patch 52 from prolonged laser exposure, thus ensuring the processed product remains adsorbed and fixed on the carrier plate without vacuum leakage.

[0046] The material of patch 52 can be made of laser sputtering resistant materials, such as stainless steel sheet metal, ceramic, slab or artificial stone.

[0047] In a further implementation, refer to Figure 1-2 The adsorption panel 1 is provided with multiple vision positioning parts 7. When cutting the processed product near the corresponding vision positioning part 7, the vision positioning device (such as a camera) automatically identifies the vision positioning part 7, and obtains the correct position of the graphic to be cut according to the compensation value, and then makes the laser cut along the correct laser cutting path to ensure the laser cutting accuracy.

[0048] In another preferred embodiment, reference Figure 3 and Figure 5 The base plate 3 is provided with multiple positioning holes 8. Each processing station of each process is provided with a positioning pin that matches the positioning hole 8. When the carrier plate is conveyed to the processing station of the corresponding process, the positioning pin of the processing station is inserted into the positioning hole 8 on the base plate 3 to position the carrier plate at the processing station.

[0049] In order to make the positioning of the carrier plate at the corresponding processing station more accurate, this embodiment can symmetrically set positioning holes 8 at opposite ends of the base plate 3. For example, two or more positioning holes 8 can be machined at one end of the base plate 3 and two or more positioning holes 8 can be symmetrically machined at the opposite end. Alternatively, one positioning hole 8 can be machined at each of the four top corners of the base plate 3.

[0050] During the long laser cutting process, the dust generated will be continuously sucked into the vacuum channel inside the carrier plate. If it is not cleaned, the adsorption effect on the processed products will be deteriorated.

[0051] To facilitate cleaning of the vacuum channels within the carrier plate, refer to Figure 3-7 In this embodiment of the application, the main air passage 23 is provided with a plurality of first transmission air holes 231 on the side facing the gas transmission section 4;

[0052] The gas transmission unit 4 includes a plurality of ventilation ducts 41 spliced ​​together. The extension direction of the ventilation ducts 41 intersects the extension direction of the main air duct 23. Each ventilation duct 41 has a second transmission air hole (not shown in the figure) that communicates with the corresponding first transmission air hole 231 on the side facing the main air duct 23. Each ventilation duct 41 has a third transmission air hole (not shown in the figure) that communicates with the corresponding adsorption hole 11 on the side facing the adsorption panel 1.

[0053] In this embodiment, only one main airway 23 may be provided, or as follows: Figure 3 and Figure 5The embodiment shows two main air ducts 23, or more than two, but this embodiment does not limit this. Each second transmission air hole on each ventilation duct 41 is connected to the first transmission air hole 231 below it, and each third transmission air hole is connected to the adsorption hole 11 above it. For example, each ventilation duct 41 can have only one second transmission air hole on the side facing the main air duct 23, and this second transmission air hole is connected to multiple first transmission air holes 231 below it; or each ventilation duct 41 can have multiple second transmission air holes on the side facing the main air duct 23, and each second transmission air hole is connected to one first transmission air hole 231. Correspondingly, the total number of third transmission air holes on each ventilation duct 41 can be the same as the total number of adsorption holes 11 on the adsorption panel 1, and each third transmission air hole is connected to one adsorption hole 11.

[0054] After the vacuum generator is started, the airflow converges through each adsorption hole 11, each third transmission air hole, each ventilation airway 41, each second transmission air hole, each first transmission air hole 231, and the main airway 23, and is then drawn out through the gas transmission port 31 to form a negative pressure, so that the processed product is adsorbed on the carrier plate.

[0055] In this embodiment, the main air duct 23, in conjunction with the gas transmission unit 4, makes the extraction path converging, effectively reducing the extraction volume. This allows each adsorption hole 11 to quickly form a high vacuum environment, shortening the time required to form a vacuum environment. Furthermore, only the connection between the base plate 1 and the intermediate plate 2 needs to be ensured; no additional requirements are needed for the sealing between them. Only the air extraction path needs to have good sealing performance, thereby significantly reducing the requirement for large-area sealing of the carrier plate and reducing the amount of sealing work during the carrier plate processing.

[0056] In a preferred embodiment of this example, the carrier plate further includes a sealing portion 6. Along the extending direction of the ventilation duct 41, at least one end of each ventilation duct 41 has an opening 411, and the opening 411 is sealed by the sealing portion 6. Preferably, each end of each ventilation duct 41 has a plurality of openings 411.

[0057] During prolonged laser cutting, dust generated during laser cutting is continuously drawn into the ventilation duct 41. If the ventilation duct 41 is not cleaned regularly, it may cause blockage of the second or third transmission air hole, thereby affecting the adsorption and fixation effect of the processed product. In this embodiment, each ventilation duct 41 has multiple openings 411 at both ends. During the vacuuming process, the sealing part 6 seals each opening 411, forming a sealed space for each ventilation duct 41. When it is necessary to clean each ventilation duct 41, simply remove the sealing part 6 to clean the inside of the ventilation duct 41 through the openings 411.

[0058] In one embodiment, reference Figure 3-4 The sealing part 6 includes a sealing strip 61 and a pressure plate 62. The sealing strip 61 is provided on the outside of each opening 411, and the pressure plate 62 is provided on the outside of the sealing strip 61. The sealing strip 61 is pressed against the end of each ventilation duct 41 by the pressure plate 62.

