Flow transfer mechanism and feeding and discharging equipment

Abstract

The application provides a flow transfer mechanism and a feeding and discharging device. The flow transfer mechanism comprises a first track, a first carrier, a second carrier, a second track and a third carrier. The first track comprises a pick-and-place station. The first carrier is movably connected to the first track. The second carrier is movably connected to the first track. The second track is arranged on one side of the first track. The third carrier is movably connected to the second track. A transfer assembly can alternately place boat bodies on the first carrier and the third carrier, and the third carrier can transfer the boat bodies to the second carrier. The first carrier and the second carrier can be alternately driven to the pick-and-place station, and the transfer assembly can alternately carry the boat bodies carried by the first carrier and the boat bodies carried by the second carrier after flowing out of the pick-and-place station. By transferring the boat bodies to the second carrier through the third carrier and alternately moving the first carrier and the second carrier to the pick-and-place station, the efficiency of providing the pick-and-place station with the boat bodies can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing, specifically to a transfer mechanism and loading / unloading equipment. Background Technology

[0002] As an important semiconductor material, silicon wafers involve the loading and unloading of wafers during the processing. The boat can hold the wafers and move them between the processing equipment and the transfer mechanism.

[0003] The transfer mechanism typically consists of a slide rail and a carrier. The carrier moves along the slide rail to receive the boats discharged from the processing unit and transports them to the sheet-picking station. Once the cooked sheet (the sheet processed by the processing unit) inside the boat is replaced with a raw sheet (the sheet to be processed) at the sheet-picking station, the carrier transports the boat back to the processing unit. However, during the reciprocating motion of the boat driven by the carrier, the sheet-picking station is idle as no boat is being used for sheet replacement; such a transfer mechanism has low efficiency in providing boats to the sheet-picking station. Utility Model Content

[0004] In view of this, this application provides a transfer mechanism and loading / unloading equipment that can improve the efficiency of providing a boat for the insert and pick-up station.

[0005] One embodiment of this application provides a transfer mechanism. A transfer component is capable of picking up and placing boat bodies at the transfer mechanism. The transfer mechanism includes a first track, a first carrier, a second carrier, a second track, and a third carrier. The first track includes an insertion / removal station. The first carrier is movably connected to the first track and configured to carry boat bodies. The second carrier is movably connected to the first track and configured to carry boat bodies. The second track is located on one side of the first track. The third carrier is movably connected to the second track and configured to carry boat bodies. The transfer component is capable of alternately placing boat bodies on the first carrier and the third carrier, and the third carrier is capable of transferring boat bodies to the second carrier. The first carrier and the second carrier are alternately driven to the insertion / removal station, and the transfer component is capable of alternately transporting the boat bodies carried by the first carrier and the boat bodies carried by the second carrier after they have flowed out of the insertion / removal station.

[0006] In the aforementioned transfer mechanism, the first carrier receives the boat from the transfer component and transports it to the sheet-changing station for sheet replacement. During the transfer and sheet replacement process in the first carrier, the third carrier receives the boat from the transfer component and transfers it to the second carrier, preparing the sheet loaded onto the boat and awaiting replacement for the sheet-changing station in advance. After sheet replacement is completed in the first carrier, the first carrier carries the boat out of the sheet-changing station, and the second carrier carries the boat to the sheet-changing station for sheet replacement. Therefore, by using the third carrier to transport the boat to the second carrier, and by having the first and second carriers alternately move to the sheet-changing station, the efficiency of providing boats to the sheet-changing station can be improved.

[0007] In some embodiments of this application, the transfer mechanism further includes a transport assembly configured to transfer the boat body carried by the third vehicle to the second vehicle; the transport assembly and the transfer assembly are located at opposite ends of the first track. The transport assembly includes a three-axis transfer member and a gripper; the three-axis transfer member is located at one end of the first track and / or the second track; the gripper is mounted to the three-axis transfer member and is used to transfer the boat body carried by the third vehicle to the second vehicle.

[0008] In some embodiments of this application, the extension direction of the first track is parallel to the extension direction of the second track, and the extension direction of the first track is defined as the first direction; the third carrier includes a conveying component, which is disposed along a second direction, and the second direction is perpendicular to the first direction; when the third carrier and the second carrier are aligned along the second direction, the boat body carried by the third carrier can be conveyed to the second carrier by the conveying component.

