Plasma cleaning apparatus for sensor processing

Abstract

The utility model relates to sensor processing technical field discloses sensor processing's plasma cleaning device, including the bottom plate, the upper surface fixed connection of bottom plate has the slide rail, the upper surface sliding connection of slide rail has the placing table, the inside screw thread connection of placing table has the threaded rod, the outer wall fixed connection of threaded rod has the handle, the outer wall fixed connection of threaded rod has the clamping block, the inside sliding connection of placing table has the sliding rod, the outer wall of sliding rod is equipped with the spring, the outer wall fixed connection of sliding rod is in the outer wall of clamping block, the upper surface of bottom plate is provided with the support assembly. In the utility model, through the mutual cooperation between handle, threaded rod, placing table, slide rail, clamping block, sliding rod, spring can be fixed to the sensor that places on placing table and hold, to realize the accurate clamping and fixed of sensor, ensure its stability and positional consistency in the cleaning process.

Description

Technical Field

[0001] This utility model relates to the field of sensor processing technology, and in particular to a plasma cleaning device for sensor processing. Background Technology

[0002] In today's era of rapid technological advancement, sensors, as key components for information acquisition, directly impact the effectiveness of applications across numerous fields. As industries continuously raise their requirements for sensor accuracy, sensitivity, and reliability, sensor manufacturing processes face unprecedented challenges. Among these challenges, the cleaning and treatment of sensor surfaces has become one of the core factors determining their performance.

[0003] Plasma cleaning utilizes the physical bombardment and chemical reaction between active particles (such as ions, electrons, and free radicals) in plasma and contaminants on the sensor surface, enabling efficient and precise cleaning and surface treatment. However, existing technologies lack a fixed mechanism, requiring significant manual effort to maintain sensor stability, increasing operational difficulty and time costs. Therefore, there is a need to develop a plasma cleaning device for sensor processing. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a plasma cleaning device for sensor processing, which aims to improve the problem that in the prior art, due to the lack of a fixing function, a lot of effort is required to keep the sensor stable during manual operation, which increases the difficulty of operation and time cost.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a plasma cleaning device for sensor processing, comprising a base plate, a slide rail fixedly connected to the upper surface of the base plate, a placement platform slidably connected to the upper surface of the slide rail, a threaded rod threadedly connected to the interior of the placement platform, a handle fixedly connected to the outer wall of the threaded rod, a clamping block fixedly connected to the outer wall of the threaded rod, a sliding rod slidably connected to the interior of the placement platform, a spring sleeved on the outer wall of the sliding rod, one end of the spring fixedly connected to the inner wall of the placement platform, the other end of the spring fixedly connected to the outer wall of the sliding rod, the outer wall of the sliding rod fixedly connected to the outer wall of the clamping block, and a support assembly provided on the upper surface of the base plate.

[0006] Preferably, the support assembly includes a support rod, the lower surface of which is fixedly connected to the upper surface of the base plate, and a support block is fixedly connected to the outer wall of the support rod.

[0007] Preferably, a plasma cleaner is fixedly connected to the outer wall of the support block, and a support frame is fixedly connected to the lower surface of the plasma cleaner.

[0008] Preferably, a motor is fixedly connected inside the support frame, a rotating frame is fixedly installed at the output end of the motor, a support shaft is rotatably connected inside the rotating frame, and a rotating nozzle is fixedly connected to the outer wall of the support shaft.

[0009] Preferably, a second motor is fixedly connected inside the support frame, and a second connecting frame is fixedly installed at the output end of the second motor.

[0010] Preferably, a connecting shaft is fixedly connected inside the connecting frame two, and a connecting frame one is rotatably connected to the outer wall of the connecting shaft. A support shaft two is rotatably connected inside the connecting frame one, and the outer wall of the support shaft two is fixedly connected to the outer wall of the rotating nozzle.

[0011] Preferably, a fixing frame is fixedly connected to the lower surface of the plasma cleaner, and a support shaft is fixedly connected to the outer wall of the fixing frame.

[0012] Preferably, the plasma cleaner has two pipes at one end, and the other ends of the two pipes are respectively located inside the rotating nozzle and the second support shaft.

