A target coater

By modifying the mechanical structure and automating the electrical control of the coating machine, the problems of easy cracking of workpieces and inconvenient operation of the equipment were solved, realizing automated coating and improving product quality and production efficiency.

CN224542177UActive Publication Date: 2026-07-24QINGYUAN QINGCHENG TIANHUA AUTOMATION EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
QINGYUAN QINGCHENG TIANHUA AUTOMATION EQUIP CO LTD
Filing Date
2025-08-11
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing coating machines suffer from problems such as workpieces being prone to cracking and becoming unusable, and inconvenient equipment structure and operation, especially manual operation which leads to equipment inconvenience and workpiece damage.

Method used

By adopting mechanical research and development upgrades and electrical automation control, a target coating machine including a heating box assembly, an ultrasonic coating assembly, an indium heating assembly and an electrical control box was designed. The machine achieves automated coating process by driving the roller rotation, hot air circulation and ultrasonic coating through a servo geared motor.

Benefits of technology

It significantly improved product quality, reduced scrap rates, reduced worker fatigue, and improved coating uniformity and efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to target material manufacturing technical field, specifically disclose a kind of target material coating machine, including target material, rack, heating box subassembly, ultrasonic wave brushing subassembly, indium heating subassembly and electrical control box, heating box subassembly includes heating box, heating box cover, roller rotation subassembly and hot air circulation subassembly, heating box is equipped with heating plate inside;Roller rotation subassembly includes two rollers, and rotating mechanism that is equipped with on rack and drives two roller rotations;Hot air circulation subassembly includes hot air outlet pipe, hot air return pipe and hot air circulation fan, and hot air outlet pipe and hot air return pipe are communicated in hot air circulation fan;Ultrasonic wave brushing subassembly includes movement module and ultrasonic wave heating gun;Indium heating subassembly is equipped between movement module and heating box;The top of electrical control box is equipped with man-machine exchange control screen.The application is reformed by mechanical research and development, electrical automation control, does not need worker long time fatigue operation, can significantly improve product quality, reduce scrap rate.
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Description

Technical Field

[0001] This utility model belongs to the field of target material manufacturing technology, and specifically relates to a target material coating machine. Background Technology

[0002] The coating machine is mainly used for heating and coating the inner surface of ITO and metal targets with indium or tin materials.

[0003] Existing coating machines are manually operated, which leads to technical problems such as workpieces being prone to cracking and becoming unusable, and the equipment structure making it inconvenient to load and unload workpieces.

[0004] To address the problems of workpiece cracking and scrapping due to manual coating in existing technologies, as well as the inconvenience of equipment assembly and disassembly, the structure of the coating machine needs to be improved to solve the current technical problems. Utility Model Content

[0005] The purpose of this invention is to provide a target coating machine that, through mechanical research and development, upgrading and improvement, and electrical automation control, eliminates the need for workers to work long hours while fatigued, thereby improving product quality and reducing scrap rate.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a target material coating machine, comprising a target material, a frame, a heating box assembly, an ultrasonic coating assembly, an indium heating assembly, and an electrical control box, characterized in that the heating box assembly comprises a heating box body, a heating box cover, a roller rotation assembly, and a hot air circulation assembly, the heating box body is fixed to the top of the frame, the heating box cover is hinged to the heating box body, and a heating plate is provided inside the heating box body; The roller rotation assembly includes two parallel rollers, both ends of which are rotatably connected to two opposite side walls of the heating chamber. The target material is freely placed on top between the two rollers. The frame is provided with a rotation mechanism that drives the two rollers to rotate. The hot air circulation assembly includes a hot air outlet pipe, a hot air return pipe, and a hot air circulation fan. The hot air outlet pipe and the hot air return pipe are parallel to the roller and are respectively fixed to two opposite side walls of the heating box. The hot air outlet pipe and the hot air return pipe are respectively connected to the air outlet and air inlet of the hot air circulation fan. The ultrasonic coating assembly includes a moving module and an ultrasonic heating gun. The ultrasonic heating gun is detachably connected to the moving module. Both the heating chamber and the heating chamber cover are provided with semi-circular grooves. The two semi-circular grooves are joined together to form a through hole for the ultrasonic heating gun to move. The indium heating assembly is disposed on the top surface of the electrical control box and is located between the movable module and the heating box. The top of the electrical control box is equipped with a human-machine interface control panel.

