Sample holder for sputter coater

Abstract

The utility model discloses a sample fixing device of sputter coater, relates to sample fixing technical field of sputter coater, including fixed stand, sample stage, negative pressure hole, rotating mechanism and adjusting mechanism, the fixed stand top is provided with sample stage, and the inside of sample stage is provided with negative pressure hole, the sample stage top is provided with annular pressing plate. The utility model discloses a sample fixing device of sputter coater, and the film is fixed on the sample stage through the pressure of annular pressing plate, prevents the film from being adsorbed into the negative pressure hole in the sample stage, thereby improves the stability and thickness uniformity of film when sputtering gold spraying, thereby improves gold spraying effect, through the adjusting mechanism adjustment between sample stage and fixed stand's inclination included angle, and then the deposition angle of sample stage top film is regulated, and the deposition angle of film is different and can play different effects, thereby the flexibility when using sample stage is promoted.

Description

Technical Field

[0001] This utility model relates to the field of sample fixing technology for gold sputtering machines, specifically to a sample fixing device for gold sputtering machines. Background Technology

[0002] A gold sputtering machine is a specialized device that utilizes magnetron sputtering physical vapor deposition technology. In a vacuum environment, high-energy ions bombard a gold target, causing gold atoms to be sputtered and deposited onto the substrate surface, thus forming a high-performance gold thin film. Small gold sputtering machines play a crucial role as auxiliary equipment for scanning electron microscopes. The sample fixing device is one of the most critical core components of a gold sputtering machine. Its function is to accurately, stably, and reliably fix the sample to be coated, ensuring it is in the optimal position and state during the coating process to obtain a high-quality, uniform thin film.

[0003] The sample stage of a gold sputtering machine has a porous structure. During use, the chamber becomes negatively pressured. After the sample is placed on the stage, it is adhered to the stage surface and fixed by the holes and negative pressure, thus facilitating gold sputtering and improving the uniformity of the gold thickness. However, for thin film products, the porous sample stage surface may suck some areas of the film into the holes, causing wrinkles on the film surface and affecting the uniformity of the gold thickness during sputtering. Utility Model Content

[0004] The purpose of this invention is to provide a sample fixing device for a gold sputtering machine to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a sample fixing device for a gold sputtering machine, comprising:

[0006] A fixed column is provided, and a sample stage is provided above the fixed column;

[0007] An annular pressure plate, wherein fixed brackets are welded to both sides of the outer wall of the annular pressure plate, and the bottom end of the fixed brackets extends to the bottom of the sample stage. Fasteners are provided at the bottom end of the fixed brackets, and the fasteners abut against the bottom of the sample stage to fix the annular pressure plate to the sample stage.

[0008] A rotating mechanism is connected to the sample stage and the fixed column respectively, and the rotating mechanism drives the sample stage to rotate around the axis of the fixed column;

[0009] An adjustment mechanism is provided, the top of which is connected to the bottom of the sample stage, and the adjustment mechanism is used to adjust the angle of the sample stage.

[0010] The annular pressure plate fixes the film on the sample stage, preventing the film from being adsorbed into the negative pressure hole in the sample stage, thereby preventing the film surface from wrinkling and causing uneven gold spraying thickness.

[0011] Preferably, the fastener includes a fixing part, the bottom end of which has a through threaded hole, and a bolt is connected inside the threaded hole, the top of which abuts against the bottom of the sample stage.

[0012] Applying pressure to the annular platen by bolting it against the sample stage helps to expand and fix the film, preventing deformation and improving the stability and thickness uniformity of the film during sputtering and gold spraying, thereby improving the gold spraying effect.

[0013] Preferably, a U-shaped buckle is connected to the side of the annular pressure plate away from the fixed bracket, and the bottom of the U-shaped buckle extends into the sample stage. The fixed bracket and the U-shaped buckle are arranged in a "+" shape. The annular pressure plate has an "O" shaped structure. An anti-slip pad is fixedly connected to the bottom of the outer wall of the annular pressure plate. The bottom of the anti-slip pad is in contact with the outer side of the top of the sample stage, and the side of the anti-slip pad that contacts the film is wavy.

[0014] The U-shaped buckle further ensures the stability of the fixation, while the wave-shaped anti-slip pad eliminates the fine wrinkles of the film and prevents damage to the film.

