A pick-up detection mechanism of a wafer handler

Abstract

The utility model relates to wafer sorting machine technical field, concretely is a kind of wafer sorting machine's pickup detection mechanism, including detection seat, support frame and pickup device, the inside of detection seat is provided with cavity, the side surface of detection seat is fixedly connected with moving device, the outer surface of moving device is threadedly connected with detection instrument body, the other end of detection instrument body away from moving device is slidably connected with the inner wall of cavity, the side surface of cross bar is fixedly connected with first motor, the output of first motor is fixedly connected with screw rod, the one end of screw rod away from first motor is rotatably connected with the inner wall of connecting groove on one side, the outer surface of screw rod is threadedly connected with pickup device. The utility model, by the setting of moving device, expands detection range, and detection instrument body moves stably, ensures detection accuracy;Pickup device can flexibly adjust horizontal and vertical position, realize accurate pickup to different position wafer.

Description

Technical Field

[0001] This utility model relates to the field of wafer sorting machine technology, and in particular to a picking and detection mechanism for a wafer sorting machine. Background Technology

[0002] In today's rapidly developing semiconductor industry, wafers, as the core carrier of integrated circuits, directly determine the performance and yield of chips. During the manufacturing process, wafers undergo multiple steps, including dicing, grinding, and polishing. Each step can produce defects such as surface scratches, residual impurities, and cracks, which severely impact the quality of subsequent chip production. Therefore, precise sorting and inspection of wafers to select qualified wafers is an indispensable and crucial step in the semiconductor manufacturing process.

[0003] In existing technologies, some testing institutions have limited range of movement and fixed testing angles, which cannot perform all-round, multi-angle testing of wafers, and may miss defects on the wafer surface, affecting the accuracy of testing. Utility Model Content

[0004] The purpose of this invention is to solve the problem of limited detection range of existing detection mechanisms, and to propose a picking and detection mechanism for a wafer sorting machine.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a picking and detection mechanism for a wafer sorting machine, comprising a detection base, a support frame, and a picking device.

[0006] The detection seat has an internal cavity, and a moving device is fixedly connected to the side of the detection seat. The outer surface of the moving device is threadedly connected to the detector body, and the other end of the detector body away from the moving device is slidably connected to the inner wall of the cavity.

[0007] The support frame is located on one side of the detection seat. A crossbar is fixedly connected to the top of the support frame. A connecting groove is provided inside the crossbar. A first motor is fixedly connected to one side surface of the crossbar. A screw is fixedly connected to the output end of the first motor. The end of the screw away from the first motor is rotatably connected to the inner wall of one side of the connecting groove. A pickup device is threadedly connected to the outer surface of the screw.

[0008] Furthermore, the moving device includes a connecting block fixedly connected to the side of the detection seat, a second motor fixedly connected to the outer surface of the connecting block, a lead screw fixedly connected to the output end of the second motor, a connecting plate rotatably connected to the end of the lead screw away from the second motor, the connecting plate fixedly connected to the side of the detection seat, and a sliding rod fixedly connected between the connecting block and the connecting plate.

[0009] Furthermore, a movable block is fixedly connected to one end of the detector body, and the other end of the detector body is slidably connected to the inner wall of the cavity. The movable block is slidably connected to the slide rod.

[0010] Furthermore, the picking device includes a movable frame, which is threadedly connected to the outer surface of the screw. A hydraulic cylinder is provided at the top of the movable frame, and a hydraulic rod is fixedly connected to the output end of the hydraulic cylinder. A lifting plate is fixedly connected to the telescopic end of the hydraulic rod, and an automatic vacuum suction cup is fixedly connected to the bottom of the lifting plate.

[0011] Furthermore, a connecting rod is fixedly connected to the inner top of the movable frame, and the lifting plate is slidably connected to the connecting rod.

[0012] Furthermore, a placement pad is snapped onto the top edge of the detection seat, and a detection placement plate is fixedly connected to the top of the placement pad.

[0013] Furthermore, a support base is fixedly connected to the bottom of the detection seat, and a base plate is fixedly connected to the bottom of the support base.

