Ceramic sheet sinter

Abstract

The ceramic sheet sintered body of the present application includes a first line portion layer composed of a plurality of first line portions and a second line portion layer composed of a plurality of second line portions arranged so as to be connected to and cross over each of the first line portions, the two line portion layers being integrally formed, and the "warp rate" per unit length obtained by dividing the amount of warp of the longest portion of the main surface of the ceramic sheet sintered body by the length of the longest portion is 5 x 10 ‑ 3 mm / mm or less. The manufacturing method of the ceramic sheet sintered body of the present application includes a step of placing a ceramic sheet on a shaped body formed from a raw material paste including a ceramic raw material powder and a solvent, the shaped body including a plurality of first line coating bodies and a plurality of second line coating bodies.

Description

Technical Field

[0001] This invention relates to sintered ceramic sheets and methods for manufacturing the same. More specifically, this invention relates to sintered ceramic sheets with extremely high levelness and minimal warpage, and methods for manufacturing the same. Background Technology

[0002] When firing ceramic electronic components and glass, the materials to be fired are generally placed on a firing plate, also known as a slab or mortiseplate. To shorten the degreasing and firing time and increase the number of units produced per unit time, rapid heating and cooling are required during the firing process. However, existing ceramic firing plates are prone to cracking and other defects when subjected to rapid heating and / or cooling. Furthermore, repeated use also increases the likelihood of cracking. Additionally, when using metal firing plates, it has been pointed out that they cannot be used in oxidizing atmospheres, and repeated use in high-temperature areas above 1200°C results in significant deformation.

[0003] Regarding techniques for preventing cracks in the firing plate during rapid heating and cooling of the workpiece, for example, Patent Document 1 (Japanese Patent Application Publication No. 2018-193274) discloses a ceramic grid body having multiple first lines made of ceramic and multiple second lines made of ceramic intersecting with them, wherein in a longitudinal cross-sectional view of the intersection, the top of the convex curved portion of the first line portion only contacts the circular or elliptical downward convex top of the second line portion (so-called point contact).

[0004] In addition, a ceramic grid body is reported, which has multiple first lines made of ceramic and multiple second lines made of ceramic intersecting with them, and the first lines and second lines are in contact as surfaces rather than points at their respective contact points.

[0005] On the other hand, ceramic firing supports are often stored and transported on platforms or in multi-layer stacks. For example, sometimes multi-layer stacked firing supports are transported from the warehouse to other locations by trolleys over elevation differences. Therefore, it is desirable to manufacture ceramic firing supports that, even under conditions of handling involving vigorous movements such as storage and transport on platforms or in multi-layer stacks, especially when transported from the warehouse to other locations by trolleys in multi-layer stacks over elevation differences, possess a high degree of horizontality that prevents lateral displacement, collapse, and associated defects, allowing for neat transport and multi-layer stacking.

[0006] Existing technical documents

[0007] Patent documents

[0008] Patent Document 1: Japanese Patent Application Publication No. 2018-193274 Summary of the Invention

[0009] The problem that the invention aims to solve

[0010] In cases where a firing support plate of a flat (plate) shape or the like experiences significant warping after firing, impairing its levelness, it can be flattened by grinding to reduce warping. However, even when a firing support plate for a ceramic grid exhibits significant warping after firing, there are concerns about flattening it by grinding: narrow line widths can lead to stress and line defects, localized thinning can easily occur, and uneven heat capacity can result in uneven physical properties of the fired product. Therefore, such post-firing flattening is not possible. Thus, when obtaining a ceramic firing support plate, especially a ceramic grid firing support plate, it is desirable to minimize warping immediately after the ceramic grid is manufactured (fired). However, in the prior art, a ceramic firing support plate that sufficiently reduces warping during manufacturing by firing has not yet been specifically provided.

[0011] Therefore, the problem to be solved by the present invention is to provide a ceramic firing support plate with extremely high levelness and significantly reduced warping during firing, and a method thereof.

[0012] means for solving problems

[0013] Through in-depth research, the inventors discovered that in a ceramic sheet sintered body comprising a first line layer and a second line layer, the first line layer is composed of multiple first line portions extending in one direction at predetermined intervals, and the second line layer is composed of multiple second line portions extending in one direction at predetermined intervals, connected to and intersecting with each of the first line portions. The first line layer and the second line layer are integrally formed. When this ceramic sheet sintered body is manufactured by firing, the "warp rate" per unit length, obtained by dividing the warp of the longest portion of the main surface of the ceramic sheet sintered body by the length of the longest portion, is adjusted to 5 × 10⁻⁶. -3 Within a specified range of less than mm / mm, a ceramic sheet sintered body with sufficiently reduced warpage and durability relative to processing conditions accompanied by violent movements when placed on a table or stacked in multiple layers as described above can be obtained, thus completing the ceramic sheet sintered body of the present invention.

[0014] Furthermore, the inventors have discovered that by preparing a molded body from a raw material paste comprising ceramic raw material powder and a solvent, the molded body comprising a plurality of first line coating bodies extending in one direction at predetermined intervals, and a plurality of second line coating bodies extending in one direction at predetermined intervals, which are connected to and intersect with each of the first line coating bodies, and then placing a ceramic plate on the second line coating body of the molded body and firing it in this state, it is possible to manufacture a ceramic sheet sintered body with sufficiently reduced warpage to have a degree of durability relative to processing conditions accompanied by violent movements when placed on a table or stacked in multiple layers as described above, thus completing the manufacturing method of the present invention.

[0015] The various aspects included in this invention are as follows. [1].

[0017] A ceramic sheet sintered body comprising a first line layer and a second line layer.

[0018] The first line section layer is composed of multiple first line sections arranged at predetermined intervals and extending in one direction, and the second line section layer is composed of multiple second line sections arranged at predetermined intervals and extending in one direction, which are connected to and intersect with the first line sections.

[0019] The first line layer and the second line layer are integrally formed.

[0020] The warpage rate per unit length, obtained by dividing the warpage of the longest portion of the main surface of the sintered ceramic sheet by the length of the longest portion, is 5 × 10⁻⁶. -3 Below mm / mm. [2].

[0022] A method for manufacturing a sintered ceramic sheet body, comprising:

[0023] A process for producing a molded body from a raw material paste containing ceramic raw material powder and a solvent, the molded body comprising a plurality of first line coating bodies extending in one direction at predetermined intervals, and a plurality of second line coating bodies extending in one direction at predetermined intervals, arranged to connect with and intersect the first line coating bodies, and further comprising...

[0024] Next, the ceramic plate is placed on the second line coating body of the molded body.

[0025] Invention Effects

[0026] According to the ceramic sheet sintered body and manufacturing method of the present invention, by having a structure comprising a first line portion layer and a second line portion layer, wherein the first line portion layer is composed of a plurality of first line portions extending in one direction at predetermined intervals, and the second line portion layer is composed of a plurality of second line portions extending in one direction at predetermined intervals in a manner that connect to and intersect with each of the first line portions, thereby enabling the obtaining of a ceramic sheet sintered body that provides excellent air permeability even when the workpiece is subjected to multi-stage firing.

[0027] Furthermore, according to the ceramic sheet sintered body and its manufacturing method of the present invention, while obtaining excellent air permeability in the firing process of the sintered object, warping can also be sufficiently suppressed. Thus, a ceramic sheet sintered body can be obtained that can be neatly transported and stacked in multiple layers without lateral displacement, collapse, or associated defects, even under conditions of violent movement such as storage, transportation, or transporting from a warehouse to other locations by trolley across height differences while placed on a table or in multi-layer stacked state.

[0028] Furthermore, according to a preferred embodiment of the ceramic sheet sintered body and its manufacturing method, a ceramic sheet sintered body can be obtained in which the maximum rate of change of the gap dimension of the line portion is suppressed within a specified range. This prevents the fired material from falling from the opening of the firing plate, and in the case of multi-stage firing of the material, avoids the unfavorable situation of it falling to the lower layer and getting stuck. In addition, according to another preferred embodiment of the ceramic sheet sintered body and its manufacturing method, a ceramic sheet sintered body can be obtained in which the maximum rate of change of the width dimension of the sheet is suppressed within a specified range. This effectively prevents material handling problems (material handling-related problems) caused by misidentification of straight lines during image recognition of the firing plate. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of a ceramic plate being placed on a molded body containing multiple first-line coating bodies and multiple second-line coating bodies within a firing fixture and then fired.

[0030] Figure 2 This is a conceptual diagram of a method for determining the maximum rate of change of a sintered ceramic sheet relative to the median value of the sheet width.

[0031] Figure 3 This is a schematic diagram of a sintered ceramic sheet in the shape of a footrest (firing support plate) according to one embodiment of the present invention.

[0032] Figure 4 (a) is a perspective view showing a ceramic sheet sintered body (firing support plate for firing) having a so-called point contact structure according to an embodiment of the present invention. Figure 4 (b) is viewed from the opposite side. Figure 4 (a) shows a three-dimensional view of the sintered body.

[0033] Figure 5 yes Figure 4 Sectional view along line II-II.

[0034] Figure 6 yes Figure 4 Sectional view along line III-III.

[0035] Figure 7 yes Figure 4 Sectional view along line IV-IV.

[0036] Figure 8 yes Figure 4 The VV line section view in the diagram.

[0037] Figure 9 From Figure 4 A projection view of the area near the intersection of the second line portion of the sintered body shown.

[0038] Figure 10 From Figure 4 A projection view of the area near the intersection of the first line portion of the sintered body shown.

[0039] Figure 11 It is shown Figure 4 A schematic diagram showing the shape of the through holes in the sintered body.

[0040] Figure 12 (a) is a perspective view showing a ceramic sheet sintered body (firing support plate) having a so-called surface contact structure according to an embodiment of the present invention. Figure 12 (b) is viewed from the opposite side. Figure 12 (a) shows a three-dimensional view of the sintered body.

[0041] Figure 13 yes Figure 12 Sectional view along line II-II.

[0042] Figure 14 yes Figure 12 Sectional view along line III-III.

[0043] Figure 15 yes Figure 12 Sectional view along line IV-IV.

[0044] Figure 16 yes Figure 12 The VV-line sectional view in the diagram.

[0045] Figure 17 From Figure 12 A projection view of the area near the intersection of the second line portion of the sintered body shown.

[0046] Figure 18 From Figure 12 A projection view of the area near the intersection of the first line portion of the sintered body shown.

[0047] Figure 19 It is shown Figure 12 A schematic diagram showing the shape of the through holes in the sintered body. Detailed Implementation

[0048] 1. Sintered ceramic sheet body

[0049] The ceramic sheet sintered body of the present invention comprises:

[0050] (i) A first line section layer, which is composed of multiple first line sections extending in one direction at predetermined intervals, and,

[0051] (ii) A second line section layer, which is composed of multiple second line sections arranged at predetermined intervals, each extending in one direction, in a manner that connects to and intersects with each of the first line sections.

[0052] The first line layer and the second line layer are integrally formed.

[0053] The warpage rate per unit length, obtained by dividing the warpage of the longest portion of the main surface of the sintered ceramic sheet by the length of the longest portion, is 5 × 10⁻⁶. -3 Below mm / mm.