[0015] Preferably, the rotating mechanism includes a fixed cylinder, a limiting column, a protective cover, a servo motor, a rotating rod, a transmission gear, and a fixed gear ring. The fixed cylinder is rotatably connected to the outer side of the top of the fixed column, and the fixed cylinder has an "O" shaped structure.

[0016] The sample stage is rotated smoothly by a rotating mechanism, causing the thin film fixed at the top of the sample stage to rotate as well.

[0017] Preferably, a limiting post is welded to the center of the top end of the fixed cylinder, a limiting cavity is opened inside the top end of the fixed post, and the limiting post extends into the cavity, and the fixed cylinder rotates around the fixed post as an axis.

[0018] The limiting column will rotate around the fixed column as the axis, thereby guiding the sample stage to rotate smoothly.

[0019] Preferably, a protective cover is welded to the outer side of the bottom end of the fixed cylinder, and a servo motor is installed on one side of the top of the protective cover. A rotating rod is fixedly connected to the output end of the servo motor, and the protective cover can protect the transmission gear and the fixed gear ring.

[0020] When the servo motor starts, it drives the rotating rod to rotate, and then the rotation of the rotating rod drives the transmission gear to rotate.

[0021] Preferably, a transmission gear is welded to the bottom of the outer wall of the rotating rod, and the outer wall of the transmission gear meshes with a fixed gear ring, and the inner wall of the fixed gear ring is welded to the outer wall of the fixed column, so that the transmission gear can move in a circle along the outer wall of the fixed gear ring.

[0022] At this time, the rotation of the transmission gear will generate a thrust on the protective cover, causing the protective cover to drive the fixed cylinder to rotate, and then the rotation of the fixed cylinder will drive the sample stage to rotate.

[0023] Preferably, the adjustment mechanism includes a support base, an electric push rod, a transmission base, a fixed base, and a rotating base. Support bases are provided on both sides below the sample stage, and one side of the outer wall of the support base is connected to the fixed cylinder. An electric push rod is rotatably connected inside the support base.

[0024] The tilt angle between the sample stage and the fixed column is adjusted by the adjustment mechanism, thereby controlling the deposition angle of the thin film on the top of the sample stage.

[0025] Preferably, the output end of the electric push rod is rotatably connected to a transmission seat, and the top of the outer wall of the transmission seat is welded to the bottom of the outer wall of the sample stage, and a fixing seat is welded to the middle of the top of the fixing cylinder.

[0026] Two sets of electric actuators move alternately, thereby generating a stable thrust on the sample stage.

[0027] Preferably, the fixed base is rotatably connected to a rotating base, and the top of the outer wall of the rotating base is welded to the center of the bottom of the sample stage, and the sample stage rotates around the rotating base as an axis.

[0028] This causes the fixed base to rotate around the rotating base, thereby changing the angle between the sample stage and the fixed column.

[0029] As can be seen from the above, the sample fixing device for the gold sputtering machine provided by this utility model has the following beneficial effects.

[0030] 1. The film is fixed on the sample stage by applying pressure with an annular pressure plate, preventing the film from being adsorbed into the negative pressure hole in the sample stage, thereby improving the stability and thickness uniformity of the film during sputtering and thus improving the sputtering effect.

[0031] 2. The tilt angle between the sample stage and the fixed column is adjusted by adjusting the mechanism, thereby controlling the deposition angle of the thin film on the top of the sample stage. Different deposition angles of the thin film can have different effects, thereby improving the flexibility of the sample stage during use. Attached Figure Description

[0032] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0033] Figure 2 This is a schematic diagram of the main structure of this utility model;

[0034] Figure 3 This is a schematic diagram of the three-dimensional structure of the annular pressure plate of this utility model;

[0035] Figure 4This is a three-dimensional structural diagram of the sample stage of this utility model;

[0036] Figure 5 This is a schematic diagram of the main sectional view of the present invention;

[0037] Figure 6 This is a three-dimensional cross-sectional view of the protective cover of this utility model;

[0038] Figure 7 This is a three-dimensional cross-sectional view of the fixed cylinder structure of this utility model.