[0009] In some embodiments of this application, the first track includes a first boat-carrying station and a second boat-carrying station opposite each other, and the insert / take-up station is located between the first boat-carrying station and the second boat-carrying station; the second track includes a first end and a second end opposite each other, the first end corresponding to the first boat-carrying station and the second end corresponding to the second boat-carrying station; the first carrier can move between the first boat-carrying station and the insert / take-up station, and the transfer component can pick up and place the boat body on the first carrier at the first boat-carrying station; the third carrier can move between the first end and the second end, the third carrier is located at the first end and carries the boat body placed by the transfer component, when the third carrier is driven to the second end, the boat body carried by the third carrier can be transferred to the second carrier; the second carrier can drive the boat body to move sequentially to the insert / take-up station and the first boat-carrying station, so that the second carrier is adjacent to the first carrier, and the transfer component can transport the boat body on the second carrier at the first boat-carrying station.

[0010] In some embodiments of this application, the extension direction of the first track is parallel to the extension direction of the second track, and the extension direction of the first track is defined as the first direction; the first track and the second track are spaced apart along the second direction, such that the orthographic projection of the first vehicle along the third direction and the orthographic projection of the third vehicle along the third direction are spaced apart along the second direction, and the second direction and the third direction are perpendicular to each other; the second track is located above or below the first track along the third direction, and the third direction is perpendicular to the first direction.

[0011] In some embodiments of this application, the transfer mechanism further includes a buffer platform, which is disposed on the transport assembly and configured to buffer the boat body carried by the third carrier; the buffer platform is fixedly or movably installed on the transport assembly; the buffer platform and the third carrier are spaced apart along a second direction by a second track including a second end away from the transfer assembly, and the buffer platform is disposed close to the second end.

[0012] In some embodiments of this application, the first carrier, the second carrier, the third carrier, and the buffer platform all include a support portion and a protrusion. The support portion is configured to support a boat body. The protrusion is disposed on the surface of the support portion and forms two first stop surfaces and two second stop surfaces. The two first stop surfaces are spaced apart along a second direction, and the two second stop surfaces are spaced apart along a first direction. The first direction is perpendicular to the second direction, and the first stop surfaces and the second stop surfaces position the boat body along the first direction and the second direction.

[0013] In some embodiments of this application, the transfer mechanism further includes a top tooth assembly and a straightening assembly. The top tooth assembly is located below the first track and at the sheet insertion / removal station. The top tooth assembly can pass through the boat body to lift or place the sheet inside the boat body. The straightening assembly is located above the first track and at the sheet insertion / removal station. The straightening assembly is configured to straighten the sheet placed on the top tooth assembly.

[0014] In some embodiments of this application, the gripper includes a drive member and two clamping plates, the two clamping plates being spaced apart along a first direction, the drive member being connected to the clamping plates and used to drive the clamping plates to move along the first direction, so that the two clamping plates can clamp the boat body along the first direction.

[0015] One embodiment of this application provides a loading and unloading device, including a transfer component, a sheet changing component, and a transfer mechanism as described in any of the above embodiments. The transfer component is located at one end of the transfer mechanism. The transfer component removes the boat body from the transfer mechanism or places the boat body in the transfer mechanism. The sheet changing component can correspond to the sheet insertion and removal station and is configured to pick up and place the sheet inside the boat body in the sheet insertion and removal station.

[0016] The aforementioned transfer mechanism can efficiently provide the sheet material loaded onto the boat for the sheet insertion and picking station, enabling the loading and unloading equipment to efficiently replace the sheet material inside the boat, thereby improving the sheet material replacement efficiency. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation on the scope.

[0018] Figure 1 This is a schematic diagram of the structure of a loading and unloading device according to an embodiment of this application.

[0019] Figure 2 This is a schematic diagram of the plate changing assembly in the loading and unloading equipment.

[0020] Figure 3 for Figure 1 A top view of the circulation mechanism.

[0021] Figure 4 for Figure 1 Side view of the transfer mechanism.

[0022] Figure 5 for Figure 1 A schematic diagram of the transport component.

[0023] Figure 6 for Figure 1 A structural schematic diagram of the transport component from another perspective.

[0024] Figure 7 for Figure 1 A partial structural diagram of the buffer platform.

[0025] Figure 8 for Figure 1 A schematic diagram of the structure of the first track, the first vehicle, and the second vehicle.

[0026] Figure 9 for Figure 1 A schematic diagram of the structure of the second track and the third vehicle.