[0054] It should be noted that, in this specification, the “main surface” of the ceramic sheet sintered body refers to the surface formed by the tops of the lines of the uppermost line layer, which can constitute the mounting surface of the object to be fired when the ceramic sheet sintered body is used as a firing support plate for firing.

[0055] Furthermore, the "longest part" of a main face refers to the portion formed by the line that traverses the main face and whose length on the main face reaches its maximum. When the main face is roughly rectangular, its "longest part" usually refers to the portion formed by either of the two diagonals of the main face.

[0056] The ceramic raw material powder used in the multiple first and second line portions of the sintered ceramic sheet body is not particularly limited and can include various ceramic raw materials. Examples of ceramic raw materials used as raw material powders include one or more combinations of alumina (Al2O3), zirconium oxide (ZrO2), magnesium oxide (MgO), mullite (3Al2O3-2SiO2), silicon carbide (SiC), silicon nitride (Si3N4), aluminum nitride (AlN), boron carbide (B4C), cordierite (MgO / Al2O3 / SiO2), aluminum titanate (Al2TiO5), magnesium titanate (MgTiO3), and titanium diboride (TiB2). Furthermore, sintered bodies manufactured using raw material powders that are combinations of one or more of these ceramic raw materials will naturally have a composition that can be produced by these raw materials.

[0057] Regarding the specified spacing between the lines of the multiple first lines, when there are three or more lines, that is, when there are two or more spacings, the spacing can be designed to be at least partially different, or it can be designed to be substantially equal.

[0058] Furthermore, regarding the prescribed spacing between the lines of the multiple second lines, when the structure consists of three or more lines (i.e., when there are two or more spacings), the spacing can be designed to be at least partially different, or it can be designed to be substantially equal. The prescribed spacing between the lines of the multiple first lines and the prescribed spacing between the lines of the multiple second lines can be designed independently.

[0059] The aforementioned first line layer and second line layer being integrally formed means that the line group constituting the first line layer and the line group constituting the second line layer are fired and connected in such a way that they form an integral structure at their contact points, and are formed in such a way that they cannot be easily separated.

[0060] In one embodiment, the first line layer and the second line layer are fired and connected in such a way that the line groups constituting the first line layer and the line groups constituting the second line layer are integrated at their contact points, forming a structure that cannot be easily separated, and the first line layer and the second line layer, or different parts of each line layer, can be formed from a single component.

[0061] In another embodiment, the first line layer and the second line layer are fired and connected in such a way that the line groups constituting the first line layer and the line groups constituting the second line layer are integrated at their contact points, forming a structure that cannot be easily separated, and the first line layer and the second line layer, or different parts of each line layer, can be formed from different multiple compositions.

[0062] The ceramic sheet sintered body may optionally include a third line layer, which is composed of a first line layer consisting of multiple first line sections and a second line layer consisting of multiple second line sections. The third line layer is composed of multiple third line sections that are connected to each of the second line sections and intersect with the first and second line sections in a top view at predetermined intervals, each extending in one direction.

[0063] There are no particular limitations on the sintered ceramic sheet body; it can be manufactured by combining one or more embodiments of the manufacturing method described later.

[0064] The warpage per unit length, obtained by dividing the warpage of the longest part of the main surface of the sintered ceramic sheet by the length of its longest part, is 5 × 10⁻⁶. -3 The warpage of the sintered ceramic sheet should be less than 0.5 mm / mm. A lower warpage is better, and is preferably 4.5 × 10⁻⁶ mm / mm. - 3 For mm / mm and below, 4×10 is more preferable. -3 For mm / mm and below, it can be further preferred to be 3.5×10. -3 For mm / mm and below, 3×10 is even more preferred. -3 For thicknesses below mm / mm, a further preferred value is 2.5 × 10⁻⁶. -3 For mm / mm and below, a further preferred value is 2×10. -3 Below mm / mm, the optimal value is 1.5 × 10. -3 Below mm / mm.

[0065] There is no specific lower limit to the warpage of the sintered ceramic sheet body; for example, it can be 0.1 × 10⁻⁶. -3 mm / mm or above.

[0066] By using such small warpage ceramic sheet sintered bodies as firing plates, the stability of the fired objects (such as ceramic electronic components, glass, etc.) can be greatly improved. In addition, ceramic sheet sintered bodies can be obtained that can be neatly transported and stacked in multiple layers without lateral displacement, collapse, or associated defects, even under conditions of violent movement such as storage, transportation, or transporting from a warehouse to other locations by trolley over height differences while placed on a table or stacked in multiple layers.

[0067] Specifically, the warpage here can be calculated as follows, assuming the sintered ceramic sheet is roughly rectangular when viewed from above.

[0068] • With a metal ruler aligned with one diagonal of the sintered ceramic sheet, use a gap gauge to measure the warping of the other diagonal that constitutes the longest part.

[0069] • The maximum warping ratio is calculated by dividing the warping amount (mm) of the diagonal portion by the length of the diagonal (maximum length) relative to the larger value.

[0070] The smaller the maximum rate of change of the gap between each line in the first line portion of the ceramic sheet sintered body relative to the median value, the better. It can usually be less than 100%, preferably within 85%, more preferably within 80%, even more preferably within 70%, even more preferably within 60%, even more preferably within 50%, even more preferably within 40%, and most preferably within 30%.

[0071] The firing of a molded body containing multiple first-line coatings and multiple second-line coatings, obtained by coating and drying a raw material paste containing ceramic raw material powder and solvent (see below). Figure 1 According to the relevant instructions, by maintaining the load on the plate within a specified range, uneven shrinkage within the surface during firing and changes in the gaps between the individual lines of the first line portion can be suppressed. As a result, when using such a sheet sintered body as a firing plate to fire microelectronic components, the phenomenon of electronic components falling from the gaps or openings of the individual lines of the first line portion of the sintered body, and falling to lower layers and getting stuck in the case of multi-stage firing, can be minimized.

[0072] Specifically, the maximum rate of change of the gaps between the lines in the first line section relative to the median value can be calculated as follows.

[0073] • The gap dimensions (opening dimensions) of all the first line sections were measured using digital image analysis equipment, i.e., a digital microscope (such as the Keyence VHX-5000).

[0074] • The average value of the gap dimension (opening dimension) of the first line section when at least 50 points were measured is defined as the "median value".

[0075] • Calculate the minimum and maximum values ​​of the gap dimensions (opening dimensions) of all measured first line sections, and the maximum rate of change (%) of these values ​​relative to the median values.

[0076] When the sintered ceramic sheet is roughly rectangular in plan view, and two parallel imaginary lines A and B, circumscribed on any two opposite sides constituting the roughly rectangular shape and spaced at the shortest distance, are arranged, the distance between the two points C and D, the intersection points of the straight line perpendicular to imaginary lines A and B with the aforementioned opposite sides, is the sheet width. When the sheet width is measured as a whole over the length of these two sides, the maximum rate of change relative to the midpoint of the sheet width is typically within 5%, preferably within 4%, more preferably within 3.5%, even more preferably within 3%, even more preferably within 2.5%, even more preferably within 2%, and most preferably within 1.5%. By suppressing the maximum rate of change of the sheet width dimension within a specified range, a sintered ceramic sheet with excellent mechanical transportability can be obtained. For example, in operations such as image recognition when using the sintered ceramic sheet as a support plate for material handling, the straight line recognition performance is significantly improved, thus effectively preventing edge breakage during subsequent transport operations.

[0077] The concept of a method for determining the maximum rate of change of such sintered ceramic sheet relative to the median value of the sheet width is illustrated in the figure. Figure 2 Please understand. Figure 2 The top view of the sintered ceramic sheet shown is only one example for the sake of simplification. Figure 2 As shown, two imaginary lines A and B (in practice, a ruler can generally be used) are arranged parallel to each other relative to the roughly rectangular sintered ceramic sheet. The distance between the intersection points C and D of the straight line perpendicular to imaginary lines A and B with the opposite sides is taken as the sheet width W. By measuring the sheet width as a whole along the length of the opposite sides, its variation can be grasped. Figure 2 In the ceramic sheet sintering body, the left side of each part is formed into an acute angle (for ease of understanding, it is drawn as a large acute angle, but in reality, large acute angles are rarely formed). In this case, strictly speaking, the imaginary line A cannot be considered "circumscribed to the edge," but it can be considered "circumscribed to the edge" when the imaginary line is drawn in the manner of being circumscribed to the corner of the edge. In addition, for the two opposite sides, "measuring the sheet width as a whole over the length of the two opposite sides" means measuring the sheet width of the area where the two opposite sides are parallel to each other as a whole.

[0078] It should be noted that the average value of the width of the sintered ceramic sheet body measured at least 6 points is defined as the "median value" here.

[0079] The following are specific examples of the structure of the ceramic sheet sintered body of the present invention, but these are merely illustrative examples and the ceramic sheet sintered body is not limited to these.

[0080] Those skilled in the art will, as needed, conceive of modifying and altering a portion of these specific structural examples, or, to the extent possible, combining a portion or all of multiple structural examples.

[0081] Example 1 of the structure of ceramic sheet sintered body: pedal-shaped sintered body

[0082] In one embodiment, the ceramic sheet sintered body is configured as a pedal-shaped sintered body (firing support plate). The pedal-shaped sintered body forms a first line layer (support layer) consisting of two lines (supports) extending substantially parallel at predetermined intervals. A second line layer is formed, consisting of a plurality of lines extending substantially parallel at predetermined intervals above the first line layer, with the two lines of the first line layer serving as both ends and intersecting thereinters. This pedal-shaped sintered body is formed by integrally firing the first line layer and the second line layer.

[0083] An example of a footplate-shaped sintered body (firing support plate) is shown below. Figure 3 . Figure 3 In the text, 5 refers to the sintered ceramic sheet, 6 (6a and 6b) refers to the lines constituting the first line layer, and 7 refers to the lines constituting the second line layer. Here, the lines constituting the second line layer are arranged approximately perpendicularly to the lines constituting the first line layer (i.e., the supports).

[0084] The cross-sectional shape of each line in the first and second line layers can be circular, elliptical, triangular, rectangular, etc., without particular limitation. When the cross-sectional shape of each line is circular, elliptical, triangular, or rectangular, these lines form cylinders, elliptical cylinders, triangular prisms, and square prisms. For example, as... Figure 3 As shown, the lines constituting the second line layer and the lines constituting the first line layer are cylindrical except for their bottoms, and the bottoms of the lines constituting the first line layer can be flat surfaces. The thicknesses of the first and second line layers are not particularly limited; for example, they can be 0.3 mm or more and 10 mm or less. The thicknesses of the first and second line layers can be substantially the same or different. From the perspective of structural strength and stability, the thickness of the first line layer constituting the bottom of the sintered pedestal sheet can be greater than the thickness of the second line layer.