[0007] To better realize this utility model, a tilting electric cylinder is connected between the heating box cover and the frame.

[0008] To better realize this utility model, the heating chamber body is provided with an upper protective cover, and the heating chamber cover is provided with a lower protective cover.

[0009] To better realize this utility model, the two ends of the perforation are respectively provided with a front sealing plate of the heating box and a rear sealing plate of the heating box.

[0010] To better realize this utility model, the rotating mechanism includes a servo geared motor, a motor mounting base, a drive sprocket, a transmission chain, a front support bearing, a driven sprocket, rollers, a rear support bearing, and limiting rings. The servo geared motor is fixedly connected to the frame via the motor mounting base. The drive sprocket is connected to the output end of the servo geared motor. There are two driven sprockets, one coaxially connected to each roller. The two driven sprockets and the drive sprocket are connected by the transmission chain. The two ends of the roller are rotatably connected to the heating chamber via the front support bearing and the rear support bearing, respectively. There are four limiting rings, two coaxially fitted onto each roller. The target material is located between two limiting rings.

[0011] To better realize this utility model, the movable module includes a module mounting frame, a vertical movable module, a front-back movable module, a counterweight, and a floating clamping mechanism. The front-back movable module is fixedly connected to the top surface of the electrical control box through the module mounting frame, and its movement direction is parallel to the extension direction of the roller. The vertical movable module is movably connected to the front-back movable module. The floating clamping mechanism is connected to the vertical movable module. The ultrasonic heating gun is detachably connected to the floating clamping mechanism. One end of the ultrasonic heating gun is connected to a coating brush head near the heating box, and the other end is connected to a counterweight.

[0012] To better realize this utility model, the floating clamping mechanism includes a mounting base, a floating plate, a rear limiting screw, an inner bearing seat, a rotating shaft, a front limiting screw, an outer bearing seat, a front fixing clamp, and a rear fixing clamp. The mounting base is fixedly connected to the up-and-down moving module. The two ends of the roller are rotatably connected to the mounting base through the inner bearing seat and the outer bearing seat, respectively. The floating plate is movably connected to the top of the rotating shaft. The front limiting screw and the rear limiting screw are threaded through the mounting base and are located on both sides of the rotating shaft, respectively. The front fixing clamp and the rear fixing clamp are fixedly connected to the top surface of the floating plate. The ultrasonic heating gun is detachably connected to the front fixing clamp and the rear fixing clamp.

[0013] To better realize this utility model, the indium heating assembly includes an indium disk and a heater.

[0014] Beneficial effects: This application improves and upgrades mechanical research and development, and implements electrical automation control, eliminating the need for prolonged worker fatigue and significantly improving product quality while reducing scrap rates. Specifically: Open the heating chamber cover, place the pre-clamped target material on two rollers inside the heating chamber, and adjust the distance between the upper limit rings of the rollers to prevent the target material from shifting; lower the heating chamber cover and seal the front and rear sealing plates of the heating chamber; start the servo reduction motor to drive the rollers to rotate, start the heating plate, and start the circulating fan, so that the target material rotates continuously inside the heating chamber for uniform heating. During the target heating process, the heater in the indium heating assembly is simultaneously activated to heat the indium in the indium pan to a molten state for later use. Once the target reaches the process-set temperature, the ultrasonic coating assembly is activated to heat the coating head. The forward and backward movement module and the up and down movement module are manipulated to apply molten indium to the coating head. The front cover of the heating chamber is opened, and the forward and backward movement module and the up and down movement module are used to move the coating brush head to the inner hole of the target, applying indium to the inner wall of the target. This process is repeated, combined with the uniform rotation of the target, to coat the inner wall of the target with a uniform layer of indium. When the coating reaches a certain thickness, the rear cover of the heating chamber is opened, and the coating thickness is checked using a special measuring tool. When the thickness meets the process requirements, coating is stopped, the coating brush head is removed, and the ultrasonic coating assembly is turned off. The heating chamber is then shut down. When the temperature drops to the process-set temperature, the hot air circulation fan and rollers are turned off, the heating chamber cover is opened, and the target is removed, completing the operation. Attached Figure Description

