Tail gas treatment device for a vapor deposition furnace

Abstract

The utility model discloses a tail gas treatment device for vapor deposition furnace, including with the tail gas treatment device body of vapor deposition furnace exhaust end cooperation, the tail gas treatment device body includes condensing mechanism, oil storage tank, bents vent pipe and neutralization mechanism, and bents vent pipe installs in condensing mechanism. The utility model discloses a series of structure's setting can carry out filtration, liquefaction, neutralization and adsorption treatment to tail gas in proper order, through adsorption, can adsorb trace contaminant in tail gas, reaches the effect of further tail gas treatment, through the mode of prefiltering again liquefaction and neutralization, can reduce the risk of bents vent pipe blockage and the frequency of liquid replacement in neutralization mechanism, in addition through the mode of setting two groups of filter screen, when cleaning, only need to switch the air inlet direction and continue to filter, do not need to stop cleaning, thereby can effectively reduce the downtime, improve tail gas treatment efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition furnace technology, and in particular to a tail gas treatment device for a vapor deposition furnace. Background Technology

[0002] In recent years, SiC (silicon carbide) has attracted great interest in the semiconductor electronics industry. It is a promising candidate material for semiconductor devices used in extreme conditions, such as high-temperature and radiation environments, high-power applications, and high heat dissipation. Advanced chemical vapor deposition (CVD) technology has overcome the drawbacks of traditional silicon carbide manufacturing, including high cost, low throughput, small grain size, and numerous impurities. However, the exhaust gas treatment process from CVD furnaces is complex, requiring neutralization and furnace ash filtration. This results in low exhaust gas treatment efficiency, further impacting production efficiency. Existing designs have addressed these shortcomings by improving exhaust gas treatment, such as document CN115738572A, which discloses an exhaust gas treatment method for CVD furnaces. The device includes a deposition furnace body, with a condensation mechanism connected to one side of the furnace body. The condensation mechanism includes an extraction pipe, one end of which extends into the bottom of the furnace body, and a gas transfer pump fixedly connected to the other end. A bent vent pipe is fixedly connected to one side of the gas transfer pump. The bent vent pipe consists of multiple bends and has an anti-fouling nano-coating on its inner wall. A vent pipe is fixedly connected to one inner wall of the bent vent pipe, and a condenser cabinet covers its outer wall. A main control box is connected to the bottom outer wall of the condenser cabinet, and a condenser is installed on one inner wall of the condenser cabinet. A connecting pipe is welded to the bottom inner wall of the vent pipe. This device enables the exhaust gas to be filtered during its flow, thereby improving the exhaust gas treatment efficiency.

[0003] The aforementioned patent discloses a tail gas treatment device for a chemical vapor deposition furnace. When the tail gas from the furnace body is drawn into a bent ventilation pipe, it uniformly receives sodium hydroxide liquid and reacts with it. Simultaneously, the bent ventilation pipe, located in a condenser cabinet, is liquefied by the condenser during transport, liquefying the tar in the tail gas. Furthermore, due to the anti-fouling nano-coating installed inside the bent channel, the liquefied tar does not adhere to the inner wall of the bent ventilation pipe as it flows. As it passes through the ventilation pipe, the liquefied tar flows into an oil storage tank, and the remaining gas enters a filtration mechanism. Simultaneously, the neutralization mechanism neutralizes the acidity in the tail gas, and the filtration mechanism filters out the remaining tar. The process of filtering particulate matter in exhaust gas during its flow is characterized by the following shortcomings: 1. The method of filtering particulate matter in exhaust gas by liquefying and neutralizing it through cooling can lead to particulate matter adhering to the inner wall of the bend in the ventilation pipe during the liquefaction process, causing blockage. Furthermore, the entry of particulate matter into the neutralization mechanism increases the frequency of liquid replacement within the mechanism. 2. After a period of filtration, personnel are required to stop the machine and clean the filter screen. This requires a long downtime, which affects the efficiency of exhaust gas treatment. In light of the above, this application proposes an exhaust gas treatment device for a vapor deposition furnace. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a tail gas treatment device for a vapor deposition furnace.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A tail gas treatment device for a vapor deposition furnace includes a tail gas treatment device body that cooperates with the exhaust end of the vapor deposition furnace. The tail gas treatment device body includes a condensation mechanism, an oil storage tank, a bent vent pipe, and a neutralization mechanism. The bent vent pipe is installed in the condensation mechanism, and an exhaust and oil discharge assembly is fixedly connected to the bottom end of the bent vent pipe. The exhaust and oil discharge assembly is connected to the oil storage tank and the neutralization mechanism. The condensation mechanism is used to liquefy the tail gas in the bent vent pipe, the oil storage tank is used to collect the liquefied liquid, and the neutralization mechanism is used to neutralize the tail gas. The specific principle has been mentioned in the patent with publication number CN115738572A, and will not be elaborated here.

