Three-stage vacuum box

Abstract

The utility model relates to three -segmented vacuum box technical field especially relates to a three -segmented vacuum box. Including the frame, the section of frame is back -shaped, the upper end of frame is fixedly connected with the top frame, the surface of top frame is equipped with a plurality of through -hole, the lower surface both sides of frame are fixedly connected with the bottom frame, the inner wall bottom of frame is equipped with a plurality of communicating holes, the inner wall both sides of frame are fixedly connected with the baffle, the lower surface of bottom frame is provided with adjusting device, and adjusting device includes base, and the surface of base is in contact with the lower surface of two bottom frames, and the both sides surface of base is equipped with the sliding slot, and the position of bottom frame surface both sides corresponding sliding slot is respectively in contact with first limit block and second limit block, and the lower surface of first limit block and second limit block is fixedly connected with the sliding block, and the surface of sliding block is in sliding connection with the inner wall of sliding slot. The utility model provides a three -segmented vacuum box has to the vacuum box installation operation convenient, stable nature uniform advantage when using.

Description

Technical Field

[0001] This utility model relates to the field of three-section vacuum chamber technology, and in particular to a three-section vacuum chamber. Background Technology

[0002] The three-stage vacuum chamber is a high-efficiency, high-precision vacuum processing device widely used in physics experiments, electronic device manufacturing, materials science, aerospace and other fields. With technological advancements, especially in industries such as semiconductors, vacuum coating, and vacuum drying, the three-stage vacuum chamber, as a highly efficient and stable device, is gradually becoming the standard for high-end vacuum processing.

[0003] Existing technologies, such as the utility model patent with publication number CN219462599U, disclose a three-section vacuum chamber. This patent includes a pressure-holding chamber, a first transition chamber, and a second transition chamber. The first transition chamber is located on one side of the pressure-holding chamber, and the second transition chamber is located on the other side. A first intermediate door is installed between the first transition chamber and the pressure-holding chamber, and a second intermediate door is installed between the second transition chamber and the pressure-holding chamber. A vacuum pump is fixedly installed on one side of the pressure-holding chamber, and a valve is provided at the output end of the vacuum pump. One end of the valve communicates with the interior of the pressure-holding chamber. This utility model solves the problem of single-section vacuum chamber degassing, which requires the vacuum pump to start vacuuming after the product enters the vacuum chamber. During this time, the air inside the vacuum chamber needs to be evacuated from atmospheric pressure to the required vacuum environment, and there is a waiting time after the product enters the vacuum chamber. This cannot guarantee that the pressure-holding chamber is always in a vacuum environment, which is very time-consuming.

[0004] In industrial processing, a low-pressure environment is established using vacuum chamber equipment to remove molecules and impurities from the air in order to achieve specific physical or chemical reactions. During this process, due to the single-chamber structure, the pump is directly pumped from atmospheric pressure to a high vacuum, which puts a heavy burden on the pump unit, takes a long time to pump, and is prone to problems such as airflow turbulence and oil backflow, which can affect the final vacuum quality. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies that rely on vacuum chamber equipment to establish a low-pressure environment to remove molecules and impurities from the air in order to achieve specific physical or chemical reactions. In this process, due to the single-chamber structure, the pump is directly drawn from atmospheric pressure to a high vacuum, resulting in a heavy burden on the pump unit, a long pumping time, and a tendency to be affected by airflow turbulence and oil backflow, which in turn affects the final vacuum quality.

[0006] To solve the above technical problems, this utility model provides a three-section vacuum chamber, comprising: a frame, the cross-section of which is U-shaped; a top frame fixedly connected to the upper end of the frame; a plurality of through holes formed on the surface of the top frame; a bottom frame fixedly connected to both sides of the lower surface of the frame; a plurality of through holes formed at the bottom end of the inner wall of the frame; partitions fixedly connected to both sides of the inner wall of the frame; and an adjustment device provided on the lower surface of the bottom frame, the adjustment device comprising a base, the surface of which abuts against the lower surfaces of the two bottom frames; sliding grooves formed on both sides of the base; and corresponding sliding grooves on both sides of the bottom frame surface. The groove is respectively abutted against a first limiting block and a second limiting block. A slider is fixedly connected to the lower surface of both the first and second limiting blocks. The surface of the slider is slidably connected to the inner wall of the groove. Adjustment grooves are opened on both sides of the base corresponding to the position of the groove. An adjustment rod is fixedly connected to the side wall of the slider corresponding to the position of the first limiting block. An adjustment plate is movably connected to the arc surface of the adjustment rod. A positioning rod is fixedly connected to the slider corresponding to the position of the second limiting block. A positioning hole is opened on the surface of the adjustment plate. The inner wall of the positioning hole is slidably connected to the arc surface of the positioning rod. A rotating shaft is threaded through one side surface of the adjustment plate.

