Wafer calibration device and photolithography machine

Abstract

The utility model relates to the technical field of semiconductor processing discloses wafer calibration device and photoetching machine, wafer calibration device includes body, lifting structure and support structure, lifting structure includes lifting assembly and a plurality of communication parts, and lifting assembly sets up on the body, and lifting assembly is used for driving the workpiece lifting, and the one end of any communication part is electrically connected with lifting assembly, and the other end is electrically connected with adapter piece, support structure includes support piece and a plurality of protective parts, and support piece sets up on the body, and a plurality of mounting parts are seted up on support piece, and any protective part sets up in an installation part, adapter piece is used for electrically connecting communication part and outside system, and any protective part sets up and is equipped with the through -going portion, and adapter piece is worn and is equipped in the through -going portion, the utility model can avoid the adapter piece that appears and communication part electrically connects and causes the abrasion and the disconnection of communication part and leads to the situation of communication exception.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a wafer calibration device and a photolithography machine. Background Technology

[0002] The wafer pre-alignment device is an important subsystem of the wafer processing system. It is used to position the wafer before it is transferred to the processing station, calculate the deviation between the wafer and the standard position, and then drive the motion platform to position the center and notch (or dicing edge) of the wafer within a specific range.

[0003] The purpose of wafer pre-alignment is twofold: first, to determine the center position of the wafer; and second, to determine the notch direction. Since the wafer center's position on the pre-alignment system is unknown before operation, and the notch direction is random, pre-alignment is crucial for subsequent wafer processing.

[0004] In related technologies, wafer pre-alignment is typically achieved using a centering chuck. The centering chuck has several vacuum holes, primarily used to hold and move the wafer. The specific principle of the centering chuck is as follows: when the wafer is transported onto the TSU (Transfer Unit), its center position may deviate. The centering chuck then lifts and moves the wafer to align it with the center of the P-chuck (P-chuck). However, during wafer pre-alignment, the TSU continuously rises and falls rapidly. This rapid movement causes the signal lines of the centering chuck to move synchronously, leading to wear and tear on the signal lines. This can cause communication abnormalities and prevent the centering chuck from functioning properly. Utility Model Content

[0005] In view of this, the present invention provides a wafer calibration device and a lithography machine to solve the problem that the signal lines will move synchronously when the centering chuck is raised and lowered, resulting in wear of the signal lines.

[0006] In a first aspect, this utility model provides a wafer calibration device, comprising:

[0007] ontology;

[0008] The lifting structure includes a lifting component and several communication components. The lifting component is disposed on the main body and is used to drive the workpiece to be processed to rise and fall. One end of each of the communication components is electrically connected to the lifting component and the other end is electrically connected to the adapter.

[0009] The support structure includes a support member and several protective members. The support member is disposed on the main body and has several mounting portions. Any one of the protective members is disposed in one of the mounting portions.

[0010] The adapter is used to electrically connect the communication device and the external system. Each of the protective devices has a through-hole, and the adapter passes through the through-hole.

[0011] Beneficial effects: By inserting the adapter into the through-hole of the protective component, one end of the communication component can be electrically connected to the adapter and then electrically connected to an external system through the adapter. The other end of the communication component can be electrically connected to the lifting assembly, thus enabling the lifting assembly to be electrically connected to an external system. When the lifting assembly moves the communication component up and down, the support component can provide support for the communication component through the adapter, making the movement of the adapter smoother. The protective component can separate the adapter from the side wall of the mounting part of the support component, preventing friction and wear between the adapter and the side wall of the mounting part of the support component during movement, and preventing the communication component from dragging the adapter and causing a disconnection. In this way, communication abnormalities of the communication component can be avoided, and the normal operation of the lifting assembly can be guaranteed.

[0012] In one alternative embodiment, the protective member has a recessed portion on its periphery, and the protective member is adapted to engage with the mounting portion through the recessed portion.

[0013] Beneficial effect: By creating a recess on the periphery of the protective member, which is a recessed groove in this embodiment, when the protective member is installed in the mounting part on the support member, the protective member can be installed in the mounting part by engaging the recess with the side wall of the mounting part on the support member.