[0007] Also includes:

[0008] The adsorption filtration mechanism is connected and fixed to the right side of the neutralization mechanism. The adsorption filtration mechanism is used to adsorb trace pollutants in the exhaust gas.

[0009] An exchangeable filter mechanism is fixedly installed on the left side of the condenser mechanism and connected to the top of the bent vent pipe. The exchangeable filter mechanism is used to filter particulate matter in the exhaust gas.

[0010] The exhaust mechanism, installed at the bottom of the exchangeable filter mechanism and connected to its interior, is used to draw in the exhaust gas from the exhaust end of the vapor deposition furnace and discharge it into the exchangeable filter mechanism.

[0011] Preferably, the adsorption filtration mechanism includes a filter box fixedly connected to the top right side of the neutralization mechanism. The left side of the filter box is connected to the top right side of the neutralization mechanism and is fixedly connected to the same vent pipe. Three activated carbon filters are movably sleeved inside the filter box. The filter holes of the three activated carbon filters decrease in size from right to left. The right side of the filter box is set as an opening and a U-shaped frame is threadedly fixed thereon. A connecting rod is fixedly connected between the front inner wall and the rear inner wall of the U-shaped frame. The connecting rod is fixedly connected to the right side of the leftmost activated carbon filter. The other two activated carbon filters are fixedly sleeved on the connecting rod. The activated carbon filters are used to adsorb and purify trace pollutants in the exhaust gas.

[0012] Preferably, the exchangeable filter mechanism includes a mounting box fixedly installed on the top left side of the condensation mechanism. The top of the mounting box is open and fixedly connected to a box cover. A mounting base located inside the mounting box is fixedly installed at the bottom of the box cover. Filter grooves are opened on both sides of the mounting base. A detachable filter assembly is movably fitted inside the filter groove. The detachable filter assembly is used to filter particulate matter in the exhaust gas. The bottom of the detachable filter assembly extends to the bottom of the mounting box. A groove is opened at the bottom of the mounting base between the two filter grooves. A switchable ventilation assembly is installed in the groove. The switchable ventilation assembly is connected to the two filter grooves and is used to switch the ventilation direction. A connecting assembly is fixedly connected to the top of the bent ventilation pipe. The bottom of the connecting assembly is connected to the two filter grooves. The connection between the filter grooves and the bent ventilation pipe is realized through the connecting assembly. A PLC controller is fixedly connected to the left side of the mounting box. The PLC controller is electrically connected to the switchable ventilation assembly and the connecting assembly. The PLC controller is electrically connected to two alarm lights. The PLC controller controls the opening and closing of the alarm lights. The two alarm lights are fixedly connected to the corresponding detachable filter assemblies.

[0013] Preferably, the air extraction mechanism includes an air pump fixedly connected to the bottom of the mounting box. The exhaust end of the air pump extends into the groove and is connected and fixedly connected to the detachable filter assembly. The bottom of the air pump is the extraction end and is connected and fixedly connected to an L-shaped air extraction pipe. The L-shaped air extraction pipe cooperates with the exhaust end of the vapor deposition furnace, and the exhaust gas of the vapor deposition furnace is extracted through the air pump and the L-shaped air extraction pipe.