[0027] Explanation of key component symbols:

[0028] 100. Transfer mechanism; 11. First track; 11a. Insertion / removal station; 11b. First carrier station; 11c. Second carrier station; 111. First carrier; 112. Second carrier; 12. Second track; 12a. First end; 12b. Second end; 121. Third carrier; 20. Handling assembly; 21. Three-axis transfer component; 211. First moving component; 212. Second moving component; 213. Third moving component; 2131. Slide rail; 2132. Power component; 2132a. Motor; 2132b. Belt; 2132c. Belt 22. Wheel; 22. Gripping component; 221. Driving component; 222. Clamping plate; 223. Base; 2221. Positioning part; 23. Frame; 30. Buffer platform; 31. Bearing part; 32. Protrusion; 321. First stop surface; 322. Second stop surface; 41. Top tooth assembly; 42. Regularizing assembly; 200. Loading and unloading equipment; 210. Transfer assembly; 220. Sheet changing assembly; 2201. Suction cup; 2202. Transfer component; 300. Sheet; 400. Boat body; 410. Protruding column; X, First direction; Y, Second direction; Z, Third direction. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0031] The definitions of "first direction", "second direction" and "third direction" are for the purpose of describing the relative positional relationship of related structures, and do not mean that "first direction", "second direction" and "third direction" need to depend on the related structures involved in the above definitions.

[0032] Furthermore, the terms “first,” “second,” “third,” etc., are used for descriptive purposes only and should not be interpreted as indicating or implying relative importance.

[0033] During the processing, sheet material is loaded and unloaded. A boat holds the sheets, facilitating their movement between the processing unit and the transfer mechanism. The transfer mechanism typically consists of a slide rail and a carrier. The carrier moves along the slide rail to receive the boat discharged from the processing unit and transports it to the sheet-picking station. Once the cooked sheet (processed by the processing unit) in the boat is replaced with a raw sheet (sheet to be processed) at the sheet-picking station, the carrier returns the boat to the processing unit. However, during the reciprocating motion of the boat driven by the carrier, the sheet-picking station remains idle without a boat for sheet replacement; this transfer mechanism is inefficient in providing boats to the sheet-picking station.

[0034] One embodiment of this application provides a transfer mechanism. A transfer component is capable of picking up and placing boat bodies at the transfer mechanism. The transfer mechanism includes a first track, a first carrier, a second carrier, a second track, and a third carrier. The first track includes an insertion / removal station. The first carrier is movably connected to the first track and configured to carry boat bodies. The second carrier is movably connected to the first track and configured to carry boat bodies. The second track is located on one side of the first track. The third carrier is movably connected to the second track and configured to carry boat bodies. The transfer component is capable of alternately placing boat bodies on the first carrier and the third carrier, and the third carrier is capable of transferring boat bodies to the second carrier. The first carrier and the second carrier are alternately driven to the insertion / removal station, and the transfer component is capable of alternately transporting the boat bodies carried by the first carrier and the boat bodies carried by the second carrier after they have flowed out of the insertion / removal station.

[0035] In the aforementioned transfer mechanism, the first carrier receives the boat from the transfer component and transports it to the sheet-changing station for sheet replacement. During the transfer and sheet replacement process in the first carrier, the third carrier receives the boat from the transfer component and transfers it to the second carrier, preparing the sheet loaded onto the boat and awaiting replacement for the sheet-changing station in advance. After sheet replacement is completed in the first carrier, the first carrier carries the boat out of the sheet-changing station, and the second carrier carries the boat to the sheet-changing station for sheet replacement. Therefore, by using the third carrier to transport the boat to the second carrier, and by having the first and second carriers alternately move to the sheet-changing station, the efficiency of providing boats to the sheet-changing station can be improved.

[0036] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0037] Please see Figure 1One embodiment of this application provides a loading and unloading device 200 for supplying materials to a processing device (not shown) or unloading materials processed by the processing device. The materials include a boat 400 and a sheet 300, with the boat 400 holding the sheet 300. The processing device processes the sheet 300.

[0038] In some embodiments, the sheet 300 is a silicon wafer or silicon carbide wafer used to manufacture solar cells. Each boat 400 can hold multiple stacked silicon wafers.

[0039] In some embodiments, the sheet 300 processed by the processing device is defined as a cooked sheet, and the sheet 300 to be processed by the processing device is defined as a raw sheet.

[0040] When the loading and unloading equipment 200 is used for loading, it provides raw slices loaded in the boat 400 to the processing device; when the loading and unloading equipment 200 is used for unloading, it receives cooked slices discharged from the processing device and loaded in the boat 400.

[0041] In some embodiments, the processing apparatus is a reactor. The reactor is connected to a conveyor line (not shown) to transfer green wafers loaded in the boat 400 to the reactor or to discharge cooked wafers loaded in the boat 400.

[0042] Please combine Figures 1 to 3 In some embodiments, the loading and unloading equipment 200 includes a transfer mechanism 100, a sheet changing assembly 220, and a transfer assembly 210. The transfer mechanism 100 has a sheet picking station 11a, and the sheet changing assembly 220 corresponds to the sheet picking station 11a of the transfer mechanism 100. The sheet changing assembly 220 is used to exchange the sheets 300 in the boat 400 located in the sheet picking station 11a, replacing the cooked sheets in the boat 400 with raw sheets. The transfer assembly 210 is used to transport the boat 400, for example, to transport the boat 400 in the transfer mechanism 100 to the conveyor line, or to transport the boat 400 in the conveyor line to the transfer mechanism 100.