[0014] In one optional embodiment, the mounting portion is a mounting hole, the recessed portion is a recessed groove, and the bottom surface of the recessed groove forms a limiting circle. The diameter of the limiting circle is smaller than the diameter of the mounting hole, so as to movably connect the protective member and the support member.

[0015] Beneficial effects: By setting the mounting part as a mounting hole and the recessed part as a recessed groove, the bottom surface of the recessed groove can form a limiting circle. The diameter of the limiting circle is smaller than the diameter of the mounting hole. Therefore, when the protective part is installed in the mounting part on the support through the recessed part, the protective part can move relative to the support, thereby movably connecting the protective part and the support. The movably connected protective part and support can provide a certain amount of space for the communication part. That is, when the communication part moves and shakes, the communication part can drive the protective part to move relative to the support, preventing the end of the communication part from loosening with the lifting assembly.

[0016] In one alternative embodiment, any of the protective components is configured to be resilient, and the through-hole and the adapter are interference-fitted.

[0017] Beneficial effect: By configuring the protective component to be flexible, when the adapter is inserted into the through-hole on the protective component, the adapter can achieve an interference fit with the through-hole, so that the adapter will not shake when the communication component is moved by the lifting assembly.

[0018] In one alternative embodiment, all the mounting portions are spaced apart on the support member to separate all the communication components.

[0019] Beneficial effects: By spacing all the mounting parts on the support, when the protective parts are installed in the mounting parts, all the protective parts are also spaced apart. Furthermore, when the end of the communication part passes through the through-hole on the protective part, all the communication parts are also spaced apart. In this way, it is possible to avoid short circuits caused by contact between adjacent communication parts.

[0020] In one alternative embodiment, the support member includes a connecting portion and a supporting portion, the connecting portion and the supporting portion being interconnected, the connecting portion being adapted to be connected to the body, and all the mounting portions being formed on the supporting portion.

[0021] Beneficial effects: By setting the support component including a connecting part and a support part, in this embodiment the connecting part and the support part are a connecting plate and a support plate, wherein the connecting part and the support part are connected to each other, and the connecting part can be connected to the main body to install the support part on the main body. The support part is provided with all the mounting parts to provide support for the communication component through the protective component installed on the mounting part.

[0022] In one optional embodiment, the connecting part is provided with a plurality of fixing holes, and the connecting part is connected to the body through all of the fixing holes.

[0023] Beneficial effect: By opening several fixing holes on the connecting part, each fixing hole corresponds to the connecting hole on the main body, so that the connecting part can be connected to the connecting hole on the main body through all the fixing holes, and thus the connecting part can be installed on the main body.

[0024] In one alternative embodiment, the connecting portion and the supporting portion are arranged vertically.

[0025] Beneficial effects: By setting the connecting part and the support part to be perpendicular, when the end of the communication component passes through the through part on the protective component, the support part and the main body of the communication component will be perpendicular, which will make the movement of the communication component smoother and reduce the resistance when the communication component moves.

[0026] In one alternative embodiment, the support is made of carbon fiber reinforced polymer, and the protective element is made of silicone or polyurethane.

[0027] Beneficial effects: By using carbon fiber reinforced polymer for the support components, the overall mass of the support components can be reduced, and the resonant frequency of the support components can be increased; by using silicone or polyurethane for the protective components, the damping coefficient of the protective components can be increased, and the shock absorption efficiency of the protective components can be improved.

[0028] Secondly, this utility model also provides a lithography machine, including the aforementioned wafer calibration device.

[0029] Beneficial effects: By passing the end of the communication component through the through-hole opened on the protective component and electrically connecting it to the lifting assembly, the support component can provide support for the communication component when the lifting assembly drives the communication component to move up and down, making the movement of the communication component smoother. The protective component can separate the communication component from the side wall of the mounting part of the support component, avoiding friction and wear between the communication component and the side wall of the mounting part of the support component during movement. This can prevent communication abnormalities of the communication component and ensure the normal operation of the lifting assembly. Attached Figure Description

[0030] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the structure of a wafer calibration device according to an embodiment of the present invention;

[0032] Figure 2This is a schematic diagram of the structure of a support component for a wafer calibration device according to an embodiment of the present invention;

[0033] Figure 3 This is a schematic diagram of the structure of a protective component of a wafer calibration device according to an embodiment of the present invention.

