A film thickness monitoring mechanism and a vacuum coating chamber
By designing a rotating mechanism and a monitoring mechanism in the vacuum coating chamber, with the monitoring plate fixed at the rotation center of the mounting part, the problem of inaccurate monitoring of the film thickness of the workpiece in the prior art is solved, and precise control and monitoring of the film thickness is realized.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- OPTORUN SHANGHAI CO LTD
- Filing Date
- 2025-08-15
- Publication Date
- 2026-07-24
AI Technical Summary
When existing optical monitoring components are set on planetary disks, they cannot accurately monitor the thickness of the thin film on the workpiece, resulting in the inability to precisely control and obtain the desired film thickness.
A film thickness monitoring mechanism was designed, including a rotating mechanism and a monitoring mechanism. The monitoring plate is fixed at the rotation center of the mounting part. Through the setting of the monitoring plate and the hollow cavity, the light energy emitted by the light source passes through the monitoring plate and the hollow cavity in sequence and enters the photodetector component to realize accurate monitoring of the film thickness of the workpiece.
It achieves precise control of the film thickness of the workpiece, has a simple structure, is convenient to monitor, and improves the accuracy of monitoring results.
Smart Images
Figure CN224548530U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum coating technology, and in particular to a film thickness monitoring mechanism and a vacuum coating chamber. Background Technology
[0002] Thin film thickness monitoring is a key technology in the field of vacuum coating, directly affecting the control accuracy of the vacuum coating chamber. Common thin film thickness monitoring technologies include optical monitoring and crystal oscillator monitoring. Crystal oscillator monitoring obtains thin film thickness information based on the relationship between the thin film thickness and the vibration frequency of the crystal oscillator; optical monitoring uses indicators such as the reflectivity or transmittance of the optical monitoring sheet to detect the thickness of the thin film.
[0003] The optical monitoring components in a vacuum coating chamber include a light source, a monitoring plate, and a photodetector. The light beam emitted by the light source is first projected onto the monitoring plate and the thin film attached to it. Then, the light beam carrying the optical information of the thin film, reflected or transmitted from the monitoring plate, reaches the photodetector. The control system processes the light signal received by the photodetector to obtain the thickness information of the thin film. In existing optical monitoring components, the monitoring plate is typically placed on a planetary disk in the vacuum coating chamber, for example, at the center of rotation. However, for vacuum coating chambers with a planetary disk, since the workpiece on the planetary disk both revolves and rotates during the coating process, the aforementioned monitoring plate placement method often cannot accurately monitor the thickness of the thin film on the workpiece, thus failing to precisely control the film thickness and obtain the desired thickness. Utility Model Content
[0004] The purpose of this invention is to provide a film thickness monitoring mechanism and a vacuum coating chamber, which can accurately monitor the thickness of the film on the workpiece, so as to achieve precise control of the film thickness and obtain the film of the expected thickness. In addition, the structure is simple and the monitoring is convenient.
[0005] To achieve this objective, the present invention adopts the following technical solution:
[0006] On the one hand, a film thickness monitoring mechanism is provided, comprising:
[0007] A rotating mechanism is configured to be disposed in a vacuum chamber. The rotating mechanism includes a drive assembly, a revolving disk, and a planetary assembly. The planetary assembly includes a rotating frame rotatably disposed on the revolving disk. The drive assembly is used to drive the rotating frame to revolve around the axis of the revolving disk and to drive the rotating frame to rotate on its own axis. The rotating frame has a hollow cavity and a mounting portion for supporting a workpiece.
[0008] The monitoring mechanism includes a light source, a monitoring plate, and a light detection component. The light source and the light detection component are both configured to be located in the vacuum chamber. The monitoring plate is fixed at the rotation center of the mounting part. The light energy emitted by the light source passes through the monitoring plate and the hollow cavity in sequence and enters the light detection component.
[0009] In some possible implementations, the planetary assembly is provided in at least two sets, and the at least two sets of planetary assemblies are arranged at circumferential intervals along the orbital disk. The drive assembly is used to drive all the rotating frames to revolve around the orbital disk and can also drive all the rotating frames to rotate on their own axis. The monitoring plate is arranged in a one-to-one correspondence with the mounting part.