[0015] Figure 1 This is an assembly structure diagram of the coating machine of this utility model from one angle; Figure 2 This is an assembly structure diagram of the coating machine of this utility model from another angle; Figure 3 This is a structural diagram of the rotating mechanism of this utility model; Figure 4 This is a structural diagram of the hot air circulation component of this utility model; Figure 5 This is a structural diagram of the mobile module of this utility model; Figure 6 This is a structural diagram of the floating clamping mechanism of this utility model.

[0016] In the diagram: 1. Target material; 2. Frame; 3. Heating chamber assembly; 31. Heating chamber body; 311. Heating plate; 312. Lower protective cover; 32. Heating chamber cover; 321. Upper protective cover; 33. Roller rotation assembly; 331. Roller; 332. Servo geared motor; 333. Motor mounting base; 334. Drive sprocket; 335. Transmission chain; 336. Front support bearing; 337. Driven sprocket; 338. Rear support bearing; 339. Limiting ring; 34. Hot air circulation assembly; 341. Hot air outlet duct; 342. Hot air return duct; 343. Hot air circulation fan; 35. Perforation; 351. Front of heating chamber 352. Rear sealing plate of heating box; 36. Tilting electric cylinder; 4. Ultrasonic coating assembly; 41. Ultrasonic heating gun; 42. Module mounting bracket; 43. Up and down moving module; 44. Front and rear moving module; 45. Balance weight; 46. Floating clamping mechanism; 461. Mounting base; 462. Floating plate; 463. Rear limit screw; 464. Inner bearing seat; 465. Rotating shaft; 466. Front limit screw; 467. Outer bearing seat; 468. Front fixing clamp; 469. Rear fixing clamp; 47. Coating brush head; 5. Indium heating assembly; 51. Indium disk; 6. Electrical control box; 7. Human-machine interface control panel. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Example like Figure 1 - Figure 6 As shown, a target coating machine comprises a target 1, a frame 2, a heating chamber assembly 3, an ultrasonic coating assembly 4, an indium heating assembly 5, and an electrical control box 6. The indium heating assembly 5 includes an indium plate 51 and a heater, and is disposed on the top surface of the electrical control box 6, located between the moving module and the heating chamber 31. A human-machine interface control panel 7 is provided on the top of the electrical control box 6.

[0019] The heating chamber assembly 3 includes a heating chamber body 31, a heating chamber cover 32, a roller rotation assembly 33, and a hot air circulation assembly 34. The heating chamber body 31 is fixedly installed on the top of the frame 2. The heating chamber cover 32 is hinged to the heating chamber body 31, and a flipping electric cylinder 36 connects the heating chamber cover 32 and the frame 2. A heating plate 311 is installed inside the heating chamber body 31. An upper protective cover 321 is installed on the heating chamber body 31, and a lower protective cover 312 is installed on the heating chamber cover 32. Its working principle is as follows: 1. Control the flipping electric cylinder to open and close the heating chamber cover 32; 2. Control the heating plate 311 to heat the target material 1; 3. Drive the roller rotation assembly 33 to make the target material 1 rotate, so that it is heated evenly and coated evenly; 4. Start the hot air circulation assembly 34 to make the temperature inside the heating chamber body 31 uniform. By adding the upper protective cover 321 and the lower protective cover 312, burns can be prevented from being accidentally touched by the heating chamber body 31 or the heating chamber cover 32 during operation.