[0043] In some embodiments, when the transfer component 210 transports the boat 400 in the transfer mechanism 100 to the conveyor line, the boat 400 contains raw slices; when the transfer component 210 transports the boat 400 in the conveyor line to the transfer mechanism 100, the boat 400 contains cooked slices.

[0044] In some embodiments, the transfer component 210 is a robotic arm that can grasp the boat 400 and drive the boat 400 to move in three-dimensional space.

[0045] In some embodiments, the sheet changing assembly 220 includes a suction cup 2201 and a transfer member 2202. The suction cup 2201 is used to adsorb the sheet 300, and the transfer member 2202 is connected to the suction cup 2201 and drives the suction cup 2201 to move, so that the sheet changing assembly 220 can change the cooked sheet in the boat 400 into a raw sheet. The transfer member 2202 can be an electric slide rail or a robotic arm.

[0046] Please see Figure 4 In some embodiments, the transfer mechanism 100 includes a first track 11, a second track 12, a first carrier 111, a second carrier 112, and a third carrier 121. The first track 11 includes a piece insertion / removal station 11a. The second track 12 is disposed on one side of the first track 11. The first carrier 111 is movably connected to the first track 11 and is used to carry the boat 400. The second carrier 112 is movably connected to the first track 11 and is used to carry the boat 400. The third carrier 121 is movably connected to the second track 12 and is used to carry the boat 400.

[0047] The transfer assembly 210 is capable of alternately placing the boat body 400 on the first carrier 111 and the third carrier 121. The third carrier 121 is capable of transferring the boat body 400 to the second carrier 112, so as to convey the boat body 400 to the second carrier 112 via the third carrier 121. The first carrier 111 and the second carrier 112 can be alternately driven to the inserting station 11a, so that the first carrier 111 and the second carrier 112 alternately provide the inserting station 11a with the boat body 400 loaded with cooked films. The transfer assembly 210 is capable of alternately transporting the boat body 400 carried by the first carrier 111 and the boat body 400 carried by the second carrier 112 after flowing out of the inserting station 11a, so as to transfer the boat body 400 containing the raw films to the conveyor line.

[0048] In the aforementioned transfer mechanism 100, during the process of the first carrier 111 conveying the boat 400 to the insertion and take-up station 11a and the sheet 300 in the boat 400 being replaced, the third carrier 121 can receive the boat 400 from the transfer component 210 and transfer the boat 400 to the second carrier 112, so as to prepare the sheet 300 loaded in the boat 400 and waiting for replacement in advance for the insertion and take-up station 11a; after the sheet 300 in the first carrier 111 is replaced, the first carrier 111 carries the boat 400 out of the insertion and take-up station 11a, and the second carrier 112 carries the boat 400 to the insertion and take-up station 11a for sheet replacement.

[0049] Therefore, by transferring the boat body 400 to the second carrier 112 via the third carrier 121, and by having the first carrier 111 and the second carrier 112 move alternately to the insertion and picking station 11a, the efficiency of providing the boat body 400 to the insertion and picking station 11a can be improved.

[0050] Please see Figure 4 In some embodiments, the extension direction of the first track 11 is parallel to the extension direction of the second track 12. The extension direction of the first track 11 is defined as the first direction X, the width direction of the first track 11 is defined as the second direction Y, and the height direction of the first track 11 is defined as the third direction Z. The third direction Z, the second direction Y, and the first direction X are all perpendicular to each other.

[0051] Setting the first track 11 and the second track 12 in parallel can occupy less space in the second direction Y.

[0052] Please see Figure 3 In some embodiments, the first track 11 and the second track 12 are spaced apart and arranged side by side along the second direction Y. The third carrier 121 includes a conveying component arranged along the second direction Y. When the third carrier 121 is aligned with the second carrier 112 along the second direction Y, the boat 400 carried by the third carrier 121 can be conveyed to the second carrier 112 by the conveying component.

[0053] In some embodiments, the conveying component includes, but is not limited to, a cylinder. When the conveying component is a cylinder, the cylinder is located on the side of the third carrier 121 facing away from the third carrier 121. The cylinder can move along the second track 12 together with the third carrier 121. When the third carrier 121 is aligned with the second carrier 112, the cylinder pushes the boat body 400 towards the second carrier 112 in the second direction Y, so that the boat body 400 is pushed to the second carrier 112. Similarly, a cylinder is also provided on the side of the second carrier 112 facing away from the third carrier 121 to push the boat body 400 from the second carrier 112 to the third carrier 121.