[0039] In the diagram: 1. Fixed column; 2. Sample stage; 3. Negative pressure hole; 4. Annular pressure plate; 5. Fixed bracket; 6. Bolt; 7. U-shaped buckle; 8. Anti-slip pad; 9. Rotation mechanism; 901. Fixed cylinder; 902. Limiting column; 903. Protective cover; 904. Servo motor; 905. Rotating rod; 906. Transmission gear; 907. Fixed gear ring; 10. Adjustment mechanism; 1001. Support base; 1002. Electric push rod; 1003. Transmission base; 1004. Fixed base; 1005. Rotating base. Detailed Implementation

[0040] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0041] Please see Figures 1-6This utility model provides a technical solution: a sample fixing device for a gold sputtering machine, including a fixing column 1, a sample stage 2, a negative pressure hole 3, a rotating mechanism 9, and an adjusting mechanism 10. The sample stage 2 is positioned above the fixing column 1, and a negative pressure hole 3 is provided on the surface of the sample stage 2. An annular pressure plate 4 is positioned above the sample stage 2, and fixing brackets 5 are welded to both sides of the outer wall of the annular pressure plate 4. The bottom end of the fixing brackets 5 extends below the sample stage 2, and a fastener is provided at the bottom end of the fixing brackets 5. The fastener includes a fixing part, and a through threaded hole is provided inside the bottom end of the fixing part. A bolt 6 is connected inside the threaded hole, and the top end of the bolt 6 abuts against the sample stage 2. The bottom of the ring plate 4 is subjected to downward pressure. A U-shaped buckle 7 is connected to the side of the ring plate 4 away from the fixed bracket 5. The bottom of the U-shaped buckle 7 extends into the sample stage 2. An anti-slip pad 8 is fixedly connected to the bottom of the outer wall of the ring plate 4. The fixed bracket 5 and the U-shaped buckle 7 are arranged in a "+" shape. The negative pressure holes 3 are evenly distributed. The ring plate 4 has an "O" shape structure. The bottom of the anti-slip pad 8 is in contact with the outer side of the top of the sample stage 2. The side of the anti-slip pad 8 that contacts the film is wavy. The sample stage 2 has a cavity inside. The negative pressure holes 3 are connected to the cavity. The cavity is connected to external equipment through a pipe.

[0042] For specific implementation, please refer to Figures 1-3 Since the bottom sides of the annular pressure plate 4 are connected to the fixed bracket 5, the annular pressure plate 4 is first moved horizontally to extend above the sample stage 2 until the bottom of the fixed bracket 5 extends below the sample stage 2. Then, the bolt 6 is rotated upward so that its top is in contact with the bottom of the sample stage 2, thereby applying downward pressure to the annular pressure plate 4, so that the film is fixed on the sample stage 2. Then, the U-shaped buckle 7 is moved so that its top is in contact with the top of the annular pressure plate 4 and its bottom is in contact with the bottom of the sample stage 2, thereby further improving the fixing effect and fixing the film on the sample stage 2. This prevents the film from being adsorbed into the negative pressure hole 3 inside the sample stage 2, thereby preventing the film surface from wrinkling and causing uneven gold spraying thickness. Moreover, the pressure applied by the annular pressure plate 4 helps to open and fix the film to prevent the film from deforming, improve the stability and thickness uniformity of the film during sputtering gold spraying, and thus improve the gold spraying effect.

[0043] Because the bottom of the annular pressure plate 4 is connected to the anti-slip pad 8, when the annular pressure plate 4 applies pressure to fix the film, the anti-slip pad 8 will also stick to the film. And because the side of the anti-slip pad 8 that contacts the film is wavy, it prevents the film from shifting on the one hand, and prevents damage to the film on the other hand.

[0044] See Figure 2 , Figure 4 , Figure 5 , Figure 6 and Figure 7The rotating mechanism 9 includes a fixed cylinder 901, a limiting post 902, a protective cover 903, a servo motor 904, a rotating rod 905, a transmission gear 906, and a fixed gear ring 907. The fixed cylinder 901 is rotatably connected to the outer side of the top of the fixed column 1, and the fixed cylinder 901 has an "O" shaped structure. The limiting post 902 is welded to the center of the top of the fixed cylinder 901. A limiting cavity is opened inside the top of the fixed column 1, and the limiting post 902 extends into it. The fixed cylinder 901 rotates around the fixed column 1 as an axis. The bottom end of the fixed cylinder 901... A protective cover 903 is welded to the outside, and a servo motor 904 is installed on one side of the top of the protective cover 903. A rotating rod 905 is fixedly connected to the output end of the servo motor 904. The protective cover 903 can protect the transmission gear 906 and the fixed gear ring 907. The transmission gear 906 is welded to the bottom of the outer wall of the rotating rod 905, and the outer wall of the transmission gear 906 meshes with the fixed gear ring 907. The inner wall of the fixed gear ring 907 is welded to the outer wall of the fixed column 1. The transmission gear 906 can move in a circle along the outer wall of the fixed gear ring 907.

