Transport mechanism and semiconductor material processing apparatus

Abstract

The utility model discloses a transmission mechanism and semiconductor material processing device belong to semiconductor material processing technical field, transmission mechanism is used for in vacuum chamber and transports holding piece, and semiconductor material processing device includes vacuum chamber, and transmission mechanism includes drive assembly, transmission assembly and holding piece. Drive assembly includes drive piece and magnetic fluid seal, and the cavity wall of magnetic fluid seal is worn and is equipped with the cavity of vacuum chamber. Transmission assembly includes first transmission rod and a plurality of second transmission rods, and a plurality of second transmission rods are spaced apart along the first direction, and a plurality of second transmission rods are directly or indirectly with first transmission rod magnetic force meshed connection, and drive piece is connected first transmission rod through magnetic fluid seal to drive first transmission rod rotation. Holding piece is overlapped on second transmission rod, and with the rotation of second transmission rod and moves in the first direction. The utility model can increase the carrying distance of carrying semiconductor material under the vacuum environment, and improve the vacuum cleanliness of vacuum environment simultaneously.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material processing technology, and in particular to a transmission mechanism and a semiconductor material processing device. Background Technology

[0002] In semiconductor bonding processes, semiconductor materials need to undergo various processes at different stations within a vacuum environment. To maintain vacuum cleanliness and reduce material spillage caused by the mechanical interaction of the handling device, robotic arms are typically used to transport semiconductor materials. However, limitations such as the reach and load capacity of the robotic arms, as well as the size of the vacuum chamber, prevent them from transporting semiconductor materials over long distances. Therefore, there is an urgent need for a handling device that can transport semiconductor materials over long distances in a vacuum environment while maintaining vacuum cleanliness.

[0003] This section provides background information related to this application, which is not necessarily prior art. Utility Model Content

[0004] The purpose of this invention is to provide a transmission mechanism and a semiconductor material processing device that can increase the transport distance of semiconductor materials in a vacuum environment, while improving the vacuum cleanliness of the vacuum environment.

[0005] To achieve the above objectives, the following technical solution is provided:

[0006] A transfer mechanism for transferring a holding member in a vacuum chamber, comprising:

[0007] A drive assembly includes a drive element and a magnetohydrodynamic seal, wherein the drive element is disposed outside the vacuum chamber and the magnetohydrodynamic seal penetrates the cavity wall of the vacuum chamber;

[0008] A transmission assembly is disposed within the vacuum chamber. The transmission assembly includes a first transmission rod and a plurality of second transmission rods. The plurality of second transmission rods are spaced apart along a first direction. The plurality of second transmission rods are directly or indirectly magnetically engaged with the first transmission rod. The driving member is connected to the first transmission rod through the magnetic fluid seal to drive the first transmission rod to rotate. The first transmission rod drives the plurality of second transmission rods to rotate.

[0009] A retainer for holding semiconductor material is attached to the second transmission rod and moves in the first direction as the second transmission rod rotates.

[0010] As an optional embodiment of the transmission mechanism, the transmission assembly further includes a third transmission rod, the first transmission rod and the third transmission rod being magnetically engaged, the third transmission rod being able to drive the second transmission rod to rotate, the rotation direction of the first transmission rod being the same as the rotation direction of the second transmission rod, and the extension direction of the first transmission rod intersecting the extension direction of the third transmission rod.

[0011] As an alternative to the transmission mechanism, the extension direction of the first transmission rod is perpendicular to the extension direction of the third transmission rod.

[0012] As an alternative to the transmission mechanism, the third transmission rod includes a first transmission part and a second transmission part coaxially connected. The first transmission part is magnetically engaged with the first transmission rod, and the second transmission part is magnetically engaged with the second transmission rod. The first transmission rod and the second transmission rod are located on both sides of the third transmission rod, respectively.

[0013] As an alternative to the transmission mechanism, the radial dimension of the first transmission part is larger than the radial dimension of the second transmission part.

[0014] As an alternative to the transmission mechanism, the first transmission rod extends along the second direction, and there are at least two third transmission rods. The at least two third transmission rods are magnetically engaged with the first transmission rod at intervals along the second direction, and the first direction and the second direction are perpendicular.

[0015] As an alternative to the transmission mechanism, along the first direction, the number of the third transmission rods may be multiple, and two adjacent third transmission rods may be coaxially connected by an adapter.