[0054] In some embodiments, the conveying assembly further includes other structures, such as a conveyor belt, capable of conveying the boat body 400 when the third carrier 121 is aligned with the second carrier 112, such that the conveyor belt, when in operation, can convey the boat body 400 along the second direction Y, so that the boat body 400 in the third carrier 121 is conveyed to the second carrier 112.

[0055] Please see Figure 4 In some embodiments, the transfer mechanism 100 further includes a transport component 20, which can transfer the boat body 400 in the third carrier 121 to the second carrier 112, or transfer the boat body 400 in the second carrier 112 to the third carrier 121.

[0056] In some embodiments, the handling component 20 is a robotic arm that can grasp the boat 400 and move the boat 400 in three-dimensional space so that the boat 400 can be transferred between the third carrier 121 and the second carrier 112.

[0057] Please see Figure 5 and Figure 6In some embodiments, the transport assembly 20 includes a three-axis transfer member 21 and a gripper 22. The three-axis transfer member 21 is disposed at one end of the first track 11 and / or the second track 12. The gripper 22 is mounted to the three-axis transfer member 21 and is used to clamp the boat hull 400.

[0058] The three-axis transfer component 21 drives the gripper 22 to move, so that the gripper 22 can grab the boat 400 in the third vehicle 121 and move the boat in the third vehicle 121 to the second vehicle 112.

[0059] In some embodiments, the handling assembly 20 includes a frame 23, on which a triaxial transfer member 21 and a gripper 22 are mounted.

[0060] In some embodiments, the triaxial transfer member 21 and the transfer assembly 210 are respectively disposed at opposite ends of the first track 11 and the second track 12 to prevent interference between the transfer assembly 210 and the triaxial transfer member 21.

[0061] Please combine Figure 5 and Figure 6 In some embodiments, the triaxial transfer member 21 includes a first moving member 211, a second moving member 212, and a third moving member 213. The first moving member 211 is used to mount the gripper 22, and its extension direction is parallel to a third third direction Z, so as to move the gripper 22 along the third third direction Z. The first moving member 211 is disposed on the second moving member 212, and the extension direction of the second moving member 212 is parallel to a second direction Y, so as to move the first moving member 211 and the gripper 22 along the second direction Y. The second moving member 212 is disposed on the third moving member 213, and the extension direction of the third moving member 213 is parallel to a first direction X, so as to move the second moving member 212, the first moving member 211, and the gripper 22 along the first direction X.

[0062] The three-axis transfer component 21 can drive the gripper 22 to move in three directions: X-axis, Y-axis and Z-axis, enabling the gripper 22 to move in three-dimensional space.

[0063] In some embodiments, the third moving member 213 includes a slide rail 2131 and a power member 2132. The slide rail 2131 extends along a first direction X. The power member 2132 includes a motor 2132a, a belt 2132b, and two pulleys 2132c. The two pulleys 2132c are spaced apart along the first direction X, and the belt 2132b is tensioned between the two pulleys 2132c. The second moving member 212 is connected to the slide rail 2131 and the belt 2132b at both ends along the second direction Y, respectively. The motor 2132a is coaxially connected to one pulley 2132c and drives the pulley 2132c to rotate, so that the belt 2132b drives the second moving member 212 to move along the slide rail 2131.

[0064] The second moving part 212 is driven to move by one end of the belt 2132b, and guided to move along the first direction X by the other end of the slide rail 2131, so that the second moving part 212 can move relatively stably along the first direction X.

[0065] In some embodiments, the end of the second moving member 212 connected to the belt 2132b may also be provided with a slide 2131 extending along the first direction X, so that the top of the second moving member 212 is connected to the belt 2132b and the bottom of the second moving member 212 is slidably connected to the slide 2131, thereby making the second moving member 212 more stable when moving along the first direction X.

[0066] In some embodiments, the first moving member 211 is a slide cylinder. The second moving member 212 is a slide cylinder or an electric slide rail.

[0067] Please see Figure 6 In some embodiments, the gripper 22 includes a base 223, a drive member 221, and two clamping plates 222. The base 223 is slidably connected to the first moving member 211. The drive member 221 is mounted on the base 223. The two clamping plates 222 are spaced apart along a first direction X, and each clamping plate 222 is provided with a positioning part 2221. The drive member 221 brings the two clamping plates 222 closer together, and the positioning part 2221 connects to the boat body 400 to position the boat body 400, thereby enabling the gripper 22 to grip the boat body 400.