[0045] For specific implementation, please refer to Figure 6 and Figure 7 Because the top center of the fixed cylinder 901 is connected to the limiting post 902, the fixed cylinder 901 is moved first so that the limiting post 902 is inserted into the fixed column 1. Then, the servo motor 904 on one side of the top of the protective cover 903 is started. Since the output end of the servo motor 904 is fixedly connected to the rotating rod 905, the start of the servo motor 904 will drive the rotating rod 905 to rotate. Then, the rotation of the rotating rod 905 will drive the transmission gear 906 to rotate. Since the transmission gear 906 and the fixed gear ring 907 are meshed, the rotation of the transmission gear 906 will rotate along the fixed gear ring 907. At this time, the transmission gear 906 will rotate along the fixed gear ring 907, and at this time, the protective cover 903 protects the transmission gear 906 and the fixed gear ring 907.

[0046] At this time, the rotation of the transmission gear 906 will generate a thrust on the protective cover 903, causing the protective cover 903 to drive the fixed cylinder 901 to rotate. Then, the rotation of the fixed cylinder 901 will drive the sample stage 2 to rotate. At this time, the limiting column 902 will rotate around the fixed column 1 as the axis, thereby guiding the sample stage 2 to rotate smoothly.

[0047] The rotating mechanism 9 smoothly rotates the sample stage 2, causing the film fixed at the top of the sample stage 2 to rotate as well, resulting in more uniform gold sputtering of the film. The protective cover 903 protects the transmission gear 906 and the fixed gear ring 907, preventing metal sputtering from affecting the use of the rotating mechanism 9.

[0048] See Figure 2 , Figure 4 , Figure 5 and Figure 7The adjustment mechanism 10 includes a support base 1001, an electric push rod 1002, a transmission base 1003, a fixed base 1004, and a rotating base 1005. The support base 1001 is provided on both sides below the sample stage 2, and one side of the outer wall of the support base 1001 is connected to the fixed cylinder 901. The electric push rod 1002 is rotatably connected inside the support base 1001. The output end of the electric push rod 1002 is rotatably connected to the transmission base 1003, and the top of the outer wall of the transmission base 1003 is welded to the bottom of the outer wall of the sample stage 2. The fixed base 1004 is welded to the middle of the top of the fixed cylinder 901. The rotating base 1005 is rotatably connected inside the fixed base 1004, and the top of the outer wall of the rotating base 1005 is welded to the center of the bottom of the sample stage 2. The sample stage 2 rotates around the rotating base 1005 as the axis.

[0049] For specific implementation, please refer to Figure 2 and Figure 4 At the same time, the electric push rod 1002 inside the support base 1001 is activated. Since the bottom end of the electric push rod 1002 is rotatably connected to the support base 1001 and the top end of the electric push rod 1002 is rotatably connected to the transmission base 1003, the extension of the electric push rod 1002 will generate a thrust on the sample stage 2. Since there are two sets of electric push rods 1002, at this time, one set of electric push rods 1002 extends and the other set of electric push rods 1002 retracts, and the two sets of electric push rods 1002 move alternately.

[0050] This generates a stable thrust on the sample stage 2, causing the rotating seat 1005 to rotate around the fixed seat 1004 at the center of its bottom end, thereby changing the angle between the sample stage 2 and the fixed column 1.

[0051] The tilt angle between the sample stage 2 and the fixed column 1 can be adjusted by the adjustment mechanism 10, thereby controlling the deposition angle of the thin film on the top of the sample stage 2. Different deposition angles of the thin film can have different effects, thereby improving the flexibility of the sample stage 2 during use.

[0052] The above description is merely a preferred embodiment of this utility model, but the protection scope of this utility model is not limited thereto. The substitutions may be replacements of some structures, devices, or method steps, or they may be complete technical solutions. Equivalent substitutions or modifications made based on the technical solution and inventive concept of this utility model should all be covered within the protection scope of this utility model.