[0085] As a form of transformation, in such Figure 3 In the case where the lines of the sintered body (firing support plate) shaped like a floor slab are formed into quadrangular prisms, one longitudinal side a of the two lines (supports) of the first line section of a sintered body and the end faces b1~b of each line of the second line section arranged approximately perpendicularly thereon can be used. xThe longitudinal side ac of one of the two lines (supports) of the first line layer of another sintered body and the end faces b corresponding to the lines of the second line layer disposed thereon. 1c ~b xc Between them, side a and side ac interlock, and end faces b1~b x and end face b 1c ~b xc In a mutually joined form, a sintered body is formed by coupling two or more sintered bodies together in an integral structure.

[0086] Example 2 of ceramic sheet sintered body structure: lattice (network) sintered body

[0087] In a preferred embodiment, the ceramic sheet sintered body may also have the following configuration at any intersection of the first line portion and the second line portion: the cross section of the first line portion also has a shape consisting of a straight section and a convex curved section with the two ends of the straight section as the ends; the cross section of the second line portion has a circular or elliptical shape; and, in the longitudinal cross-section of the intersection, the top of the convex curved section of the first line portion is in contact only with the downwardly convex top of the circular or elliptical shape of the second line portion (so-called point contact configuration).

[0088] An example of a ceramic sheet sintered body (firing support plate) with such a so-called point contact structure is shown below. Figure 4 . Figure 4 (a) and Figure 4 The ceramic sheet sintered body 11 shown in (b) has multiple first ceramic lines 20 extending in one direction X. Each first line 20 extends in a generally straight line and is generally parallel to each other. Furthermore, the ceramic sheet sintered body 11 has multiple second ceramic lines 30 extending in a direction different from X, namely Y. Each second line 30 extends in a generally straight line and is generally parallel to each other. Since the X and Y directions are different directions, the first line 20 and the second line 30 intersect. The intersection angle of the two line sections 20 and 30 can be set according to the specific application of the ceramic sheet sintered body 11. For example, the intersection angle of the second line section 30 relative to the first line section 20 can be set to approximately 90 degrees. Alternatively, the intersection angle of the second line section 30 relative to the first line section 20 can be varied within the range of 90 degrees ± 10 degrees. The ceramic sheet sintered body 11 is formed by the intersection of multiple first line sections 20 and multiple second line sections 30.

[0089] The sintered ceramic sheet body 11 forms a grid by the intersection of the first line portion 20 and the second line portion 30, and has a plate-like shape with a plurality of through holes 13 defined by the grid. The sintered ceramic sheet body 11 is as follows... Figure 5 As shown, it has a first surface 11a and a second surface 11b opposite to it.

[0090] The sintered ceramic sheet body 11 has an intersection 12 at the locations where the first line portion 20 and the second line portion 30 intersect. The intersection 12 is the location where the first line portion 20 and the second line portion 30 overlap in a top-view projection image of the sintered ceramic sheet body 11.

[0091] The first line portion 20, excluding the intersection 12, has a roughly constant width W1 when viewed from above (see reference). Figure 5 The cross-sectional shape of the first line portion 20 along the thickness direction in a direction orthogonal to its longitudinal direction is as follows: Figure 5 and Figure 6 As shown, the ceramic sheet sintered body 11 is defined by a first surface 20a located on the side of the first surface 11a and a second surface 20b located on the side of the second surface 11b. Specifically, the cross-section of the first line portion 20 in the thickness direction orthogonal to its longitudinal direction, excluding the intersection 12, has a shape consisting of a straight section 20A and a convex curved section 20B with both ends of the straight section 20A as its ends. As a result, the first surface 20a of the first line portion 20 has a flat cross-section in the thickness direction of the line portion 20. This flat surface is approximately parallel to the in-plane direction of the ceramic sheet sintered body 11. On the other hand, regarding the second surface 20b of the first line portion 20, the cross-section of the line portion 20 in the thickness direction has a convex curved shape extending from the first surface 11a to the second surface 11b of the ceramic sheet sintered body 11.

[0092] Similar to the first line portion 20, the second line portion 30, excluding the intersection 12, also has a roughly constant width W2 when viewed from above (see reference). Figure 8 The width W2 can be substantially the same as, or different from, the width W1 of the first line portion 20. The cross-sectional shape of the second line portion 30 along its thickness direction in a direction orthogonal to its longitudinal direction is as follows: Figure 7 and Figure 8As shown, the second line portion 30 is defined by a first surface 30a located on the side of the first surface 11a of the ceramic sheet sintered body 11 and a second surface 30b located on the side of the second surface 11b of the ceramic sheet sintered body 11. The first surface 30a of the second line portion 30 has a convex curved shape from the second surface 11b of the ceramic sheet sintered body 11 toward the first surface 11a. On the other hand, regarding the second surface 30b of the second line portion 30, the cross-section of the line portion 30 in the thickness direction has a convex curved shape from the first surface 11a of the ceramic sheet sintered body 11 toward the second surface 11b. This curved shape may be substantially the same as the curved shape of the first line portion 20, or it may be different. The first surface 30a and the second surface 30b of the second line portion 30 are substantially symmetrical, and as a result, the cross-sectional shape of the second line portion 30 in the thickness direction orthogonal to its longitudinal direction can be substantially circular or elliptical.

[0093] like Figure 6 and Figure 7 As shown, when the straight section 20A of the first line portion 20, i.e., the first surface 20a, is used as the mounting surface on the plane P, the sintered ceramic sheet 11 is mounted on the plane P. Since the first surface 20a constitutes the first surface 21a of the sintered ceramic sheet 11, the fact that each first surface 20a is located on the plane P indicates that the first surface 11a of the sintered ceramic sheet 11 is a flat surface. Therefore, when the sintered ceramic sheet 11 is mounted with its first surface 11a in contact with the flat mounting surface, the entire first surface 11a will be in contact with the mounting surface.

[0094] like Figure 6 As shown, when the straight section 20A, i.e. the first surface 20a, of the first line section 20 is placed on the plane P as the mounting surface, the second line section 30 is shaped to be separated from the plane P between two adjacent intersections 12. Therefore, a space S is formed between the second line section 30 and the plane P between the two adjacent intersections 12.

[0095] On the other hand, the second surface 11b of the ceramic sheet sintered body 11 is as follows: Figure 7 As shown, it is composed of the second surface 30b of the second line portion 30, which is a convex curved surface, and therefore is not a flat surface, but a concave-convex surface.

[0096] At the intersection 12 of the first line portion 20 and the second line portion 30 of the ceramic sheet sintered body 11, the two line portions 20 and 30 are integrated. "Integration" means that the cross-section of the intersection 12, when observed, forms a continuous ceramic structure between the two line portions 20 and 30. Through the intersection of the two line portions 20 and 30, the through holes 13 formed in the ceramic sheet sintered body 11 are substantially the same size and substantially the same shape. Each through hole 13 is approximately rectangular. The through holes 13 are arranged regularly.

[0097] like Figure 4 , Figure 6 and Figure 7 As shown, at any intersection 12 of the first line portion 20 and the second line portion 30, a second line portion 30 is disposed on the first line portion 20. That is, at the intersection 12 of the first line portion 20 and the second line portion 30, on the first line portion 20 located more on the first surface 11a of the two surfaces 11a and 11b of the ceramic sheet sintered body 11, a second line portion 30 located more on the second surface 11b is disposed. Furthermore, the thickness of the intersection 12 is greater than either the thickness of the first line portion or the thickness of the second line portion at other locations excluding the intersection. That is, let the thickness of the first line portion 20 at the location excluding the intersection 12 of the two line portions 20 and 30 be T1 (refer to...). Figure 5 Let the thickness of the second line portion 30, excluding the intersection 12, be T2 (refer to...). Figure 8 ), and then let the thickness of the intersection be Tc (refer to Figure 6 and Figure 7 Since Tc > T1 and Tc > T2, the intersection of the two lines 20 and 30 is the highest point on the second surface 11b of the ceramic sheet sintered body 11. It should be noted that the thickness Tc of the intersection 12 is also the thickness of the ceramic sheet sintered body 11.

[0098] like Figure 7 As shown, excluding the intersection 12, the highest point, i.e., the top position, of the second surface 20b of the first line portion 20 is substantially the same along the direction of extension of the first line portion 20. Regarding the second line portion 30, as... Figure 6 As shown, the highest position of the second surface 30b of the second line portion 30 is at either the position of the intersection 12 or any other position, and these positions are substantially the same along the direction of extension of the first line portion 20. The lowest position of the first surface 30a of the second line portion 30 is at any position other than the intersection 12, and these positions are substantially the same along the direction of extension of the second line portion 30.

[0099] like Figure 6 and Figure 7As shown, when the intersection 12 of the ceramic sheet sintered body 11 is viewed longitudinally, the first line portion 20 and the second line portion 30 only come into contact at the top of the convex curved portion 20B of the first line portion 20 and the top of the circular or elliptical downward convex curve of the second line portion 30, i.e., the top of the first surface 30a. In other words, the first line portion 20 and the second line portion 30 form a point contact or a near-point contact surface contact. By forming such a contact state between the first line portion 20 and the second line portion 30, the spalling resistance of the ceramic sheet sintered body 11 is increased. This can be attributed to the fact that by bonding through point contact or near-point contact between the first line portion 20 and the second line portion 30, the two line portions 20 and 30 are less likely to be excessively and firmly bonded, thus mitigating volume changes that occur during rapid heating and / or cooling. From this perspective, the thickness Tc of the intersection 12 is preferably 0.5 or more and 1.0 or less, more preferably 0.8 or more and 1.0 or less, and more preferably 0.9 or more and 1.0 or less, relative to the sum of the thickness T1 of the first line portion 20 (excluding the intersection 12) and the thickness T2 of the second line portion 30 (excluding the intersection 12) and (T1+T2), respectively, in a point contact state.

[0100] The sintered ceramic sheet body 11 is composed of a first line portion 20 and a second line portion 30. When the sintered ceramic sheet body 11 is composed of n layers of first line portions 20 and m layers of second line portions 30 (n and m are each an integer of 1 or more independently. Where n and m are not both 1.), the intersection portion 12 is formed in a point contact state with respect to the thickness T (nT1+mT2) of the sintered ceramic sheet body 11, preferably 0.5 or more and 1.0 or less, more preferably 0.8 or more and 1.0 or less, and more preferably 0.9 or more and 1.0 or less.

[0101] like Figure 4 (a) and Figure 9As shown, the width W2a of the top-view projected image at the intersection 12 of the second line portion 30 is approximately the same as, or slightly larger than, the width W2b of the top-view projected image at the portion other than the intersection 12. Specifically, regarding the second line portion 30, (i) the longitudinal contour of the top-view projected image forms a generally straight line 31,31 at the intersection 12, or (ii) it is drawn as a very gently convex curve (not shown) outward in the width direction X. In the case of (ii), the longitudinal contour of the top-view projected image of the second line portion 30 has a maximum width portion with width W2a, and the width gradually decreases slowly away from its maximum width portion, reaching width W2b at the position between the intersections 12. Width W2b is the same as the previously mentioned width W2. W2a is preferably more than 1 and less than 1.5 times W2b, more preferably more than 1 and less than 1.3 times W2b, and more preferably more than 1 and less than 1.1 times W2b.