[0059] It is understandable that if each end of each ventilation duct 41 is provided with multiple openings 411, then along the extension direction of the ventilation duct 41, a sealing strip 61 can be provided on each side of the gas transmission section 4. The length and width of the sealing strip 61 can completely cover all the openings 411 of all the ventilation ducts 41 on this side, so that when the pressure plate 62 presses the sealing strip 61 on the side of the gas transmission section 4, the sealing strip 61 can completely seal all the openings 411 of all the ventilation ducts 41 on this side.

[0060] Specifically, the pressure plate 62 can be fixed to the side of the gas transmission section 4 by screw locking, so that the sealing strip 61 seals all the openings 411 on the same side of the gas transmission section 4.

[0061] In another implementation, refer to Figure 5-6 The sealing part 6 includes a plurality of sealing plugs 63 and a pressure plate 62. The sealing plugs 63 are arranged one-to-one with the openings 411 and have the same shape. The pressure plate 62 is arranged on the outside of the sealing plugs 63. The sealing plugs 63 are fixed and pressed into the openings 411 by the pressure plate 62, thereby sealing each opening 411.

[0062] Specifically, if each end of each ventilation duct 41 has multiple openings 411, multiple sealing plugs 63 can be mounted on a mounting plate 64, with the number of sealing plugs 63 on the mounting plate 64 being the same as the number of openings 411 on one side of the gas transmission section 4. After each sealing plug 63 is inserted into the corresponding opening 411 with an interference fit, the mounting plate 64 and the pressure plate 62 can be fixed to the side of the gas transmission section 4 by bolt locking, thereby ensuring a good seal between each sealing plug 63 and the corresponding opening 411.

[0063] like Figure 7 As shown, this embodiment does not specifically limit the number of openings 411 at each end of the ventilation duct 41, nor does it specifically limit the shape of each opening 411. For example, the shape of the opening 411 can be square, circular, elliptical, polygonal, or other irregular shapes.

[0064] The various embodiments in this specification are described in a progressive, parallel, or combined manner. Each embodiment focuses on its differences from other embodiments, and similar or identical parts between embodiments can be referred to interchangeably. For the apparatuses disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple, and relevant parts can be referred to the method section.

[0065] It should be noted that, in the description of this application, the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component centrally located at the same time.

[0066] It should also be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or apparatus comprising a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the article or apparatus that includes the aforementioned element.

[0067] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A load-bearing plate, characterized in that, It includes an adsorption panel, a base plate, and an intermediate plate disposed between the adsorption panel and the base plate. The adsorption panel is provided with multiple adsorption holes penetrating the adsorption panel. The base plate is provided with a gas transmission port. The intermediate plate includes a support frame and a weight reduction part disposed in the hollow cavity formed by the support frame. A gas transmission section is provided between the intermediate plate and the adsorption panel. A main gas channel is provided on the support frame. The gas transmission port is connected to the main gas channel. The main gas channel is connected to the gas transmission section. The gas transmission section is connected to each adsorption hole on the adsorption panel.

2. The carrier plate according to claim 1, characterized in that, The weight reduction section includes multiple hollow weight reduction units that abut against each other.

3. A carrier plate according to claim 2, characterized in that, Multiple first transmission air holes are provided on the side of the main air passage facing the gas transmission section; The gas transmission section includes multiple ventilation ducts that are spliced ​​together. The extension direction of the ventilation ducts intersects the extension direction of the main air duct. Each ventilation duct has a second transmission air hole on the side facing the main air duct that communicates with the corresponding first transmission air hole. Each ventilation duct has a third transmission air hole on the side facing the adsorption panel that communicates with the corresponding adsorption hole.

4. A carrier plate according to claim 3, characterized in that, It also includes a sealing part, and at least one end of each ventilation duct has an opening along the extension direction of the ventilation duct, and the opening is sealed by the sealing part.

5. A load-bearing plate according to claim 4, characterized in that, The sealing part includes a sealing strip and a pressure plate. A sealing strip is provided on the outside of each opening, and the pressure plate is located on the outside of the sealing strip. The pressure plate presses the sealing strip against the end of each ventilation duct.

6. A load-bearing plate according to claim 4, characterized in that, The sealing part includes multiple sealing plugs and pressure plates. The sealing plugs are arranged one-to-one with the openings and have the same shape. The pressure plates are arranged on the outside of the sealing plugs and the sealing plugs are fixed and pressed into the openings by the pressure plates.

7. A carrier plate according to any one of claims 1-6, characterized in that, The adsorption holes are staggered from the laser cutting path of the processed product.

8. A carrier plate according to any one of claims 1-6, characterized in that, A flexible film layer is provided on the side of the adsorption panel away from the middle plate. Adsorption holes penetrate the flexible film layer, and the flexible film layer is provided with clearance grooves along the laser cutting path of the processed product.

9. A load-bearing plate according to claim 8, characterized in that, Patches are installed inside the clearance groove.

10. A carrier plate according to any one of claims 1-6, characterized in that, The adsorption panel is provided with multiple visual positioning parts; and / or, The base plate has multiple positioning holes.

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