[0016] As an alternative to the transmission mechanism, a frame is also included, the frame comprising two guide rails arranged opposite each other along a second direction, the two guide rails forming a transmission channel between them along the second direction, the retaining member being disposed within the transmission channel, and the third transmission rod and the second transmission rod being disposed on the guide rails.

[0017] As an optional solution for the transmission mechanism, the guide rail forms an installation space on the side opposite to the transmission channel, the second transmission rod passes through the guide rail, and the second transmission rod includes a third transmission part and a fourth transmission part connected and grounded. The third transmission part is magnetically engaged with the third transmission rod, and the fourth transmission part drives the retaining member to translate along the first direction.

[0018] The third transmission unit is disposed in the installation space, and the fourth transmission unit is disposed in the transmission channel.

[0019] As an optional transmission mechanism, both the fourth transmission part and the retaining member are made of stainless steel.

[0020] A semiconductor material processing apparatus is also provided, including a transport mechanism and a vacuum chamber as described in any of the foregoing embodiments.

[0021] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0022] The transmission mechanism and semiconductor material processing apparatus provided by this invention utilize a magnetic fluid seal to ensure the vacuum level within the vacuum chamber while simultaneously transmitting power from the drive component to the transmission assembly within the vacuum chamber, thereby reducing the impact of the drive component on the vacuum level. The magnetic engagement of the first and second transmission rods in the transmission assembly reduces physical contact between the rods, minimizing material drop caused by mechanical engagement and thus reducing dust generation within the vacuum chamber, improving vacuum cleanliness. Furthermore, adjusting the number of second transmission rods allows for adjustments to the moving distance of the retaining component, thereby increasing the transport distance of the semiconductor material. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0024] Figure 1 This is an isometric view of a transmission mechanism according to an embodiment of the present utility model;

[0025] Figure 2 for Figure 1 An enlarged schematic diagram of P in the middle;

[0026] Figure 3 This is an axonal view of the connection between a drive assembly and a first transmission rod in an embodiment of the present invention;

[0027] Figure 4 This is a front view schematic diagram of a transmission mechanism according to an embodiment of the present utility model;

[0028] Figure 5 This is an isometric view of another transmission mechanism in an embodiment of this utility model.

[0029] Figure label:

[0030] 10. Drive assembly; 11. Drive element; 12. Magnetohydrodynamic seal; 20. Transmission assembly; 21. First transmission rod; 22. Second transmission rod; 221. Third transmission part; 222. Fourth transmission part; 23. Third transmission rod; 231. First transmission part; 232. Second transmission part; 30. Retaining element; 40. Frame; 41. Guide rail; 411. First connecting part; 412. Second connecting part; 42. Connecting element; 50. Adapter; X, First direction; Y, Second direction. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0032] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0033] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0035] This utility model provides a semiconductor material processing apparatus, which includes a vacuum chamber and a transport mechanism.

[0036] Optionally, the semiconductor material processing apparatus can be a semiconductor material bonding apparatus. For example, the semiconductor material includes wafers and chips. The semiconductor material bonding apparatus can be a wafer-to-wafer bonding apparatus, a wafer-to-chip bonding apparatus, or a chip-to-chip bonding apparatus.

[0037] Optionally, the vacuum chamber may have multiple workstations, and the transfer mechanism can move between these workstations. The holding element of the transfer mechanism can be used to hold the semiconductor material, thereby driving the semiconductor material to move between the multiple workstations.

[0038] Optionally, the vacuum chamber includes a processing chamber, which may have multiple workstations, with the transfer mechanism located within one of the processing chambers. Optionally, the processing chamber may be a bonding chamber. Of course, the processing chamber may also be used for semiconductor material activation or coating processes.

[0039] Optionally, the vacuum chamber has multiple processing chambers, with valves between adjacent processing chambers. During processing operations in a processing chamber, the valves close, creating an independent, sealed chamber. Each processing chamber may have a transfer mechanism. For example, the vacuum chamber may have at least two of a bonding chamber, an activation chamber, and a coating chamber. Exemplarily, the bonding chamber and the activation chamber are arranged adjacent to each other, with the transfer mechanisms in the bonding chamber and the activation chamber spaced apart sequentially along a first direction. The distance between the second drive rod closest to the activation chamber in the transfer mechanism within the bonding chamber and the second drive rod closest to the bonding chamber in the transfer mechanism within the activation chamber along the first direction is less than the dimension of the retainer along the first direction. Optionally, the distance between the second drive rod closest to the activation chamber in the transfer mechanism within the bonding chamber and the second drive rod closest to the bonding chamber in the transfer mechanism within the activation chamber along the first direction is less than or equal to half the dimension of the retainer along the first direction.