[0014] Preferably, the detachable filter assembly includes two filter screens movably fitted inside the filter groove. The filter screens are used to filter particulate matter in the exhaust gas. The mesh size of the two middle filter screens is larger than that of the two side filter screens. Two removal holes are provided on the bottom inner wall of the mounting box, through which the filter screens can be removed. A connecting seat is movably fitted inside the removal hole. The top of the connecting seat is fixedly connected to the bottom of the corresponding two filter screens. Connecting plates are magnetically fixed on both sides of the bottom of the mounting box. The connecting plates are fixedly connected to the bottom of the corresponding connecting seats. Two alarm lights are fixedly connected to the two connecting plates on the sides away from each other.

[0015] Preferably, the switchable ventilation assembly includes two conical hoods, which are respectively embedded and fixed on the inner wall of the two filter tanks on their adjacent sides. A first solenoid valve is fixedly connected to the adjacent side of each of the two conical hoods. A three-way pipe located in the groove is fixedly connected to the adjacent side of the two first solenoid valves. The bottom end of the three-way pipe is fixedly connected to the exhaust end of the air pump. Both first solenoid valves are electrically connected to the PLC controller. The air intake direction can be switched by setting the two first solenoid valves.

[0016] Preferably, the connecting component includes a connecting pipe fixed to the top of the bent vent pipe, the left end of the connecting pipe is provided with a sealing structure, and two second solenoid valves are fixed to the bottom of the connecting pipe. The bottom end of the second solenoid valve is fixed to the top of the corresponding filter tank. Both second solenoid valves are electrically connected to the PLC controller, and the PLC controller is used to control the two second solenoid valves.

[0017] Compared with existing technologies, the beneficial effects of this utility model are:

[0018] 1. The adsorption filtration mechanism is used to adsorb trace pollutants in the filtered, liquefied and neutralized exhaust gas. Through adsorption, the exhaust gas is further treated, thereby improving the exhaust gas treatment effect.

[0019] 2. By setting up an exchangeable filter mechanism, the exhaust gas is pre-filtered before liquefaction, which can effectively reduce the adhering of impurities to the inner wall of the bend vent pipe and the entry into the neutralization mechanism. This reduces the risk of blockage in the bend vent pipe and the frequency of liquid replacement in the neutralization mechanism. When it is necessary to clean the filter screen on the left, it is only necessary to switch the air intake direction to filter through the filter screen on the right, so that it is not necessary to stop the machine for cleaning, thus effectively reducing the downtime.

[0020] This invention, through a series of structural designs, can sequentially filter, liquefy, neutralize, and adsorb exhaust gas. Adsorption removes trace pollutants from the exhaust gas, achieving further treatment. By pre-filtering before liquefying and neutralizing, the risk of blockage in the bend ventilation pipe and the frequency of liquid replacement in the neutralization mechanism can be reduced. In addition, by setting two sets of filter screens, cleaning only requires switching the air intake direction to continue filtering, without stopping the machine for cleaning, thus effectively reducing downtime and improving exhaust gas treatment efficiency. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a tail gas treatment device for a vapor deposition furnace proposed in this utility model;

[0022] Figure 2 for Figure 1 A schematic diagram of the right-side view structure;

[0023] Figure 3 This is a schematic diagram of the main cross-sectional structure of a tail gas treatment device for a vapor deposition furnace proposed in this utility model;

[0024] Figure 4 for Figure 3 A magnified structural diagram of part A in the middle;

[0025] Figure 5 for Figure 3 A magnified structural diagram of part B.