Claims

1. A sample fixing device for a gold sputtering machine, characterized in that, include: A fixed column (1) is provided, and a sample stage (2) is provided above the fixed column (1); An annular pressure plate (4) has fixed brackets (5) welded on both sides of its outer wall, and the bottom end of the fixed brackets (5) extends to the bottom of the sample stage (2). The bottom end of the fixed brackets (5) is provided with fasteners, which abut against the bottom of the sample stage (2) to fix the annular pressure plate (4) to the sample stage (2). A rotating mechanism (9) is connected to the sample stage (2) and the fixed column (1) respectively. The rotating mechanism (9) drives the sample stage (2) to rotate around the axis of the fixed column (1). An adjustment mechanism (10) is provided, the top of which is connected to the bottom of the sample stage (2), and the adjustment mechanism (10) is used to adjust the angle of the sample stage (2).

2. The sample fixing device for a gold sputtering machine according to claim 1, characterized in that: The fastener includes a fixing part, and a through threaded hole is provided inside the bottom end of the fixing part. A bolt (6) is connected inside the threaded hole, and the top of the bolt (6) abuts against the bottom of the sample stage (2).

3. The sample fixing device for a gold sputtering machine according to claim 1, characterized in that: A U-shaped buckle (7) is connected to the side of the annular pressure plate (4) away from the fixed bracket (5), and the bottom of the U-shaped buckle (7) extends into the sample stage (2). The fixed bracket (5) and the U-shaped buckle (7) are arranged in a "+" shape. The annular pressure plate (4) has an "O" shaped structure. An anti-slip pad (8) is fixedly connected to the bottom of the outer wall of the annular pressure plate (4). The bottom of the anti-slip pad (8) is in contact with the outer side of the top of the sample stage (2), and the side of the anti-slip pad (8) that contacts the film is wavy.

4. The sample fixing device for a gold sputtering machine according to claim 1, characterized in that: The rotating mechanism (9) includes a fixed cylinder (901), a limiting column (902), a protective cover (903), a servo motor (904), a rotating rod (905), a transmission gear (906), and a fixed gear ring (907). The fixed cylinder (901) is rotatably connected to the outer side of the top of the fixed column (1), and the fixed cylinder (901) has an "O" shaped structure.

5. The sample fixing device for a gold sputtering machine according to claim 4, characterized in that: A limiting post (902) is welded to the center of the top of the fixed cylinder (901). A limiting cavity is opened inside the top of the fixed column (1), and the limiting post (902) extends into it. The fixed cylinder (901) rotates around the fixed column (1) as the axis.

6. The sample fixing device for a gold sputtering machine according to claim 5, characterized in that: A protective cover (903) is welded to the outer side of the bottom end of the fixed cylinder (901), and a servo motor (904) is installed on one side of the top of the protective cover (903). A rotating rod (905) is fixedly connected to the output end of the servo motor (904). The protective cover (903) can protect the transmission gear (906) and the fixed gear ring (907).

7. The sample fixing device for a gold sputtering machine according to claim 6, characterized in that: A transmission gear (906) is welded to the bottom of the outer wall of the rotating rod (905), and the outer wall of the transmission gear (906) meshes with the fixed gear ring (907). The inner wall of the fixed gear ring (907) is welded to the outer wall of the fixed column (1). The transmission gear (906) can move in a circle along the outer wall of the fixed gear ring (907).

8. The sample fixing device for a gold sputtering machine according to claim 1, characterized in that: The adjustment mechanism (10) includes a support base (1001), an electric push rod (1002), a transmission base (1003), a fixed base (1004), and a rotating base (1005). The sample stage (2) is provided with support bases (1001) on both sides below, and one side of the outer wall of the support base (1001) is connected to the fixed cylinder (901). The electric push rod (1002) is rotatably connected inside the support base (1001).

9. The sample fixing device for a gold sputtering machine according to claim 8, characterized in that: The output end of the electric push rod (1002) is rotatably connected to the transmission seat (1003), and the top of the outer wall of the transmission seat (1003) is welded to the bottom of the outer wall of the sample stage (2). The top center of the fixed cylinder (901) is welded to the fixed seat (1004).

10. The sample fixing device for a gold sputtering machine according to claim 9, characterized in that: The fixed base (1004) is rotatably connected to a rotating base (1005), and the top of the outer wall of the rotating base (1005) is welded to the center of the bottom of the sample stage (2). The sample stage (2) rotates around the rotating base (1005) as the axis.

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