[0040] Figure 1 This is an isometric view of a transmission mechanism according to an embodiment of the present invention. Figure 2 for Figure 1 An enlarged schematic diagram of P in the diagram. Figure 3 This is a side view of the connection between a drive assembly and a first transmission rod in an embodiment of the present invention. Figure 4 This is a front view schematic diagram of a transmission mechanism in an embodiment of this utility model. Figure 5 This is an isometric view of another transmission mechanism in an embodiment of this utility model. Figure 5 The drive assembly and the first transmission rod are not shown.

[0041] Please see Figures 1 to 5This utility model provides a transmission mechanism for transferring a holding member 30 in a vacuum chamber. The transmission mechanism includes a drive assembly 10, a transmission assembly 20, and a holding member 30. The drive assembly 10 includes a drive member 11 and a magnetic fluid seal 12. The drive member 11 is disposed outside the vacuum chamber, and the magnetic fluid seal 12 passes through the cavity wall of the vacuum chamber. The transmission assembly 20 is disposed inside the vacuum chamber and includes a first transmission rod 21 and a plurality of second transmission rods 22. The plurality of second transmission rods 22 are spaced apart along a first direction X. The plurality of second transmission rods 22 are directly or indirectly magnetically engaged with the first transmission rod 21. The drive member 11 is connected to the first transmission rod 21 through the magnetic fluid seal 12 to drive the first transmission rod 21 to rotate. The first transmission rod 21 drives the plurality of second transmission rods 22 to rotate. The holding member 30 is used to hold semiconductor material. The holding member 30 is attached to the second transmission rods 22 and moves in the first direction X as the second transmission rods 22 rotate.

[0042] The drive assembly 10 serves as the core of the transmission mechanism, and the transmission assembly 20 and the retaining member 30 in the transmission mechanism move under the drive of the drive assembly 10. The drive assembly 10 includes a drive member 11, which may include a drive motor, such as a servo motor. The magnetic fluid seal 12 may include a magnetic fluid drive shaft. A magnetic fluid drive shaft is a device that uses the magnetism of a magnetic fluid to achieve transmission. It mainly consists of a drive shaft, magnetic fluid, a magnetic field generator, and seals. A magnetic fluid vacuum transmission device is a device that transmits rotational motion into a vacuum container. Its basic structure consists of a permanent magnetic field, two magnetic poles, a magnetic rotating shaft, and a magnetic fluid. The drive shaft is a multi-pole structure composed of magnetic poles and a rotating shaft. Each annular gap is filled with magnetic fluid. Ideally, all the magnetic fluid is sealed between each pole and the magnetic pole, forming a series of "magnetic fluid seal rings". Optionally, the drive shaft is connected to the first transmission rod 21.

[0043] The drive unit 11 is located outside the vacuum chamber, for example, the drive unit 11 is located outside the vacuum chamber shell.

[0044] The magnetohydrodynamic seal 12 penetrates the cavity wall of the vacuum chamber. For example, one end of the magnetohydrodynamic seal 12 is connected to the drive member 11, and the other end is connected to the first transmission member. The middle part of the magnetohydrodynamic seal 12 penetrates the cavity wall. Optionally, the magnetohydrodynamic seal 12 and the first transmission rod 21 can be directly connected or connected by a coupling.

[0045] The transmission assembly 20 can convert the rotational force of the drive member 11 into the transmission force that drives the retaining member 30 to move along the first direction X.