[0007] The aforementioned components achieve the following effect: by setting up a frame with a U-shaped cross-section, a top frame with through holes, and two bottom frames, and cooperating with partitions, a three-section vacuum chamber base frame with a stable structure and clear chamber division is formed. During this process, the adjustment device can easily and quickly fix the bottom frame on the base, and allows for fine-tuning of the position within a certain range to adapt to the installation environment or the needs of connecting with other equipment, thereby improving the flexibility and convenience of installation.

[0008] Preferably, the frame and the two partitions sequentially form a first chamber, a second chamber, and a third chamber, wherein the first chamber is a coarse extraction chamber, the second chamber is a fine extraction chamber, and the third chamber is an ultra-fine extraction chamber.

[0009] The aforementioned components achieve the following effect: clearly dividing the internal space of the vacuum chamber into three consecutive and progressively functional chambers for coarse evacuation, fine evacuation, and ultra-fine evacuation. This three-stage gradient vacuum design enables a smooth and efficient transition from atmospheric pressure to a high vacuum environment, avoiding the inefficiencies and oil vapor backflow that can occur with single-chamber vacuuming, and significantly improving the final vacuum level and product quality.

[0010] Preferably, a spring is fitted onto the arc surface of the adjusting rod, and the two ends of the spring are fixedly connected to the adjusting rod and the adjusting plate, respectively.

[0011] The effect achieved by the above components is that the spring provides a continuous elastic force, causing the adjusting plate to tend to move away from the slider. This ensures that when the rotating shaft is released, the adjusting plate can automatically disengage from the positioning rod or maintain a certain preload to prevent accidental slippage. At the same time, it makes the adjustment operation more responsive, improving the stability and ease of operation of the device.

[0012] Preferably, four locking blocks are fixedly connected to the arc surface of the adjusting rod, the four locking blocks are distributed in a cross shape, and the surface of the locking blocks is slidably connected to the inner wall of the adjusting plate.

[0013] The effect achieved by the above components is as follows: the sliding connection between the locking block and the inner wall of the adjusting plate restricts the rotational freedom of the adjusting plate relative to the adjusting rod, ensuring that the adjusting plate can only move along the axial direction of the adjusting rod and will not rotate around it. This ensures that when the rotating shaft is rotated, the force can be effectively converted into linear motion of the adjusting plate, thereby reliably pushing or releasing the positioning rod, making the adjustment action more precise and reliable.

[0014] Preferably, the positioning hole has a vertical cross-section, and the cross-sectional dimensions of the positioning hole are adapted to the cross-sectional dimensions of the positioning rod.

[0015] The effect achieved by the above components is that the vertical and appropriately sized positioning holes ensure that the positioning rod can only be smoothly inserted or pulled out in the vertical direction without shaking or getting stuck in the holes, which improves the accuracy and stability of the connection between the slider on one side of the second limit block and the adjustment plate, and ensures the synchronization and reliability of the adjustment device's operation.

[0016] Preferably, an insert block is fixedly connected to one end of the rotating shaft near the positioning rod. The insert block is a rubber block, and the surface of the insert block abuts against the arc surface of the positioning rod.

[0017] The effect achieved by the above components is as follows: the rubber insert has a certain elasticity and a high coefficient of friction. When the rotating shaft is tightened so that the insert is pressed against the positioning rod, it can generate a strong static friction force, thereby effectively locking the adjusting plate onto the positioning rod and preventing it from accidentally loosening under vibration or external force, which greatly enhances the locking reliability and safety of the adjusting device.

