A polishing pad marking port processing apparatus

Abstract

The utility model relates to chip manufacturing technical field discloses a kind of grinding pad mark mouth processing device, comprising: cutting platform top surface is equipped with cutting disc, and positioning block is equipped on cutting disc;The top surface of cutting disc is suitable for placing grinding pad, and cooperate with the first positioning hole on grinding pad by positioning block, to limit grinding pad;Cutter frame is equipped with lifting seat and mounting seat, and mounting seat is set to the bottom of lifting seat;Cutting tool and positioning member are equipped on mounting seat;Positioning member is tangent to the edge of grinding pad in the plane projection of cutting disc;When cutter frame drives mounting seat to descend in lifting seat, cutting tool cuts the edge of grinding pad, and forms mark mouth.The grinding pad positioning and fixing of the present application are realized by positioning block and first positioning hole;Grinding pad edge is determined by positioning member, and cutting tool position is determined, and cutting tool carries out steady, convenient and accurate processing to the edge of grinding pad, and forms mark mouth.

Description

Technical Field

[0001] This utility model relates to the field of chip manufacturing technology, specifically to a grinding pad marking port processing device. Background Technology

[0002] In the chip manufacturing industry, chemical mechanical polishing (CMP) equipment is frequently used to polish wafers, and polishing pads are consumables required for this equipment. During initial testing and actual use, the lack of markings on the edges of existing polishing pads made it difficult to determine their initial position when installing them onto the CMP equipment, often resulting in misalignment and inadequate polishing performance. Utility Model Content

[0003] In view of this, the present invention provides a grinding pad marking hole processing device to solve the problem that the existing grinding pads lack marking holes on the edge, which makes it difficult to determine the initial position of the grinding pad when it is installed on a chemical mechanical polishing equipment, and often results in installation misalignment.

[0004] This utility model provides a device for processing marking holes on abrasive pads, including:

[0005] The top surface of the cutting platform is provided with a cutting disc, and at least one positioning block is provided on the cutting disc. The top surface of the cutting disc is suitable for placing a grinding pad, and the positioning block cooperates with a first positioning hole provided on the grinding pad to limit the grinding pad.

[0006] A tool holder includes a lifting seat and a mounting seat, with the mounting seat located at the bottom of the lifting seat. A cutting tool and a positioning element are mounted on the mounting seat. The projection of the positioning element onto the cutting disc plane is tangent to the outer edge of the grinding pad. The tool holder is adapted to allow the cutting tool to cut the edge of the grinding pad and form a marking notch when the lifting seat lowers the mounting seat. Beneficial effects: This application employs the above technical solution, achieving precise positioning and fixation of the grinding pad through the positioning block on the cutting disc and the first positioning hole on the grinding pad. The positional relationship between the positioning element and the grinding pad determines the outer edge of the grinding pad, accurately determining the position of the cutting tool. This allows for stable, convenient, and accurate processing of the edge of the grinding pad using the cutting tool, forming a marking notch. When the grinding pad is installed on a chemical mechanical polishing device, it facilitates determining the initial position of the grinding pad and prevents installation misalignment.

[0007] Optionally, the height of the positioning block is higher than the top surface of the cutting disc, and the first positioning hole is a square hole and / or a circular hole; the positioning block is a square positioning block and / or a cylindrical positioning block adapted to the first positioning hole. Beneficial effects: This application adopts the above technical solution, and by setting the height of the positioning block to be higher than the top surface of the cutting disc, better positioning of the grinding pad is achieved.

[0008] Optionally, the square positioning block is disposed in the second positioning hole provided on the top surface of the cutting disc; and / or the cylindrical positioning block is disposed in the third positioning hole provided on the top surface of the cutting disc.

[0009] Optionally, the number of square positioning blocks is at least two; the number of cylindrical positioning blocks is at least three; the square positioning blocks and the marking opening are located on the same straight line; the cylindrical positioning blocks are located on the same circumference.

[0010] Optionally, a notch is provided on the cutting disc at the position corresponding to the marked opening on the grinding pad, and a gasket is detachably installed in the notch. Beneficial effects: By adopting the above technical solution, this application avoids damage to the cutting disc by the cutting tool during cutting by providing the notch. When the gasket is damaged by the cutting tool, it can be replaced, thus preventing damage to the cutting disc.

[0011] Optionally, the gasket is inserted and fixed in the notch; or, the gasket is fixed in the notch by fasteners.