[0102] On the other hand, the first line section 20, as Figure 4 (b) and Figure 10 As shown, the width W1a of the top-view projected image of the intersection 12 is approximately the same as, or slightly larger than, the width W1b of the top-view projected image of the portion other than the intersection 12. Specifically, regarding the first line portion 20, (i) the longitudinal contour of the top-view projected image forms approximately straight lines 21,21 at the intersection 12, or (ii) it is drawn as a very gently convex curve (not shown) outward in the width direction Y. In the case of (ii), the longitudinal contour of the top-view projected image of the first line portion 20 has a maximum width portion with width W1a, and the width gradually decreases slowly away from this maximum width portion, reaching width W1b at the position between the intersections 12. Width W1b is the same as the previously mentioned width W1. W1a is preferably more than 1 and less than 1.5 times W1b, more preferably more than 1 and less than 1.3 times W1b, and more preferably more than 1 and less than 1.1 times W1b.

[0103] Figure 11A top view of the sintered ceramic sheet body 11 is shown. As shown in the figure, a plurality of generally rectangular through holes 13 are formed on the sintered ceramic sheet body 11 through a plurality of first line portions 20 and a plurality of second line portions 30 that are approximately orthogonal to each other in the top view of the lattice body. The generally rectangular through holes 13 have first sides 13a, 13a as a pair of opposing sides. And the through holes 13 have second sides 13b, 13b as another pair of opposing sides. The first sides 13a, 13a are the sides corresponding to the two side edges of the first line portions 20. On the other hand, the second sides 13b, 13b are the sides corresponding to the two side edges of the second line portions 30. The through holes 13 are defined by these four sides. The opposing first sides 13a, 13a are approximately straight lines to each other and extend approximately parallel to each other. Similarly, the opposing second sides 13b, 13b are also approximately straight lines to each other and extend approximately parallel to each other. Furthermore, the first line portion 20 and the second line portion 30 have the aforementioned generally straight shape at their intersection 12, and the through hole 13 is formed by the first line portion 20 and the second line portion 30 being approximately orthogonal. Figure 11 As shown in the diagram, it becomes a rectangle with approximately right angles at the corners of 40°.

[0104] When the ceramic sheet sintered body 11 with the above-described structure is used as a firing support plate for firing, for example, a fired body, if the fired body is placed on the first surface 11a of the ceramic sheet sintered body 11, the first surface 11a is flat, making it suitable for placing fired bodies requiring flatness. Examples of fired bodies requiring flatness include small surface-mount electronic components such as multilayer ceramic capacitors. Since these small electronic components need to avoid getting stuck on the firing support plate during the firing process, the flatness of the first surface 11a of the ceramic sheet sintered body 11 is advantageous. Furthermore, since the fired body only contacts the component constituting the first surface 11a, namely the first line portion 20, the contact area between the ceramic sheet sintered body 11 and the fired body is greatly reduced, thereby facilitating rapid heating and cooling of the fired body. Furthermore, the ceramic sheet sintered body 11, formed by the intersection of the first line portion 20 and the second line portion 30, has multiple through holes 13, resulting in a small heat capacity, which facilitates rapid heating and cooling of the sintered body. Moreover, the presence of multiple through holes 13 in the ceramic sheet sintered body 11 provides good air permeability, further facilitating rapid cooling of the sintered body. This good air permeability is further enhanced by the second line portion 30 floating above each other between adjacent intersection portions 12. Furthermore, since the first line portion 20 and the second line portion 30 are integrated at the intersection portion 12, the ceramic sheet sintered body 11 possesses sufficient strength.

[0105] On the other hand, it is advantageous to place a fired body of mm level on the second surface 11b of the ceramic sheet sintered body 11. This is because the second surface 11b is a concavo-convex surface caused by the curved surface of the second line portion 30, and from the perspective of improving the debinding property, it is advantageous to have concavities and convexities on the surface for placing electronic components of this grade of size.

[0106] Thus, since one surface of the ceramic sheet sintered body 11 of the present embodiment is flat and the other surface is a concavo-convex surface, it is advantageous in terms of being able to distinguish and use the placement surface according to the type of the fired body.

[0107] From the perspective of making the above various advantageous effects more significant, the value of T1 is preferably 30 μm or more and 3 mm or less, more preferably 100 μm or more and 2 mm or less. On the other hand, the value of T2 is preferably 30 μm or more and 3 mm or less, more preferably 100 μm or more and 2 mm or less. There is no particular limitation on the magnitude relationship between the values of T1 and T2, and it can be T1 > T2, conversely it can be T1 < T2, or it can be T1 = T2.

[0108] From the same perspective, the thickness Tc of the crossing portion 12 is preferably 0.5 or more and 1.0 or less with respect to (T1 + T2), preferably 20 μm or more and 5 mm or less, more preferably 50 μm or more and 2 mm or less.

[0109] In addition, in the case where the cross-sectional shape in the thickness direction of the second line portion 30 (refer to Figure 8 ) is an ellipse, from the perspective of being able to smoothly place the fired body, it is preferable that the minor axis of the ellipse is in the same direction as the thickness direction of the ceramic sheet sintered body 11 and the major axis of the ellipse is in the same direction as the plane direction of the ceramic sheet sintered body 11. In this case, the ratio of the major axis to the minor axis is preferably 1 or more and 5 or less, more preferably 1 or more and 3 or less. In addition, the cross-sectional shape in the thickness direction of the second line portion 30 being an ellipse or a circle also helps to improve the strength of the ceramic sheet sintered body 11.

[0110] Regarding the through hole 13 formed on the ceramic sheet sintered body 11, from the aspects of reducing the heat capacity of the ceramic sheet sintered body 11, improving the air permeability, and maintaining the strength of the ceramic sheet sintered body 11, its area is 100 μm 2 or more and 100 mm 2 or less, particularly 2500 μm 2 or more and 1 mm 2The following are preferred. In addition, the ratio of the total area of the through-holes 13 in plan view to the apparent area of the ceramic sheet sintered body 11 is preferably 1% or more and 80% or less, more preferably 3% or more and 70% or less, and still more preferably 10% or more and 70% or less. This ratio is calculated as follows: Cut out a rectangle of any size from the ceramic sheet sintered body 11 in plan view, calculate the total area of the through-holes 13 contained in this rectangle, divide this total by the area of the rectangle and multiply by 100. In addition, the area of each through-hole 13 can be measured by image analysis of the microscopic observation image of the ceramic sheet sintered body 11.

[0111] Regarding the area of the through-hole 13, the width W1 of the first line portion 20 is preferably 30 μm or more and 4 mm or less, more preferably 50 μm or more and 2 mm or less, and still more preferably 100 μm or more and 1 mm or less. On the other hand, the width W2 of the second line portion 30 is preferably 30 μm or more and 4 mm or less, more preferably 50 μm or more and 2 mm or less, and still more preferably 100 μm or more and 1 mm or less. The size relationship between the values of W1 and W2 is not particularly limited, and it can be W1 > W2, conversely it can be W1 < W2, or it can be W1 = W2.

[0112] Regarding the widths W1 and W2 of the first line portion 20 and the second line portion 30, the pitch P1 as the gap (line pitch) between adjacent first line portions 20 is preferably 60 μm or more and 10 mm or less, more preferably 100 μm or more and 5 mm or less. On the other hand, the pitch P2 between adjacent second line portions 30 is preferably 60 μm or more and 10 mm or less, more preferably 100 μm or more and 5 mm or less.

[0113] Preferably, the first surface 20a of the first line portion 20 is smooth. Because the first surface 20a of the line portion 20 is smooth, when a sintered body is placed on the ceramic sheet sintered body 11, it is less likely to cause damage to the sintered body. Furthermore, the sintered body obtained through firing is less likely to stick to the ceramic sheet sintered body 11, resulting in better removability. Moreover, if the sintered body is a thin-walled strip-shaped body such as a substrate, the surface condition of the first surface 20a is transferred to the bottom surface of the sintered body, making it easier to fire a smoother bottom surface. On the other hand, if the surface roughness is high, the flow of gas under the sintered body is better when it is placed, making degreasing easier. From these perspectives, the surface roughness Ra of the first surface 20a of the first line portion 20 is preferably 0.01 μm or more and 10 μm or less, more preferably 0.01 μm or more and 5 μm or less. On the other hand, the surface roughness Ra of the second surface 30b of the second line portion 30 is preferably 5 μm or more and 100 μm or less, and more preferably 10 μm or more and 50 μm or less. Specifically, the surface roughness Ra can be measured using a laser microscope (e.g., a VK-8710 manufactured by Keyence Corporation) as the value of the centerline surface roughness calculated according to JIS B0601 (2001) on a cross-sectional curve obtained by scanning at 200x magnification. For the first surface 20a of the first line portion 20, the surface roughness is measured along the centerline of the first surface 20a, and the average value is calculated as Ra based on 20 measured values. Similarly, for the second surface 30b of the second line portion 30, the surface roughness is measured along the centerline of the second surface 30b, and the average value is calculated as Ra based on 20 measured values.

[0114] To reduce the surface roughness Ra values ​​of the first surface 20a of the first line portion 20 and the second surface 30b of the second line portion 30, for example, a substrate with low surface roughness can be used as the substrate for applying the paste used in forming the line portion, or a low-viscosity substance can be used as the paste. On the other hand, to increase the surface roughness Ra values ​​of the first surface 20a of the first line portion 20 and the second surface 30b of the second line portion 30, for example, a high-viscosity substance can be used as the paste, or the nozzle diameter can be increased.

[0115] As a variation of this structural example (not shown), the sintered body can incorporate three or more types of line portions, including a third, fourth, and fifth line portion, in addition to the first and second line portions. In this case of using three or more line portions, the thickness T1, width W1, and spacing P1 of the third and subsequent line portions are ideally the same as those of the first and second line portions described above. Furthermore, the intersections formed by the third and subsequent line portions are also ideally constructed in the same way as those formed by the first and second line portions described above.

[0116] Furthermore, as another variation (not shown), the sintered body can be used in a multi-level stacked manner. In this manner, for example, in the case of a two-level stacked body, the first line portion of one sintered body can be arranged with substantially the same spacing as the first line portion of another sintered body, or the second line portion of one sintered body can be arranged with substantially the same spacing as the second line portion of another sintered body.

[0117] Examples of ceramic sheet sintered body structures 3a and 3b: lattice (mesh) sintered bodies

[0118] In one embodiment, the sintered ceramic sheet body may have the following configuration: the cross-section of the first line portion, excluding the intersection of the first line portion and the second line portion, has a shape consisting of a straight section and a convex curved section with the two ends of the straight section as ends; the cross-section of the aforementioned second line portion, excluding the intersection, has a circular or elliptical shape; and the first line portion and the second line portion do not form an intersection at a single point, but rather form a surface-contact intersection (Structural Example 3a). This configuration can be referred to as a surface-contact structure compared to the aforementioned point-contact structure.

[0119] In a preferred embodiment of the lower concept of the above-described structural example 3a, which is based on surface contact, the ceramic sheet sintered body may have the following configuration: the cross section of the first line portion has a shape consisting of a straight section and a convex curved section with the two ends of the straight section as the ends, except for the intersection of the first line portion and the second line portion; the cross section of the second line portion has a circular or elliptical shape, except for the intersection; and the top view projection image of the second line portion is a shape that bends and protrudes outward in the width direction at the intersection, thereby making the width of the projection image at the intersection greater than the width of the projection image at the parts other than the intersection (structural example 3b).