[0046] For example, the magnetohydrodynamic seal 12 can convert the rotational force of the drive member 11 into a rotational force that drives the first transmission rod 21 to rotate. The first transmission rod 21 and the second transmission rod 22 are magnetically engaged, so that when the first transmission rod 21 rotates, it can drive the second transmission rod 22 to rotate. Multiple second transmission rods 22 rotate in a single direction. A retaining member 30 is disposed on multiple second transmission rods 22. As the multiple second transmission rods 22 rotate, the retaining member 30 is transmitted by the second transmission rod 22 to the adjacent second transmission rod 22. Optionally, the second transmission rod 22 drives the retaining member 30 to move along the first direction X through rotational friction. Of course, the second transmission rod 22 can also drive the retaining member 30 to move along the first direction X through magnetic force. Here, "magnetic engagement" is a technology that uses the interaction of magnetic fields to achieve force transmission or motion coupling. Its core principle is to use the magnetic field generated by a permanent magnet or electromagnet to form a "magnetic connection" between different components, similar to mechanical engagement, thereby completing power transmission without direct contact. Optionally, the engagement parts of the first transmission rod 21 and the second transmission rod 22 are both permanent magnets.

[0047] In some examples, multiple second drive rods 22 are directly magnetically engaged with the first drive rod 21. In other examples, multiple second drive rods 22 are indirectly magnetically engaged with the first drive rod 21.

[0048] Multiple second transmission rods 22 are spaced apart along the first direction X. When the multiple second transmission rods 22 rotate, the retaining member 30 can reciprocate between the multiple second transmission rods 22 along the first direction X.

[0049] Optionally, the retainer 30 can be a plate-shaped structure. The side of the retainer 30 facing away from the second transmission rod 22 is used to support the semiconductor material, and the side of the retainer 30 facing the second transmission rod 22 can be directly or indirectly in contact with multiple second transmission rods 22.

[0050] In the transmission mechanism provided in this embodiment, the magnetohydrodynamic seal 12 can ensure the vacuum level inside the vacuum chamber while also transmitting the power of the drive member 11 to the transmission assembly 20 inside the vacuum chamber, thereby reducing the impact of the drive member 11 on the vacuum level inside the vacuum chamber. The magnetic engagement of the first transmission rod 21 and the second transmission rod 22 in the transmission assembly 20 can reduce the physical contact between the transmission rods, reduce material falling off caused by the mechanical engagement of the transmission assembly 20, thereby reducing the amount of dust generated inside the vacuum chamber and improving the vacuum cleanliness; at the same time, by adjusting the number of the second transmission rods 22, the moving distance of the retainer 30 can be increased or decreased, thereby increasing the transport distance of the semiconductor material.

[0051] In some alternative embodiments, the transmission assembly 20 further includes a third transmission rod 23, the first transmission rod 21 and the third transmission rod 23 are magnetically engaged, the third transmission rod 23 can drive the second transmission rod 22 to rotate, the rotation direction of the first transmission rod 21 is the same as the rotation direction of the second transmission rod 22, and the extension direction of the first transmission rod 21 and the extension direction of the third transmission rod 23 intersect.

[0052] Optionally, the third transmission rod 23 is magnetically engaged with the plurality of second transmission rods 22.

[0053] Optionally, the tangent direction at the point where the second transmission rod 22 abuts against the retainer 30 is parallel to the first direction X.

[0054] When the first transmission rod 21 rotates, it can drive the third transmission rod 23 to rotate. The rotation axis of the first transmission rod 21 and the rotation axis of the third transmission rod 23 are intersected. When the third transmission rod 23 rotates, it can drive multiple second transmission rods 22 to rotate simultaneously. Since the rotation directions of the first transmission rod 21 and the second transmission rod 22 are the same, and by using the third transmission rod 23, the rotation of multiple second transmission rods 22 can be achieved by one driving component 11 and one first transmission rod 21, thereby reducing the number of drive components 10 and reducing manufacturing costs.

[0055] In some alternative embodiments, the extension direction of the first transmission rod 21 is perpendicular to the extension direction of the third transmission rod 23, so that the rotation axis of the first transmission rod 21 and the rotation axis of the third transmission rod 23 are perpendicular. Further, the rotation axis of the third transmission rod 23 is perpendicular to the rotation axis of the second transmission rod 22, and the rotation axis of the first transmission rod 21 and the rotation axis of the second transmission rod 22 are parallel.

[0056] In some alternative embodiments, the third transmission rod 23 includes a first transmission part 231 and a second transmission part 232 coaxially connected. The first transmission part 231 is magnetically engaged with the first transmission rod 21, and the second transmission part 232 is magnetically engaged with the second transmission rod 22. The first transmission rod 21 and the second transmission rod 22 are located on both sides of the third transmission rod 23.

