Silicon backside anchor thermal expansion misregistration structure
By setting a metal base and annular compensation groove structure at the bottom of the silicon package, the misalignment of the anchors is prevented, thus solving the problem of silicon package damage caused by thermal expansion and improving the stability and safety of the equipment.
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIAOZUO SENZE HIGH TEMPERATURE MATERIAL CO LTD
- Filing Date
- 2025-08-20
- Publication Date
- 2026-07-24
AI Technical Summary
Thermal expansion at the bottom of the silicon package can cause misalignment of the anchors, which can easily lead to the silicon package being sheared by the anchors.
A metal base is set at the bottom of the silicon package, and the bottom of the outer steel shell is provided with a compensation hole and an annular compensation groove. A movable circular plate is installed inside. When the outer steel shell expands, the movable circular plate moves in the annular compensation groove to prevent the anchor bolts from being misaligned, and heat transfer is reduced through ceramic materials and heat insulation pads.
It effectively prevents misalignment of anchor bolts, reduces damage to the bottom of the silicon package, and improves equipment stability and safety.
Smart Images

Figure CN224543109U_ABST