[0013] This utility model has the following beneficial effects:

[0014] 1. In this utility model, the sensor placed on the placement platform can be clamped and fixed by the cooperation between the throttle, threaded rod, placement platform, slide rail, clamping block, sliding rod and spring. The rotational movement of the threaded rod is converted into the linear displacement of the clamping block through thread transmission, thereby achieving precise clamping and fixing of the sensor and ensuring its stability and positional consistency during the cleaning process.

[0015] 2. In this utility model, the rotating nozzle can be driven to rotate at multiple angles through the mutual cooperation between the support frame, motor one, motor two, rotating frame, support shaft one, connecting frame two, connecting shaft, connecting frame one, and support shaft two. In the sensor processing, it is sometimes necessary to perform precise cleaning or surface treatment on specific parts of the sensor. By transporting the plasma in the plasma cleaner to the external nozzle through the pipeline, the nozzle can be aimed at the part that needs to be treated, achieving precise operation and avoiding affecting other parts that do not need to be treated. Attached Figure Description

[0016] Figure 1 This is a perspective view of the plasma cleaning device for sensor processing proposed in this utility model.

[0017] Figure 2 This is a partial structural diagram of the placement stage of the plasma cleaning device for sensor processing proposed in this utility model.

[0018] Figure 3This is a partial structural diagram of the threaded rod of the plasma cleaning device for sensor processing proposed in this utility model.

[0019] Figure 4 This is a partial structural diagram of the plasma cleaner in the plasma cleaning device for sensor processing proposed in this utility model.

[0020] Figure 5 This is a partial structural diagram of the support frame of the plasma cleaning device for sensor processing proposed in this utility model.

[0021] Figure 6 This is a partial structural diagram of the motor of the plasma cleaning device for sensor processing proposed in this utility model.

[0022] Legend:

[0023] 1. Base plate; 2. Slide rail; 3. Placement platform; 4. Threaded rod; 5. Rotary handle; 6. Sliding rod; 7. Spring; 8. Clamping block; 9. Support rod; 10. Support block; 11. Plasma cleaner; 12. Support frame; 13. Motor 1; 14. Motor 2; 15. Rotating frame; 16. Support shaft 1; 17. Rotating nozzle; 18. Connecting frame 1; 19. Connecting frame 2; 20. Connecting shaft; 21. Pipe; 22. Fixing frame; 23. Support shaft 2; 24. Fixing nozzle. Detailed Implementation

[0024] The technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0025] Reference Figure 1 , Figure 2 and Figure 3 An embodiment of this utility model provides a plasma cleaning device for sensor processing, including a base plate 1, a slide rail 2 fixedly connected to the upper surface of the base plate 1, a placement platform 3 slidably connected to the upper surface of the slide rail 2, a threaded rod 4 threadedly connected to the inside of the placement platform 3, a handle 5 fixedly connected to the outer wall of the threaded rod 4, a clamping block 8 fixedly connected to the outer wall of the threaded rod 4, a sliding rod 6 slidably connected to the inside of the placement platform 3, a spring 7 sleeved on the outer wall of the sliding rod 6, one end of the spring 7 fixedly connected to the inner wall of the placement platform 3, the other end of the spring 7 fixedly connected to the outer wall of the sliding rod 6, the outer wall of the sliding rod 6 fixedly connected to the outer wall of the clamping block 8, and a support assembly provided on the upper surface of the base plate 1;

[0026] Specifically, the base plate 1 fixes the position of the slide rail 2, the slide rail 2 supports the placement platform 3 to facilitate its movement, the placement platform 3 supports the position of the threaded rod 4, the threaded rod 4 fixes the position of the throttle 5, and rotating the throttle 5 causes the threaded rod 4 to rotate inside the placement platform 3. This rotation of the threaded rod 4 causes the clamping block 8 to move to a limited position, and the movement of the clamping block 8 causes the sliding rod 6 to slide to a limited position inside the placement platform 3. Simultaneously, the sliding of the sliding rod 6 limits the clamping block 8, preventing it from rotating due to the rotation of the threaded rod 4. Furthermore, the sliding of the sliding rod 6 stretches the spring 7 inside the placement platform 3, ensuring the stability of the movement. Thus, the sensor can be placed on the placement platform 3 and clamped and fixed by the movement of the clamping block 8.