[0020] The roller rotation assembly 33 includes two parallel rollers 331. Both ends of the rollers 331 are rotatably connected to two opposite side walls of the heating chamber 31. The target material 1 is freely placed on the top between the two rollers 331. A rotation mechanism for driving the two rollers 331 to rotate is installed on the frame 2. The rotating mechanism consists of a servo geared motor 332, a motor mounting base 333, a drive sprocket 334, a transmission chain 335, a front support bearing 336, a driven sprocket 337, rollers 331, a rear support bearing 338, and a limiting ring 339. The servo geared motor 332 is fixedly connected to the frame 2 via the motor mounting base 333. The drive sprocket 334 is connected to the output end of the servo geared motor 332. There are two driven sprockets 337, which are respectively installed on two rollers 331. The two driven sprockets 337 and the drive sprocket 334 are connected by the transmission chain 335. The two ends of the rollers 331 are rotatably connected to the heating chamber 31 via the front support bearing 336 and the rear support bearing 338, respectively. There are four limiting rings 339, with two coaxially fitted on each roller 331. The target material 1 is located between two limiting rings 339. Its working principle is as follows: the servo geared motor 332 drives the roller 331 to rotate via the drive sprocket 334, transmission chain 335, and driven sprocket 337, thereby rotating the target material 1 supported on the roller 331. The speed and direction of the servo geared motor 332 are controlled by the PLC in the control panel, so that the target material 1 can obtain different speeds and directions to meet the process requirements.

[0021] The hot air circulation assembly 34 consists of a hot air circulation fan 343, a hot air outlet duct 341, and a hot air return duct 342. The hot air outlet duct 341 and the hot air return duct 342 are parallel to the roller 331 and are respectively fixed to two opposite side walls of the heating chamber 31. The hot air outlet duct 341 and the hot air return duct 342 are respectively connected to the air outlet and air inlet of the hot air circulation fan 343. The hot air circulation assembly 34 and the heating plate 311 inside the heating chamber 31 constitute a complete heating system, ensuring that the target material 1 inside the heating chamber 31 is heated evenly and stably, meeting the process requirements.

[0022] The ultrasonic coating assembly 4 includes a moving module and an ultrasonic heating gun 41. The ultrasonic heating gun 41 is detachably connected to the moving module. The heating chamber 31 and the heating chamber cover 32 are both provided with semi-circular grooves. The semi-circular grooves are spliced ​​together to form a through hole 35 for the ultrasonic heating gun 41 to move. The two ends of the through hole 35 are respectively provided with a front sealing plate 351 and a rear sealing plate 352 of the heating chamber.

[0023] The movable module includes a module mounting bracket 42, a vertical movable module 43, a front-to-back movable module 44, a counterweight 45, and a floating clamping mechanism 46. The front-to-back movable module 44 is fixedly connected to the top surface of the electrical control box 6 via the module mounting bracket 42, and its movement direction is parallel to the extension direction of the roller 331. The vertical movable module 43 is movably connected to the front-to-back movable module 44. The floating clamping mechanism 46 is connected to the vertical movable module 43. The ultrasonic heating gun 41 is detachably connected to the floating clamping mechanism 46. One end of the ultrasonic heating gun 41 is connected to a coating brush head 47 near the heating box 31, and the other end is connected to the counterweight 45.

[0024] The floating clamping mechanism uses a clamping method to fix the ultrasonic heating gun 41, and the ultrasonic heating gun 41 can be flexibly adjusted back and forth. The floating clamping mechanism 46 includes a mounting base 461, a floating plate 462, a rear limiting screw 463, an inner bearing seat 464, a rotating shaft 465, a front limiting screw 466, an outer bearing seat 467, a front fixing clamp 468, and a rear fixing clamp 469. The mounting base 461 is fixedly connected to the vertical moving module 43. The two ends of the rotating shaft 465 are rotatably connected to the mounting base 461 through the inner bearing seat 464 and the outer bearing seat 467, respectively. The floating plate 462 is movably connected to the top of the rotating shaft 465. The front limiting screw 466 and the rear limiting screw 463 are threaded through the mounting base 461 and are located on both sides of the rotating shaft 465, respectively. The front fixing clamp 468 and the rear fixing clamp 469 are fixedly connected to the top surface of the floating plate 462. The ultrasonic heating gun 41 is detachably connected to the front fixing clamp 468 and the rear fixing clamp 469. Its working principle is as follows: The floating plate 462, the rotating shaft 465, the inner bearing seat 464, and the outer bearing seat 467 form a floating mechanism, which is fixed on the mounting base 461; the floating plate 462 can swing up and down along the rotating shaft 465 to realize the swing function. The front fixing clamp 468 and the rear fixing clamp 469 fix the ultrasonic heating gun 41 on the floating plate 462, so that the ultrasonic heating gun 41 can realize the up and down floating function. The front limit screw 466 and the rear limit screw 463 can adjust the swing amplitude; when used with the balance weight 45, the adhesion force between the coating brush head 47 and the inner wall of the target material 1 can be adjusted, and at the same time, the coating brush head 47 can be prevented from scratching the inner wall of the target material 1 and damaging the ultrasonic heating gun 41.

