Photoresist compounding and filling device

Abstract

The utility model discloses a kind of photoresist mixing and filling device, it is related to filling equipment technical field, including support and multiple support modules, the bottom end of each support module is fixedly installed with docking end, the end of each docking end is provided with filling pipe, the end of each filling pipe is fixedly installed with soft rubber ring, the bottom end of each soft rubber ring is fixedly installed with shower head, the outside of each filling pipe is fixedly installed with synchronous ring, the bottom end of each synchronous ring is fixedly installed with heating coil, the design of screw knob makes the docking of filling pipe and docking end simple and convenient to operate, it is convenient for the installation and disassembly of equipment, the inside reset spring of synchronous ring top telescopic rod generates reverse thrust after being extruded, makes synchronous ring drive shower head automatic reset, automatic reset function ensures that shower head can return to initial position after each filling is completed, guarantee the accuracy and consistency of next filling.

Description

Technical Field

[0001] This utility model relates to the field of filling equipment technology, and in particular to a photoresist mixing and filling device. Background Technology

[0002] Currently, existing filling devices (such as patent publication number: CN220616396U) disclose an automatic quantitative filling device for photoresist production. The electric slide rail can drive the slider to move, thereby driving the clamp to move. During the use of the device, the clamp is adjusted to a suitable position according to the size of the container, and the container is limited and fixed to prevent the container from shifting or tipping over and affecting the filling. The control panel on the outer shell can effectively observe the weight of the filling bottle, and then shut off the second mud pump after the weight of the filling bottle reaches a certain value, so as to realize the quantitative filling operation.

[0003] In the aforementioned patent, the filling volume is controlled by a high-precision metering system (such as a servo-driven screw pump or plunger pump). During the filling process, the contact between the adhesive and the low-temperature metal parts can easily lead to a drop in local temperature, resulting in an increase in viscosity and causing poor dripping or dosage deviation. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a photoresist mixing and filling device, which solves the technical problem that during the filling process, the contact between the photoresist and low-temperature metal components can easily lead to a local temperature drop, resulting in increased viscosity and causing poor dripping or dosage deviation.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A photoresist mixing and filling device includes a bracket and multiple support modules. A docking end is fixedly installed at the bottom of each support module. A filling tube is provided at the end of each docking end. A soft rubber ring is fixedly installed at the end of each filling tube. A nozzle is fixedly installed at the bottom of each soft rubber ring.

[0007] A synchronization ring is fixedly installed on the outside of each filling tube, and a heating coil is fixedly installed at the bottom of each synchronization ring.

[0008] Preferably, each of the synchronization rings has two telescopic rods fixedly installed at its top end, each telescopic rod has a segmented structure, and a return spring is fixedly installed inside each telescopic rod;

[0009] Two retaining rings are fixedly installed on the outside of each filling tube, and the same outer shell is fixedly installed on the outside of the two retaining rings. A swivel buckle is rotatably installed on the top of the outer shell.

[0010] Preferably, a protective sleeve is fixedly installed at the bottom end of each of the outer shells, and each of the protective sleeves has an arc-shaped structure;

[0011] A metering pump is fixedly installed at the top of each of the support modules, and a delivery pipe is fixedly installed at the top of each of the metering pumps.

[0012] The support is equipped with a conveyor belt at one end and a mixing tank connected to a conveying pipe at one side end.

[0013] Compared with the prior art, the present invention has the following beneficial effects;

[0014] In this invention, the heating coil heats up inside the protective sleeve, heating the air inside the sleeve and externally heating the photoresist. This effectively prevents the photoresist from cooling down rapidly during the filling process, avoids changes in photoresist performance due to temperature variations, and ensures product quality stability. The flexible protective sleeve tightly wraps around the nozzle and container opening, reducing heat loss and further improving temperature retention.

[0015] In this invention, the twist-lock design makes the docking and fixing of the filling tube and the docking end simple and convenient, facilitating the installation and disassembly of the equipment. The internal return spring of the telescopic rod at the top of the synchronization ring generates a reverse thrust after being squeezed, causing the synchronization ring to drive the nozzle to automatically reset. The automatic reset function ensures that the nozzle can return to the initial position after each filling, ensuring the accuracy and consistency of the next filling. Attached Figure Description

[0016] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings.

[0017] Figure 1 This is a structural diagram of the filling equipment of this utility model;

[0018] Figure 2 This is a structural diagram of the support module of this utility model;

[0019] Figure 3 This is a structural diagram of the filling tube of this utility model;

[0020] Figure 4 This is a cross-sectional view of the nozzle of this utility model.