[0120] That is, the ceramic sheet sintered body of the above-described structure example 3a based on surface contact includes the structure of the above-described structure example 3b (lower concept) which does not have the configuration of "the top view projection image of the second line portion is curved and protrudes outward in the width direction at the intersection, thereby making the width of the projection image at the intersection larger than the width of the projection image at other parts". In this case, the ceramic sheet sintered body of the above-described structure example 3a based on surface contact has the following configuration: the top view projection image of the second line portion does not curve and protrude outward in the width direction at the intersection, and the width of the projection image at the intersection is substantially the same as the width of the projection image at other parts.

[0121] The following description, with reference to the accompanying drawings, illustrates an example of a sintered ceramic sheet body of structural example 3b.

[0122] Figure 12 (a) and Figure 12 The ceramic sheet sintered body 41 shown in (b) has multiple first ceramic lines 50 extending in one direction X. Each first line 50 extends in a generally straight line and is generally parallel to each other. Furthermore, the ceramic sheet sintered body 41 has multiple second ceramic lines 60 extending in a direction different from X, namely Y. Each second line 60 extends in a generally straight line and is generally parallel to each other. Since the X and Y directions are different directions, the first line 50 and the second line 60 intersect. The intersection angle of the two line sections 50 and 60 can be set according to the specific application of the ceramic sheet sintered body 41. For example, the intersection angle of the second line section 60 relative to the first line section 50 can be set to approximately 90 degrees. Alternatively, the intersection angle of the second line section 60 relative to the first line section 50 can be varied within the range of 90 degrees ± 10 degrees. The ceramic sheet sintered body 41 is formed by the intersection of multiple first line sections 50 and multiple second line sections 60.

[0123] The sintered ceramic sheet body 41 forms a grid by the intersection of the first line portion 50 and the second line portion 60, and has a plate-like shape with a plurality of through holes 43 defined by the grid. The sintered ceramic sheet body 41 has a first surface 41a and a second surface 41b opposite to it.

[0124] The sintered ceramic sheet body 41 has an intersection portion 42 at the locations where the first line portion 50 and the second line portion 60 intersect. The intersection portion 42 is the location where the first line portion 50 and the second line portion 60 overlap in a top-view projection image of the sintered ceramic sheet body 41.

[0125] The first line portion 50, excluding the intersection 42, has a roughly constant width W1 when viewed from above (see reference). Figure 13 The cross-sectional shape of the first line portion 50 along the thickness direction in a direction orthogonal to its longitudinal direction is as follows: Figure 13and Figure 14 As shown, the ceramic sheet sintered body 41 is defined by a first surface 50a located on the side of the first surface 41a and a second surface 50b located on the side of the second surface 41b. Specifically, the cross-section of the first line portion 50 in the thickness direction orthogonal to its longitudinal direction, excluding the intersection portion 42, has a shape consisting of a straight section 50A and a convex curved section 50B with both ends of the straight section 50A as its ends. As a result, the first surface 50a of the first line portion 50 has a flat cross-section in the thickness direction of the line portion 50. This flat surface is approximately parallel to the in-plane direction of the ceramic sheet sintered body 41. On the other hand, regarding the second surface 50b of the first line portion 50, the cross-section of the line portion 50 in the thickness direction has a curved shape that convexes from the first surface 41a to the second surface 41b of the ceramic sheet sintered body 41.

[0126] Similar to the first line portion 50, the second line portion 60, located at the position of the two line portions 50 and 60 excluding the intersection 42, also has a roughly constant width W2 when viewed from above (see reference). Figure 16 The width W2 can be substantially the same as, or different from, the width W1 of the first line portion 50. The cross-sectional shape of the second line portion 60 along its thickness direction in a direction orthogonal to its longitudinal direction is as follows: Figure 15 and Figure 16 As shown, the second line portion 60 is defined by a first surface 60a located on the side of the first surface 41a of the ceramic sheet sintered body 41 and a second surface 60b located on the side of the second surface 41b of the ceramic sheet sintered body 41. The first surface 60a of the second line portion 60 has a convex curved shape extending from the second surface 41b of the ceramic sheet sintered body 41 towards the first surface 41a. On the other hand, regarding the second surface 60b of the second line portion 60, the cross-section of the line portion 60 in the thickness direction has a convex curved shape extending from the first surface 41a of the ceramic sheet sintered body 41 towards the second surface 41b. This curved shape may be substantially the same as the curved shape in the first line portion 50, or it may be different. In this embodiment, the first surface 60a and the second surface 60b of the second line portion 60 are substantially symmetrical, resulting in a substantially circular or elliptical cross-sectional shape in the thickness direction orthogonal to its longitudinal direction for the second line portion 60.

[0127] like Figure 14 and Figure 15As shown, when the straight portion 50A of the first line portion 50, i.e., the first surface 50a, is used as the mounting surface on the plane P, the sintered ceramic sheet body 41 is mounted on the plane P. Since the first surface 50a constitutes the first surface 41a of the sintered ceramic sheet body 41, the fact that each first surface 50a is located on the plane P indicates that the first surface 41a of the sintered ceramic sheet body 41 is a flat surface. Therefore, when the sintered ceramic sheet body 41 is mounted with its first surface 41a in contact with the flat mounting surface, the entire first surface 41a will be in contact with the mounting surface.

[0128] like Figure 14 As shown, when the straight section 50A, i.e. the first surface 50a, of the first line section 50 is placed on the plane P as the mounting surface, the second line section 60 is shaped to be separated from the plane P between two adjacent intersections 42. Therefore, a space S is formed between the second line section 60 and the plane P between the two adjacent intersections 42.

[0129] On the other hand, the second surface 41b of the ceramic sheet sintered body 41 is composed of the second surface 60b of the second line portion 60, which has a convex curved shape, and therefore is not a flat surface, but a concave-convex surface.

[0130] At the intersection 42 of the first line portion 50 and the second line portion 60 of the ceramic sheet sintered body 41, the two line portions 50 and 60 are integrated. "Integration" means that the cross-section of the intersection 42, when observed, forms a continuous ceramic structure between the two line portions 50 and 60. Through the intersection of the two line portions 50 and 60, the through holes 43 formed in the ceramic sheet sintered body 41 are substantially the same size and substantially the same shape. Each through hole 43 is approximately rectangular. The through holes 43 are arranged regularly.

[0131] like Figure 12 , Figure 14 and Figure 15 As shown, at any intersection 42 between the first line portion 50 and the second line portion 60, a second line portion 60 is disposed on the first line portion 50. That is, at the intersection 42 between the first line portion 50 and the second line portion 60, a second line portion 60 disposed on the first surface side 41a, 41b, of the two surfaces 41a and 41b of the ceramic sheet sintered body 41, is disposed on the first line portion 50 which is located more on the first surface side 41a, and a second line portion 60 which is located more on the second surface side 41b. Furthermore, the thickness of the intersection 42 is greater than either the thickness of the first line portion or the thickness of the second line portion at other locations besides the intersection. That is, let the thickness of the first line portion 50 at locations other than the intersection 42 of the two line portions 50 and 60 be T1 (refer to...). Figure 13 Let the thickness of the second line portion 60, excluding the intersection 42, be T2 (refer to...). Figure 16 ), and then let the thickness of the intersection be Tc (refer to Figure 14 and Figure 15 Tc>T1, Tc>T2. Therefore, on the second surface 41b of the ceramic sheet sintered body 41, the intersection of the two line portions 50 and 60 is at the highest position.

[0132] like Figure 15 As shown, excluding the intersection 42, the highest point, i.e., the top position, of the second surface 50b of the first line portion 50 is substantially the same along the extending direction of the first line portion 50. Regarding the second line portion 60, as... Figure 14 As shown, the highest position of the second surface 60b of the second line portion 60 is at either the intersection 42 or any other location, and is at the same position along the direction of extension of the first line portion 50. The lowest position of the first surface 60a of the second line portion 60 is at locations other than the intersection 42, and is substantially at the same position along the direction of extension of the second line portion 60.

[0133] like Figure 12 (a) and Figure 17 As shown, the top-view projection image of the second line portion 60 has a shape that curves outward in the width direction X at the intersection 42. Therefore, the width W2a of the projection image in the intersection 42 is greater than the width W2b of the projection image at other locations (the embodiment of structural example 3a described above includes a case where width expansion does not occur). Specifically, the longitudinal contour of the top-view projection image of the second line portion 60 is drawn with gently convex curves 61, 61 in the width direction X at the intersection 42. The longitudinal contour of the top-view projection image of the second line portion 60 has a maximum width portion with width W2a, and the width gradually decreases slowly away from this maximum width portion, reaching width W2b at the position between the intersections 42. Width W2b is substantially the same as the previously mentioned width W2.

[0134] On the other hand, the first line section 50, as Figure 12 (b) and Figure 18As shown, the projected image from above has a shape that curves outward in the width direction Y at the intersection 42. Therefore, the width W1a of the projected image at the intersection 42 is greater than the width W1b of the projected image at other parts of the intersection 42 (the embodiment of structural example 3a described above includes a case where width expansion does not occur). Specifically, the longitudinal contour of the projected image of the first line portion 50 from above is drawn with gently convex curves 51, 51 in the width direction Y at the intersection 42. The longitudinal contour of the projected image of the first line portion 50 from above has a maximum width portion with width W1a, and the width gradually decreases slowly away from this maximum width portion, reaching width W1b at the position between the intersections 42. Width W1b is the same as the previously mentioned width W1.

[0135] Figure 19 A top view of the sintered ceramic sheet body 41 is shown. As shown in the figure, a plurality of generally rectangular through holes 43 are formed on the sintered ceramic sheet body 41 through a plurality of first line portions 50 and a plurality of second line portions 60 that are substantially orthogonal to each other. The generally rectangular through holes 43 have first sides 43a, 43a as a pair of opposing sides. And the through holes 43 have second sides 43b, 43b as another pair of opposing sides. The first sides 43a, 43a are the sides corresponding to the two side edges of the first line portions 50. On the other hand, the second sides 43b, 43b are the sides corresponding to the two side edges of the second line portions 60. The through holes 43 are defined by these four sides. The opposing first sides 43a, 43a are substantially straight and extend substantially parallel to each other. Similarly, the opposing second sides 43b, 43b are also substantially straight and extend substantially parallel to each other. Furthermore, because the first line portion 50 and the second line portion 60 have the aforementioned curved protruding shape at their intersection 42, and because the first line portion 50 and the second line portion 60 are approximately orthogonal, the resulting through hole 43 is not a right-angled rectangle with corner 70, as... Figure 19 As shown in the schematic diagram, it is a rectangle with a slightly rounded corner of 70° (the embodiment of the above structural example 3a includes the case where the corner of the through hole is approximately right angle).