[0068] In some embodiments, the drive element 221 consists of two cylinders. Both cylinders are fixedly connected to the base 223. Each cylinder is connected to a clamping plate 222 to drive the clamping plate 222 to move along a first direction X, thereby causing the two clamping plates 222 to move closer or further apart relative to each other, in order to clamp or release the boat body 400.

[0069] In some embodiments, the drive element 221 may be a lead screw assembly or other structures that enable the two clamping plates 222 to move relatively close and relatively far apart. This application does not limit the scope of the application, and those skilled in the art may make the selection based on the actual situation.

[0070] In some embodiments, the positioning part 2221 is a positioning groove. The boat body 400 has protrusions 410 on opposite sides along the first direction X. When the two clamping plates 222 are close to each other, the protrusions 410 are inserted into the positioning groove, thereby positioning the position of the boat body 400. This fixes the boat body 400 with the two clamping plates 222, preventing the boat body 400 from falling relative to the two clamping plates 222 along the third direction Z or shifting along the second direction Y, so that the gripping member 22 can grip the movement of the boat body 400 to transfer the boat body 400 and the sheet 300 inside the boat body 400.

[0071] Please see Figure 4 In some embodiments, the first track 11 and the second track 12 may also be spaced apart along the third direction Z, which can further save the space occupied by the first track 11 and the second track 12 in the second direction Y. The first track 11 is positioned above the second track 12 along the third direction Z, so that the sheet changing assembly 220 can change the sheet 300 of the insert and pick-up station 11a.

[0072] Please see Figure 4 In some embodiments, the transfer mechanism 100 further includes a top tooth assembly 41 and a straightening assembly 42, which are respectively arranged at the sheet insertion / removal station 11a. The top tooth assembly 41 is located below the first track 11, and the straightening assembly 42 is located above the first track 11. The top tooth assembly 41 can pass through the boat body 400 to lift the cooked sheet inside the boat body 400 or cooperate with the sheet changing assembly 220 to place the raw sheet inside the boat body 400. The straightening assembly 42 is configured to straighten the sheet 300 placed on the top tooth assembly 41 to reduce the probability of breakage of the sheet 300 during the picking and placing process.

[0073] Please see Figure 3 In some embodiments, the orthographic projections of the first carrier 111 / second carrier 112 along the third direction Z and the orthographic projections of the third carrier 121 along the third direction Z are spaced apart along the second direction Y, so that the third carrier 121 avoids the top tooth assembly 41, thereby preventing the third carrier 121 from colliding with the top tooth assembly 41 when the first carrier 111 / second carrier 112 is conveyed to the insert / remove station 11a for wafer replacement.

[0074] Please combine Figure 3 and Figure 5 In some embodiments, the transfer mechanism 100 further includes a buffer platform 30, which is disposed on the frame 23 of the transport assembly 20 and configured as a buffer boat 400.

[0075] By caching a boat 400 on the buffer platform 30, it is possible to facilitate the transfer of the boat 400 between the third vehicle 121 and the second vehicle 112, or to provide more transfer methods. For example, the boat 400 can be directly transported from the third vehicle 121 to the second vehicle 112, the boat 400 can also be transported from the third vehicle 121 to the buffer platform 30, and the boat 400 can also be transported from the buffer platform 30 to the second vehicle 112.

[0076] In some embodiments, the buffer platform 30 and the third carrier 121 are spaced apart along the second direction Y to avoid collisions with the third carrier 121 as it moves along the second track 12. The buffer platform 30 and the first carrier 111 are aligned in the first direction X so that when the gripper 22 grips the boat 400 in the buffer platform 30 or the first carrier 111, the gripper 22 moves the same distance along the second direction Y.

[0077] In some embodiments, the buffer platform 30 can be fixedly mounted on the frame 23, so that the position of the buffer platform 30 is fixed and the buffer platform 30 is not likely to collide with the third vehicle 121.

[0078] In some embodiments, the buffer platform 30 can be moved relative to the frame 23 along the first direction X to adjust the position of the buffer platform 30, so as to facilitate the transport assembly 20 to transport the boat 400 to the buffer platform 30.

[0079] Please see Figure 7 In some embodiments, the buffer platform 30 includes a support portion 31. The support portion 31 is disposed on the frame 23. A protrusion 32 is fixedly provided on the upper surface of the support portion 31. The protrusion 32 forms two first stop surfaces 321 and two second stop surfaces 322, the two first stop surfaces 321 being spaced apart along a first direction X, and the two second stop surfaces 322 being spaced apart along a second direction Y.

[0080] Please see Figure 5 When the support part 31 supports the boat body 400, the two first stop surfaces 321 position the boat body 400 on opposite sides along the second direction Y, and the second stop surface 322 position the boat body 400 on opposite sides along the first direction X, so as to position the boat body 400 in the support part 31 along two perpendicular horizontal directions and prevent the boat body 400 provided on the buffer platform 30 from shifting in the horizontal direction.