[0018] Preferably, the first limiting block and the second limiting block are both fixedly connected to an extrusion strip on the side that is close to each other. The surface of the extrusion strip is provided with anti-slip texture, and the surface of the extrusion strip abuts against the surface of the bottom frame.

[0019] The aforementioned components achieve the following effect: the extrusion strip with anti-slip texture increases the friction between the limiting block and the contact surface of the bottom frame. When the first and second limiting blocks are driven by the adjustment device to clamp the bottom frame, the extrusion strip provides a stronger clamping force, effectively preventing the bottom frame from sliding or shifting relative to the base, thus ensuring the stability of the vacuum box on the base.

[0020] Compared with related technologies, the three-section vacuum chamber provided by this utility model has the following beneficial effects:

[0021] This invention provides a three-section vacuum chamber. Through the operation of the adjustment device, the main body of the vacuum chamber can be quickly and stably installed and its position flexibly adjusted. The three-section chamber design significantly improves pumping efficiency and vacuum effect. During the process, rotating a single rotating shaft drives the adjustment plate, causing the first and second limit blocks on both sides of the slider to move synchronously in opposite directions, thus quickly clamping or loosening the base frame. Combined with the sliding groove design, the overall position of the vacuum chamber can be fine-tuned before and after installation, facilitating precise docking with other equipment on the production line. This greatly simplifies the installation and debugging process and improves work efficiency. In the adjustment device, a spring provides continuous preload to the adjustment plate, a locking block ensures non-slip transmission, and the significant friction between the rubber insert and the positioning rod effectively locks the position. In addition, the limiting blocks feature anti-slip grooves, ensuring that the vacuum chamber will not shift or loosen even during long-term operation or under vibration, greatly enhancing the stability and safety of the equipment. Two partitions clearly divide the inner cavity into three continuous chambers: coarse vacuum, fine vacuum, and ultra-fine vacuum, creating a gradient vacuum environment. This structure allows the workpiece to undergo a gradually increasing vacuum process, effectively reducing the risk of airflow impact and oil vapor backflow, thus achieving a higher and more stable final vacuum level more quickly and improving process quality. Attached Figure Description

[0022] Figure 1 A schematic diagram of the structure of a three-section vacuum chamber provided by this utility model;

[0023] Figure 2 for Figure 1 The diagram shows the internal structure.

[0024] Figure 3 for Figure 1 The diagram shows the structure of the regulating device.

[0025] Figure 4 for Figure 3 A partial structural schematic diagram of the adjustment device is shown.

[0026] The diagram is labeled as follows: 1. Frame; 2. Top frame; 3. Bottom frame; 4. Adjustment device; 401. Base; 402. Foot pad; 403. First limiting block; 404. Second limiting block; 405. Adjustment groove; 406. Slide groove; 407. Slider; 408. Extrusion strip; 409. Adjustment rod; 410. Adjustment plate; 411. Spring; 412. Positioning rod; 413. Positioning hole; 414. Rotating shaft; 415. Inlay block; 416. Locking block; 5. Through hole; 6. Partition plate; 7. Connecting hole; 8. First chamber; 9. Second chamber; 10. Third chamber. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0028] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0029] Please see Figures 1 to 4 The present invention provides a three-section vacuum chamber, comprising: a frame 1, the cross-section of the frame 1 being U-shaped, a top frame 2 fixedly connected to the upper end of the frame 1, a plurality of through holes 5 opened on the surface of the top frame 2, a bottom frame 3 fixedly connected to both sides of the lower surface of the frame 1, a plurality of through holes 7 opened at the bottom end of the inner wall of the frame 1, a partition 6 fixedly connected to both sides of the inner wall of the frame 1, and an adjustment device 4 provided on the lower surface of the bottom frame 3.