[0136] When the ceramic sheet sintered body 41 with the above-described structure is used, for example, as a firing support plate for firing a sintered body, its strength and resistance to spalling are improved because the corners 70 of the rectangular through holes 43 are rounded. This is because the corners 70 of the through holes 43 are the most prone to defects such as cracks in the ceramic sheet sintered body 41, and because these corners 70 are rounded, cracks are less likely to occur at these corners.

[0137] Regarding the aforementioned improvement in strength and peel resistance, this can be fully achieved as long as the longitudinal contour of the projection image of the first line portion 50 and the second line portion 60 at least in the intersection 42 of the first line portion 50 and the second line portion 60 has the aforementioned convex curve 61. In particular, if the longitudinal contours of the projection images of both the first line portion 50 and the second line portion 60 in the top view have the aforementioned convex curves 51 and 61, the strength and peel resistance are further improved.

[0138] When the ceramic sheet sintered body 41 with the above configuration is used, for example, as a firing support plate for firing a sintered body, if the sintered body is placed on the first surface 41a of the ceramic sheet sintered body 41, similar to the structure example 2 described above, since the first surface 41a is a flat surface, it is suitable for placing a sintered body that requires flatness. Examples of sintered bodies that require flatness include, for example, small chip electronic components such as multilayer ceramic capacitors. Since these small electronic components need to avoid getting stuck on the firing support plate during the firing process, it is advantageous for the first surface 41a of the ceramic sheet sintered body 41 to be flat. Furthermore, since the sintered body only contacts the first line portion 50, which is a component constituting the first surface 41a, the contact area between the ceramic sheet sintered body 41 and the sintered body is greatly reduced, thereby making it easier to perform rapid heating and cooling of the sintered body. Furthermore, the ceramic sheet sintered body 41, formed by the intersection of the first line portion 50 and the second line portion 60, has multiple through holes 43, resulting in a small heat capacity, which facilitates rapid heating and cooling of the sintered body. Moreover, the presence of multiple through holes 43 in the ceramic sheet sintered body 41 provides good air permeability, further facilitating rapid cooling of the sintered body. This good air permeability is further enhanced by the second line portion 60 floating between adjacent intersections 42. Furthermore, since the first line portion 50 and the second line portion 60 are integrated at the intersection 42, the ceramic sheet sintered body 41 possesses sufficient strength.

[0139] On the other hand, it is advantageous to mount a sintered body of the millimeter size on the second surface 41b of the ceramic sheet sintered body 41. This is because the second surface 41b is an uneven surface caused by the curved surface of the second line portion 60, and from the perspective of improving degreasing properties, it is advantageous to have an uneven surface on the surface on which electronic components of this size are mounted.

[0140] Thus, the ceramic sheet sintered body 41 of this embodiment has one flat surface and the other uneven surface, which is advantageous in that it is possible to distinguish the use of the mounting surface according to the type of the sintered body.

[0141] From the perspective of making the above various advantageous effects more prominent, the value of T1 is preferably 30 μm or more and 3 mm or less, and more preferably 100 μm or more and 2 mm or less. On the other hand, the value of T2 is preferably 30 μm or more and 3 mm or less, and more preferably 100 μm or more and 2 mm or less. There is no particular limitation on the magnitude relationship between the values of T1 and T2, and it can be T1 > T2, conversely it can be T1 < T2, or it can be T1 = T2.

[0142] From the same perspective, the thickness Tc of the crossing portion 42 is preferably 0.1 mm or more and 2 mm or less, and more preferably 0.3 mm or more and 1.5 mm or less. It should be noted that the thickness Tc of the crossing portion 42 is less than T1 + T2 which is the sum of T1 and T2.

[0143] In addition, when the cross-sectional shape in the thickness direction of the second line portion 60 (refer to Figure 16 ) is elliptical, from the aspect of being able to smoothly place the fired body, it is preferable that the short axis of the ellipse is in the same direction as the thickness direction of the ceramic sheet sintered body 41, and the long axis of the ellipse is in the same direction as the plane direction of the ceramic sheet sintered body 41. In this case, the ratio of the long axis to the short axis is preferably 1 or more and 5 or less, and more preferably 1 or more and 3 or less. In addition, the cross-sectional shape in the thickness direction of the second line portion 60 being elliptical or circular also helps to improve the strength of the ceramic sheet sintered body 41.

[0144] Regarding the through-hole 43 formed on the ceramic sheet sintered body 41, from the aspects of reducing the heat capacity of the ceramic sheet sintered body 11, improving the air permeability, and maintaining the strength of the ceramic sheet sintered body 41, its area is 100 μm 2 or more and 100 mm 2 or less, particularly 2500 μm 2 or more and 1 mm 2 or less is preferable. In addition, the ratio (this value) of the total area of the through-holes 43 to the apparent area of the ceramic sheet sintered body 41 viewed from above is preferably 1% or more and 80% or less, more preferably 3% or more and 70% or less, and further preferably 10% or more and 70% or less. The calculation and measurement methods of this ratio are as described above.

[0145] Regarding the area of the through-hole 43, the width W1 of the first line portion 50 is preferably 30 μm or more and 4 mm or less, more preferably 50 μm or more and 2 mm or less, and still more preferably 100 μm or more and 1 mm or less. On the other hand, the width W2 of the second line portion 60 is preferably 30 μm or more and 4 mm or less, more preferably 50 μm or more and 2 mm or less, and still more preferably 100 μm or more and 1 mm or less. The magnitude relationship between the values of W1 and W2 is not particularly limited, and it can be W1 > W2, conversely it can be W1 < W2, or it can be W1 = W2.

[0146] Regarding the widths W1 and W2 of the first line portion 50 and the second line portion 60, the pitch P1 between adjacent first line portions 50 is preferably 60 μm or more and 10 mm or less, more preferably 100 μm or more and 5 mm or less. On the other hand, the pitch P2 between adjacent second line portions 60 is preferably 60 μm or more and 10 mm or less, more preferably 100 μm or more and 5 mm or less.

[0147] Similar to the case of the above-described structural example 2, it is preferable that the first surface 50a of the first line portion 50 is smooth. By the first surface 50a of the line portion 50 being smooth, when the fired body is placed on the ceramic sheet sintered body 41, there is an advantage that it is not easy to damage the fired body. In addition, there is also an advantage that the fired body obtained by firing the fired body is not easily stuck to the ceramic sheet sintered body 41 and the take-out property is improved. Further, if the fired body is a thin-walled belt-shaped molded body such as a substrate, there is also an advantage that since the surface state of the first surface 50a is transferred to the bottom surface of the fired body, the bottom surface of the fired body is easily fired to be smoother. On the other hand, if the surface roughness is large, when the fired body is placed, there is an advantage that since the flow of the gas under the fired body is improved, the debinding is easily carried out smoothly. From these viewpoints, the surface roughness Ra of the first surface 50a of the first line portion 50 is preferably 0.01 μm or more and 20 μm or less, more preferably 0.01 μm or more and 10 μm or less. On the other hand, the surface roughness Ra of the second surface 60b of the second line portion 60 is preferably 10 μm or more and 300 μm or less, more preferably 20 μm or more and 100 μm or less. The specific measurement method of the surface roughness Ra is as described above.

[0148] To reduce the value of the surface roughness Ra of the line portions 50a and 60a, for example, as the substrate of the coating paste used in the formation of the line portion, a substrate with a small surface roughness can be used, or as the paste, a low-viscosity substance can be used. On the other hand, to increase the value of the surface roughness Ra of the line portions 50b and 60b, for example, as the paste, a high-viscosity substance can be used, or the nozzle diameter of the ejection can be increased.

[0149] As a variation of this structural example (not shown), the sintered body can incorporate three or more line sections in addition to the first and second line sections, such as a third, fourth, and fifth line section. In the case of using three or more line sections, the thickness T1, width W1, and spacing P1 of the third and subsequent line sections are ideally the same as those of the first and second line sections described above. Furthermore, the intersections formed by the third and subsequent line sections are also ideally the same as those formed by the first and second line sections described above.

[0150] Furthermore, as another variation (not shown), the sintered body can be used in a multi-level stacked manner. In this manner, for example, in the case of a two-level stacked body, the first line portion of one sintered body can be arranged with substantially the same spacing as the first line portion of another sintered body, or the second line portion of one sintered body can be arranged with substantially the same spacing as the second line portion of another sintered body.

[0151] Example 4 of ceramic sheet sintered body structure: lattice (network) sintered body

[0152] In one embodiment, the sintered ceramic sheet body may have the following configuration: the cross-section of the first line portion has a shape consisting of a straight section and a convex curved section with the two ends of the straight section as the ends, except at the intersection of the first line portion and the second line portion; the cross-section of the second line portion has a circular or elliptical shape, except at the intersection of the first line portion and the second line portion; at least a portion of the outline of the sintered body in plan view has a straight edge; and the first line portion and the second line portion each independently intersect the straight edge (outer edge) at an angle of 10 degrees or more and 170 degrees or less (i.e., a wide range of angles including non-right angles).

[0153] The sintered body of this embodiment has a rectangular outline with opposing first and second sides, as well as opposing third and fourth sides. The first line portion and the second line portion can each independently intersect the first and second sides at an angle of 10 degrees or more and 170 degrees or less.

[0154] As in structural examples 3a or 3b above, the sintered body may have a contact pattern based on so-called surface contact between the first and second line portions. Alternatively, it may be further configured such that the top-view projection image of the second line portion is a shape that curves outward in the width direction at the intersection of the first and second line portions, thereby making the width of the projection image at the intersection point greater than the width of the projection image at other locations. Furthermore, the sintered body may replace this configuration of the second line portion, or, based on this, the top-view projection image of the first line portion is a shape that curves outward in the width direction at the intersection of the first and second line portions, thereby making the width of the projection image at the intersection point greater than the width of the projection image at other locations.

[0155] When the straight portion of the first line portion is placed on a plane as the mounting surface, the sintered body can take the shape in which the second line portion separates from the plane between two adjacent intersection points.

[0156] Example 5 of ceramic sheet sintered body structure: lattice (mesh) sintered body

[0157] In one embodiment, the sintered ceramic sheet body can be a plate-shaped ceramic structure that, in addition to multiple first line portions and multiple second line portions, also has multiple third line portions made of ceramic on the diagonal of a quadrilateral defined by the intersection of the first line portions and the second line portions, forming multiple triangular through holes defined by the first line portions, the second line portions and the third line portions.

[0158] The sintered body of this structural example can be constructed such that the first line portion, the second line portion, and the third line portion intersect at one intersection.

[0159] In this sintered body, the lines that make up the upper two layers can each have a circular or elliptical shape in cross-section, except for the intersections.

[0160] The sintered body may have a straight edge in at least a portion of its outline when viewed from above, and any one of the first, second, and third line portions may be arranged parallel to the straight edge. Alternatively, the sintered body may have either the first or third line portion arranged parallel to the aforementioned straight edge.

[0161] The sintered body can form a structure by stacking two or more repeating units consisting of a first line section, a second line section, and a third line section.