[0025] The working principle of the ultrasonic coating assembly is as follows: 1. The forward and backward moving module 44 controls the coating brush head 47 on the ultrasonic heating gun 41 to move above the indium disk 51; 2. The up and down moving module 43 controls the coating brush head 47 to descend, allowing it to adhere to the molten indium solution; 3. It then rises to the set height; 4. The forward and backward moving module 44 operates, controlling the coating brush head 47 to enter the heating chamber 31, reaching the inner hole of the target material 1 at the required process temperature; 5. The up and down moving module 43 operates, controlling the coating brush head 47 to adhere to the inner wall of the target material 1; 6. Subsequently, the forward and backward moving module 44 moves forward and backward according to the PLC-set parameters for coating; 7. After a certain number of coatings, the up and down moving module 43 operates, controlling the coating brush head 47 to rise to the set height; 8. The forward and backward moving module 44 operates, controlling the coating brush head 47 to retreat back above the steel disk. The PLC controls the repetition of steps 1 to 8, coating the inner wall of the target material 1 with a layer of indium that meets the requirements of the next process. The operation process has two modes: manual and automatic.

[0026] The working principle of this utility model is as follows: 1. Open the heating chamber cover 32, place the pre-clamped target material 1 on the two rollers 331 inside the heating chamber 31, adjust the distance of the upper limit ring 339 of the rollers 331 to prevent the target material 1 from moving; lower the heating chamber cover 32, and seal the front sealing plate 351 and the rear sealing plate 352 of the heating chamber; start the servo reduction motor 332 to drive the rollers 331 to rotate, start the heating plate 311, and start the circulating fan to make the target material 1 rotate continuously inside the heating chamber 31 for uniform heating.

[0027] 2. During the heating process of target 1, the heater in the indium heating assembly 5 is simultaneously activated to heat the indium in the indium disk 51 to a molten state for later use. After the target 1 is heated to the process set temperature, the ultrasonic coating assembly 4 is activated to heat the coating head. The forward and backward moving module 44 and the up and down moving module 43 are controlled to apply indium liquid to the coating head. The front sealing plate 351 of the heating box is opened. The forward and backward moving module 44 and the up and down moving module 43 are controlled to move the coating brush head 47 to the inner hole of the target 1 and apply indium to the inner wall of the target 1. The above actions are repeated, and combined with the uniform rotation of the target 1, a uniform layer of indium is coated on the inner wall of the target 1.

[0028] 3. When the coating reaches a certain thickness, open the heating chamber back cover 352 and use a special measuring tool to check the coating thickness; when the thickness meets the process requirements, stop coating, remove the coating brush head 47, and turn off the ultrasonic coating assembly 4. Turn off the heating chamber 31.

[0029] IV. When the temperature drops to the process setting, turn off the hot air circulation fan 343 and roller 331, open the heating box cover 32, remove the target material 1, and the operation is complete.