[0057] Optionally, the first transmission part 231 and the second transmission part 232 are arranged at intervals.

[0058] Furthermore, the third transmission rod 23 also includes a rod body, and the first transmission part 231 and the second transmission part 232 are both disposed on the rod body.

[0059] Optionally, the number of second transmission parts 232 can be configured to correspond one-to-one with the number of second transmission rods 22. Alternatively, one second transmission part 232 can be magnetically engaged with multiple second transmission rods 22.

[0060] The first transmission rod 21 and the second transmission rod 22 can be located on both sides of the third transmission rod 23 along a third direction, which is parallel to the side-by-side arrangement direction of the second transmission rod 22 and the retainer 30, thereby reducing the possibility of interference between the first transmission rod 21 and the second transmission rod 22.

[0061] In these alternative embodiments, by providing the first transmission part 231 and the second transmission part 232, the meshing accuracy between the third transmission rod 23 and the first transmission rod 21 and the second transmission rod 22 can be reduced, and the manufacturing difficulty of the third transmission rod 23 can be reduced.

[0062] Optionally, both the first transmission part 231 and the second transmission part 232 are made of permanent magnets.

[0063] In some alternative embodiments, the radial dimension of the first transmission part 231 is larger than the radial dimension of the second transmission part 232. It is understood that the larger the radial dimension, the larger the magnet volume or the magnetic field area, and the larger the output torque. This is beneficial to the output torque of the first transmission part 231, so that the drive assembly 10 can drive multiple second transmission rods 22 to rotate with a smaller output torque, thereby reducing the usage requirements of the drive assembly 10.

[0064] In some alternative embodiments, the first transmission rod 21 extends along the second direction Y, and there are at least two third transmission rods 23. The at least two third transmission rods 23 are magnetically engaged with the first transmission rod 21 at intervals along the second direction Y, and the first direction X and the second direction Y are perpendicular.

[0065] It is understood that each third transmission rod 23 can be magnetically engaged with multiple second transmission rods 22. That is, when the driving member 11 drives the first transmission rod 21 to rotate, the first transmission rod 21 can drive at least two third transmission rods 23 to rotate, thereby causing the multiple second transmission rods 22 arranged opposite each other along the second direction Y to rotate. Optionally, the retaining member 30 can be disposed on the multiple second transmission rods 22 arranged opposite each other along the second direction Y. That is, the sum of the extension dimensions of two second transmission rods 22 arranged opposite each other along the second direction Y can be less than the distance between two adjacent third transmission rods 23 along the second direction Y, thereby providing a stable transmission force for the retaining member 30, while reducing the contact area between the second transmission rods 22 and the retaining member 30, thereby reducing the possibility of material falling off due to friction between the second transmission rods 22 and the retaining member 30, and improving the vacuum cleanliness.

[0066] In some alternative embodiments, the number of third transmission rods 23 along the first direction X includes multiple third transmission rods 23, and two adjacent third transmission rods 23 are coaxially connected by an adapter 50.

[0067] For example, at least two third transmission rods 23 are sequentially arranged along the second direction Y, and multiple third transmission rods 23 are sequentially arranged along the first direction X. The third transmission rods 23 arranged sequentially along the second direction Y can drive the second transmission rods 22 arranged opposite each other along the second direction Y to rotate, and the third transmission rods 23 arranged sequentially along the first direction X can drive the multiple second transmission rods 22 arranged sequentially along the first direction X to rotate, thereby increasing the number of second transmission rods 22 and thus increasing the moving distance of the retaining member 30. Furthermore, the coaxial connection via the adapter 50 can shorten the extension dimension of the third transmission rods 23 and improve the arrangement flexibility of the third transmission rods 23. Optionally, the rotating member includes a coupling.

[0068] In some alternative embodiments, the transmission mechanism further includes a frame 40, which includes two guide rails 41 disposed opposite each other along the second direction Y, forming a transmission channel between the two guide rails 41 along the second direction Y, a retainer 30 disposed in the transmission channel, and a third transmission rod 23 and a second transmission rod 22 disposed on the guide rails 41.

[0069] For example, the guide rail 41 extends along the first direction X, and the area between the two guide rails 41 arranged along the second direction Y forms a transmission channel. The transmission channel extends along the first direction X, and the retainer 30 can reciprocate along the extension direction of the transmission channel.

