A polishing chuck assembly for polishing wafer processing

Abstract

The utility model belongs to the field of polishing piece processing, concretely relates to a polishing clamping assembly for polishing piece processing, including the workstation, the top of workstation is provided with the polishing piece body, the inside of polishing piece body both sides all are clamped with the clamping plate, the bottom of clamping plate extends to the bottom of workstation, the surface of clamping plate is connected with the mounting bracket, the top of mounting bracket is fixedly connected in the bottom of workstation, the surface of clamping plate is fixedly connected with control mechanism. The utility model adds the structure such as clamping plate on the workstation, can realize the stable clamping of polishing piece body, and this structure design not only is convenient for quick installation and fixed polishing piece, adds the structure such as workstation on polishing piece body, can ensure that polishing piece body does not occur displacement or wobble in the processing, effectively improves the precision and stability of polishing processing, and simple structure, convenient operation, strong applicability simultaneously.

Description

Technical Field

[0001] This utility model relates to the field of polishing disc processing technology, specifically a polishing clamping assembly for polishing disc processing. Background Technology

[0002] In the processing of polishing discs, stable clamping of the polishing discs is a crucial step in ensuring processing accuracy. Currently, commonly used polishing disc clamping components on the market have many shortcomings: most clamping devices have complex structures and cumbersome operation procedures, requiring a lot of time to load and unload polishing discs, which seriously affects processing efficiency, especially in production scenarios where polishing discs need to be changed frequently.

[0003] Meanwhile, the clamping force of existing clamping components is difficult to control precisely, which can easily lead to damage to the polishing disc due to excessive clamping or displacement and shaking of the polishing disc during processing due to excessive clamping, thereby affecting the polishing quality and increasing the product defect rate. In addition, the overall structural stability of some clamping components is not good. When subjected to pressure and impact during the polishing process, the worktable is prone to deformation or shaking, which further reduces the processing accuracy. Furthermore, the ease of operation and safety may be affected by issues such as component slippage during operation. Utility Model Content

[0004] The purpose of this utility model is to provide a polishing clamping assembly for polishing disc processing, which solves the problems of existing clamping assemblies where the clamping force is difficult to control precisely, easily leading to damage to the polishing disc due to excessive clamping or displacement and shaking of the polishing disc during processing due to excessive clamping, thus affecting the polishing quality and increasing the product defect rate. In addition, the overall structural stability of some clamping assemblies is not good. When subjected to pressure and impact during the polishing process, the worktable is prone to deformation or shaking, further reducing the processing accuracy. Moreover, the operation may also be affected by the slippage of parts, affecting the convenience and safety of operation.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a polishing clamping assembly for processing polishing discs, comprising a worktable, a polishing disc body disposed on the top of the worktable, a clamping plate being clamped on both sides of the interior of the polishing disc body, the bottom of the clamping plate extending to the bottom of the worktable, a mounting bracket being movably connected to the surface of the clamping plate, the top of the mounting bracket being fixedly connected to the bottom of the worktable, and a control mechanism being fixedly connected to the surface of the clamping plate.

[0006] Preferably, the control mechanism includes an inclined block, which is fixedly connected to the surface of the card plate. A support block is provided on the inner side of the inclined block. A movable plate is fixedly connected to both the front and rear sides of the support block. A round rod is slidably connected to both sides of the movable plate. The surface of the round rod is fixedly connected to the surface of the mounting frame. Springs are fixedly connected to both sides of the bottom of the movable plate. The bottom of the springs is fixedly connected to the surface of the mounting frame.

[0007] Preferably, the mounting bracket is provided with a support rod on its inner side, and the support rod is located on both sides of the bottom of the workbench.

[0008] Preferably, a support ring is fixedly connected to the top of the worktable, and the surface of the support ring is in contact with the bottom of the polishing disc body.

[0009] Preferably, a pull rod is fixedly connected to the bottom of the support block, and the pull rod is located at the bottom of the workbench.