[0030] Finally, it should be noted that the above are merely preferred embodiments of this utility model and are not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A target coating machine, comprising a target (1), a frame (2), a heating box assembly (3), an ultrasonic coating assembly (4), an indium heating assembly (5), and an electrical control box (6), characterized in that, The heating box assembly (3) includes a heating box body (31), a heating box cover (32), a roller rotation assembly (33), and a hot air circulation assembly (34). The heating box body (31) is fixed to the top of the frame (2), and the heating box cover (32) is hinged to the heating box body (31). A heating plate (311) is provided inside the heating box body (31). The roller rotation assembly (33) includes two parallel rollers (331), both ends of which are rotatably connected to the two opposite side walls of the heating box (31). The target material (1) is freely placed on the top between the two rollers (331). The frame (2) is provided with a rotation mechanism to drive the two rollers (331) to rotate. The hot air circulation assembly (34) includes a hot air outlet pipe (341), a hot air return pipe (342), and a hot air circulation fan (343). The hot air outlet pipe (341) and the hot air return pipe (342) are parallel to the roller (331) and are respectively fixed to two opposite side walls of the heating box (31). The hot air outlet pipe (341) and the hot air return pipe (342) are respectively connected to the air outlet and air inlet of the hot air circulation fan (343). The ultrasonic coating assembly (4) includes a moving module and an ultrasonic heating gun (41). The ultrasonic heating gun (41) is detachably connected to the moving module. The heating box (31) and the heating box cover (32) are both provided with semi-circular grooves. The two semi-circular grooves are spliced ​​together to form a through hole (35) for the ultrasonic heating gun (41) to move. The indium heating assembly (5) is disposed on the top surface of the electrical control box (6) and is located between the moving module and the heating box (31); The top of the electrical control box (6) is equipped with a human-machine interface control panel (7).

2. The target coating machine according to claim 1, characterized in that, A tilting electric cylinder (36) is connected between the heating box cover (32) and the frame (2).

3. The target coating machine according to claim 1, characterized in that, The heating chamber (31) is provided with an upper protective cover (321), and the heating chamber cover (32) is provided with a lower protective cover (312).

4. The target coating machine according to claim 1, characterized in that, The two ends of the perforation (35) are respectively provided with a front sealing plate (351) and a rear sealing plate (352) for the heating box.

5. A target coating machine according to claim 1, characterized in that, The rotating mechanism includes a servo geared motor (332), a motor mounting base (333), a drive sprocket (334), a transmission chain (335), a front support bearing (336), a driven sprocket (337), a rear support bearing (338), and a limiting ring (339). The servo geared motor (332) is fixedly connected to the frame (2) via the motor mounting base (333). The drive sprocket (334) is connected to the output end of the servo geared motor (332). The driven sprocket (337) is connected to the output end of the servo geared motor (332). There are two rollers (331) in total, with each roller (331) coaxially connected to one. The two passive sprockets (337) and the active sprocket (334) are connected by the transmission chain (335). The two ends of the roller (331) are rotatably connected to the heating box (31) through the front support bearing (336) and the rear support bearing (338), respectively. There are four limiting rings (339) in total, with two coaxially fitted on each roller (331). The target material (1) is located between the two limiting rings (339).

6. The target coating machine according to claim 1, characterized in that, The movable module includes a module mounting bracket (42), a vertical movable module (43), a front-back movable module (44), a counterweight (45), and a floating clamping mechanism (46). The front-back movable module (44) is fixedly connected to the top surface of the electrical control box (6) through the module mounting bracket (42), and its movement direction is parallel to the extension direction of the roller (331). The vertical movable module (43) is movably connected to the front-back movable module (44). The floating clamping mechanism (46) is connected to the vertical movable module (43). The ultrasonic heating gun (41) is detachably connected to the floating clamping mechanism (46). One end of the ultrasonic heating gun (41) is connected to a coating brush head (47) near the heating box (31), and the other end is connected to a counterweight (45).

7. A target coating machine according to claim 6, characterized in that, The floating clamping mechanism (46) includes a mounting base (461), a floating plate (462), a rear limiting screw (463), an inner bearing seat (464), a rotating shaft (465), a front limiting screw (466), an outer bearing seat (467), a front fixing clamp (468), and a rear fixing clamp (469). The mounting base (461) is fixedly connected to the up-and-down moving module (43), and the two ends of the rotating shaft (465) are rotatably connected to the upper and lower moving module (43) through the inner bearing seat (464) and the outer bearing seat (467), respectively. Mounting base (461), floating plate (462) is movably connected to the top of rotating shaft (465), front limiting screw (466) and rear limiting screw (463) are threaded through mounting base (461) and are respectively located on both sides of rotating shaft (465); front fixing clamp (468) and rear fixing clamp (469) are fixedly connected to the top surface of floating plate (462), and ultrasonic heating gun (41) is detachably connected to front fixing clamp (468) and rear fixing clamp (469).

8. The target coating machine according to claim 1, characterized in that, The indium heating assembly (5) includes an indium disk (51) and a heater.