[0070] Optionally, the frame 40 also includes a connector 42, one end of which is connected to the inner wall of the vacuum chamber, and the other end of which is connected to the guide rail 41.

[0071] Optionally, the third transmission rod 23 is mounted on the guide rail 41, which can restrict the axial movement of the third transmission rod 23, and the third transmission rod 23 can also rotate. Optionally, the guide rail 41 is provided with a connecting structure for rotatably connecting with the third transmission rod 23.

[0072] Optionally, the second transmission rod 22 is mounted on the guide rail 41, which can restrict the axial movement of the second transmission rod 22, and the second transmission rod 22 can also rotate. Optionally, the guide rail 41 is provided with a connecting structure for rotatably connecting with the second transmission rod 22.

[0073] In some alternative embodiments, the guide rail 41 forms an installation space on the side opposite to the transmission channel, the second transmission rod 22 passes through the guide rail 41, and the second transmission rod 22 includes a third transmission part 221 and a fourth transmission part 222 connected and grounded. The third transmission part 221 is magnetically engaged with the third transmission rod 23, and the fourth transmission part 222 drives the retaining member 30 to translate along the first direction X. The third transmission part 221 is disposed in the installation space, and the fourth transmission part 222 is disposed in the transmission channel.

[0074] Optionally, the guide rail 41 includes a first connecting portion 411 and a second connecting portion 412 connected and grounded. The first connecting portion 411 and the second connecting portion 412 are intersected and an installation space is formed between the first connecting portion 411 and the second connecting portion 412. A transmission channel is formed on the side of the second connecting portion 412 facing away from the first connecting portion 411.

[0075] The third transmission rod 23 is disposed on the side of the first connecting part 421 facing the installation space, and the second transmission rod 22 is disposed on the second connecting part 422.

[0076] Optionally, the first connecting part 421 and the second connecting part 422 are connected at 90 degrees. For example, the guide rail 41 is an L-shaped plate.

[0077] Optionally, the first connecting part 421 is provided with a bearing seat, and the third transmission rod 23 passes through the bearing seat.

[0078] Optionally, the second connecting part 422 is provided with a bearing seat, and the second transmission rod 22 passes through the bearing seat.

[0079] Optionally, the number of first connecting members 41 is the same as the number of third transmission rods 23 arranged sequentially along the second direction Y. For example, the number of third transmission rods 23 arranged along the second direction Y includes two, the number of first connecting members 41 arranged along the second direction Y includes two, and the two second connecting portions 422 are arranged opposite to each other along the second direction Y. The area between the two second connecting portions 422 forms a transmission area for the retainer 30 to move along the first direction X. The first connecting portion 421 is located on the side of the second connecting portion 422 facing away from the retainer 30. Optionally, a limiting shoulder may be provided on the side of the second connecting portion 422 facing the retainer 30, and the limiting shoulder can prevent the retainer 30 from moving along the second direction Y.

[0080] Optionally, the material of the third transmission unit 221 can be a permanent magnet.

[0081] The third transmission rod 23 is disposed on the side of the first connecting part 421 facing the second connecting part 422, that is, the third transmission rod 23 is disposed on the side of the second connecting part 422 away from the retaining member 30, and the third transmission rod 23 is connected to the first connecting part 421.

[0082] The second transmission rod 22 passes through the second connecting portion 422, and the third transmission portion 221 of the second transmission rod 22 is located on the side of the second connecting portion 422 facing away from the retainer 30, and the fourth transmission portion 222 of the second transmission rod 22 is located on the side of the second connecting portion 42 facing the retainer 30, so that the magnetic engagement connection of the third transmission rod 23 and the third transmission portion 221 and the transmission connection of the fourth transmission portion 222 and the retainer 30 are respectively located on both sides of the second connecting portion 422, thereby reducing the possibility of interference between the magnetic engagement connection of the third transmission rod 23 and the third transmission portion 221 and the retainer 30.

[0083] In some alternative embodiments, both the fourth transmission part 222 and the retainer 30 are made of stainless steel. The connection between the fourth transmission part 222 and the retainer 30 can be a rolling transmission connection, and the stainless steel material helps to reduce the coefficient of friction of the transmission between the fourth transmission part 222 and the retainer 30, while increasing the load of the transmission mechanism and expanding the applicability of the transmission mechanism.