[0021] In the diagram: 11. Bracket; 12. Support module; 13. Metering pump; 14. Delivery pipe; 15. Connecting end; 16. Rotary buckle; 17. Filling pipe; 18. Nozzle; 19. Soft rubber ring; 21. Synchronization ring; 22. Telescopic rod; 23. Heating coil; 24. Protective sleeve; 25. Fixing ring; 26. Outer shell. Detailed Implementation

[0022] This application provides a photoresist mixing and filling device that effectively solves the problem that during the filling process, the contact between the photoresist and low-temperature metal components can easily lead to a local temperature drop, resulting in increased viscosity and causing poor dripping or dosage deviation. The heating coil heats up inside the protective sleeve, heating the air inside the protective sleeve and externally heating the photoresist, effectively preventing the photoresist from cooling rapidly during the filling process, avoiding changes in photoresist performance due to temperature changes, and ensuring the stability of product quality. The flexible protective sleeve tightly wraps around the nozzle and container mouth, reducing heat loss and further improving the temperature holding effect.

[0023] Example

[0024] like Figure 1 - Figure 4 As shown, the technical solution in this application embodiment effectively solves the technical problem that during the filling process, the contact between the adhesive and low-temperature metal components easily leads to a local temperature drop, causing an increase in viscosity and resulting in poor dripping or dosage deviation. The overall idea is as follows:

[0025] To address the problems existing in the prior art, this utility model provides a photoresist mixing and filling device, including a bracket 11 and multiple support modules 12. Each support module 12 has a docking end 15 fixedly installed at its bottom end, and a filling tube 17 is provided at the end of each docking end 15. A soft rubber ring 19 is fixedly installed at the end of each filling tube 17, and a nozzle 18 is fixedly installed at the bottom end of each soft rubber ring 19. The bottom end of the bracket 11 is retractable. During filling, the bracket 11 moves downward, causing the support modules 12 to move vertically downward, inserting the end of the nozzle 18 into the container. The nozzle 18 is squeezed by the bottle mouth of the container, and the nozzle 18 moves upward in the opposite direction to squeeze the soft rubber ring 19, causing the soft rubber ring 19 to contract.

[0026] A synchronization ring 21 is fixedly installed on the outside of each filling tube 17, and a heating coil 23 is fixedly installed at the bottom of each synchronization ring 21. When the nozzle 18 moves upward, it drives the synchronization ring 21 and the heating coil 23 to move synchronously. At the same time, the heating coil 23 is installed inside the protective sleeve 24. The heating coil 23 heats up inside the protective sleeve 24, heating the air inside the protective sleeve 24. The protective sleeve 24 is made of flexible material and covers the nozzle 18 and the bottle mouth. When the nozzle 18 is filling, the photoresist is prevented from cooling down quickly by external heating.

[0027] Two telescopic rods 22 are fixedly installed at the top of each synchronization ring 21. Each telescopic rod 22 has a segmented structure, and a return spring is fixedly installed inside each telescopic rod 22. The nozzle 18 with the synchronization ring 21 slides upward inside the gap between the filling tube 17 and the outer shell 26. The synchronization ring 21 moves upward and squeezes the two telescopic rods 22. The telescopic rods 22 are compressed by force and at the same time, the compression of the telescopic rods 22 generates a reverse thrust, which makes the synchronization ring 21 slide downward. The synchronization ring 21 pushes the nozzle 18 to slide, allowing the nozzle 18 to reset itself.

[0028] Two fixing rings 25 are fixedly installed on the outside of each filling tube 17. The same outer shell 26 is fixedly installed on the outside of the two fixing rings 25. A buckle 16 is rotatably installed on the top of the outer shell 26. The outside of the filling tube 17 is connected to the outer shell 26 through the fixing rings 25. The filling tube 17 and the outer shell 26 have a double-layer structure. At the same time, the buckle 16 is rotatably installed on the top of the outer shell 26. After the filling tube 17 is docked and fixed with the docking end 15, by rotating the buckle 16, the buckle 16 rotates clockwise and moves upward at the top of the outer shell 26. The buckle 16 engages with the outside of the docking end 15. By continuing to rotate the buckle 16, the buckle 16 engages with the outside of the docking end 15. The modular structure facilitates assembly and installation.

[0029] Each outer shell 26 has a protective sleeve 24 fixedly installed at its bottom end. Each protective sleeve 24 has an arc-shaped structure and is made of soft material. As the nozzle 18 slides upward, the nozzle 18 drives the protective sleeve 24 to bend and move, causing the protective sleeve 24 to deform. Since the protective sleeve 24 is bent inward, the nozzle 18 connects to the bottle mouth of the container, and at the same time, the nozzle 18 drives the protective sleeve 24 to cover the connection end with the container.

[0030] A metering pump 13 is fixedly installed at the top of each support module 12, and a delivery pipe 14 is fixedly installed at the top of each metering pump 13. The photoresist is delivered to the inside of the metering pump 13 through the delivery pipe 14. At the same time, a flow sensor is installed inside the delivery pipe 14 to control the flow rate of the photoresist.

