A sealing detection device for an evaporation coating chamber

Abstract

The utility model relates to vacuum coating technology field discloses a kind of sealing detection equipment of evaporation coating cavity, including mesa, storage room is installed in mesa lower end rear part, positive pressure method seal tester is installed in mesa lower end middle part, mesa middle part is provided with detection port;In the utility model, start drive motor, drive motor is rotated by coupling and drives ball screw, sliding block is moved, start electric hydraulic cylinder, tighten locking bolt, adjust telescopic rod length, realize the adjustment of position, again tighten locking bolt, start electric hydraulic cylinder, electric hydraulic cylinder is all driven and press plate moves downward, extrusion fixation is carried out to evaporation coating cavity around, avoid the position of evaporation coating cavity from deviating when operating, to cause air leakage, to the influence of sealing detection operation, rubber layer improves the sealing of evaporation coating cavity and mesa contact surface, improve the compactness, high efficiency, save the time of detection.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a sealing detection device for an evaporation coating cavity. Background Technology

[0002] The evaporation coating chamber is the core component of vacuum evaporation coating equipment. Its design, materials, and environmental control directly affect the coating quality and efficiency. The evaporation coating process needs to be carried out in a high vacuum environment. Traditional evaporation coating chamber sealing equipment does not have a squeezing and pressing structure, which makes the evaporation coating chamber prone to displacement during operation, resulting in poor stability and air leakage. This affects the accuracy of the test, reduces efficiency, and delays the test time. Utility Model Content

[0003] To address the shortcomings of existing technologies, this invention provides a sealing detection device for evaporation coating chambers, which has advantages such as high stability and solves the problems mentioned in the background technology.

[0004] To achieve the aforementioned goal of high stability, this utility model provides the following technical solution: a sealing test device for an evaporation coating cavity, including a table, a storage chamber installed at the rear of the lower end of the table, a positive pressure sealing tester installed at the middle of the lower end of the table, a test port provided at the middle of the table, and the lower end of the test port communicating with the positive pressure sealing tester;

[0005] Both sides of the upper end of the platform are equipped with drive seats. Both sides of the upper end of the drive seats are provided with slide grooves. Ball screws are provided inside the slide grooves. Drive motors are installed on the inner ends of the ball screws through couplings. Sliders are driven and installed on the ball screws. Telescopic rods are installed on the inner ends of the sliders. Locking bolts are threaded to the upper ends of the telescopic rods. Fixing blocks are installed on the inner ends of the telescopic rods. Electric hydraulic cylinders are installed on the upper ends of the fixing blocks. Pressure plates are installed on the lower ends of the electric hydraulic cylinders through the fixing blocks.

[0006] As a further improvement of this utility model: two drawers are slidably installed on the upper part of the front wall of the storage chamber, and each drawer is provided with a handle at the front end. The two drawers are pulled out to store items inside.

[0007] As a further improvement of this utility model, the surface of the countertop is provided with a rubber layer, which improves the elasticity of the countertop surface and enhances its sealing performance.

[0008] As a further improvement of this utility model: a support frame is installed at the front end of the storage room, the upper end of the support frame is fixedly connected to the lower end of the tabletop, the support frame is made of aluminum alloy material, and the support frame supports the tabletop.

[0009] As a further improvement of this utility model: a door is hinged to the right side of the front wall of the storage chamber, and tools can be stored inside by opening the door.

[0010] As a further improvement of this utility model: a vacuum pump is provided on the inner wall of the detection port. When the vacuum pump is started, the air inside the evaporation coating chamber is evacuated and the evaporation coating chamber is restored to a normal pressure state.

[0011] As a further improvement of this utility model: a buffer plate is installed at the bottom of each pressure plate. The buffer plate is made of rubber material, and the pressure plate is made of stainless steel material. The buffer plate improves the elasticity of the bottom of the pressure plate and improves the sealing performance.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] In this invention, the drive motor is started, and the drive motor drives the ball screw to rotate through the coupling, which in turn moves the slider. The electric hydraulic cylinder is then started, the locking bolt is loosened, and the length of the telescopic rod is adjusted to achieve position adjustment. The locking bolt is then tightened, and the electric hydraulic cylinder is started again. The electric hydraulic cylinder drives the pressure plate to move downward, squeezing and fixing the evaporation coating chamber around its perimeter. This prevents the evaporation coating chamber from shifting during operation, which could lead to air leakage and affect the sealing test. The rubber layer improves the sealing performance of the contact surface between the evaporation coating chamber and the table, increasing tightness, improving efficiency, and saving test time. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the drive seat in this utility model;

[0016] Figure 3 This is a schematic diagram of the appearance of the pressure plate of this utility model.

[0017] In the diagram: 1. Support frame; 2. Drive base; 3. Telescopic rod; 4. Electric hydraulic cylinder; 5. Vacuum pump; 6. Slide groove; 7. Ball screw; 8. Buffer plate; 9. Tabletop; 10. Drawer; 11. Box door; 12. Storage chamber; 13. Positive pressure sealing tester; 14. Drive motor; 15. Slider; 16. Locking bolt; 17. Pressure plate. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] It should be noted that the positive pressure sealing tester 13 is existing technology and common knowledge to those skilled in the art, and will not be elaborated upon here.

[0020] Please see Figures 1-3 In this embodiment of the utility model, a sealing test device for an evaporation coating cavity includes a table 9, a storage chamber 12 installed at the rear of the lower end of the table 9, a positive pressure sealing tester 13 installed at the middle of the lower end of the table 9, and a test port provided in the middle of the table 9, the lower end of which is connected to the positive pressure sealing tester 13.