[0010] In some possible implementations, the hollow cavity extends along the rotation center line of the rotating frame.
[0011] In some possible implementations, the planetary assembly further includes a carrier that serves as the mounting portion and is attached to the rotating frame.
[0012] In some possible implementations, the rotating frame includes a rotating shaft and an overlapping assembly. The rotating shaft is rotatably disposed on the revolving disk and has the hollow cavity. The overlapping assembly is detachably connected to the rotating shaft and is used to overlap the carrier.
[0013] In some possible implementations, the rotating shaft has an overlapping portion, and the overlapping component is sleeved on the rotating shaft and overlaps the overlapping portion.
[0014] In some possible implementations, the overlapping assembly includes a mounting platform, an overlapping member, and at least two connecting rods. The mounting platform is detachably connected to the rotating shaft. All the connecting rods are spaced apart circumferentially along the mounting platform. Both ends of each connecting rod are connected to the mounting platform and the overlapping member, respectively. The overlapping member has an overlapping surface for overlapping the vehicle.
[0015] In some possible implementations, the overlapping assembly further includes an adjustment assembly, which is configured to correspond one-to-one with the connecting rod. The adjustment assembly connects the connecting rod to the mounting platform and can adjust the position of the connecting rod in the vertical direction.
[0016] In some possible implementations, the drive assembly includes a drive member, a first gear, and a second gear. The drive member is used to drive the rotary disk to rotate. The first gear is coaxially arranged with the rotary disk and fixed to the vacuum chamber. The second gear is fixed to the rotating frame and coaxially arranged with the rotating frame. The second gear is drively connected to the first gear.
[0017] On the other hand, a vacuum coating chamber is provided, including a vacuum chamber and a film thickness monitoring mechanism as described in any of the above embodiments, wherein a rotation mechanism, a light source and a photodetector are all disposed in the vacuum chamber.
[0018] The beneficial effects of this utility model are:
[0019] This utility model provides a film thickness monitoring mechanism, including a rotating mechanism and a monitoring mechanism. When the rotating disk rotates, both the monitoring plate and the workpiece on the same rotating frame revolve and rotate. The film thickness on the workpiece is detected by monitoring the film thickness on the monitoring plate. For the same rotating frame, since the monitoring plate is fixed at the rotation center of the mounting part, the movement trajectory of the monitoring plate is simple. Each rotation of the rotating disk allows the monitoring mechanism to obtain the film thickness at the same position on the monitoring plate, thus enabling relatively accurate monitoring of the film thickness on the workpiece when it revolves and rotates. Feedback adjustments are made based on the coating results to achieve precise control of the film thickness on the workpiece and obtain the desired film thickness. The monitoring mechanism includes a light source, a monitoring plate, and a photodetector component. During monitoring, the light energy emitted by the light source passes sequentially through the monitoring plate and the hollow cavity and enters the photodetector component. The photodetector component receives the light signal, enabling the monitoring of the film thickness. By fixing the monitoring plate at the rotation center of the mounting part and providing a hollow cavity in the rotating frame, the film thickness on the workpiece can be monitored relatively accurately. This setup is simple in structure and convenient for monitoring. In addition, by setting up a hollow cavity, light can pass through easily, which further improves the accuracy of the monitoring results. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of the structure of the vacuum coating chamber provided by this utility model;
[0021] Figure 2 This is a partial structural schematic diagram of the vacuum coating chamber provided by this utility model.