[0031] A conveyor belt is provided at the end of the support 11, and a mixing tank connected to the delivery pipe 14 is provided at the side end of the support 11. The container is transported to the bottom of the support module 12 in sequence by the conveyor belt. After the photoresist is mixed in the mixing tank, it is transported to the inside of the metering pump 13 through multiple delivery pipes 14. The metering pump 13 controls the flow rate of the photoresist, allowing the photoresist to enter the inside of the docking end 15 through the support module 12. At the same time, the docking end 15 and the inside of the filling pipe 17 are docked. The photoresist is filled into the inside of the container through the cooperation of the filling pipe 17 and the nozzle 18.

[0032] Working principle:

[0033] In the first step, after the photoresist is mixed in the mixing tank, the mixed photoresist is transported to the metering pump 13 through multiple delivery pipes 14. The delivery pipes 14 are equipped with flow sensors to monitor and control the photoresist flow rate. The bottom of the support 11 is retractable. During filling, the support 11 moves downward, driving the support module 12 vertically downward, so that the end of the nozzle 18 is inserted into the container.

[0034] After being squeezed by the bottle opening, the nozzle 18 moves upward in the opposite direction, squeezing the soft rubber ring 19 to shrink it. As the nozzle 18 moves upward, it drives the synchronization ring 21 and the heating coil 23 to move synchronously. The heating coil 23 is installed inside the protective sleeve 24. The heating coil 23 generates heat, which heats the air inside the protective sleeve 24. The protective sleeve 24 is made of flexible material. When the nozzle 18 slides upward, it will bend and deform with the nozzle 18. Because it bends inward, it can cover the connection end between the nozzle 18 and the container. The photoresist is prevented from cooling down quickly by external heating.

[0035] In the second step, the two segmented telescopic rods 22 fixed at the top of the synchronization ring 21 are squeezed and contracted when the synchronization ring 21 moves upward. The internal return spring is compressed and generates a reverse thrust, causing the synchronization ring 21 to slide downward, which in turn pushes the nozzle 18 to slide, realizing the self-reset of the nozzle 18. The outer side of the filling tube 17 is connected to the outer shell 26 through two fixing rings 25 to form a double-layer structure. The screw buckle 16 rotatably installed at the top of the outer shell 26, after the filling tube 17 is docked and fixed with the docking end 15, rotates the screw buckle 16 clockwise, so that it rotates upward at the top of the outer shell 26 and engages with the outer side of the docking end 15. This modular structure facilitates assembly and installation.

[0036] The conveyor belt at the end of the support 11 sequentially transports the container to the bottom of the support module 12. The mixed photoresist, after the flow rate is controlled by the metering pump 13, enters the docking end 15 through the support module 12, and then, through the filling tube 17 and the nozzle 18, fills the photoresist into the container.

[0037] Finally, it should be noted that the above embodiments are merely examples for clearly illustrating the present invention and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A photoresist mixing and filling device, comprising a bracket (11) and multiple support modules (12), characterized in that, Each of the support modules (12) has a docking end (15) fixedly installed at its bottom end, and a filling tube (17) is provided at the end of each docking end (15). A soft rubber ring (19) is fixedly installed at the end of each filling tube (17), and a nozzle (18) is fixedly installed at the bottom end of each soft rubber ring (19). A synchronization ring (21) is fixedly installed on the outside of each filling tube (17), and a heating coil (23) is fixedly installed at the bottom end of each synchronization ring (21).

2. The photoresist mixing and filling device as described in claim 1, characterized in that, Two telescopic rods (22) are fixedly installed at the top of each of the synchronization rings (21). Each of the telescopic rods (22) has a segmented structure, and a return spring is fixedly installed inside each of the telescopic rods (22).

3. The photoresist mixing and filling device as described in claim 1, characterized in that, Two fixing rings (25) are fixedly installed on the outside of each filling tube (17), and the same outer shell (26) is fixedly installed on the outside of the two fixing rings (25). A buckle (16) is rotatably installed on the top of the outer shell (26).

4. The photoresist mixing and filling device as described in claim 3, characterized in that, Each of the outer shells (26) is fixedly fitted with a protective sleeve (24) at its bottom end, and each of the protective sleeves (24) has an arc-shaped structure.

5. The photoresist mixing and filling device as described in claim 1, characterized in that, A metering pump (13) is fixedly installed at the top of each of the support modules (12), and a delivery pipe (14) is fixedly installed at the top of each of the metering pumps (13).

6. A photoresist mixing and filling apparatus as described in any one of claims 1-5, characterized in that, The support (11) is provided with a conveyor belt at its end and a mixing tank connected to the conveying pipe (14) at its side end.

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