[0084] This embodiment provides a semiconductor material processing apparatus, including a transport mechanism and a vacuum chamber as described in any of the above embodiments. Since the semiconductor material processing apparatus provided in this application includes the transport mechanism of any of the above embodiments, it possesses the beneficial effects of the transport mechanism of any of the above embodiments, which will not be elaborated further here.

[0085] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A transmission mechanism, characterized in that, The transfer mechanism is used to transfer the holding member (30) in a vacuum chamber, and includes: The drive assembly (10) includes a drive element (11) and a magnetic fluid seal (12), wherein the drive element (11) is disposed outside the vacuum chamber and the magnetic fluid seal (12) passes through the cavity wall of the vacuum chamber; A transmission assembly (20) is disposed in the vacuum chamber. The transmission assembly (20) includes a first transmission rod (21) and a plurality of second transmission rods (22). The plurality of second transmission rods (22) are spaced apart along a first direction (X). The plurality of second transmission rods (22) are directly or indirectly magnetically engaged with the first transmission rod (21). The driving member (11) is connected to the first transmission rod (21) through the magnetic fluid seal (12) to drive the first transmission rod (21) to rotate. The first transmission rod (21) drives the plurality of second transmission rods (22) to rotate. A retainer (30) is used to hold the semiconductor material; The retainer (30) is attached to the second transmission rod (22) and moves in the first direction (X) as the second transmission rod (22) rotates.

2. The transmission mechanism according to claim 1, characterized in that, The transmission assembly (20) further includes a third transmission rod (23), the first transmission rod (21) and the third transmission rod (23) are magnetically engaged, the third transmission rod (23) can drive the second transmission rod (22) to rotate, the rotation direction of the first transmission rod (21) is the same as the rotation direction of the second transmission rod (22), and the extension direction of the first transmission rod (21) intersects the extension direction of the third transmission rod (23).

3. The transmission mechanism according to claim 2, characterized in that, The extension direction of the first transmission rod (21) is perpendicular to the extension direction of the third transmission rod (23).

4. The transmission mechanism according to claim 2, characterized in that, The third transmission rod (23) includes a first transmission part (231) and a second transmission part (232) coaxially connected. The first transmission part (231) is magnetically engaged with the first transmission rod (21), and the second transmission part (232) is magnetically engaged with the second transmission rod (22). The first transmission rod (21) and the second transmission rod (22) are located on both sides of the third transmission rod (23).

5. The transmission mechanism according to claim 4, characterized in that, The radial dimension of the first transmission part (231) is greater than the radial dimension of the second transmission part (232).

6. The transmission mechanism according to claim 2, characterized in that, The first transmission rod (21) extends along the second direction (Y), and there are at least two third transmission rods (23). The at least two third transmission rods (23) are magnetically engaged with the first transmission rod (21) at intervals along the second direction (Y). The first direction (X) and the second direction (Y) are perpendicular.

7. The transmission mechanism according to claim 2, characterized in that, Along the first direction (X), there are multiple third transmission rods (23), and two adjacent third transmission rods (23) are coaxially connected by an adapter (50).

8. The transmission mechanism according to claim 1, characterized in that, It also includes a frame (40), which includes two guide rails (41) arranged opposite each other along a second direction (Y), forming a transmission channel between the two guide rails (41) along the second direction (Y), the retainer (30) being disposed in the transmission channel, and the third transmission rod (23) and the second transmission rod (22) being disposed on the guide rails (41).

9. The transmission mechanism according to claim 8, characterized in that, The guide rail (41) forms an installation space on the side opposite to the transmission channel. The second transmission rod (22) passes through the guide rail (41). The second transmission rod (22) includes a third transmission part (221) and a fourth transmission part (222) connected and grounded. The third transmission part (221) is magnetically engaged with the third transmission rod (23). The fourth transmission part (222) drives the retaining member (30) to translate along the first direction (X). The third transmission unit (221) is disposed in the installation space, and the fourth transmission unit (222) is disposed in the transmission channel.

10. The transmission mechanism according to claim 9, characterized in that, The fourth transmission part (222) and the retaining member (30) are both made of stainless steel.

11. A semiconductor material processing apparatus, characterized in that, include: The transmission mechanism as described in any one of claims 1 to 10; as well as Vacuum chamber.

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