[0022] In the picture:
[0023] 1. Vacuum chamber; 2. Drive assembly; 21. First gear; 22. Second gear; 23. Third gear; 24. Fourth gear; 3. Revolutionary disk; 4. Planetary assembly; 41. Rotating frame; 411. Hollow cavity; 412. Rotating shaft; 4121. Overlapping part; 413. Mounting platform; 414. Overlapping component; 4141. Overlapping surface; 415. Connecting rod; 416. Threaded component; 42. Carrier; 5. Light source; 6. Monitoring plate; 7. Light detection assembly; 71. Transparent glass; 8. Bearing seat; 9. First bearing; 10. Second bearing; 11. Third bearing; 20. Crucible; 100. Workpiece. Detailed Implementation
[0024] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0025] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0026] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0027] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0028] like Figure 1 and Figure 2As shown, this utility model provides a film thickness monitoring mechanism, including a rotating mechanism and a monitoring mechanism. The rotating mechanism is configured to be disposed in a vacuum chamber 1. The rotating mechanism includes a driving component 2, a revolving disk 3, and a planetary assembly 4. The planetary assembly 4 includes a rotating frame 41, which is rotatably disposed on the revolving disk 3. The driving component 2 is used to drive the rotating frame 41 to revolve around the axis of the revolving disk 3 and to drive the rotating frame 41 to rotate on its own axis. The rotating frame 41 has a hollow cavity 411 and a mounting part for supporting the workpiece 100. The monitoring mechanism includes a light source 5, a monitoring plate 6, and a light detection component 7. The light source 5 and the light detection component 7 are both configured to be disposed in the vacuum chamber 1. The monitoring plate 6 is fixed at the rotation center of the mounting part. The light energy emitted by the light source 5 passes sequentially through the monitoring plate 6 and the hollow cavity 411 and enters the light detection component 7. In this embodiment, the light source 5 is fixed by a bracket and located below the monitoring plate 6, and the light detection component 7 is located above one side opening of the hollow cavity 411, and the light source 5 and the light detection component 7 are arranged opposite to each other. Optionally, the material of the monitoring plate 6 is an optically transparent material.
[0029] When the rotary disk 3 rotates, both the monitoring plate 6 and the workpiece 100 on the same rotating frame 41 revolve and rotate. The thickness of the film on the workpiece 100 is detected by monitoring the film thickness of the monitoring plate 6. For the same rotating frame 41, since the monitoring plate 6 is fixed at the rotation center of the mounting part, the movement trajectory of the monitoring plate 6 is simple. Each time the rotary disk 3 rotates, the monitoring mechanism can obtain the film thickness at the same position on the monitoring plate 6. Thus, it can more accurately monitor the film thickness on the workpiece 100 when it revolves and rotates. Feedback adjustments are made based on the coating results to achieve precise control of the film thickness on the workpiece 100 and obtain the film thickness of the expected thickness. The monitoring mechanism includes a light source 5, a monitoring plate 6, and a photodetector 7. During monitoring, the light energy emitted by the light source 5 passes through the monitoring plate 6 and the hollow cavity 411 in sequence and enters the photodetector 7. The photodetector 7 receives the light signal, which enables the monitoring of the film thickness. By fixing the monitoring film 6 to the rotation center of the mounting part and setting a hollow cavity 411 in the rotating frame 41, the thickness of the film on the workpiece 100 can be monitored relatively accurately. This setup is simple in structure and convenient for monitoring. In addition, by setting a hollow cavity 411, light can pass through easily, further improving the accuracy of the monitoring results.
[0030] Optionally, the planetary assembly 4 is provided with at least two sets, and the at least two sets of planetary assemblies 4 are arranged at intervals along the circumference of the orbital disk 3. The drive assembly 2 is used to drive all rotating frames 41 to revolve around the axis of the orbital disk 3, and can also drive all rotating frames 41 to rotate on their own axis. The monitoring plates 6 are arranged one-to-one with the mounting parts. With this arrangement, the orbital disk 3 can obtain the film thickness information on the monitoring plates 6 of each mounting part with each revolution. For the same monitoring plate 6, the orbital disk 3 can obtain the film thickness information once with each revolution through the monitoring plate 6, and then feed the film thickness information back to the coating source to adjust the film thickness of the workpiece 100 on that mounting part. Of course, the film thickness information of the monitoring plates 6 corresponding to all mounting parts on the orbital disk 3 can also be superimposed. Since the coating source coats the monitoring plates 6 on two adjacent mounting parts sequentially, by monitoring the difference in film thickness between two adjacent monitoring plates 6, it is determined whether the film thickness of the workpiece 100 on the two adjacent mounting parts is consistent, so as to ensure that the coating thickness of all workpieces 100 is the same. In this embodiment, the planetary assembly 4 is provided with four sets. Each time the orbital disk 3 rotates, it can acquire film thickness information four times, which can realize real-time monitoring and adjustment of the film thickness of the workpiece 100.
