A coated mask plate and a coating apparatus

Abstract

The utility model relates to vacuum coating equipment technical field discloses a kind of coating mask plate and coating equipment. Coating mask plate includes lower plate, adjusting part and upper plate. Wherein, lower plate is equipped with limit slot, one side of lower plate is curve, limit slot is adjacent to the curve side of lower plate. Adjusting part is at least partially clamped in limit slot, and adjusting part can move relative to limit slot. Upper plate cover is arranged on adjusting part, and is fixedly connected with lower plate, and upper plate and lower plate are located at the two sides of adjusting part respectively. The coating mask plate and coating equipment provided by the utility model can adjust the position of adjusting part in limit slot according to the distribution of sputtering particles on the substrate during coating process, thereby adjusting the shape profile of coating mask plate. It is not necessary to make a new coating mask plate, thereby improving the efficiency of making coating mask plate, and can also save the resources of making coating mask plate.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a coating mask plate and coating equipment. Background Technology

[0002] In vacuum deposition, film uniformity is a crucial performance indicator. When using magnetron sputtering to deposit film on a substrate, a mask is required between the magnetron target and the substrate. The mask is used to shield areas with a high concentration of sputtered particles, thereby allowing for adjustment of the particle distribution on the substrate. In existing designs, the mask is a single, integrated structure. When the designed mask fails to achieve satisfactory film uniformity or effectively correct sputtered areas, a new mask design is necessary, rendering the existing one unusable. This results in low mask production efficiency and wasted resources.

[0003] Therefore, there is an urgent need for a coated mask plate to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this invention is to propose a coating mask that can solve the problem that when the mask is an integral structure, and the designed mask does not perform well in terms of coating uniformity or sputtering area correction, the mask needs to be redesigned, and the original mask can no longer be used, resulting in low production efficiency and waste of resources.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A coated mask plate, comprising,

[0007] The lower plate is provided with a limiting groove;

[0008] An adjusting member is at least partially engaged within the limiting groove, and the adjusting member is movable relative to the limiting groove;

[0009] An upper plate is placed on the adjusting member and fixedly connected to the lower plate. The upper plate and the lower plate are located on opposite sides of the adjusting member, respectively.

[0010] One side of the lower plate is curved, and the limiting groove is adjacent to the curved side of the lower plate.

[0011] As an optional solution, the bottom of the limiting groove is provided with a first fixing hole that penetrates the lower plate, and the first fixing hole is used to fix the adjusting member.

[0012] As an optional solution, the adjusting member includes a blocking part and a snap-fit ​​part. The cross-sectional area of ​​the blocking part along the width direction is larger than the cross-sectional area of ​​the snap-fit ​​part along the width direction. The blocking part is used to block substances during the coating process. The shape of the snap-fit ​​part matches the shape of the limiting groove, and the snap-fit ​​part can snap into the limiting groove.

[0013] As an optional solution, the lower plate is provided with multiple limiting grooves, and the number of the adjusting members corresponds to the number of the limiting grooves. When the adjusting members are located on the lower plate, there is no gap between adjacent blocking parts.

[0014] As an alternative, the three adjacent first fixing holes are not on the same straight line.

[0015] As an alternative, the lower plate includes a fixing part and a mounting part connected to the fixing part. The limiting groove is disposed on the fixing part. At least one side of the fixing part is curved. The limiting groove is adjacent to the curved side of the fixing part and is far away from the mounting part. The shape of the upper plate matches the shape of the fixing part. The fixing part is used to fix the upper plate.

[0016] As an alternative, the thickness of the mounting portion is equal to the sum of the thickness of the fixing portion and the thickness of the upper plate.

[0017] As an optional solution, the fixing part is provided with a second fixing hole, and the upper plate is provided with a third fixing hole at a corresponding position. The upper plate is fixed to the lower plate by bolts, the second fixing hole and the third fixing hole.

[0018] As an alternative, the mounting part is provided with mounting holes for mounting the coating mask onto other equipment.

[0019] This application also provides a coating apparatus, including two coating mask plates, which are symmetrically arranged in the coating apparatus and the curved sides of the two coating mask plates are opposite each other.

[0020] The present invention has at least the following beneficial effects: the coating mask and coating equipment of this application can adjust the position of the adjustment component in the limiting groove according to the distribution of sputtered particles on the substrate during the coating process, thereby adjusting the outline of the coating mask. There is no need to remake a new coating mask, which improves the efficiency of coating mask production and saves the resources for coating mask production. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments of this utility model will be briefly introduced below.