[0162] 2. Manufacturing method of sintered ceramic sheet body

[0163] The method for manufacturing a ceramic sheet sintered body of the present invention includes: (1) a step of making a molded body from a raw material paste comprising ceramic raw material powder and a solvent, the molded body comprising a plurality of first line coating bodies extending in one direction at predetermined intervals, and a plurality of second line coating bodies extending in one direction at predetermined intervals, which are connected to and intersect with the aforementioned first line coating bodies; and (2) a step of placing a ceramic plate on the second line coating body of the molded body.

[0164] These processes are sometimes referred to as molding processes and placement processes in the following description.

[0165] Molding process

[0166] The ceramic raw material powder constituting the raw material paste in the molding process is not particularly limited and can include various ceramic raw materials. Regarding the sintered ceramic sheet body, as mentioned above, examples of ceramic raw materials used as ceramic raw material powder include one or more combinations of alumina (Al2O3), zirconium oxide (ZrO2), magnesium oxide (MgO), mullite (3Al2O3-2SiO2), silicon carbide (SiC), silicon nitride (Si3N4), aluminum nitride (AlN), boron carbide (B4C), cordierite (MgO / Al2O3 / SiO2), aluminum titanate (Al2TiO5), magnesium titanate (MgTiO3), and titanium diboride (TiB2). For the overall mass of the paste, the mass ratio of ceramic raw material powder in the raw material paste is typically 20% by mass or more and 85% by mass or less, preferably 30% by mass or more and 75% by mass or less.

[0167] The average particle size of the ceramic raw material powder used in the raw material paste is typically in the range of 0.1~20 μm, and preferably in the range of 0.2~10 μm. The average particle size of the ceramic raw material powder here is based on the volumetric median particle size (D50) obtained by laser diffraction-scattering method. By using an average particle size of ceramic raw material powder within the above range, sintered ceramic sheets with increased structural strength and stability and reduced likelihood of collapse after firing can be obtained.

[0168] Water is typically used as a solvent for the raw material paste used to make the molded articles. Alcohols, acetone, and ethyl acetate, among others, can also be used as solvents. Two or more of these solvents can be mixed. The mass ratio of the solvent in the raw material paste relative to the total mass of the paste is typically 10% by mass or more and 60% by mass or less, preferably 15% by mass or more and 55% by mass or less.

[0169] The raw material paste used to produce the molded body may optionally contain a sintering aid. Depending on the purpose, any known sintering aid may be used in an appropriate amount, or it may be omitted.

[0170] The raw material paste may contain a binder. There are no particular limitations on the binder, but examples include polyvinyl alcohol, polyethylene glycol, polyethylene, oxides, dextrin, sodium lignosulfonate and ammonium lignosulfonate, carboxymethyl cellulose, ethyl cellulose, hydroxypropyl methyl cellulose, carboxymethyl cellulose, hydroxyethyl cellulose, hydroxyethyl methyl cellulose, sodium alginate and ammonium alginate, epoxy resin, phenolic resin, gum arabic, polyvinyl butyral, acrylic polymers such as polyacrylic acid and polyacrylamide, thickening polysaccharides such as xanthan gum and guar gum, gelling agents such as gelling agents such as gelatin, agar and pectin, vinyl acetate resin emulsions, wax emulsions, and inorganic binders such as alumina sol and silica sol. Two or more of these can be mixed. The mass ratio of the binder in the raw material paste relative to the total mass of the raw material paste can be, for example, 0% by mass or more and 40% by mass or less, preferably 1% by mass or more and 40% by mass or less, and more preferably 3% by mass or more and 30% by mass or less.

[0171] From the perspective of ensuring smooth fabrication of the line-coated body, it is preferable that the viscosity of the raw material paste is high at the temperature during the application of the line-coated body. The viscosity of the raw material paste is not particularly limited, but at the application temperature (typically room temperature such as approximately 25°C), it is preferably 1.5 MPa·s or higher and 5.0 MPa·s or lower, more preferably 1.7 MPa·s or higher and 3.0 MPa·s or lower. Here, the viscosity of the raw material paste refers to the value measured 4 minutes after the start of the process using a cone-plate rotational viscometer or rheometer at a speed of 0.3 rpm.

[0172] In raw material pastes, thickeners, flocculants, thixotropic agents, etc., may be contained as viscosity modifiers.

[0173] Examples of tackifiers are not specifically limited and can include polyethylene glycol fatty acid esters, alkyl allyl sulfonic acids, alkyl ammonium salts, ethyl vinyl ether-maleic anhydride copolymers, fumed silica, albumin, and other proteins. In most cases, binders are sometimes classified as tackifiers because of their tackifying effect. However, in cases requiring more precise viscosity control, tackifiers that are not classified as binders can be used separately.

[0174] Examples of flocculants are not particularly limited and can include polyacrylamide, polyacrylate, aluminum sulfate, and polyaluminum chloride. Examples of thixotropic agents include fatty acid amides, oxidized polyolefins, and polyether ester surfactants.

[0175] To ensure a stable ejection rate from the ejection device, the raw material paste may contain, for example, plasticizers, lubricants, dispersants, precipitation inhibitors, pH adjusters, etc.

[0176] Examples of plasticizers are not specifically limited, but can include triethylene glycol, tetramethylene glycol and other diols, glycerol, butanediol, phthalic acid, adipic acid, phosphoric acid, etc.

[0177] Examples of lubricants are not specifically limited and can include hydrocarbon-based products such as liquid paraffin, microcrystalline wax, and synthetic paraffin, as well as higher fatty acids and fatty acid amides.

[0178] Examples of dispersants are not particularly limited, but can include sodium or ammonium salts of polycarboxylate, acrylic acid-based dispersants, polyethyleneimine-based dispersants, and phosphoric acid-based dispersants.

[0179] Examples of precipitation inhibitors are not specifically limited, but can include polyamide amine salts, bentonite, aluminum stearate, etc.

[0180] Examples of pH adjusters are not particularly limited and can include sodium hydroxide, ammonia, oxalic acid, acetic acid, hydrochloric acid, etc.

[0181] By spraying the raw material paste thus obtained onto a flat substrate from a spraying device, multiple first line coating bodies extending in one direction and arranged at predetermined intervals are formed. The first line coating bodies correspond to the first line portions of the ceramic sheet sintered body.

[0182] As the ejection device, various known devices such as small extruders and printing presses can be used. These ejection devices typically include a dispenser with nozzles. After the first line coating is ejected, operations can be performed to remove the solvent contained in the first line coating and to dry it, thereby increasing its viscosity. The solvent can be removed by spraying hot air onto the first line coating or by irradiating it with infrared light. The proportion of solvent in the first line coating after the solvent removal operation is preferably 50% by mass or less, more preferably reduced to 30% by mass or less. Through such solvent removal operations, the viscosity of the first line coating becomes extremely high, and its shape retention is further improved.

[0183] Next, using a raw material paste, multiple second line coatings are formed, arranged at predetermined intervals on and intersecting with each of the first line coatings, each extending in one direction. The second line coatings correspond to the second line portions of the ceramic sheet sintered body. The raw material paste used to form the second line coatings may be the same as or different from the raw material paste used to form the first line coatings; however, from the perspective of efficiency in forming the line coatings and the integrity of the structure and physical properties of the produced ceramic sheet sintered body, the same raw material paste is more preferable.

[0184] The specific shapes of the multiple first line coating bodies and multiple second line coating bodies formed as molded bodies can be constructed in a desired shape suitable for the ceramic sheet sintered body comprising a first line layer composed of multiple first line portions and a second line layer composed of multiple second line portions, which includes the various embodiments described above.

[0185] In an additional embodiment, a raw material paste may be used to optionally form multiple third line coatings, each extending in one direction and arranged at predetermined intervals, in a manner that connects to each of the second line coatings and intersects with the first and second line coatings. The raw material paste used to form the optional third line coatings may be the same as or different from the raw material paste used to form the first / second line coatings; from the perspective of the efficiency of line coating formation and the integrity of the structure and physical properties of the produced ceramic sheet sintered body, the same is more preferred.

[0186] The ceramic plate placement process and subsequent firing process

[0187] A molded body comprising multiple first line coatings and multiple second line coatings is peeled from a substrate (molding worktable) and placed in a firing fixture (firing furnace). A ceramic plate is then placed on the second line coating of this molded body. The molded body with the ceramic plate placed thereon is then fired, thereby obtaining the desired ceramic sheet sintered body. The resulting ceramic sheet sintered body comprises a first line layer and a second line layer. The first line layer is composed of multiple first line portions (fired products of the aforementioned multiple first line coatings) extending in one direction and arranged at predetermined intervals. The second line layer is composed of multiple second line portions (fired products of the aforementioned multiple second line coatings) extending in one direction and arranged at predetermined intervals, connecting to and intersecting with each of the first line portions. Through firing, a ceramic sheet sintered body comprising a first line layer composed of multiple first line portions and a second line layer composed of multiple second line portions is constructed as an integral structure. The construction of a monolithic structure, such as a sintered ceramic sheet, typically does not involve the physical bonding of individual components based on adhesives.

[0188] In the mounting process, a ceramic plate is mounted on the second line coating body of the molded body containing multiple first line coating bodies and multiple second line coating bodies obtained as described above (or on the third line coating body in the case where the third line coating body is formed on the second line coating body). By mounting the ceramic plate on the second line coating body in this way, a sintered ceramic sheet body that effectively suppresses warping after firing (significantly reduces warping) can be manufactured.

[0189] Examples of ceramic materials used in the firing process to form ceramic plates are not particularly limited and include mullite, tungsten, tantalum, or mixtures thereof. In a preferred embodiment, the ceramic plate may be formed substantially entirely of mullite, tungsten, or tantalum. By using ceramic plates formed from such materials, it becomes easier to manufacture sintered ceramic sheets that effectively suppress warping after firing (significantly reduce warping).

[0190] The ceramic plate used in the loading process is not particularly limited, but from the perspective of maximizing the warping suppression effect of the sintered body by applying a uniform load to the entire molded body, a substantially uniform thickness is preferred. The average thickness of a single ceramic plate is not particularly limited, and for example, it can be 1 mm or more and 20 mm or less, or 1.5 mm or more and 10 mm or less.

[0191] The ceramic plate can be used as a single piece or in multiple pieces, for example, 2 to 5 pieces stacked together. The average thickness of the ceramic plates when stacked in this way can be within the same range as illustrated above. The size of the ceramic plate is not particularly limited; ideally, the second line-coated body (or, in the case of formation, a third line-coated body) on which it is mounted should substantially cover the entire molded body in order to apply an equal load. In one embodiment, the size of the ceramic plate can be more than 90% of the size of the second line-coated body (or, in the case of formation, a third line-coated body) on which it is mounted, preferably more than 100%, and most preferably about 100%. In a preferred embodiment, the ceramic plate and the second line-coated body (or, in the case of formation, a third line-coated body) on which it is mounted can have substantially the same shape (outline) and are substantially the same size.