[0030] In the embodiments of this utility model, please refer to Figure 2 , Figure 3 and Figure 4The adjusting device 4 includes a base 401, the surface of which abuts against the lower surfaces of the two base frames 3. Foot pads 402 are fixedly connected to the four corners of the lower surface of the base 401. Sliding grooves 406 are formed on both sides of the base 401. A first limiting block 403 and a second limiting block 404 are respectively abutted against the positions of the sliding grooves 406 on both sides of the base frame 3. A slider 407 is fixedly connected to the lower surfaces of both the first limiting block 403 and the second limiting block 404. The surface of the slider 407 is slidably connected to the inner wall of the sliding groove 406. Adjustment grooves 405 are provided on both sides of the base 401 at positions corresponding to the slide grooves 406. An adjustment rod 409 is fixedly connected to the side wall of the slider 407 at the position corresponding to the first limiting block 403. An adjustment plate 410 is movably connected to the arc surface of the adjustment rod 409. A positioning rod 412 is fixedly connected to the slider 407 at the position corresponding to the second limiting block 404. A positioning hole 413 is provided on the surface of the adjustment plate 410. The inner wall of the positioning hole 413 is slidably connected to the arc surface of the positioning rod 412. A rotating shaft is threaded through one side surface of the adjustment plate 410. 414. The frame 1 and the two partitions 6 sequentially form a first chamber 8, a second chamber 9, and a third chamber 10. The first chamber 8 is the coarse extraction chamber, the second chamber 9 is the fine extraction chamber, and the third chamber 10 is the ultra-fine extraction chamber. A spring 411 is fitted onto the arc surface of the adjusting rod 409. The two ends of the spring 411 are fixedly connected to the adjusting rod 409 and the adjusting plate 410, respectively. Four locking blocks 416 are fixedly connected to the arc surface of the adjusting rod 409. The four locking blocks 416 are arranged in a cross shape. The surface of the locking blocks 416 is slidably connected to the inner wall of the adjusting plate 410. The cross-section of the positioning hole 413 is vertical, and the cross-sectional dimensions of the positioning hole 413 are adapted to the cross-sectional dimensions of the positioning rod 412. An insert block 415 is fixedly connected to one end of the rotating shaft 414 near the positioning rod 412. The insert block 415 is a rubber block, and the surface of the insert block 415 abuts against the arc surface of the positioning rod 412. An extrusion strip 408 is fixedly connected to one side of the first limiting block 403 and the second limiting block 404 that are close to each other. The surface of the extrusion strip 408 is provided with anti-slip texture, and the surface of the extrusion strip 408 abuts against the surface of the bottom frame 3.

[0031] The working principle of the three-stage vacuum chamber provided by this utility model is as follows: The workpiece is first sent into the first chamber 8. A high-speed vacuum pump connected to this chamber is started, rapidly pumping the workpiece from atmospheric pressure to a lower vacuum level. The main purpose of this stage is to quickly remove most of the gas. Subsequently, the workpiece is transferred to the second chamber 9. The vacuum pump here further increases the vacuum level to a high vacuum range. This stage is responsible for removing more difficult-to-pump gas molecules and some residual trace gases. Finally, the workpiece enters the third chamber 10. This chamber is usually connected to the vacuum pump with the strongest pumping capacity and the highest ultimate vacuum level, and may be supplemented with processes such as baking and degassing to ultimately stabilize the vacuum level at an extremely high level to meet the most stringent process requirements. The partition 6 between the chambers effectively prevents the airflow from interfering with each other between different vacuum levels, ensuring pumping efficiency.

[0032] During this process, the rotating shaft 414 is rotated counterclockwise to retract it. At this time, the pressure applied to the adjusting plate 410 disappears, and under the restoring force of the spring 411, the adjusting plate 410 is pushed away from the slider 407. As the adjusting plate 410 slides backward along the positioning rod 412, the positioning hole 413 on it disengages from the positioning rod 412, and the adjusting plate 410 becomes movable. At the same time, the locking block 416 on the adjusting rod 409 connected to the adjusting plate 410 ensures that the adjusting plate 410 can only move horizontally and not rotate. At this time, the two sliders 407 are no longer constrained, and the operator can manually move the sliders 407, thereby driving the first limiting block 403 and the second limiting block 404 to slide synchronously in the slide groove 406, so as to adjust the lateral position of the entire vacuum box on the base 401 to meet the alignment requirements. After the position is adjusted, the rotating shaft 414 is screwed in clockwise. The front end of the rotating shaft 414 pushes the adjusting plate 410 to slide forward along the positioning rod 412, compressing the spring 411. The forward movement of the adjusting plate 410, on the one hand, pulls the slider 407 and the first limiting block 403 on one side inward through the adjusting rod 409; on the other hand, the adjusting plate 410 itself contacts the positioning rod 412, thereby pushing the slider 407 and the second limiting block 404 on the other side inward. Finally, the two limiting blocks clamp the bottom frame 3 from both sides simultaneously. The extrusion strip 408 on the inner side of the limiting block, due to its anti-slip texture design, significantly increases the friction and prevents slippage. Continuing to tighten the rotating shaft 414, the insert block 415 at its end will tightly abut against the positioning rod 412, using the high coefficient of friction of the rubber to generate a huge locking force, forming a self-locking effect, effectively preventing loosening caused by equipment vibration, thereby firmly fixing the vacuum box to the base 401.