[0012] Optionally, the tool holder further includes a support base and a frame; one side of the frame is connected to the lifting seat, and the other side is connected to the support base; the support base is located below the mounting base, and the top surface of the support base abuts against the bottom surface of the cutting platform. Beneficial effects: This application adopts the above technical solution, which uses a support base to stably support the cutting platform, further ensuring the stability of the cutting platform and guaranteeing stability during cutting.

[0013] Optionally, the support base includes abutment members and fixing members arranged vertically. A height adjustment mechanism is provided at the bottom of the fixing member. The height adjustment mechanism includes a threaded rod and an adjusting nut. The threaded rod abuts against the abutment member through a threaded hole on the fixing member. The adjusting nut is installed on the threaded rod and abuts against the bottom of the fixing member. Beneficial effect: This application adopts the above technical solution, adjusting the height of the support base by turning the adjusting nut, thereby ensuring stable support of the cutting platform by the support base.

[0014] Optionally, height-adjustable support feet are provided around the bottom of the cutting platform. Advantages: This application adopts the above technical solution, using support feet to provide stable support for the entire cutting platform.

[0015] Optionally, the cutting platform and the cutting disc are manufactured as a single unit. Attached Figure Description

[0016] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional structural diagram of the grinding pad marking port processing device provided in the embodiments of this utility model. Figure 1 ;

[0018] Figure 2 This is a three-dimensional structural diagram of the grinding pad marking port processing device provided in the embodiments of this utility model. Figure 2 ;

[0019] Figure 3 This is a three-dimensional structural diagram of the tool holder provided in the embodiment of this utility model;

[0020] Figure 4 This is a three-dimensional structural diagram of the grinding pad marking port processing device provided in the embodiments of this utility model. Figure 3 ;

[0021] Figure 5 This is a partial top view of the grinding pad marking port processing device provided in the embodiments of this utility model;

[0022] Figure 6 This is a partial top-view enlarged structural diagram of the grinding pad marking port processing device provided in the embodiments of this utility model;

[0023] Figure 7 This is a three-dimensional exploded view of the cutting platform provided in the embodiment of this utility model.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Cutting platform; 2. Cutting disc; 3. Tool holder; 4. Lifting seat; 5. Mounting seat; 6. Cutting tool; 7. Positioning component; 8. Square positioning block; 9. Columnar positioning block; 10. Second positioning hole; 11. Third positioning hole; 12. Notch; 13. Gasket; 14. Support foot; 15. Bearing seat; 16. Frame; 17. Adjusting nut; 18. Threaded rod; 19. Screw; 20. Pressing rod; 21. First rod; 22. Second rod; 23. Abutment component; 24. Fixing component. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0027] like Figures 1 to 7 One specific embodiment of the grinding pad marking port processing device shown includes: a cutting platform 1 and a tool holder 3.

[0028] like Figure 1 , Figure 3 and Figure 4 As shown, the top surface of the cutting platform 1 is provided with a cutting disk 2, and at least one positioning block is provided on the cutting disk 2; furthermore, the height of the positioning block is higher than the top surface of the cutting disk 2, and the positioning block can better achieve the positioning of the grinding pad; the cutting tool 6 can be aligned with the edge of the cutting disk 2. Of course, it is more convenient that the top surface size of the cutting disk 2 is the same as the size of the grinding pad; the top surface of the cutting disk 2 is suitable for aligning and placing the grinding pad, and the positioning block cooperates with the first positioning hole provided on the grinding pad, that is, the positioning block is inserted into the first positioning hole of the grinding pad to limit the grinding pad.

[0029] Specifically, the grinding pad is circular, the cutting disc 2 is also circular, and the cutting platform 1 is square with a size larger than the cutting disc 2. The tool holder 3 is provided with a lifting seat 4 and a mounting seat 5, with the mounting seat 5 located at the bottom of the lifting seat 4; a cutting tool 6 and a positioning element 7 are provided on the mounting seat 5; the positioning element 7 is used to ensure the accuracy of the current cutting and avoid excessive cutting of the grinding pad, and the projection of the positioning element 7 on the plane of the cutting disc 2 is tangent to the outer edge of the grinding pad; the tool holder 3 is adapted to cut the edge of the grinding pad with the cutting tool 6 when the lifting seat 4 drives the mounting seat 5 to descend, forming a notch, which serves as a marking opening.

[0030] like Figure 6 As shown, the positioning element 7 can be two symmetrically arranged on both sides of the marking opening. The cutting disc 2 can be made of aluminum plate or stainless steel. The aluminum plate can be made of 6061 aluminum alloy, and the stainless steel can be 304 stainless steel, model SUS304. Using the above materials to make the cutting disc 2 is corrosion resistant, not easy to rust, and has a smooth surface, which will not cause wear to the product and can maintain a long service life even in high humidity environments.