[0022] Figure 1 A schematic diagram of the structure of a coating mask provided in an embodiment of this utility model;

[0023] Figure 2 A schematic diagram of the structure of a coating mask plate (with the top plate removed) provided for an embodiment of this utility model;

[0024] Figure 3 This is a schematic diagram of the structure of the lower plate provided in an embodiment of the present utility model;

[0025] Figure 4 for Figure 3 A magnified view of a section at point A in the middle;

[0026] Figure 5 A schematic diagram of the structure of the adjustment component provided in an embodiment of this utility model;

[0027] Figure 6 This is a schematic diagram of a coating mask plate installed on a coating equipment, as provided in an embodiment of the present invention.

[0028] Figure label:

[0029] 1. Lower plate; 11. Fixing part; 111. Limiting groove; 1111. First fixing hole; 112. Second fixing hole; 12. Mounting part; 121. Mounting hole; 2. Adjusting part; 21. Covering part; 22. Snap-fit ​​part; 3. Upper plate; 31. Third fixing hole. Detailed Implementation

[0030] In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0031] In the prior art, the mask plate is used to adjust the distribution of sputtered particles on the substrate. The mask plate is an integral structure. When the designed mask plate is not good at improving the uniformity of the coating or the trimming function of the sputtered area, the mask plate needs to be redesigned, and the original mask plate can no longer be used. This results in low production efficiency of the mask plate and waste of resources.

[0032] Therefore, such as Figures 1 to 5 As shown, an embodiment of this utility model provides a coating mask to solve the above-mentioned technical problems.

[0033] Specifically, a coating mask includes a lower plate 1, an adjusting member 2, and an upper plate 3. One side of the lower plate 1 is curved, and the lower plate 1 is provided with a limiting groove 111 adjacent to the curved side of the lower plate 1. The adjusting member 2 is at least partially engaged in the limiting groove 111 and can move relative to the limiting groove 111. The upper plate 3 covers the adjusting member 2 and is fixedly connected to the lower plate 1. The upper plate 3 and the lower plate 1 are located on opposite sides of the adjusting member 2. When the shape of the coating mask needs to be adjusted according to the distribution of sputtered particles on the substrate, the position of the adjusting member 2 in the limiting groove 111 can be adjusted to complete the adjustment. There is no need to remake a new coating mask, thereby improving the efficiency of coating mask production and saving resources.

[0034] In some embodiments, such as Figure 4 As shown, in order to stably fix the adjustment component 2 between the upper plate 3 and the lower plate 1, the bottom of the limiting groove 111 is provided with a first fixing hole 1111 that penetrates the lower plate 1. When fixing the adjustment component 2, a bolt can be used to pass through the first fixing hole 1111 to abut the adjustment component 2, thereby clamping the adjustment component 2 between the upper plate 3 and the lower plate 1.

[0035] In some embodiments, such as Figure 5 As shown, in order to facilitate the adjustment part 2 to be snapped into the limiting groove 111, the adjustment part 2 includes a blocking part 21 and a snapping part 22. The snapping part 22 protrudes from the blocking part 21. The cross-sectional area of ​​the blocking part 21 along the width direction is larger than the cross-sectional area of ​​the snapping part 22 along the width direction. The blocking part 21 is used to block the material in the coating process. The shape of the snapping part 22 matches the shape of the limiting groove 111. The snapping part 22 can be snapped into the limiting groove 111. When the position of the adjustment part 2 needs to be adjusted, only the relative position of the snapping part 22 in the limiting groove 111 needs to be adjusted.

[0036] In some embodiments, such as Figure 2 , Figure 3 As shown, in order to flexibly adjust the local shape contour of the coating mask, this application includes multiple adjustment parts 2. The lower plate 1 is provided with multiple limiting grooves 111. Each limiting groove 111 is provided with a first fixing hole 1111. The number of adjustment parts 2 corresponds to the number of limiting grooves 111. When the adjustment parts 2 are fixedly installed on the lower plate 1, there is no gap between adjacent shielding parts 21. In this way, the position of the corresponding adjustment parts 2 can be adjusted according to the specific situation of the coating on the substrate, so as to make the film layer of the substrate more uniform.

[0037] In some embodiments, such as Figure 3 , Figure 4As shown, multiple adjusting parts 2 are tightly installed on the lower plate 1. The width of the limiting groove 111 is small. In order to prevent two adjacent first fixing holes 1111 from communicating, the three adjacent first fixing holes 1111 are not on the same straight line.