[0026] In the diagram: 1. Condensation mechanism; 2. Oil storage tank; 3. Neutralization mechanism; 4. Adsorption filtration mechanism; 401. Filter box; 402. Activated carbon filter screen; 403. U-shaped frame; 404. Connecting rod; 5. Bent vent pipe; 6. Exchangeable filtration mechanism; 601. Connecting pipe; 602. Mounting box; 603. PLC controller; 604. Mounting base; 605. Filter tank; 606. Filter screen; 607. Second solenoid valve; 608. Conical cover; 609. Groove; 610. First solenoid valve; 611. T-shaped pipe; 612. Connecting plate; 613. Alarm light; 614. Connecting base; 7. Air pump; 701. L-shaped suction pipe. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0028] Reference Figure 1-3A tail gas treatment device for a vapor deposition furnace includes a tail gas treatment device body that cooperates with the exhaust end of the vapor deposition furnace. The tail gas treatment device body includes a condensation mechanism 1, an oil storage tank 2, a bent vent pipe 5, and a neutralization mechanism 3. The bent vent pipe 5 is installed inside the condensation mechanism 1. The bottom end of the bent vent pipe 5 is connected to and fixed with an exhaust and oil discharge assembly. The exhaust and oil discharge assembly is connected to the oil storage tank 2 and the neutralization mechanism 3. The condensation mechanism 1 is used to liquefy the tail gas in the bent vent pipe 5. The oil storage tank 2 is used to collect the liquefied liquid. The neutralization mechanism 3 is used to neutralize the tail gas. The specific principle has been mentioned in the patent with publication number CN115738572A, and will not be elaborated here.

[0029] In this implementation plan: The existing device {Publication (Announcement) No.}: CN115738572A discloses a tail gas treatment device for a chemical vapor deposition furnace. The condensation mechanism 1, oil storage tank 2, bent vent pipe 5, and neutralization mechanism 3 in this application document adopt the same technical means as in this prior art. These technical means will not be described in detail here. Regarding the main body of this existing device, this application makes further improvements. For details, please refer to the disclosed technology below. To solve the technical problems existing in this prior art, such as the "1. It filters particulate matter in the tail gas by cooling, liquefying, and neutralizing it" disclosed in the background technology above. During the cooling and liquefaction process, particulate matter adheres to the inner wall of the bend vent pipe, causing blockage. Furthermore, when particulate matter in the exhaust gas enters the neutralization mechanism, it increases the frequency of liquid replacement within the mechanism. Secondly, after a period of filtration, personnel need to stop the machine to clean the filter screen. This shutdown cleaning method requires a long waiting time, thus affecting the exhaust gas treatment efficiency. In terms of practical application, this problem is clearly a real and difficult-to-solve issue. Therefore, to address this technical problem, an exchangeable filtration mechanism 6 and an adsorption filtration mechanism 4 have been added to this application.

[0030] It should be noted that the accessories used in the condensation mechanism 1, oil storage tank 2, bent vent pipe 5, and neutralization mechanism 3 have been disclosed in publication number CN115738572A, and their performance can be referred to publication number CN115738572A (i.e., the prior art disclosed in this prior art consists of "vent pipe, condenser cabinet, bent vent pipe, condenser, slot, gas transfer pump, air extraction pipe, main control box, oil storage tank, connecting pipe, liquid storage tank, liquid injection port, depth detector, liquid extraction pump, liquid extraction pipe, arc pipe, atomizing nozzle, transition chamber, filter screen, hose, and inverted conical groove component").

[0031] Furthermore:

[0032] Reference Figure 1-5 A tail gas treatment device for a vapor deposition furnace further includes:

[0033] The adsorption filtration mechanism 4 is connected and fixed to the right side of the neutralization mechanism 3. The adsorption filtration mechanism 4 is used to adsorb trace pollutants in the exhaust gas.

[0034] The adsorption filtration mechanism 4 includes a filter box 401 fixedly connected to the top right side of the neutralization mechanism 3. The left side of the filter box 401 is connected to the top right side of the neutralization mechanism 3 and is fixedly connected to the same vent pipe. Three activated carbon filters 402 are movably fitted inside the filter box 401. The filter holes of the three activated carbon filters 402 decrease in size from right to left. The right side of the filter box 401 is open and threadedly fixed with a U-shaped frame 403. A connecting rod 404 is fixedly connected between the front inner wall and the rear inner wall of the U-shaped frame 403. A support rod is fixedly connected between the front inner wall and the rear inner wall of the U-shaped frame 403. The left side of the support rod is fixedly connected to the right end of the connecting rod 404. The connection between the connecting rod 404 and the U-shaped frame 403 is achieved through the support rod. The connecting rod 404 is fixedly connected to the right side of the leftmost activated carbon filter 402. The other two activated carbon filters 402 are fixedly fitted on the connecting rod 404. The activated carbon filters 402 are used to adsorb and purify trace pollutants in the exhaust gas.