[0014] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0015] In this invention, the moving device drives the detector body to move, expanding the detection range and ensuring stable movement of the detector body, thus guaranteeing accurate detection. Under the action of the first motor and hydraulic cylinder, the pickup device can flexibly adjust the horizontal and vertical positions to achieve accurate pickup of wafers at different positions, solving the problem of inflexible pickup and detection position adjustment in the prior art. Attached Figure Description

[0016] Figure 1 A three-dimensional structural diagram of the picking and detection mechanism of a wafer sorting machine is provided for this utility model;

[0017] Figure 2 This utility model provides a schematic diagram of the structure of the picking device in the picking and detection mechanism of a wafer sorting machine;

[0018] Figure 3 This utility model provides a schematic diagram of the support frame structure in the picking and detection mechanism of a wafer sorting machine;

[0019] Figure 4 This utility model provides a schematic diagram of the structure of the detection seat in the picking and detection mechanism of a wafer sorting machine;

[0020] Figure 5 This is a partial structural diagram of the picking and detection mechanism of a wafer sorting machine according to the present invention.

[0021] Legend:

[0022] 1. Detection seat; 11. Cavity; 12. Moving device; 121. Connecting block; 122. Second motor; 123. Lead screw; 124. Connecting plate; 125. Slide rod; 13. Detector body; 131. Moving block; 14. Placement pad; 15. Detection placement plate; 2. Support frame; 21. Crossbar; 22. Connecting groove; 23. First motor; 24. Screw; 3. Pickup device; 31. Moving frame; 32. Hydraulic cylinder; 33. Hydraulic rod; 34. Lifting plate; 35. Automatic vacuum suction cup; 36. Connecting rod; 4. Support seat; 5. Base plate. Detailed Implementation

[0023] Please see Figure 1-5 This utility model provides a technical solution: a picking and detection mechanism for a wafer sorting machine, including a detection seat 1, a support frame 2 and a picking device 3.

[0024] The inside of the detection seat 1 is provided with a cavity 11. A moving device 12 is fixedly connected to the side of the detection seat 1. The outer surface of the moving device 12 is threadedly connected to the detector body 13. The other end of the detector body 13 away from the moving device 12 is slidably connected to the inner wall of the cavity 11.

[0025] The specific setup and function of its support frame 2 and pickup device 3 will be explained below.

[0026] In this embodiment: the support frame 2 is located on one side of the detection seat 1. A crossbar 21 is fixedly connected to the top of the support frame 2. A connecting groove 22 is provided inside the crossbar 21. A first motor 23 is fixedly connected to one side surface of the crossbar 21. A screw 24 is fixedly connected to the output end of the first motor 23. The end of the screw 24 away from the first motor 23 is rotatably connected to the inner wall of one side of the connecting groove 22. A pickup device 3 is threadedly connected to the outer surface of the screw 24.

[0027] The aforementioned components achieve the following effects: the support frame 2 provides stable support for the crossbar 21, making the installation and operation of the entire pickup device 3 more stable. When the first motor 23 is working, it drives the screw 24 to rotate within the connecting groove 22. Since the pickup device 3 is threadedly connected to the screw 24, the rotation of the screw 24 can drive the pickup device 3 to move laterally on the crossbar 21, thereby realizing the horizontal position adjustment of the pickup device 3, enabling it to reach different wafer pickup positions.

[0028] Specifically, the moving device 12 includes a connecting block 121 fixedly connected to the side of the detection seat 1. A second motor 122 is fixedly connected to the outer surface of the connecting block 121. A lead screw 123 is fixedly connected to the output end of the second motor 122. A connecting plate 124 is rotatably connected to the end of the lead screw 123 away from the second motor 122. The connecting plate 124 is fixedly connected to the side of the detection seat 1. A sliding rod 125 is fixedly connected between the connecting block 121 and the connecting plate 124.

[0029] The aforementioned components achieve the following effects: the connecting block 121 and the connecting plate 124 provide stable mounting support for the second motor 122, the lead screw 123, and the slide bar 125. The second motor 122, as a power source, drives the lead screw 123 to rotate, while the slide bar 125 guides and stabilizes the movement of the detector body 13, preventing deviation or shaking during movement and ensuring the smoothness and accuracy of the detector body 13's movement.