[0027] Reference Figure 1 The support assembly includes a support rod 9, the lower surface of which is fixedly connected to the upper surface of the base plate 1, and a support block 10 is fixedly connected to the outer wall of the support rod 9.

[0028] Specifically, the base plate 1 serves to fix the position of the support rod 9, and the support rod 9 serves to fix the position of the support block 10.

[0029] Reference Figure 1 , Figure 4 and Figure 5 A plasma cleaner 11 is fixedly connected to the outer wall of the support block 10, and a support frame 12 is fixedly connected to the lower surface of the plasma cleaner 11. A motor 13 is fixedly connected inside the support frame 12, and a rotating frame 15 is fixedly installed at the output end of the motor 13. A support shaft 16 is rotatably connected inside the rotating frame 15, and a rotating nozzle 17 is fixedly connected to the outer wall of the support shaft 16.

[0030] Specifically, the plasma cleaner 11 serves to fix the position of the support frame 12, the support frame 12 serves to fix the position of the motor 13, the motor 13 drives the rotating frame 15 to rotate synchronously, the rotation of the rotating frame 15 drives the support shaft 16 to rotate, and the support shaft 16 fixes the position of the rotating nozzle 17. Thus, when the rotating frame 15 drives the support shaft 16 to rotate, it drives the rotating nozzle 17 to rotate synchronously.

[0031] Reference Figure 4 , Figure 5 and Figure 6A second motor 14 is fixedly connected inside the support frame 12, and a second connecting frame 19 is fixedly installed at the output end of the second motor 14; a connecting shaft 20 is fixedly connected inside the second connecting frame 19, a first connecting frame 18 is rotatably connected to the outer wall of the connecting shaft 20, a second support shaft 23 is rotatably connected inside the first connecting frame 18, and the outer wall of the second support shaft 23 is fixedly connected to the outer wall of the rotating nozzle 17; a fixed frame 22 is fixedly connected to the lower surface of the plasma cleaner 11, and a fixed nozzle 24 is fixedly connected to the outer wall of the fixed frame 22; one end of two pipes 21 is provided inside the plasma cleaner 11, and the other ends of the two pipes 21 are respectively installed inside the rotating nozzle 17 and the fixed nozzle 24;

[0032] Specifically, the support frame 12 fixes the position of the second motor 14, and the starter motor 14 drives the second connecting frame 19 to rotate synchronously. The second connecting frame 19 fixes the position of the connecting shaft 20, and the connecting shaft 20 supports the first connecting frame 18. Therefore, the rotation of the second connecting frame 19 causes the first connecting frame 18 to rotate via the connecting shaft 20. The first connecting frame 18 fixes the position of the second support shaft 23, which in turn fixes the position of the rotating nozzle 17. Thus, the rotation of the first connecting frame 18 causes the second support shaft 23 to rotate. The rotating nozzle 17 is used to adjust the rotation angle, and at the same time, the plasma cleaner 11 fixes the position of the mounting bracket 22. The mounting bracket 22 supports and fixes the position of the nozzle 24. The plasma from the plasma cleaner 11 can be delivered to the external nozzle through the pipe 21, which facilitates the integration of the cleaning process into the entire production process. In the sensor processing, sometimes it is necessary to perform precise cleaning or surface treatment on specific parts of the sensor. By delivering the plasma to the external nozzle through the pipe 21, the nozzle can be aimed at the part that needs to be treated, achieving precise operation and avoiding affecting other parts that do not need to be treated.

[0033] Working principle: In use, the sensor is first placed on the upper surface of the placement platform 3. By rotating the handle 5, the threaded rod 4 can be driven to rotate inside the placement platform 3. The rotation of the threaded rod 4 can push the clamping block 8 to move. When the clamping block 8 moves, it can drive the sliding rod 6 to slide within the placement platform 3. Then, the sliding of the sliding rod 6 drives the spring 7 to compress or stretch inside the placement platform 3. The compression or stretching of the spring 7 will absorb some kinetic energy through elastic deformation, thereby ensuring the stability of the clamping block 8 when it moves. Thus, the movement of the clamping block 8 can clamp and fix the placement platform 3. The pitch of the threaded rod 4 is usually small. By rotating the angle, the moving distance of the clamping block 8 can be precisely controlled, thereby achieving millimeter-level or even micrometer-level positioning of the sensor.