[0081] Please see Figure 8 and Figure 9 In some embodiments, the first carrier 111, the second carrier 112, and the third carrier 121 also support the boat body 400 through the support part 31 and position the boat body 400 through the protrusion 32.

[0082] Please see Figure 4 In some embodiments, along the first direction X, the first track 11 includes a first carrier station 11b and a second carrier station 11c, with the insert / remove station 11a located between the first carrier station 11b and the second carrier station 11c; the second track 12 includes a first end 12a and a second end 12b, with the first end 12a corresponding to the first carrier station 11b and the second end 12b corresponding to the second carrier station 11c.

[0083] Please combine Figure 1 and Figure 4The transfer component 210 is positioned near the first end 12a of the second track 12 and the first boat-carrying station 11b of the first track 11; the transport component 20 is positioned near the second end 12b of the second track 12 and the second boat-carrying station 11c of the first track 11. The buffer platform 30 is positioned near the second end 12b. Therefore, when the vehicle moves to the first end 12a or the first boat-carrying station 11b, the transfer component 210 can grab the boat body 400 in the vehicle or place the boat body 400 in the vehicle; when the vehicle moves to the second end 12b or the second boat-carrying station 11c, the gripper 22 can grab the boat body 400 in the vehicle or place the boat body 400 in the vehicle. Here, "vehicle" refers to any one of the first vehicle 111, the second vehicle 112, and the third vehicle 121.

[0084] In some embodiments, the third carrier 121 is capable of moving between the first end 12a and the second end 12b. The third carrier 121, located at the first end 12a, carries the boat 400 placed by the transfer assembly 210. When the third carrier 121 is driven to the second end 12b, the boat 400 carried by the third carrier 121 can be transferred to the second carrier 112. The second carrier 112 can drive the boat 400 to the insert / take-up station 11a and the first boat-carrying station 11b in succession, so that the second carrier 112 is adjacent to the first carrier 111. The transfer assembly 210 can transport the boat 400 on the second carrier 112 at the first boat-carrying station 11b.

[0085] Please combine Figure 4 When the loading and unloading equipment 200 is working, one cycle of the circulating boat 400 is as follows:

[0086] The transfer component 210 first places the boat 400, which is loaded with cooked slices in the conveyor line, onto the first carrier 111.

[0087] The first carrier 111 transports the boat 400 to the wafer insertion station 11a; at the same time, the transfer assembly 210 places the boat 400 loaded with wafers in the conveyor line onto the third carrier 121.

[0088] The wafer changing assembly 220 changes wafers on the boat body 400 carried by the first carrier 111 in the wafer insertion and removal station 11a, replacing the cooked wafers in the boat body 400 with raw wafers; at the same time, the third carrier 121 drives the boat body 400 to the second end 12b, and the transport assembly 20 transports the boat body 400 to the second carrier 112.

[0089] After the first carrier 111 finishes changing the piece on the boat 400, the first carrier 111 moves the boat 400 towards the first boat-carrying station 11b; at the same time, the second carrier 112 moves the boat 400 towards the piece-insertion station 11a. When the first carrier 111 is at the first boat-carrying station 11b, the second carrier 112 is at the piece-insertion station 11a.

[0090] The wafer changing assembly 220 changes the wafers on the boat body 400 carried by the second carrier 112 in the wafer insertion and removal station 11a, replacing the cooked wafers in the boat body 400 with raw wafers; at the same time, the transfer assembly 210 removes the boat body 400 carried by the first carrier 111 in the first boat carrying station 11b, and places the boat body 400 loaded with cooked wafers on the first carrier 111.

[0091] After the second carrier 112 finishes replacing the hull 400, the second carrier 112 moves the hull 400 toward the first carrier station 11b to one side of the first carrier 111, and the transfer component 210 removes the hull 400 carried by the second carrier 112.

[0092] The second carrier 112 moves back to the second carrier station 11c; at the same time, the first carrier 111 transports the hull 400 to the insert and pick-up station 11a.

[0093] Furthermore, those skilled in the art should recognize that the above embodiments are merely illustrative of this application and are not intended to limit this application. Any appropriate changes and variations made to the above embodiments within the essential spirit and scope of this application fall within the scope of this application's disclosure.