[0010] Preferably, a friction sleeve is fixedly connected to the surface of the pull rod, and the friction sleeve is located at the bottom of the worktable.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. This utility model can achieve stable clamping of the polishing disc body by adding a clamping plate or other structure to the worktable. This structural design not only facilitates the quick installation and fixation of the polishing disc.

[0012] 2. By adding a worktable or other structures to the polishing disc body, this utility model can ensure that the polishing disc body will not shift or shake during the processing, effectively improving the accuracy and stability of the polishing process. At the same time, the structure is simple, the operation is convenient, and the applicability is strong. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a three-dimensional cross-sectional view of the workbench of this utility model; Figure 3 For the present utility model Figure 2 Enlarged structural diagram at point A in the middle; Figure 4 This is a perspective view of the friction sleeve of this utility model.

[0014] In the diagram: 1. Workbench; 2. Polishing disc body; 3. Clamping plate; 4. Mounting bracket; 51. Squeegee block; 52. Support block; 53. Moving plate; 54. Round rod; 55. Spring; 6. Support rod; 7. Support ring; 8. Pull rod; 9. Friction sleeve. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] Please see Figure 1-4 A polishing clamping assembly for processing polishing discs includes a worktable 1, a polishing disc body 2 is provided on the top of the worktable 1, and clamping plates 3 are clamped on both sides of the interior of the polishing disc body 2. The bottom of the clamping plates 3 extends to the bottom of the worktable 1, and a mounting frame 4 is movably connected to the surface of the clamping plates 3. The top of the mounting frame 4 is fixedly connected to the bottom of the worktable 1, and a control mechanism is fixedly connected to the surface of the clamping plates 3.

[0017] Please see Figure 1-4 The control mechanism includes a wedge block 51, which is fixedly connected to the surface of the card plate 3. A support block 52 is provided on the inner side of the wedge block. A movable plate 53 is fixedly connected to the front and rear sides of the support block 52. A round rod 54 is slidably connected to both sides of the movable plate 53. The surface of the round rod 54 is fixedly connected to the surface of the mounting frame 4. A spring 55 is fixedly connected to both sides of the bottom of the movable plate 53. The bottom of the spring 55 is fixedly connected to the surface of the mounting frame 4.

[0018] Furthermore, the spring 55 allows for flexible control of the tightness of the clamping plate 3. When the polishing disc needs to be fixed, the spring force of the spring 55 pushes the moving plate 53, causing the support block 52 to press against the inclined block, which in turn causes the clamping plate 3 to clamp the polishing disc. When the polishing disc needs to be removed, simply overcome the spring force of the spring 55 to move the moving plate 53, which will release the clamping plate 3. This achieves automatic adjustment of the clamping force, making operation easier and ensuring stable clamping. It avoids the problems of damage to the polishing disc due to excessive clamping or affecting the processing quality due to excessive looseness.

[0019] Please see Figure 1-3 The mounting bracket 4 has a support rod 6 on its inner side, which is located on both sides of the bottom of the workbench 1.

[0020] Furthermore, the support rod 6 effectively supports the worktable 1, enhancing the structural stability of the entire clamping assembly. During the polishing process, the worktable 1 is subjected to certain pressure and impact forces. The presence of the support rod 6 can disperse these forces, preventing the worktable 1 from deforming or shaking, thereby ensuring the accuracy and safety of the polishing disc processing.

[0021] Please see Figure 1-2 A support ring 7 is fixedly connected to the top of the worktable 1, and the surface of the support ring 7 is in contact with the bottom of the polishing disc body 2.

[0022] Furthermore, the support ring 7 provides auxiliary support for the polishing disc body 2. The support ring 7 contacts the bottom of the polishing disc body 2, increasing the force-bearing area of ​​the polishing disc and preventing it from bending or being damaged due to excessive localized force during processing. It also allows the polishing disc to be placed more stably on the worktable 1, improving processing stability.