[0034] When it is necessary to rotate and adjust the angle of the rotary nozzle 17, motor 13 can be started to drive the rotating frame 15 to rotate. The rotation of the rotating frame 15 can then drive the rotary nozzle 17 to rotate back and forth via support shaft 16. Then, motor 2 can be started to drive the connecting frame 2 19 to rotate. The rotation of the connecting frame 2 19 can then drive the connecting frame 18 to rotate via connecting shaft 20. The rotation of the connecting frame 18 can then drive the rotary nozzle 17 to rotate left and right via support shaft 23. At the same time, motor 2 14 drives the rotary nozzle 17 through the connecting frame 2 19 and the connecting frame 18. When the rotation reaches a certain angle, the motor 13 is started again, and the rotating frame 15 drives the rotating nozzle 17 to rotate. The rotating nozzle 17 will drive the connecting frame 18 to rotate through the support shaft 23. At this time, the connecting frame 19 can support the connecting frame 18 to rotate through the support block 10, and the fixed nozzle 24 is fixed in position through the fixed frame 22. This device is designed with an external nozzle that can rotate at multiple angles, so that different shapes and spray angles can be designed according to the specific structure of the sensor and the cleaning requirements, so that the plasma can cover the sensor surface more evenly and fully, thereby improving the cleaning effect.

[0035] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A plasma cleaning apparatus for sensor processing, comprising a base plate (1), characterized in that: A slide rail (2) is fixedly connected to the upper surface of the base plate (1). A placement platform (3) is slidably connected to the upper surface of the slide rail (2). A threaded rod (4) is threadedly connected to the inside of the placement platform (3). A throttle (5) is fixedly connected to the outer wall of the threaded rod (4). A clamping block (8) is fixedly connected to the outer wall of the threaded rod (4). A sliding rod (6) is slidably connected to the inside of the placement platform (3). A spring (7) is sleeved on the outer wall of the sliding rod (6). One end of the spring (7) is fixedly connected to the inner wall of the placement platform (3). The other end of the spring (7) is fixedly connected to the outer wall of the sliding rod (6). The outer wall of the sliding rod (6) is fixedly connected to the outer wall of the clamping block (8). A support assembly is provided on the upper surface of the base plate (1).

2. The plasma cleaning apparatus for sensor processing according to claim 1, characterized in that: The support assembly includes a support rod (9), the lower surface of which is fixedly connected to the upper surface of the base plate (1), and a support block (10) is fixedly connected to the outer wall of the support rod (9).

3. The plasma cleaning apparatus for sensor processing according to claim 2, characterized in that: A plasma cleaner (11) is fixedly connected to the outer wall of the support block (10), and a support frame (12) is fixedly connected to the lower surface of the plasma cleaner (11).

4. The plasma cleaning apparatus for sensor processing according to claim 3, characterized in that: The support frame (12) is fixedly connected to a motor (13), and a rotating frame (15) is fixedly installed at the output end of the motor (13). The rotating frame (15) is rotatably connected to a support shaft (16), and a rotating nozzle (17) is fixedly connected to the outer wall of the support shaft (16).

5. The plasma cleaning apparatus for sensor processing according to claim 3, characterized in that: The support frame (12) is internally connected to a motor (14), and the output end of the motor (14) is fixedly provided with a connecting frame (19).

6. The plasma cleaning apparatus for sensor processing according to claim 5, characterized in that: The connecting frame two (19) is fixedly connected to the connecting shaft (20), the outer wall of the connecting shaft (20) is rotatably connected to the connecting frame one (18), the inner wall of the connecting frame one (18) is rotatably connected to the support shaft two (23), and the outer wall of the support shaft two (23) is fixedly connected to the outer wall of the rotating nozzle (17).

7. The plasma cleaning apparatus for sensor processing according to claim 3, characterized in that: A fixed frame (22) is fixedly connected to the lower surface of the plasma cleaner (11), and a fixed nozzle (24) is fixedly connected to the outer wall of the fixed frame (22).

8. The plasma cleaning apparatus for sensor processing according to claim 3, characterized in that: The plasma cleaner (11) has two pipes (21) at one end inside, and the other ends of the two pipes (21) are respectively located inside the rotating nozzle (17) and the fixed nozzle (24).

Images