[0035] In this implementation scheme: the neutralized exhaust gas enters the filter box 401, and the gas inside the filter box 401 passes through three activated carbon filters 402 in sequence and is discharged to the outside. The three activated carbon filters 402 adsorb trace pollutants in the exhaust gas, and through adsorption, the exhaust gas is further treated.

[0036] It should be noted that the activated carbon filter 402 is made of activated carbon. It relies on the van der Waals forces between the surface of the activated carbon and the pollutant molecules. This is a weak electrostatic attraction that does not require a chemical reaction. It can adsorb a variety of organic substances (VOCs, solvent vapors, and some odors) and inorganic small molecules (Cl2, H2S, and some mercury vapors). The specific adsorption principle of the activated carbon filter 402 is existing technology and will not be elaborated here.

[0037] Furthermore:

[0038] A tail gas treatment device for a vapor deposition furnace further includes an exchangeable filter mechanism 6, which is fixedly installed on the left side of the condensation mechanism 1 and connected and fixed to the top end of the bent vent pipe 5. The exchangeable filter mechanism 6 is used to filter particulate matter in the tail gas.

[0039] The exchangeable filter mechanism 6 includes a mounting box 602 fixedly installed on the top left side of the condenser mechanism 1. The top of the mounting box 602 is open and fixedly connected to a cover. A mounting base 604 is fixedly installed inside the mounting box 602 at the bottom of the cover. Filter grooves 605 are provided on both sides of the mounting base 604. A detachable filter assembly is movably fitted inside the filter groove 605. The bottom of the detachable filter assembly extends to the bottom of the mounting box 602. The detachable filter assembly includes two filter screens 606 movably fitted inside the filter groove 605. The filter screens 606 are used to filter particulate matter in the exhaust gas. The mesh size of the two middle filter screens 606 is larger than that of the two side filter screens 606. By setting two filter screens 606, the filtration efficiency can be improved. Two removal holes are provided on the bottom inner wall of the mounting box 602, through which the filter screens can be removed. 606 is removed, and a connecting seat 614 is movably fitted inside the pick-up and drop-out hole. A sealing sleeve is adhesively fitted on the outside of the connecting seat 614. The outside of the sealing sleeve is in movable contact with the inner wall of the corresponding pick-up and drop-out hole. The sealing sleeve achieves a seal between the connecting seat 614 and the corresponding pick-up and drop-out hole. The top of the connecting seat 614 is fixedly connected to the bottom of the two corresponding filter screens 606. The bottom sides of the mounting box 602 are magnetically fixed with connecting plates 612. The bottom sides of the mounting seat 604 are fixedly connected with first magnets. A groove is opened on one side of the top of the connecting plate 612. A second magnet is fixedly connected to the bottom inner wall of the groove. The first magnet is movably fitted in the corresponding groove and attracts the second magnet. The connecting plate 612 can be quickly fixed by the attraction and fixation of the first magnet and the second magnet. The connecting plate 612 is fixedly connected to the bottom of the corresponding connecting seat 614.

[0040] The bottom of the mounting base 604 has a groove 609 located between two filter tanks 605. A switchable venting assembly is installed in the groove 609. The switchable venting assembly is connected to the two filter tanks 605. The switchable venting assembly includes two conical covers 608. The two conical covers 608 are respectively embedded and fixed on the inner wall of the two filter tanks 605 on the side that is close to each other. The side of the two conical covers 608 that is close to each other is connected and fixed with a first solenoid valve 610. The side of the two first solenoid valves 610 that is close to each other is connected and fixed with the same three-way pipe 611 located in the groove 609.

[0041] The top end of the bent vent tube 5 is connected to a connecting component, and the bottom of the connecting component is connected to two filter tanks 605. The connecting component includes a connecting pipe 601 connected to the top end of the bent vent tube 5. The left end of the connecting pipe 601 is set as a sealing structure. The bottom of the connecting pipe 601 is connected to two second solenoid valves 607. The bottom end of the second solenoid valve 607 is connected to the top of the corresponding filter tank 605.