[0031] Optionally, the hollow cavity 411 extends along the rotation center line of the rotating frame 41. This arrangement ensures that the light emitted by the light source 5 passes through the hollow cavity 411 in parallel without being blocked. Specifically, in this embodiment, the hollow cavity 411 and the rotating frame 41 are coaxially arranged, that is, the center line of the hollow cavity 411 coincides with the rotation center line of the rotating frame 41, which facilitates processing. In other embodiments, the center line of the hollow cavity 411 is parallel to the rotation center line of the rotating frame 41, or the center line of the hollow cavity 411 intersects the rotation center line of the rotating frame 41, as long as the light emitted by the light source 5 can pass through the hollow cavity 411 without being blocked, and is not limited to this embodiment.
[0032] Optionally, the planetary assembly 4 also includes a carrier 42, which serves as a mounting part. In one embodiment, the carrier 42 has a light-transmitting hole at its rotation center, and the monitoring plate 6 is fixed to the opening on one side of the light-transmitting hole. The light energy emitted by the light source 5 passes sequentially through the monitoring plate 6, the light-transmitting hole, and the hollow cavity 411 and enters the light detection assembly 7. In another embodiment, the carrier 42 is made of an optically transparent material, and the monitoring plate 6 is fixed at the rotation center of the carrier 42 to facilitate the passage of light. Optionally, in another embodiment, for large-sized workpieces 100 made of optically transparent material, the rotating frame 41 has an overlapping surface 4141. Specifically, the overlapping member 414 has an overlapping surface 4141, which serves as a mounting part and is used to overlap the workpiece 100. Furthermore, since the workpiece 100 is made of an optically transparent material, it can monitor the thickness of the thin film, and the monitoring plate 6 may not be required. The light energy emitted by the light source 5 passes sequentially through the workpiece 100 and the hollow cavity 411 and enters the photodetector 7.
[0033] Optionally, the carrier 42 is attached to the rotating frame 41. This arrangement facilitates the installation and disassembly of the carrier 42, improving efficiency. Optionally, the rotating frame 41 includes a rotating shaft 412 and an attachment assembly. The rotating shaft 412 is rotatably mounted on the revolving disk 3 and has a hollow cavity 411. The attachment assembly is detachably connected to the rotating shaft 412 and is used to attach the carrier 42. During installation, the rotating shaft 412 is mounted on the revolving disk 3, and the attachment assembly is mounted on the rotating shaft 412, facilitating the installation and disassembly of the rotating frame 41. Optionally, the rotating shaft 412 has an attachment portion 4121, and the attachment assembly is sleeved on the rotating shaft 412 and attaches to the attachment portion 4121. During installation, the attachment assembly is sleeved on the rotating shaft 412 and then attached to the attachment portion 4121, facilitating the determination of the attachment assembly's installation position and ensuring that the carrier 42 is coaxial with the rotating shaft 412. Specifically, the lap assembly is connected to the lap portion 4121 by screws. This arrangement makes the connection more secure.
[0034] Optionally, the overlapping assembly includes a mounting platform 413, an overlapping member 414, and at least two connecting rods 415. The mounting platform 413 is connected to the rotating shaft 412. All connecting rods 415 are spaced apart circumferentially along the mounting platform 413. The two ends of each connecting rod 415 are connected to the mounting platform 413 and the overlapping member 414, respectively. The overlapping member 414 has an overlapping surface 4141 for overlapping the carrier 42. By providing at least two connecting rods 415, and connecting the two ends of each connecting rod 415 to the mounting platform 413 and the overlapping member 414, the vertical operating space is increased when the carrier 42 is overlapped on the overlapping surface 4141, making the installation operation more convenient and saving materials and costs. Specifically, the mounting platform 413 overlaps the overlapping part 4121, and the mounting platform 413 is connected to the overlapping part 4121 by screws.
[0035] Optionally, the overlapping assembly also includes an adjustment assembly, which is configured one-to-one with the connecting rods 415. The adjustment assembly connects the connecting rods 415 to the mounting platform 413 and can adjust the vertical position of the connecting rods 415. By adjusting the vertical position of all the connecting rods 415, the tilt angle of the carrier 42 can be adjusted, making the position of the carrier 42 stable and controllable, and ensuring that the bottom surfaces of the monitoring plate 6 and the workpiece 100 are on the same horizontal plane to ensure monitoring accuracy.