[0034] Explanation of reference numerals in the attached figures:

[0035] 1-Lifting structure; 11-Lifting assembly; 12-Communication component;

[0036] 2-Support structure; 21-Supporting component; 211-Mounting part; 212-Connecting part; 2121-Fixing hole; 213-Supporting part; 22-Protective component; 221-Through part; 222-Recessed part;

[0037] 3-Adapter. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0039] The following is combined with Figures 1 to 3 The following describes embodiments of the present invention.

[0040] According to embodiments of the present invention, in one aspect, a wafer calibration device is provided, such as... Figures 1 to 3 As shown, the device includes a main body, a lifting structure 1, and a support structure 2. The lifting structure 1 includes a lifting component 11 and several communication components 12. The lifting component 11 is mounted on the main body and is used to drive the workpiece to be processed to rise and fall. One end of any communication component 12 is electrically connected to the lifting component 11, and the other end is electrically connected to an adapter 3. The support structure 2 includes a support component 21 and several protective components 22. The support component 21 is mounted on the main body and has several mounting portions 211. Any protective component 22 is mounted in one mounting portion 211. The adapter 3 is used to electrically connect the communication component 12 to an external system. Any protective component 22 has a through portion 221, and the adapter 3 passes through the through portion 221.

[0041] The wafer calibration device described above uses a lifting structure 1 and a support structure 2 mounted on the main body (not shown in the attached drawings). The lifting structure 1 includes a lifting component 11 and six communication components 12. In this embodiment, the lifting component 11 is a lifting unit in the wafer calibration device, and the communication components 12 are communication cables. The lifting component 11 is mounted on the main body and can drive the workpiece to be processed to rise and fall. In this embodiment, the workpiece to be processed is a wafer. One end of each of the communication components 12 is electrically connected to the lifting component 11, and the other end is electrically connected to an adapter 3. In this embodiment, the adapter 3 is an adapter connector, which can electrically connect the communication components to an external system. This allows the adapter 3 to transmit communication signals from the control system to the lifting component 11 through all the communication components 12, thereby controlling the lifting component 11 to drive the workpiece to rise or fall.

[0042] In addition, the support structure 2 includes a support member 21 and six protective members 22. In this embodiment, the support member 21 and the protective members 22 are a support frame and a protective ring, respectively. The support member 21 is disposed on the main body and has six mounting portions 211. In this embodiment, the mounting portions 211 are mounting holes. Each protective member 22 is disposed in one mounting portion 211. At the same time, each protective member 22 has a through portion 221. In this embodiment, the through portion 221 is a through hole. Each through portion 221 can allow an adapter 3 to pass through, so that when the communication member 12 is electrically connected to the lifting assembly 11 and the external system, one end of the communication member 12 can be electrically connected to the adapter 3 and the other end can be electrically connected to the lifting assembly 11. The adapter 3 can be electrically connected to the external system to electrically connect the lifting assembly 11 and the external system.

[0043] In addition, the support member 21 can provide support and fixation for the adapter 3, and the protective member 22 can separate the adapter 3 from the side wall of the mounting part 211 of the support member 21, so as to avoid friction between the adapter 3 and the side wall of the mounting part 211 of the support member 21 when the lifting component 11 drives the communication component 12 to rise and fall, which would cause wear to the adapter 3 and lead to communication abnormality of the communication component 12. Furthermore, when the communication component 12 moves, the fixed adapter 3 will not be dragged by the communication component 12, so as to avoid the connection between the communication component 12 and the adapter 3 being disconnected, which can further prevent communication abnormality of the communication component 12.

[0044] In summary, by inserting the adapter 3 through the through-hole 221 on the protective member 22, one end of the communication member 12 can be electrically connected to the adapter 3 and connected to an external system through the adapter 3, while the other end of the communication member 12 can be electrically connected to the lifting assembly 11, thereby enabling the lifting assembly 11 to be connected to an external system. When the lifting assembly 11 moves the communication member 12 up and down, the support member 21 can provide support for the communication member 12 through the adapter 3, making the movement of the adapter 3 smoother. The protective member 22 can separate the adapter 3 from the side wall of the mounting part 211 of the support member 21, preventing friction and wear between the adapter 3 and the side wall of the mounting part 211 of the support member 21 during movement, and preventing the communication member 12 from dragging the adapter 3 and causing a disconnection. In this way, communication abnormalities of the communication member 12 can be avoided, and the normal operation of the lifting assembly 11 can be guaranteed.