[0042] A PLC controller 603 is fixedly connected to the left side of the mounting box 602. The PLC controller 603 is electrically connected to two first solenoid valves 610 and two second solenoid valves 607. The PLC controller 603 is also electrically connected to two alarm lights 613. The PLC controller 603 controls the opening and closing of the alarm lights 613. The two alarm lights 613 are fixedly connected to the two connecting plates 612 on opposite sides.

[0043] The air extraction mechanism includes an air pump 7 fixedly connected to the bottom of the mounting box 602. The exhaust end of the air pump 7 extends into the groove 609 and is connected and fixed to the bottom of the three-way pipe 611. The bottom of the air pump 7 is the extraction end and is connected and fixed to an L-shaped extraction pipe 701. The L-shaped extraction pipe 701 cooperates with the exhaust end of the vapor deposition furnace. The exhaust gas from the exhaust end of the vapor deposition furnace is extracted by the air pump 7 and the L-shaped extraction pipe 701.

[0044] In this implementation scheme: the L-shaped extraction pipe 701 is connected to the exhaust end of the vapor deposition furnace in advance. First, the first solenoid valve 610 and the second solenoid valve 607 on the left are opened, and the air pump 7 is turned on. The air pump 7 extracts the exhaust gas discharged from the vapor deposition furnace through the L-shaped extraction pipe 701. The extracted exhaust gas is blown into the filter tank 605 on the left through the three-way pipe 611, the first solenoid valve 610 on the left and the cone shroud 608 on the left. After the exhaust gas enters the filter tank 605 on the left, it passes through the two corresponding filter screens 606 in sequence and enters the bent ventilation pipe 5 through the second solenoid valve 607 on the left and the connecting pipe 601. The two filter screens 606 on the left filter and block the impurities in the exhaust gas.

[0045] When the filter screen 606 on the left is removed for cleaning, the PLC controller 603 controls the first solenoid valve 610 and the second solenoid valve 607 on the left to close, and controls the first solenoid valve 610 and the second solenoid valve 607 on the right to open. At this time, the exhaust gas enters the filter tank 605 on the right, where impurities in the exhaust gas are filtered and blocked by the two filters 606 on the right. The filtered exhaust gas then enters the connecting pipe 601 through the second solenoid valve 607 on the right. At the same time, the PLC controller 603 also controls the alarm light 613 on the left to turn on to remind personnel. During replacement, personnel can directly pull down the connecting plate 612. The connecting plate 612, through the connecting seat 614, moves the two corresponding filter screens 606 downwards from the filter tank 605, allowing the two filter screens 606 on the left side to be cleaned. After cleaning, the connecting plate 612 on the left side can be moved upwards, and the filter screens 606 will be moved into the filter tank 605 on the left side through the corresponding connecting seat 614. After installation, it is ready for the next use. When removing the filter screens 606 on the left side for cleaning, switching to the filter on the right side will continue the filtration operation without stopping the machine for cleaning.

[0046] It should be noted that the PLC controller 603 is electrically connected to the first solenoid valve 610, the second solenoid valve 607, and the alarm light 613 via wires. The PLC controller 603 is a Siemens S7-1200 series controller. The first solenoid valve 610 and the second solenoid valve 607 can be model SMC VQZ215-5G-01, and the alarm light 613 can be model Patlite NH-22V. The opening interval of the two first solenoid valves 610 and the two second solenoid valves 607 can be set through the PLC controller 603. The opening interval can be set to 30 minutes, and the opening interval of the two alarm lights 613 can be set to 30 minutes, with an opening duration of 1 minute. The PLC controller 603 achieves periodic control through its built-in timer and output module. When the set time is reached, it outputs control commands to the corresponding components, thereby controlling the corresponding components to open or close. The specific control principle is existing technology and will not be elaborated here.