[0030] Specifically, a movable block 131 is fixedly connected to one end of the detector body 13, and the other end of the detector body 13 is slidably connected to the inner wall of the cavity 11. The movable block 131 is slidably connected to the slide rod 125.

[0031] The aforementioned components achieve the following effect: the movable block 131 is threadedly connected to the lead screw 123. When the lead screw 123 rotates, the movable block 131 moves along the lead screw 123 and the slide bar 125, thereby driving the detector body 13 to move synchronously. The sliding connection between the other end of the detector body 13 and the inner wall of the cavity 11 further enhances its movement stability, allowing the detector body 13 to flexibly adjust its position on the detection seat 1, thereby performing multi-position and multi-angle detection on the wafer on the detection placement plate 15, improving the comprehensiveness and accuracy of the detection.

[0032] Specifically, the pickup device 3 includes a movable frame 31, which is threadedly connected to the outer surface of the screw 24. A hydraulic cylinder 32 is provided on the top of the movable frame 31. A hydraulic rod 33 is fixedly connected to the output end of the hydraulic cylinder 32. A lifting plate 34 is fixedly connected to the telescopic end of the hydraulic rod 33. An automatic vacuum suction cup 35 is fixedly connected to the bottom of the lifting plate 34.

[0033] The aforementioned components achieve the following effects: the movable frame 31 moves laterally under the drive of the screw 24, providing horizontal position adjustment for wafer pickup. The hydraulic cylinder 32 drives the lifting plate 34 up and down via the hydraulic rod 33, thereby achieving vertical position adjustment of the automatic vacuum chuck 35, enabling it to accurately approach and pick up the wafer. The automatic vacuum chuck 35 can automatically adjust the suction force according to the characteristics of the wafer, ensuring that the wafer will not fall due to insufficient suction force or be damaged due to excessive suction force during the pickup process, thus guaranteeing the safety and reliability of the pickup process.

[0034] Specifically, a connecting rod 36 is fixedly connected to the inner top of the movable frame 31, and the lifting plate 34 is slidably connected to the connecting rod 36.

[0035] The effect achieved by the above components is as follows: the connecting rod 36 plays a good guiding role in the up and down movement of the lifting plate 34, restricts the movement trajectory of the lifting plate 34, prevents the lifting plate 34 from tilting or deviating during movement, ensures that the automatic vacuum chuck 35 can accurately align with the wafer, and improves the accuracy of wafer picking.

[0036] Specifically, a placement pad 14 is snapped onto the top edge of the detection seat 1, and a detection placement plate 15 is fixedly connected to the top of the placement pad 14.

[0037] The aforementioned components achieve the following effects: the placement pad 14 has a certain degree of elasticity and cushioning performance, which can buffer the wafer when it is placed on the test placement plate 15, preventing damage caused by hard collision between the wafer and the test placement plate 15. The test placement plate 15 provides a flat and stable placement platform for the wafer, facilitating the tester body 13 to test the wafer, and also facilitating the pick-up device 3 to accurately pick up the wafer.

[0038] Specifically, a support base 4 is fixedly connected to the bottom of the detection base 1, and a base plate 5 is fixedly connected to the bottom of the support base 4.

[0039] The aforementioned components achieve the following effect: the support base 4 and the base plate 5 together form the support foundation of the entire mechanism, stably supporting components such as the detection base 1, so that the entire mechanism will not shake or tip over during operation, ensuring the stability and safety of the mechanism's operation, and providing reliable support for wafer picking and inspection.

[0040] Working Principle: When using the pick-up and inspection mechanism of this wafer sorter, the wafer is first placed on the inspection placement plate 15, and the placement pad 14 provides cushioning and protection for the wafer. When a wafer needs to be picked up, the first motor 23 is started, which drives the screw 24 to rotate, causing the moving frame 31 to move laterally on the crossbar 21, adjusting the pick-up device 3 to be directly above the wafer. Then, the hydraulic cylinder 32 is started, which drives the lifting plate 34 and the automatic vacuum suction cup 35 to move downwards via the hydraulic rod 33. When the automatic vacuum suction cup 35 contacts the wafer, it activates and generates appropriate suction force to firmly hold the wafer. Subsequently, the hydraulic cylinder 32 drives the hydraulic rod 33 to retract, lifting the wafer.