[0038] In some embodiments, such as Figure 2 As shown, the lower plate 1 includes a fixing part 11 and a mounting part 12 connected to the fixing part 11. A limiting groove 111 is provided on the fixing part 11. At least one side of the fixing part 11 is curved. The limiting groove 111 is adjacent to the curved side of the fixing part 11 and is far away from the mounting part 12. The shape of the upper plate 3 matches the shape of the fixing part 11. The fixing part 11 is used to fix the upper plate 3.

[0039] In some embodiments, in order to make the overall shape of the coating mask of this application aesthetically pleasing, the thickness of the mounting part 12 is equal to the sum of the thickness of the fixing part 11 and the thickness of the upper plate 3.

[0040] In some embodiments, in order to facilitate the fixed installation of the upper plate 3 on the lower plate 1, the fixing part 11 is provided with a second fixing hole 112, and the upper plate 3 is provided with a third fixing hole 31 at a corresponding position. The upper plate 3 is fixed to the lower plate 1 by bolts, the second fixing hole 112 and the third fixing hole 31.

[0041] In some embodiments, in order to facilitate the installation of the coating mask of this application on other equipment, the mounting part 12 is provided with mounting holes 121, and the coating mask is fixed to the other equipment by bolts passing through the mounting holes 121 during installation.

[0042] This application also provides a coating apparatus, including two coating mask plates, such as... Figure 6 As shown, two coating mask plates are symmetrically arranged in the coating equipment (not shown in the figure), and the curved sides of the two coating mask plates are opposite each other. The coating equipment of this application can adjust the position of the adjusting member 2 in the limiting groove 111 when the outer contour of the coating mask plate needs to be adjusted according to the distribution of sputtered particles on the substrate. There is no need to remake a new coating mask plate, thereby improving the efficiency of coating mask plate production and saving the resources for coating mask plate production.

[0043] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A coated mask plate, characterized in that, include, The lower plate (1) is provided with a limiting groove (111); The adjusting member (2) is at least partially engaged in the limiting groove (111), and the adjusting member (2) is movable relative to the limiting groove (111); The upper plate (3) is covered on the adjusting member (2) and fixedly connected to the lower plate (1). The upper plate (3) and the lower plate (1) are located on both sides of the adjusting member (2). One side of the lower plate (1) is curved, and the limiting groove (111) is adjacent to the curved side of the lower plate (1).

2. The coated mask plate according to claim 1, characterized in that, The bottom of the limiting groove (111) is provided with a first fixing hole (1111) that penetrates the lower plate (1), and the first fixing hole (1111) is used to fix the adjusting member (2).

3. A coated mask plate according to claim 2, characterized in that, The adjustment member (2) includes a blocking part (21) and a snap-fit ​​part (22). The cross-sectional area of ​​the blocking part (21) along the width direction is greater than that of the snap-fit ​​part (22) along the width direction. The blocking part (21) is used to block substances in the coating process. The shape of the snap-fit ​​part (22) matches the shape of the limiting groove (111). The snap-fit ​​part (22) can snap into the limiting groove (111).

4. A coated masking plate according to claim 3, characterized in that, The lower plate (1) includes multiple adjustment components (2), and the number of adjustment components (2) corresponds to the number of the limiting grooves (111). When the adjustment component (2) is located on the lower plate (1), there is no gap between adjacent blocking parts (21).

5. A coated masking plate according to claim 4, characterized in that, The three adjacent first fixing holes (1111) are not on the same straight line.

6. A coated masking plate according to any one of claims 1-5, characterized in that, The lower plate (1) includes a fixing part (11) and a mounting part (12) connected to the fixing part (11). The limiting groove (111) is disposed on the fixing part (11). At least one side of the fixing part (11) is curved. The limiting groove (111) is adjacent to the curved side of the fixing part (11) and the limiting groove (111) is far away from the mounting part (12). The shape of the upper plate (3) matches the shape of the fixing part (11). The fixing part (11) is used to fix the upper plate (3).

7. A coated masking plate according to claim 6, characterized in that, The thickness of the mounting part (12) is equal to the sum of the thickness of the fixing part (11) and the thickness of the upper plate (3).

8. A coated masking plate according to claim 6, characterized in that, The fixing part (11) is provided with a second fixing hole (112), and the upper plate (3) is provided with a third fixing hole (31) at the corresponding position. The upper plate (3) is fixed to the lower plate (1) by bolts, the second fixing hole (112) and the third fixing hole (31).

9. A coated mask plate according to claim 8, characterized in that, The mounting part (12) is provided with mounting holes (121), which are used to mount the coating mask plate on other equipment.

10. A coating apparatus, characterized in that, The invention includes two coating mask plates as described in any one of claims 1-9, wherein the two coating mask plates are symmetrically arranged in the coating equipment and the curved sides of the two coating mask plates are opposite each other.

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