[0021] Both sides of the upper end of the table 9 are equipped with drive seats 2. Both sides of the upper end of the drive seats 2 are provided with slide grooves 6. Ball screws 7 are provided inside the slide grooves 6. The inner ends of the ball screws 7 are equipped with drive motors 14 through couplings. Slider 15 is installed on the ball screws 7. Telescopic rods 3 are installed inside the sliders 15. Locking bolts 16 are threadedly connected to the upper ends of the telescopic rods 3. Fixing blocks are installed inside the telescopic rods 3. Electric hydraulic cylinders 4 are installed on the upper ends of the fixing blocks. The lower ends of the electric hydraulic cylinders 4 pass through the fixing blocks and are equipped with pressure plates 17.

[0022] The storage chamber 12 has two drawers 10 that slide on the upper part of its front wall. Each drawer 10 has a handle at its front end. Pulling out the two drawers 10 allows for the storage of items. The surface of the tabletop 9 is covered with a rubber layer, which improves the elasticity and sealing of the tabletop 9. A support frame 1 is installed at the front of the storage chamber 12. The upper end of the support frame 1 is fixedly connected to the lower end of the tabletop 9. The support frame 1 is made of aluminum alloy and supports the tabletop 9. A door 11 is hinged to the right side of the front wall of the storage chamber 12. Opening the door 11 allows for the storage of tools inside. A vacuum pump 5 is installed on the inner wall of the detection port. Activating the vacuum pump 5 removes the air from the evaporation coating chamber and restores the evaporation coating chamber to normal pressure. A buffer plate 8 is installed at the bottom of each pressure plate 17. The buffer plate 8 is made of rubber, while the pressure plate 17 is made of stainless steel. The buffer plate 8 improves the elasticity of the bottom of the pressure plate 17 and enhances the sealing.

[0023] The working principle of this invention is as follows: The evaporation coating chamber is placed on the detection port. The drive motor 14 is started, and the drive motor 14 drives the ball screw 7 to rotate via the coupling, causing the slider 15 to move. The electric hydraulic cylinder 4 is started, the locking bolt 16 is loosened, and the length of the telescopic rod 3 is adjusted to achieve position adjustment. Then, the locking bolt 16 is tightened, and the electric hydraulic cylinder 4 is started again. The electric hydraulic cylinder 4 drives the pressure plate 17 to move downwards, pressing and fixing the evaporation coating chamber around its perimeter to prevent displacement of the evaporation coating chamber during operation, thus avoiding air leakage. The rubber layer improves the sealing performance of the contact surface between the evaporation coating chamber and the table 9, thus enhancing the tightness of the sealing test. The positive pressure sealing tester 13 is started, and compressed gas is injected into the evaporation coating chamber. The pressure decay or rupture pressure is monitored to evaluate the sealing strength. The sealing test is then performed on the evaporation coating chamber. The vacuum pump 5 is started to remove the air from the evaporation coating chamber and restore it to normal pressure. Two drawers 10 are pulled out for storing items. The cabinet door 11 is opened to store tools inside.

[0024] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A sealing test device for an evaporation coating cavity, comprising a table (9), a storage chamber (12) installed at the rear of the lower end of the table (9), a positive pressure sealing tester (13) installed at the middle of the lower end of the table (9), a test port provided in the middle of the table (9), and the lower end of the test port being connected to the positive pressure sealing tester (13); Its features are: Both sides of the upper end of the platform (9) are equipped with drive seats (2), both sides of the upper end of the drive seats (2) are provided with slide grooves (6), and ball screws (7) are provided inside the slide grooves (6). The inner ends of the ball screws (7) are all equipped with drive motors (14) through couplings. A slider (15) is installed on the ball screws (7). The inner ends of the sliders (15) are all equipped with telescopic rods (3). The upper ends of the telescopic rods (3) are all threaded with locking bolts (16). The inner ends of the telescopic rods (3) are all equipped with fixing blocks. The upper ends of the fixing blocks are all equipped with electric hydraulic cylinders (4). The lower ends of the electric hydraulic cylinders (4) pass through the fixing blocks and are equipped with pressure plates (17).

2. The sealing detection device for an evaporation coating cavity according to claim 1, characterized in that: The storage room (12) has two drawers (10) that are slidably installed on the upper part of the front wall, and each drawer (10) has a handle at the front.

3. The sealing detection device for an evaporation coating cavity according to claim 1, characterized in that: The surface of the tabletop (9) is provided with a rubber layer.

4. The sealing detection device for an evaporation coating cavity according to claim 1, characterized in that: The storage room (12) is equipped with a support frame (1) at the front end. The upper end of the support frame (1) is fixedly connected to the lower end of the table (9). The support frame (1) is made of aluminum alloy.

5. The sealing detection device for an evaporation coating cavity according to claim 1, characterized in that: The storage room (12) has a door (11) hinged to the right side of the front wall.

6. The sealing detection device for an evaporation coating cavity according to claim 1, characterized in that: A vacuum pump (5) is installed on the inner wall of the detection port.

7. The sealing detection device for an evaporation coating cavity according to claim 1, characterized in that: Each pressure plate (17) is equipped with a buffer plate (8) at its bottom end. The buffer plate (8) is made of rubber material, and the pressure plate (17) is made of stainless steel material.

Images