Claims

1. A transfer mechanism, wherein a transfer component is capable of picking up and placing a boat body at the transfer mechanism, characterized in that, The transfer mechanism includes: The first track includes a wafer insertion and pickup station; A first vehicle is movably connected to the first track and configured to carry the boat body; A second vehicle is movably connected to the first track and configured to carry the boat hull; The second track is located on one side of the first track; A third vehicle is movably connected to the second track and is configured to carry the boat hull; The transfer component is capable of alternately placing the boat body on the first carrier and the third carrier, and the third carrier is capable of transferring the boat body to the second carrier; the first carrier and the second carrier are capable of alternately driving to the inserting station, and the transfer component is capable of alternately transporting the boat body carried by the first carrier and the boat body carried by the second carrier after flowing out of the inserting station.

2. The transfer mechanism according to claim 1, characterized in that: Also includes: A transport component is configured to transfer the hull carried by the third vehicle to the second vehicle; The transport component and the transfer component are located at opposite ends of the first track, respectively; The transport component includes: A three-axis transfer component is disposed at one end of the first track and / or the second track; A gripper is installed on the three-axis transfer device, the gripper being used to transfer the boat hull carried by the third vehicle to the second vehicle.

3. The transfer mechanism according to claim 1, characterized in that: The extension direction of the first track is parallel to the extension direction of the second track, and the extension direction of the first track is defined as the first direction; The third vehicle includes a conveying assembly disposed along a second direction, which is perpendicular to the first direction. When the third vehicle is aligned with the second vehicle along the second direction, the boat hull carried by the third vehicle can be transported to the second vehicle by the conveying assembly.

4. The transfer mechanism according to claim 1, characterized in that: The first track includes a first carrier station and a second carrier station opposite each other, and the insert / take-out station is located between the first carrier station and the second carrier station; The second track includes a first end and a second end opposite to each other, the first end corresponding to the first carrier station and the second end corresponding to the second carrier station; The first carrier is capable of moving between the first boat-carrying station and the insert / take-up station, and the transfer component is capable of picking up and placing the boat body on the first carrier at the first boat-carrying station; The third carrier can move between the first end and the second end. The third carrier is located at the first end and carries the boat body placed by the transfer component. When the third carrier is driven to the second end, the boat body carried by the third carrier can be transferred to the second carrier. The second carrier can drive the boat body to move sequentially to the inserting station and the first boat carrying station, so that the second carrier is adjacent to the first carrier. The transfer component can transport the boat body on the second carrier at the first boat carrying station.

5. The transfer mechanism according to claim 1, characterized in that: The extension direction of the first track is parallel to the extension direction of the second track, and the extension direction of the first track is defined as the first direction; The first track and the second track are spaced apart along the second direction, such that the orthographic projection of the first vehicle along the third direction and the orthographic projection of the third vehicle along the third direction are spaced apart along the second direction, and the second direction and the third direction are perpendicular to each other; The second track is located above or below the first track along the third direction, which is perpendicular to the first direction.

6. The transfer mechanism according to claim 2, characterized in that: Also includes: A buffer platform is disposed on the transport assembly and configured to buffer the hull carried by the third vehicle; The buffer platform is fixedly or movably installed onto the transport assembly; The buffer platform and the third vehicle are spaced apart along a second direction, the second track includes a second end opposite to the transfer component, and the buffer platform is positioned close to the second end.

7. The transfer mechanism according to claim 6, characterized in that: The first vehicle, the second vehicle, the third vehicle, and the buffer station each include: The support section is configured to support the boat hull; A protrusion is provided on the surface of the bearing portion. The protrusion forms two first stop surfaces and two second stop surfaces. The two first stop surfaces are spaced apart along the second direction, and the two second stop surfaces are spaced apart along the first direction. The first direction is perpendicular to the second direction. The first stop surfaces and the second stop surfaces position the boat body along the first direction and the second direction.

8. The transfer mechanism according to claim 1, characterized in that: Also includes: The top tooth assembly is located below the first track and at the insert / take-up station; The toothed assembly can pass through the boat body to lift the sheet inside the boat body or place the sheet inside the boat body; A straightening component is disposed above the first track and located at the insert / take-up station; the straightening component is configured to straighten the sheet material placed on the top tooth assembly.

9. The transfer mechanism according to claim 2, characterized in that: The gripping component includes a driving component and two clamping plates. The two clamping plates are spaced apart along a first direction. The driving component is connected to the clamping plates and is used to drive the clamping plates to move along the first direction, so that the two clamping plates can clamp the boat body along the first direction.

10. A loading and unloading device, characterized in that, The device includes a transfer component, a sheet changing component, and a transfer mechanism as described in any one of claims 1 to 9. The transfer component is located at one end of the transfer mechanism. The transfer component removes the boat body from the transfer mechanism or places the boat body in the transfer mechanism. The sheet changing component is capable of corresponding to the sheet insertion station and is configured to pick up and place the sheet inside the boat body in the sheet insertion station.

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