[0023] Please see Figure 1-4 A pull rod 8 is fixedly connected to the bottom of the support block 52, and the pull rod 8 is located at the bottom of the workbench 1.

[0024] Furthermore, the pull rod 8 provides a convenient operating component for controlling the movement of the support block 52. By pulling the pull rod 8, the support block 52 can be easily moved, thereby controlling the tightness of the clamping plate 3. This is more convenient and labor-saving than directly operating the support block 52, improving the ease of operation. Especially when it is necessary to frequently load and unload polishing discs, it can effectively improve work efficiency.

[0025] Please see Figure 1-4 A friction sleeve 9 is fixedly connected to the surface of the pull rod 8, and the friction sleeve 9 is located at the bottom of the worktable 1.

[0026] Furthermore, the friction sleeve 9 increases the friction between the lever 8 and the hand. When pulling the lever 8, the friction sleeve 9 prevents the hand from slipping, making the operation more stable and reliable, avoiding operational errors caused by slippage, ensuring the normal use of the clamping components, and also improving the comfort of operation.

[0027] The specific implementation process of this utility model is as follows: In use, the workbench 1 and the polishing disc body 2 are in a fixed state as shown in the figure. At this time, the polishing disc body 2 can be fixed and processed. When the polishing disc body 2 is processed, it is necessary to remove the polishing disc body 2 from the top of the workbench 1. Pull the lever 8 down, and the lever 8 will cause the support block 52 to move down. The support block 52 will cause the moving plate 53 to move down. The moving plate 53 will compress the spring 55. When the support block 52 descends, the inclined block will lose its support. The inclined block will cause the clamping plate 3 to rotate inward. After the clamping plate 3 separates from the polishing disc body 2, the polishing disc body 2 will lose its fixation and separate from the worktable 1.

[0028] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A polishing clamping assembly for processing polishing discs, comprising a worktable (1), characterized in that: The top of the workbench (1) is provided with a polishing disc body (2), and the two sides inside the polishing disc body (2) are both fitted with a clamping plate (3). The bottom of the clamping plate (3) extends to the bottom of the workbench (1). The surface of the clamping plate (3) is movably connected with a mounting bracket (4). The top of the mounting bracket (4) is fixedly connected to the bottom of the workbench (1). The surface of the clamping plate (3) is fixedly connected with a control mechanism.

2. The polishing clamping assembly for processing polishing discs according to claim 1, characterized in that: The control mechanism includes a wedge (51) which is fixedly connected to the surface of the card plate (3). A support block (52) is provided on the inner side of the wedge. A movable plate (53) is fixedly connected to the front and rear sides of the support block (52). A round rod (54) is slidably connected to both sides of the movable plate (53). The surface of the round rod (54) is fixedly connected to the surface of the mounting frame (4). A spring (55) is fixedly connected to both sides of the bottom of the movable plate (53). The bottom of the spring (55) is fixedly connected to the surface of the mounting frame (4).

3. The polishing clamping assembly for processing polishing discs according to claim 1, characterized in that: The mounting bracket (4) is provided with a support rod (6) on its inner side, and the support rod (6) is located on both sides of the bottom of the workbench (1).

4. The polishing clamping assembly for processing polishing discs according to claim 1, characterized in that: A support ring (7) is fixedly connected to the top of the workbench (1), and the surface of the support ring (7) is in contact with the bottom of the polishing disc body (2).

5. The polishing clamping assembly for processing polishing discs according to claim 2, characterized in that: The bottom of the support block (52) is fixedly connected to a pull rod (8), which is located at the bottom of the workbench (1).

6. The polishing clamping assembly for processing polishing discs according to claim 5, characterized in that: A friction sleeve (9) is fixedly connected to the surface of the pull rod (8), and the friction sleeve (9) is located at the bottom of the workbench (1).

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