[0033] The circuits and controls involved in this utility model are all existing technologies and will not be described in detail here.

[0034] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A three-section vacuum chamber, characterized in that, include: A frame (1) has a cross-section in the shape of a U-shape. A top frame (2) is fixedly connected to the upper end of the frame (1). Several through holes (5) are opened on the surface of the top frame (2). A bottom frame (3) is fixedly connected to both sides of the lower surface of the frame (1). Several connecting holes (7) are opened at the bottom end of the inner wall of the frame (1). A partition (6) is fixedly connected to both sides of the inner wall of the frame (1). The lower surface of the bottom frame (3) is provided with... Adjustment device (4), the adjustment device (4) includes a base (401), the surface of the base (401) abuts against the lower surfaces of the two bottom frames (3), foot pads (402) are fixedly connected to the four corners of the lower surface of the base (401), and sliding grooves (406) are opened on both sides of the base (401). The first limiting block (403) and the second limiting block (406) are respectively abutted against on both sides of the surface of the bottom frame (3) at the positions corresponding to the sliding grooves (406). Two limiting blocks (404) are provided. The lower surfaces of the first limiting block (403) and the second limiting block (404) are fixedly connected to sliders (407). The surface of the sliders (407) is slidably connected to the inner wall of the slide groove (406). The two sides of the base (401) are provided with adjustment grooves (405) corresponding to the position of the slide groove (406). The side wall of the slider (407) is fixedly connected to the position of the first limiting block (403). The arc surface of the adjustment rod (409) is movably connected to the adjustment plate (410). The slider (407) is fixedly connected to the position of the second limiting block (404). The surface of the adjustment plate (410) is provided with a positioning hole (413). The inner wall of the positioning hole (413) is slidably connected to the arc surface of the positioning rod (412). A rotating shaft (414) is threaded through one side surface of the adjustment plate (410).

2. A three-section vacuum chamber according to claim 1, characterized in that, The frame (1) and the two partitions (6) sequentially form a first chamber (8), a second chamber (9) and a third chamber (10), where the first chamber (8) is a coarse extraction chamber, the second chamber (9) is a fine extraction chamber, and the third chamber (10) is an ultra-fine extraction chamber.

3. A three-section vacuum chamber according to claim 1, characterized in that, The arc surface of the adjusting rod (409) is fitted with a spring (411), and the two ends of the spring (411) are fixedly connected to the adjusting rod (409) and the adjusting plate (410) respectively.

4. A three-section vacuum chamber according to claim 1, characterized in that, The arc surface of the adjusting rod (409) is fixedly connected to four locking blocks (416), which are arranged in a cross shape. The surface of the locking blocks (416) is slidably connected to the inner wall of the adjusting plate (410).

5. A three-section vacuum chamber according to claim 1, characterized in that, The positioning hole (413) has a vertical cross-section, and the cross-sectional dimensions of the positioning hole (413) are adapted to the cross-sectional dimensions of the positioning rod (412).

6. A three-section vacuum chamber according to claim 1, characterized in that, An insert block (415) is fixedly connected to one end of the rotating shaft (414) near the positioning rod (412). The insert block (415) is a rubber block, and the surface of the insert block (415) abuts against the arc surface of the positioning rod (412).

7. A three-section vacuum chamber according to claim 1, characterized in that, The first limiting block (403) and the second limiting block (404) are each fixedly connected to an extrusion strip (408) on the side close to each other. The surface of the extrusion strip (408) is provided with anti-slip texture, and the surface of the extrusion strip (408) abuts against the surface of the bottom frame (3).

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