[0036] Optionally, in one embodiment, the adjusting assembly includes a screw and two threaded members 416. The screw is fixed to the mounting platform 413. One end of a connecting rod 415 has a through hole, and the connecting rod 415 is sleeved on the screw through the through hole. The connecting rod 415 is sandwiched between the two threaded members 416, and both threaded members 416 are threadedly connected to the screw. By rotating the two threaded members 416, the position of the connecting rod 415 in the vertical direction can be adjusted, thereby adjusting the tilt angle of the carrier 42.
[0037] Optionally, in another embodiment, the adjusting assembly includes a screw, a mounting platform 413 having a first internal threaded hole, the screw being threadedly connected to the first internal threaded hole, and a connecting rod 415 having a second internal threaded hole at one end, the screw being threadedly connected to the second internal threaded hole. By rotating the screw, the position of the connecting rod 415 in the vertical direction can be adjusted, thereby adjusting the tilt angle of the carrier 42.
[0038] Optionally, the drive assembly 2 includes a drive element, a first gear 21, and a second gear 22. The drive element drives the rotating disk 3 to rotate. The first gear 21 is coaxially arranged with the rotating disk 3 and fixed to the vacuum chamber 1. The second gear 22 is fixed to the rotating frame 41 and coaxially arranged with the rotating frame 41, and the second gear 22 is connected to the first gear 21 in a transmission connection. Specifically, the drive element is a motor. When the drive assembly 2 is running, the drive element drives the rotating disk 3 to rotate, realizing the rotation of the rotating frame 41 along the axis of the rotating disk 3. During the rotation of the rotating frame 41, the second gear 22 rotates due to the transmission connection between the second gear 22 and the first gear 21, thereby realizing the rotation of the rotating frame 41. With this configuration, the structure of the drive assembly 2 is relatively simple, and the revolution and rotation of the rotating frame 41 can be realized by a single drive element.
[0039] Optionally, the drive assembly 2 also includes a gear set, which is disposed on the rotary disk 3. The first gear 21 is connected to the second gear 22 via the gear set. By setting the gear set, the transmission ratio can be easily adjusted to meet actual needs. Specifically, the gear set includes a third gear 23 and a fourth gear 24. The third gear 23 meshes with the first gear 21, the fourth gear 24 meshes with the third gear 23, and the second gear 22 meshes with the fourth gear 24. Optionally, the rotating mechanism also includes a bearing seat 8 and a first bearing 9. The bearing seat 8 is fixed to the rotary disk 3, the first bearing 9 is disposed on the bearing seat 8, and the rotating frame 41 is disposed on the first bearing 9, enabling flexible rotation of the rotating frame 41. Optionally, the third gear 23 is rotatably connected to the rotary disk 3 via the second bearing 10, and the fourth gear 24 is rotatably connected to the rotary disk 3 via the third bearing 11.
[0040] Optionally, the light detection component 7 includes a light-transmitting glass 71 and a beam splitter. The light emitted by the light source 5 passes through the light-transmitting glass 71 and enters the beam splitter. The light emitted by the light source 5 passes sequentially through the monitoring plate 6, the carrier 42, the hollow cavity 411, and the light-transmitting glass 71, and is focused onto the light-receiving lens. Then, it passes through an optical fiber to reach the beam splitter. After the beam signal is split by the beam splitter, it enters the detector and the data processing system. Through data calculation and analysis, the film thickness is analyzed and monitored.
[0041] This utility model also provides a vacuum coating chamber, including a vacuum chamber 1 and the aforementioned film thickness monitoring mechanism. The rotating mechanism, light source 5, and photodetector 7 are all disposed in the vacuum chamber 1. Furthermore, in this embodiment, the vacuum coating chamber includes a coating source disposed in the vacuum chamber 1. The coating source includes a crucible 20, through which the workpiece 100 is vacuum-evaporated and coated. This vacuum coating chamber can accurately monitor the thickness of the thin film on the workpiece 100 while coating it, thereby achieving precise control of the film thickness and obtaining a film of the desired thickness. In addition, it has a simple structure and is convenient for monitoring.