[0041] During wafer inspection, the second motor 122 is activated, which drives the lead screw 123 to rotate. The moving block 131, under the action of the lead screw 123 and the slide bar 125, moves the inspection instrument body 13 to a suitable inspection position. The inspection instrument body 13 can perform multi-position inspections on the wafer on the inspection placement plate 15 during movement, ensuring comprehensive detection of surface defects.

[0042] When it is necessary to place the picked-up wafers at the detection position or other designated positions, the position of the picking device 3 is adjusted by the cooperation of the first motor 23 and the hydraulic cylinder 32. Then, the automatic vacuum suction cup 35 releases the wafers to complete the placement of the wafers. Throughout the process, all components work together to achieve precise picking and comprehensive detection of wafers, thereby improving the efficiency and accuracy of wafer sorting.

Claims

1. A pick-up and inspection mechanism for a wafer sorting machine, comprising an inspection base (1), a support frame (2), and a pick-up device (3), characterized in that: The detection seat (1) has a cavity (11) inside. A moving device (12) is fixedly connected to the side of the detection seat (1). The outer surface of the moving device (12) is threadedly connected to the detector body (13). The other end of the detector body (13) away from the moving device (12) is slidably connected to the inner wall of the cavity (11). The support frame (2) is located on one side of the detection seat (1). A crossbar (21) is fixedly connected to the top of the support frame (2). A connecting groove (22) is provided inside the crossbar (21). A first motor (23) is fixedly connected to one side surface of the crossbar (21). A screw (24) is fixedly connected to the output end of the first motor (23). The end of the screw (24) away from the first motor (23) is rotatably connected to the inner wall of one side of the connecting groove (22). A pickup device (3) is threadedly connected to the outer surface of the screw (24).

2. The picking and detection mechanism of a wafer sorting machine according to claim 1, characterized in that: The moving device (12) includes a connecting block (121) fixedly connected to the side of the detection seat (1). A second motor (122) is fixedly connected to the outer surface of the connecting block (121). A lead screw (123) is fixedly connected to the output end of the second motor (122). A connecting plate (124) is rotatably connected to the end of the lead screw (123) away from the second motor (122). The connecting plate (124) is fixedly connected to the side of the detection seat (1). A slide rod (125) is fixedly connected between the connecting block (121) and the connecting plate (124).

3. The picking and detection mechanism of a wafer sorting machine according to claim 2, characterized in that: One end of the detector body (13) is fixedly connected to a moving block (131), and the other end of the detector body (13) is slidably connected to the inner wall of the cavity (11). The moving block (131) is slidably connected to the slide rod (125).

4. The picking and detection mechanism of a wafer sorting machine according to claim 1, characterized in that: The picking device (3) includes a movable frame (31), which is threaded to the outer surface of the screw (24). A hydraulic cylinder (32) is provided on the top of the movable frame (31). A hydraulic rod (33) is fixedly connected to the output end of the hydraulic cylinder (32). A lifting plate (34) is fixedly connected to the telescopic end of the hydraulic rod (33). An automatic vacuum suction cup (35) is fixedly connected to the bottom of the lifting plate (34).

5. The picking and detection mechanism of a wafer sorting machine according to claim 4, characterized in that: A connecting rod (36) is fixedly connected to the inner top of the movable frame (31), and the lifting plate (34) is slidably connected to the connecting rod (36).

6. The picking and detection mechanism of a wafer sorting machine according to claim 5, characterized in that: The edge of the top of the detection seat (1) is fitted with a placement pad (14), and the top of the placement pad (14) is fixedly connected to a detection placement plate (15).

7. The picking and detection mechanism of a wafer sorting machine according to claim 1, characterized in that: The bottom of the detection seat (1) is fixedly connected to a support seat (4), and the bottom of the support seat (4) is fixedly connected to a base plate (5).

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