[0047] Working Principle: In operation, the L-shaped extraction pipe 701 is pre-connected to the exhaust end of the vapor deposition furnace. The opening intervals of the two first solenoid valves 610 and two second solenoid valves 607 are set via the PLC controller 603, with an interval of 30 minutes. The opening interval of the two alarm lights 613 is also set, with an interval of 30 minutes and an opening duration of 1 minute. First, the left-side first solenoid valve 610 and the left-side second solenoid valve 607 are opened, and the air pump 7 is activated. The air pump 7 extracts the exhaust gas discharged from the vapor deposition furnace through the L-shaped extraction pipe 701. The extracted exhaust gas is sequentially blown into the left-side filter tank 605 through the three-way pipe 611, the left-side first solenoid valve 610, and the left-side conical shroud 608. After entering the left-side filter tank 605, the exhaust gas passes through the corresponding two filter screens 606 and then through the left-side second solenoid valve 607. Solenoid valve 607 and connecting pipe 601 enter the bent vent pipe 5. The two filters 606 on the left filter and block impurities in the exhaust gas. The condensing mechanism 1 liquefies the exhaust gas inside the bent vent pipe 5. The liquefied liquid and exhaust gas enter the oil storage tank 2 and neutralization mechanism 3 in sequence. The neutralized exhaust gas enters the filter box 401. The gas inside the filter box 401 passes through three activated carbon filters 402 in sequence and is discharged to the outside. The three activated carbon filters 402 adsorb trace pollutants in the exhaust gas. Through adsorption, the exhaust gas is further treated, improving the exhaust gas treatment effect. Furthermore, by pre-filtering the exhaust gas before liquefaction, the situation of impurities adhering to the inner wall of the bent vent pipe 5 and entering the neutralization mechanism 3 can be effectively reduced, thereby reducing the risk of blockage of the bent vent pipe 5 and the frequency of liquid replacement in the neutralization mechanism 3, thus improving the stability of exhaust gas treatment.

[0048] With prolonged filtration, the right side of both left-side filter screens 606 will become clogged with a significant amount of impurities. After 30 minutes of filtration by the left-side filter screen 606, the PLC controller 603 closes the left-side first solenoid valve 610 and the left-side second solenoid valve 607, and opens the right-side first solenoid valve 610 and the right-side second solenoid valve 607. At this point, the exhaust gas flows into the right-side filter tank 605, where the two right-side filter screens 606 filter and clog the impurities. The filtered exhaust gas then enters the connecting pipe 601 via the right-side second solenoid valve 607. Simultaneously, the PLC controller 603 also activates the left-side alarm light 613 to alert personnel, allowing them to promptly check the left side. The two filters 606 on the side are replaced. During replacement, the operator can directly pull down the connecting plate 612. The connecting plate 612, through the connecting seat 614, moves the two corresponding filters 606 downwards out of the filter tank 605, thus cleaning the two filters 606 on the left side. After cleaning, the connecting plate 612 on the left side can be moved upwards, and the filters 606, through the corresponding connecting seat 614, can be moved into the filter tank 605 on the left side. After installation, it is ready for the next use. When the filters 606 on the left side are removed for cleaning, the filtration operation can continue when switching to the right side filter without stopping the machine for cleaning. This effectively reduces downtime and improves exhaust gas treatment efficiency.

[0049] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A tail gas treatment device for a vapor deposition furnace, comprising a tail gas treatment device body that cooperates with the exhaust end of the vapor deposition furnace, the tail gas treatment device body comprising a condensation mechanism (1), an oil storage tank (2), a bent vent pipe (5), and a neutralization mechanism (3), wherein the bent vent pipe (5) is installed inside the condensation mechanism (1), and an exhaust and oil discharge assembly is fixedly connected to the bottom end of the bent vent pipe (5), the exhaust and oil discharge assembly being connected to the oil storage tank (2) and the neutralization mechanism (3), characterized in that, Also includes: The adsorption filtration mechanism (4) is connected and fixed to the right side of the neutralization mechanism (3); An exchangeable filter mechanism (6) is fixedly installed on the left side of the condenser mechanism (1) and connected and fixed to the top of the bent vent pipe (5); An air extraction mechanism is installed at the bottom of the exchangeable filter mechanism (6) and is connected to its interior.