[0042] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A film thickness monitoring mechanism, characterized in that, include: A rotating mechanism is configured to be disposed in a vacuum chamber (1). The rotating mechanism includes a drive assembly (2), a revolving disk (3), and a planetary assembly (4). The planetary assembly (4) includes a rotating frame (41), which is rotatably disposed on the revolving disk (3). The drive assembly (2) is used to drive the rotating frame (41) to revolve around the axis of the revolving disk (3) and to drive the rotating frame (41) to rotate on its own axis. The rotating frame (41) is provided with a hollow cavity (411) and a mounting part, which is used to support the workpiece (100). The monitoring mechanism includes a light source (5), a monitoring plate (6), and a light detection component (7). The light source (5) and the light detection component (7) are both configured to be located in the vacuum chamber (1). The monitoring plate (6) is fixed at the rotation center of the mounting part. The light energy emitted by the light source (5) passes through the monitoring plate (6) and the hollow cavity (411) in sequence and enters the light detection component (7).
2. The film thickness monitoring mechanism according to claim 1, characterized in that, The planetary assembly (4) is provided with at least two sets, and the at least two sets of planetary assemblies (4) are arranged at circumferential intervals along the orbital disk (3). The drive assembly (2) is used to drive all the rotating frames (41) to revolve along the axis of the orbital disk (3) and can drive all the rotating frames (41) to rotate on their own axis. The monitoring plate (6) is arranged in a one-to-one correspondence with the mounting part.
3. The film thickness monitoring mechanism according to claim 1, characterized in that, The hollow cavity (411) extends along the rotation center line of the rotating frame (41).
4. The film thickness monitoring mechanism according to claim 1, characterized in that, The planetary assembly (4) also includes a carrier (42), which serves as the mounting part and is attached to the rotating frame (41).
5. The film thickness monitoring mechanism according to claim 4, characterized in that, The rotating frame (41) includes a rotating shaft (412) and an overlapping assembly. The rotating shaft (412) is rotatably mounted on the revolving disk (3). The rotating shaft (412) is provided with the hollow cavity (411). The overlapping assembly is detachably connected to the rotating shaft (412). The overlapping assembly is used to overlap the carrier (42).
6. The film thickness monitoring mechanism according to claim 5, characterized in that, The rotating shaft (412) is provided with an overlapping part (4121), and the overlapping component is sleeved on the outside of the rotating shaft (412) and overlaps the overlapping part (4121).
7. The film thickness monitoring mechanism according to claim 5, characterized in that, The overlapping assembly includes a mounting platform (413), an overlapping member (414), and at least two connecting rods (415). The mounting platform (413) is detachably connected to the rotating shaft (412). All the connecting rods (415) are spaced apart circumferentially along the mounting platform (413). The two ends of each connecting rod (415) are connected to the mounting platform (413) and the overlapping member (414), respectively. The overlapping member (414) is provided with an overlapping surface (4141), which is used to overlap the vehicle (42).
8. The film thickness monitoring mechanism according to claim 7, characterized in that, The overlapping assembly also includes an adjustment assembly, which is configured one-to-one with the connecting rod (415). The adjustment assembly connects the connecting rod (415) to the mounting platform (413) and can adjust the position of the connecting rod (415) in the vertical direction.
9. The film thickness monitoring mechanism according to any one of claims 1-8, characterized in that, The drive assembly (2) includes a drive member, a first gear (21) and a second gear (22). The drive member is used to drive the rotating disk (3) to rotate. The first gear (21) is coaxially arranged with the rotating disk (3) and is fixed to the vacuum chamber (1). The second gear (22) is fixed to the rotating frame (41) and is coaxially arranged with the rotating frame (41). The second gear (22) is connected to the first gear (21) in a transmission connection.
10. A vacuum coating chamber, characterized in that, It includes a vacuum chamber (1) and a film thickness monitoring mechanism as described in any one of claims 1-9, wherein the rotating mechanism, the light source (5) and the photodetector (7) are all disposed in the vacuum chamber (1).