[0045] In one embodiment, such as Figures 1 to 3 As shown, a recess 222 is provided on the periphery of the protective member 22, and the protective member 22 is adapted to be engaged in the mounting part 211 through the recess 222.

[0046] The wafer calibration device with the above structure has a recess 222 formed on the periphery of the protective member 22. In this embodiment, the recess 222 is a recessed groove. When the protective member 22 is installed in the mounting part 211 on the support member 21, the recess 222 can be engaged with the side wall of the mounting part 211 of the support member 21 to install the protective member 22 in the mounting part 211.

[0047] In one embodiment, such as Figure 2 As shown, the mounting part 211 is a mounting hole, and the recessed part 222 is a recessed groove. The bottom surface of the recessed groove forms a limiting circle. The diameter of the limiting circle is smaller than the diameter of the mounting hole, so as to movably connect the protective member 22 and the support member 21.

[0048] The wafer calibration device described above, by setting the mounting part 211 as a mounting circular hole and the recessed part 222 as a recessed groove, wherein the bottom surface of the recessed groove can form a limiting circle, the diameter of the limiting circle being smaller than the diameter of the mounting circular hole, so that when the protective member 22 is installed in the mounting part 211 on the support member 21 through the recessed part 222, the protective member 22 can move relative to the support member 21, thereby movably connecting the protective member 22 and the support member 21; and the movably connected protective member 22 and support member 21 can provide a certain amount of movement space for the communication member 12, that is, when the communication member 12 moves and shakes, the communication member 12 can drive the protective member 22 to move relative to the support member 21, preventing the end of the communication member 12 from loosening with the lifting assembly 11.

[0049] In one embodiment, such as Figure 3As shown, any protective component 22 is configured to be elastic, and the through portion 221 and the adapter 3 are interference fit.

[0050] The wafer calibration device with the above structure, by configuring the protective member 22 to be elastic, allows the adapter 3 to achieve an interference fit with the through portion 221 when the adapter 3 is inserted into the through portion 221 on the protective member 22, so that the adapter 3 will not shake when the communication member 12 is moved by the lifting component 11.

[0051] In one embodiment, such as Figure 2 As shown, all the mounting parts 211 are spaced apart on the support member 21 to separate all the communication parts 12.

[0052] The wafer calibration device with the above structure, by having all the mounting portions 211 spaced apart on the support member 21, ensures that when the protective member 22 is installed in the mounting portion 211, all the protective members 22 are also spaced apart. Furthermore, when the end of the communication member 12 passes through the through portion 221 on the protective member 22, all the communication members 12 are also spaced apart. In this way, the situation of short circuit due to contact between adjacent communication members 12 can be avoided.

[0053] In one embodiment, such as Figure 2 As shown, the support member 21 includes a connecting part 212 and a support part 213. The connecting part 212 and the support part 213 are connected to each other. The connecting part 212 is adapted to be connected to the body. All the mounting parts 211 are formed on the support part 213.

[0054] The wafer calibration device with the above structure includes a support member 21 comprising a connecting part 212 and a support part 213. In this embodiment, the connecting part 212 and the support part 213 are a connecting plate and a support plate, respectively. The connecting part 212 and the support part 213 are interconnected, and the connecting part 212 can be connected to the main body to mount the support part 213 on the main body. The support part 213 is provided with all the mounting parts 211 to provide support for the communication component 12 through the protective member 22 mounted on the mounting part 211.

[0055] In one embodiment, such as Figure 2 As shown, the connecting part 212 has several fixing holes 2121, and the connecting part 212 is connected to the main body through all the fixing holes 2121.

[0056] The wafer calibration device with the above structure has a plurality of fixing holes 2121 formed on the connecting part 212, each fixing hole 2121 corresponding to a connecting hole on the main body, so that the connecting part 212 can be connected to the connecting hole on the main body through all the fixing holes 2121, thereby enabling the connecting part 212 to be mounted on the main body.