[0031] Specifically, such as Figure 5 and Figure 7 As shown, the first positioning hole is a square hole and / or a circular hole; the positioning block is a square positioning block 8 and / or a cylindrical positioning block 9 that are adapted to the first positioning hole. Correspondingly, the square hole matches the square positioning block 8, and the circular hole matches the cylindrical positioning block 9.

[0032] like Figure 7 As shown, the square positioning block 8 is disposed within the second positioning hole 10 on the top surface of the cutting disc 2; and / or the cylindrical positioning block 9 is disposed within the third positioning hole 11 on the top surface of the cutting disc 2. The fastener can be a screw 19, which allows for easy disassembly of the square positioning block 8, while the cylindrical positioning block 9 can be directly placed in the hole. Alternatively, the square positioning block can also be directly placed in the corresponding hole, but since the square positioning block is relatively large, it is prone to movement during the cutting process. Therefore, a better solution is to use a fastener for locking.

[0033] More specifically, the number of square positioning blocks 8 is at least two; the number of cylindrical positioning blocks 9 is at least three; the square positioning blocks 8 and the marking opening are located on the same straight line; the cylindrical positioning blocks 9 are located on the same circumference. For example... Figure 5 and Figure 7 As shown, there are two square positioning blocks 8 and three cylindrical positioning blocks 9. The two square positioning blocks 8 are on the same straight line as the marking opening, and the three cylindrical positioning blocks 9 are on the same circumference. The angle between the lines connecting adjacent cylindrical positioning blocks 9 and the center of the same circumference is 120°.

[0034] In actual production, a square or cylindrical positioning block can be used to accurately position the grinding pad to be processed. However, using a single positioning block can easily cause the grinding pad to move, resulting in inaccurate cutting. Using multiple positioning blocks can effectively avoid this problem.

[0035] Meanwhile, the positioning of a grinding pad usually uses only one type of positioning block. For example, when using a grinding pad of type A, a square positioning block is used for positioning, while when using a grinding pad of type B, a cylindrical positioning block is used for positioning. Therefore, by setting a detachable positioning block, it is convenient to switch the positioning block during actual work. When it is necessary to remove the cylindrical positioning block, it can be directly removed from the cutting disc 2. When it is necessary to remove the square positioning block, it can be achieved by loosening the fastener and then removing the cutting disc.

[0036] Furthermore, such as Figure 6 and Figure 7As shown, a notch 12 is provided on the cutting disc 2 at the position corresponding to the marked opening on the grinding pad. A gasket 13 is detachably installed on the notch 12. The gasket 13 can actually be regarded as a consumable. In the actual cutting process, after the cutting tool 6 cuts the grinding pad, the cutting tool 6 will directly abut against the cutting disc 2. After repeated contact between two objects with high hardness, they are prone to damage to each other. In order to avoid this problem, this application uses a gasket 13 to replace the direct contact between the two hard objects. The gasket 13 is made of soft material, such as plastic, and can be directly replaced after multiple uses. When the cutting tool 6 cuts the grinding pad and presses down, the gasket 13 can directly contact the cutting tool 6, thereby improving the life of the entire device.

[0037] Specifically, such as Figure 6 and Figure 7 As shown, the gasket 13 is inserted and fixed in the notch 12; or, the gasket 13 is fixed in the notch 12 by a fastener. The fastener is a screw.

[0038] Furthermore, the cutting platform 1 and the cutting disc 2 are manufactured as a single unit. The cutting disc 2 can be ground onto the square cutting platform 1.

[0039] Furthermore, such as Figure 1 , Figure 2 and Figure 4 As shown, height-adjustable support feet 14 are provided around the bottom of the cutting platform 1. In actual operation, it is necessary to ensure that the cutting platform is horizontally balanced. The support feet can be used to adjust the overall balance.

[0040] Furthermore, such as Figure 2 As shown, the tool holder 3 is also provided with a support base 15 and a frame 16; one side of the frame 16 is connected to the lifting seat 4, and the other side is connected to the support base 15; the support base 15 is located below the mounting base 5, and the top surface of the support base 15 abuts against the bottom surface of the cutting platform 1. The frame 16 can also be supported by support legs 14.