2. The tail gas treatment device for a chemical vapor deposition furnace according to claim 1, characterized in that, The adsorption filtration mechanism (4) includes a filter box (401) fixedly connected to the top right side of the neutralization mechanism (3). The left side of the filter box (401) is connected to the top right side of the neutralization mechanism (3) and is fixedly connected to the same vent pipe. Three activated carbon filters (402) are movably fitted inside the filter box (401). The filter holes of the three activated carbon filters (402) decrease in size from right to left. The right side of the filter box (401) is set as an opening and is threadedly fixed with a U-shaped frame (403). A connecting rod (404) is fixedly connected between the front inner wall and the rear inner wall of the U-shaped frame (403). The connecting rod (404) is fixedly connected to the right side of the leftmost activated carbon filter (402). The other two activated carbon filters (402) are fixedly fitted on the connecting rod (404).

3. The tail gas treatment device for a chemical vapor deposition furnace according to claim 1, characterized in that, The exchangeable filter mechanism (6) includes a mounting box (602) fixedly installed on the top left side of the condensing mechanism (1). The top of the mounting box (602) is open and fixedly connected to a box cover. The bottom of the box cover is fixedly installed with a mounting base (604) located inside the mounting box (602). Filter grooves (605) are provided on both sides of the mounting base (604). A detachable filter assembly is movably fitted inside the filter groove (605). The bottom of the detachable filter assembly extends to the bottom of the mounting box (602). A groove (605) is provided at the bottom of the mounting base (604) between the two filter grooves (605). 9) A switchable ventilation component is installed in the groove (609). The switchable ventilation component is connected to two filter tanks (605). The top of the bent ventilation pipe (5) is connected to a connecting component. The bottom of the connecting component is connected to the two filter tanks (605). A PLC controller (603) is fixedly connected to the left side of the mounting box (602). The PLC controller (603) is electrically connected to the switchable ventilation component and the connecting component. The PLC controller (603) is electrically connected to two alarm lights (613). The two alarm lights (613) are fixedly connected to the corresponding detachable filter components.

4. The tail gas treatment device for a chemical vapor deposition furnace according to claim 3, characterized in that, The air extraction mechanism includes an air pump (7) fixedly connected to the bottom of the mounting box (602). The exhaust end of the air pump (7) extends into the groove (609) and is connected and fixed to the detachable filter assembly. The bottom of the air pump (7) is the extraction end and is connected and fixed to an L-shaped air extraction pipe (701). The L-shaped air extraction pipe (701) is matched with the exhaust end of the vapor deposition furnace.

5. The tail gas treatment device for a chemical vapor deposition furnace according to claim 3, characterized in that, The detachable filter assembly includes two filter screens (606) movably fitted inside the filter groove (605). The mesh size of the two middle filter screens (606) is larger than that of the two filter screens (606) on both sides. Two pick-up and drop-off holes are opened on the bottom inner wall of the mounting box (602). A connecting seat (614) is sealed and movably fitted inside the pick-up and drop-off holes. The top of the connecting seat (614) is fixedly connected to the bottom of the corresponding two filter screens (606). Connecting plates (612) are magnetically fixed on both sides of the bottom of the mounting box (602). The connecting plates (612) are fixedly connected to the bottom of the corresponding connecting seats (614). Two alarm lights (613) are fixedly connected to the two connecting plates (612) on the side away from each other.

6. The tail gas treatment device for a chemical vapor deposition furnace according to claim 4, characterized in that, The switchable ventilation assembly includes two conical hoods (608), which are respectively embedded and fixed on the inner wall of the two filter tanks (605) on the side close to each other. The side close to each other of the two conical hoods (608) is connected to and fixed with a first solenoid valve (610). The side close to each other of the two first solenoid valves (610) is connected to and fixed with the same three-way pipe (611) located in the groove (609). The bottom end of the three-way pipe (611) is connected to and fixed with the exhaust end of the air pump (7). The two first solenoid valves (610) are electrically connected to the PLC controller (603).

7. The tail gas treatment device for a chemical vapor deposition furnace according to claim 3, characterized in that, The connecting component includes a connecting pipe (601) fixed at the top of the bent vent pipe (5). The left end of the connecting pipe (601) is set as a sealing structure. The bottom of the connecting pipe (601) is connected to two second solenoid valves (607). The bottom end of the second solenoid valve (607) is connected to the top of the corresponding filter tank (605). Both second solenoid valves (607) are electrically connected to the PLC controller (603).

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