[0057] In one embodiment, such as Figure 2 As shown, the connecting part 212 and the supporting part 213 are arranged vertically.

[0058] The wafer calibration device with the above structure is designed so that the connecting part 212 and the support part 213 are arranged vertically. When the end of the communication component 12 passes through the through part 221 on the protective component 22, the support part 213 and the main body of the communication component 12 are arranged vertically, so that the communication component 12 can move more smoothly and reduce the resistance when the communication component 12 moves.

[0059] In one embodiment, such as Figures 1 to 3 As shown, the support component 21 is made of carbon fiber reinforced polymer, and the protective component 22 is made of silicone or polyurethane.

[0060] The wafer calibration device with the above structure reduces the overall mass of the support member 21 by using carbon fiber reinforced polymer and increases the resonant frequency of the support member 21. Furthermore, by using silicone or polyurethane for the protective member 22, the damping coefficient of the protective member 22 can be increased and the shock absorption efficiency of the protective member 22 can be improved.

[0061] According to an embodiment of the present invention, another aspect also provides a lithography machine, such as... Figures 1 to 3 As shown, the lithography machine includes the aforementioned wafer calibration device. In this structure, the end of the communication component 12 passes through a through-hole 221 formed on the protective component 22 and is electrically connected to the lifting assembly 11. Thus, when the lifting assembly 11 moves the communication component 12 up and down, the support component 21 provides support for the communication component 12, making its movement smoother. The protective component 22 separates the communication component 12 from the side wall of the mounting portion 211 on the support component 21, preventing friction and wear between the communication component 12 and the side wall of the mounting portion 211 during movement. This avoids communication abnormalities in the communication component 12 and ensures the normal operation of the lifting assembly 11.

[0062] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A wafer calibration device, characterized in that, include: ontology; The lifting structure (1) includes a lifting component (11) and several communication components (12). The lifting component is disposed on the main body. The lifting component (11) is used to drive the workpiece to be processed to lift. One end of any of the communication components (12) is electrically connected to the lifting component (11), and the other end is electrically connected to the adapter (3). The support structure (2) includes a support member (21) and a plurality of protective members (22). The support member (21) is disposed on the main body. A plurality of mounting portions (211) are provided on the support member (21). Any of the protective members (22) is disposed in one of the mounting portions (211). The adapter (3) is used to electrically connect the communication device (12) and the external system. Each of the protective devices (22) has a through-hole (221), and the adapter (3) passes through the through-hole (221).

2. The wafer calibration apparatus according to claim 1, characterized in that, The protective component (22) has a recess (222) on its periphery, and the protective component (22) is adapted to be engaged in the mounting part (211) through the recess (222).

3. The wafer calibration apparatus according to claim 2, characterized in that, The mounting part (211) is a mounting hole, and the recessed part (222) is a recessed groove. The bottom surface of the recessed groove forms a limiting circle. The diameter of the limiting circle is smaller than the diameter of the mounting hole, so as to movably connect the protective member (22) and the support member (21).

4. The wafer calibration apparatus according to claim 3, characterized in that, Each of the protective components is configured to be resilient, and the through portion (221) and the adapter (3) are interference fit.

5. The wafer calibration apparatus according to any one of claims 1-4, characterized in that, All of the mounting portions (211) are spaced apart on the support member (21) to separate all of the communication components (12).

6. The wafer calibration apparatus according to claim 5, characterized in that, The support member (21) includes a connecting part (212) and a supporting part (213), the connecting part (212) and the supporting part (213) are connected to each other, the connecting part (212) is adapted to be connected to the body, and all the mounting parts (211) are formed on the supporting part (213).

7. The wafer calibration apparatus according to claim 6, characterized in that, The connecting part (212) is provided with a plurality of fixing holes (2121), and the connecting part (212) is connected to the body through all of the fixing holes (2121).

8. The wafer calibration apparatus according to claim 7, characterized in that, The connecting part (212) and the supporting part (213) are arranged vertically.

9. The wafer calibration apparatus according to claim 1, characterized in that, The support (21) is made of carbon fiber reinforced polymer, and the protective component (22) is made of silicone or polyurethane.

10. A lithography machine, characterized in that, The wafer calibration apparatus includes any one of claims 1-9.

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