[0041] like Figure 2As shown, the lifting seat 4 can be moved up and down by pressing the mechanism; the lifting seat 4 is slidably connected to the frame 16. The pressing mechanism includes: a pressing rod 20, a first rod 21, and a second rod 22. The lower end of the pressing rod 20 is hinged to the frame 16, and the position of the pressing rod 20 near its lower end is hinged to the lower end of the first rod 21. The upper end of the first rod 21 is hinged to the outer end of the second rod 22, the inner end of the second rod 22 is hinged to the top of the frame 16, and the two ends of the second rod 22 are connected to the top of the lifting seat 4. By pressing the pressing rod 20, the first rod 21 is lowered, which in turn causes the second rod 22 to rotate around its inner end, ultimately causing the lifting seat 4 to lower.

[0042] Specifically, such as Figure 2 As shown, the support base 15 includes an abutment member 23 and a fixing member 24 arranged vertically. The abutment member 23 is placed directly on the fixing member 24. The bottom of the fixing member 24 is provided with a height adjustment mechanism, which includes a threaded rod 18 and an adjusting nut 17. A tightening end is provided at the bottom of the threaded rod 18. The threaded rod 18 abuts against the abutment member 23 through a threaded hole on the fixing member 24. The adjusting nut 17 is installed on the threaded rod 18 and abuts against the bottom of the fixing member 24. The height of the abutment member 23 can be adjusted by the height adjustment mechanism, so that the abutment member 23 can contact and abut against the bottom surface of the cutting platform 1, thereby better ensuring that the entire cutting platform 1 is supported.

[0043] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A device for processing markings on a grinding pad, characterized in that, include: The top surface of the cutting platform (1) is provided with a cutting disk (2), and at least one positioning block is provided on the cutting disk (2). The top surface of the cutting disk (2) is suitable for placing a grinding pad, and the positioning block cooperates with the first positioning hole provided on the grinding pad to limit the grinding pad. The tool holder (3) is provided with a lifting seat (4) and a mounting seat (5). The mounting seat (5) is located at the bottom of the lifting seat (4). A cutting tool (6) and a positioning element (7) are provided on the mounting seat (5). The projection of the positioning element (7) on the plane of the cutting disc (2) is tangent to the outer edge of the grinding pad. The tool holder (3) is adapted to cut the edge of the grinding pad and form a marking hole when the lifting seat (4) drives the mounting seat (5) to descend.

2. The grinding pad marking device according to claim 1, characterized in that, The height of the positioning block is higher than the top surface of the cutting disc (2), and the first positioning hole is a square hole and / or a round hole; the positioning block is a square positioning block (8) and / or a cylindrical positioning block (9) adapted to the first positioning hole.

3. The grinding pad marking device according to claim 2, characterized in that, The square positioning block (8) is disposed in the second positioning hole (10) provided on the top surface of the cutting disc (2); and / or the cylindrical positioning block (9) is disposed in the third positioning hole (11) provided on the top surface of the cutting disc (2).

4. The grinding pad marking device according to claim 2, characterized in that, The number of the square positioning blocks (8) is at least two; the number of the cylindrical positioning blocks (9) is at least three; the square positioning blocks (8) and the marking opening are located on the same straight line; the cylindrical positioning blocks (9) are located on the same circumference.

5. The grinding pad marking device according to any one of claims 1-4, characterized in that, A notch (12) is provided on the cutting disc (2) at the position corresponding to the marked opening on the grinding pad, and a gasket (13) is detachably installed on the notch (12).

6. The grinding pad marking device according to claim 5, characterized in that, The gasket (13) is inserted and fixed in the notch (12); or the gasket (13) is fixed in the notch (12) by fasteners.

7. The grinding pad marking device according to any one of claims 1-4, characterized in that, The tool holder (3) is also provided with a support seat (15) and a frame (16); one side of the frame (16) is connected to the lifting seat (4), and the other side is connected to the support seat (15); the support seat (15) is located below the mounting seat (5), and the top surface of the support seat (15) abuts against the bottom surface of the cutting platform (1).

8. The grinding pad marking device according to claim 7, characterized in that, The support base (15) includes an abutment (23) and a fixing member (24) arranged vertically. The bottom of the fixing member (24) is provided with a height adjustment mechanism, which includes a threaded rod (18) and an adjusting nut (17). The threaded rod (18) abuts against the abutment (23) through a threaded hole on the fixing member (24). The adjusting nut (17) is installed on the threaded rod (18) and abuts against the bottom surface of the fixing member (24).

9. The grinding pad marking device according to any one of claims 1-4, characterized in that, Height-adjustable support feet (14) are provided around the bottom of the cutting platform (1).

10. The grinding pad marking device according to any one of claims 1-4, characterized in that, The cutting platform (1) and the cutting disc (2) are manufactured as a single unit.

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