[0192] In the placement process (and the subsequent firing process), the pressure applied when placing the ceramic plate onto the second line coating body (or, in the case of formation, the third line coating body) is typically 0.005 N / mm. 2 Above and below 4.0 N / mm, preferably 0.01 N / mm. 2 Above and 3.5 N / mm 2 The following is more preferably 0.01 N / mm 2 Above and 3.0 N / mm 2 The following can be further preferred to be 0.02 N / mm. 2 Above and 2.8 N / mm 2 The following can be further preferred to be 0.03 N / mm. 2 Above and 2.6 N / mm 2 The optimal value is 0.05 N / mm. 2 Above and 2.5 N / mm 2The following describes how, by controlling the applied pressure on the ceramic plate within a certain range, the warpage suppression effect of the resulting sintered body can be more effectively improved, enabling the manufacture of ceramic sheet sintered bodies with extremely high levelness.

[0193] Furthermore, in the mounting process, from the perspective of suppressing variations in the gap size of the linear portion of the sintered ceramic sheet and suppressing variations in the width size of the sintered sheet, the applied pressure of the ceramic plate can preferably be 0.01 N / mm. 2 Above and 2.6 N / mm 2 The following is more preferably 0.02 N / mm 2 Above and 2.0 N / mm 2 The following can be further preferred to be 0.03 N / mm. 2 Above and 1.5 N / mm 2 The following can be further preferred to be 0.04 N / mm. 2 Above and 1.0 N / mm 2 The following can be further preferred to be 0.05 N / mm. 2 Above and 0.5 N / mm 2 The optimal value is 0.06 N / mm. 2 Above and 0.4 N / mm 2 the following.

[0194] The applied pressure on the ceramic plate here refers to a value approximately calculated using the following method.

[0195] • By applying ink to the uppermost line portion of a molded body containing multiple first line coating bodies and multiple second line coating bodies (and optionally multiple third line coating bodies), and then placing a ceramic plate (one or more), the width of the ink-colored area on the plate is measured, thereby estimating the contact width W (mm) between the uppermost line portion of the molded body and the plate.

[0196] • The contact area (mm²) between the uppermost line portion of the molded body and the plate is calculated by multiplying the length L (mm) of the uppermost line portion, the number of lines N, and the contact width W (mm) mentioned above. 2 ).

[0197] • Calculate the load F (unit: Newton, N) based on the total mass of the ceramic plates (one or more) through unit conversion.

[0198] • The load F (N) is divided by the contact area (mm²) between the uppermost line section of the molded body and the plate. 2 The applied pressure (unit: N / mm) can be calculated for the ceramic plate. 2 ).

[0199] In the ceramic plate used in the mounting process, the "warping rate" per unit length, obtained by dividing the warping of the longest part of the main surface by the length of the longest part, can preferably be 2.0 × 10⁻⁶. -3 For thicknesses below mm / mm, 1.5 × 10⁻⁶ is further preferred. -3 mm / mm or less, and more preferably 1.0 × 10 mm / mm. -3 mm / mm or less, and more preferably 0.5×10 -3 Below mm / mm.

[0200] In the mounting process (and the subsequent firing process), by mounting ceramic plates with such low warpage that the low warpage is reflected in the warpage suppression of the resulting sintered body, it becomes easier to manufacture ceramic sheet sintered bodies with extremely high level of flatness.

[0201] The subsequent firing process, following the placement step, can be carried out in an atmospheric atmosphere (at atmospheric pressure), for example, under pressure using an inert gas such as nitrogen. The firing temperature is selected appropriately based on the type of ceramic raw material powder. The same applies to the firing time. As examples of non-limiting firing temperatures, it can be above 500°C, above 800°C, or above 1000°C, or below 4000°C, below 3500°C, or below 3000°C. As examples of non-limiting firing times, it can be above 30 minutes, above 1 hour, or above 2 hours, or below 24 hours, below 12 hours, or below 6 hours.

[0202] The ceramic plate used in the mounting process has a higher melting point than the firing temperature of the ceramic sheet sintered body in the firing atmosphere of the firing process that usually follows the mounting process. The melting point of the constituent material of the ceramic plate is preferably 50°C or more higher than the firing temperature of the ceramic sheet sintered body in the firing atmosphere, more preferably 100°C or more higher, even more preferably 150°C or more higher, and even more preferably 200°C or more higher.

[0203] More specifically, when the ceramic raw material powder of the sintered ceramic sheet is an oxide, such as zirconium oxide, alumina, mullite or yttrium oxide, it is preferable to place a ceramic plate formed of mullite (melting point 1850°C) in an atmospheric atmosphere (at atmospheric pressure), typically at a temperature of 1200 to 1750°C, preferably at a temperature of 1250 to 1700°C, and then carry out the firing process.

[0204] Furthermore, when the ceramic raw material powder of the ceramic sheet sintering body is a nitride, such as silicon nitride or aluminum nitride, or a carbide, such as silicon carbide, tantalum carbide or niobium carbide, it is preferable to place a ceramic plate made of carbon (melting point 3550°C), tungsten (melting point 3422°C) or tantalum (melting point 3017°C) on a plate in an inert gas atmosphere such as argon, typically at a temperature of 1700 to 2100°C, preferably at a temperature of 1800 to 2000°C, and then perform the firing process.

[0205] In the firing process, a device commonly referred to as a "firing furnace" or "firing kiln" is typically used. In this firing process, where firing is primarily carried out in an inert atmosphere, a fixture called a "crucible" is more preferably used to prevent contamination within the device. A crucible typically comprises a main body (forming a storage space for the material to be fired) and a lid. In addition to the main body and lid, the crucible may also have accessories such as seals. The outline of the crucible's storage space is not particularly limited and can take various shapes such as a cube, cuboid, cylinder, or elliptical cylinder, but its inner bottom surface is preferably substantially flat. The crucible may have an injection port for inert gases such as nitrogen.

[0206] Without specific limitations, generally speaking, mullite, zirconium oxide, etc. are often fired in an atmospheric atmosphere using an atmospheric firing furnace (atmospheric furnace), while carbides and nitrides such as silicon nitride and silicon carbide are often fired in crucibles used in an inert atmosphere.

[0207] The components of the firing fixture containing the exposed surface of the firing atmosphere are not particularly limited and can be formed from any one or more of the various known ceramic raw materials. The main body of the firing fixture, such as the crucible, as well as the exposed surface of the firing atmosphere in the furnace lid (cover body) or furnace top, and other parts thereon, can be made of the same material or different materials.

[0208] Figure 1 This illustration shows a ceramic plate placed on a molded body containing multiple first-line coating bodies and multiple second-line coating bodies within a firing fixture, and then fired. Figure 1 In this diagram, 1 refers to the firing fixture, 1a refers to the main body of the firing fixture (the part for storing the object to be fired), 1b refers to the furnace cover or top of the firing fixture, 2 refers to multiple first-line coating bodies, 3 refers to multiple second-line coating bodies arranged in a manner that intersects the multiple first-line coating bodies of 2 at approximately perpendicular angles (showing a structural example obtained by combining two layers of the stacked multiple first-line coating bodies of 2 and the multiple second-line coating bodies of 3), and 4 refers to the ceramic plate (weight). Although not shown, this firing fixture can be designed to perform firing at atmospheric pressure, and further, or alternatively, an inlet for inert gases such as nitrogen can be provided in the main body, furnace cover (lid), or furnace top.

[0209] Example

[0210] Example 1: Manufacturing Example of Reticulated Sheet Sintered Body

[0211] (1) Preparation of paste for forming line coating body

[0212] A paste was prepared by mixing 65.3 parts of 3 mol% yttrium oxide with partially stabilized zirconium oxide powder (average particle size 0.8 μm), 5.0 parts of hydroxypropyl methylcellulose (average degree of polymerization: 300,000 g / mol) as an aqueous binder, 2.5 parts of glycerol as a plasticizer, 1.1 parts of polycarboxylate dispersant (molecular weight 12,000), and 26.1 parts of water, followed by degassing. The viscosity of the paste at 25°C was 2.3 MPa·s.

[0213] (2) Formation of line painting body

[0214] Using the aforementioned paste as a raw material, a first line coating is formed on a resin substrate using a dispenser with a nozzle having a diameter of 0.4 mm. Next, the first line coating is dried by spraying hot air onto it using a dryer to remove water. The water content of the dried first line coating is 10%. Next, a second line coating is formed that intersects with the first line coating. The intersection angle of the two line coatings is set to 90 degrees. The second line coating is dried by spraying hot air onto it using a dryer to remove water. The water content of the dried second line coating is 8%. By repeating these operations, a lattice-like precursor formed by the line coating is obtained. The line coating is a four-layer lattice structure obtained by overlapping two layers of perpendicularly intersecting first and second line coatings with consistent openings (having the same...). Figure 1 (The same structure is illustrated in the molded body).

[0215] (3) Firing process

[0216] After the dried lattice-shaped precursor is peeled off from the resin substrate, it is placed in an atmospheric firing furnace. Degreasing and firing are performed in this furnace to obtain… Figure 4 or Figure 11 The image shows a mesh-like zirconia sheet. During firing, it is shaped to a load of 96 N, with dimensions of 150 mm long × 150 mm wide × 1.0 mm thick (warpage: 1.40 × 10⁻⁶). -3A weight of mullite slabs (mm / mm) was placed on a lattice-shaped precursor. The firing temperature was set to 1450℃, and the firing time was set to 3 hours. In the resulting lattice-shaped zirconia sheet, the first and second line portions made point contact at their intersections. The thickness T1 of the first line portion of the resulting lattice-shaped zirconia sheet was 280 μm, the thickness T2 of the second line portion was 250 μm, and the thickness Tc of the intersection was 477 μm. Therefore, Tc is 0.90 relative to (T1+T2). The width W1 of the first line portion was 400 μm, and the width W2 of the second line portion was 400 μm. The width W1a of the first line portion at the intersection was 440 μm, and the width W2a of the second line portion was 410 μm. Therefore, W2a is 1.025 times W2, and W2a and W2 are approximately the same value. The spacing P1 of the first line portions was 300 μm, and the spacing P2 of the second line portions was 300 μm. The surface roughness Ra of the zirconia mesh sheet is 0.2 μm on the first surface and 0.2 μm on the second surface. Furthermore, the size (opening size) of the through-holes in the zirconia mesh sheet is 0.3 mm□, and the area of ​​the through-holes is 0.09 mm². 2 The open area ratio is 18%. The angle between each line section and the edge in the mesh zirconia sheet is 45°, and the intersection angle between the first line section and the second line section is 90°. The mesh zirconia sheet has a length of 150mm and a width of 150mm, with 4 layers and 215 lines in the uppermost section.

[0217] Example 2: Manufacturing Example of Reticulated Sheet Sintered Body

[0218] In the firing process of Example 1, instead of the above-mentioned load, the mullite plate was placed on the lattice precursor with a load of 294 N, and otherwise the same as in Example 1 was obtained to obtain a sintered body of lattice zirconia sheet.

[0219] Example 3: Manufacturing Example of Reticulated Sheet Sintered Body

[0220] In the firing process of Example 1, instead of the above-mentioned load, the mullite plate was placed on the lattice precursor with a load of 1177 N, and otherwise the same as in Example 1 was obtained to obtain a sintered body of lattice zirconia sheet.

[0221] Example 4: Manufacturing Example of Reticulated Sheet Sintered Body

[0222] In the firing process of Example 1, instead of the above-mentioned load, the mullite plate was placed on the lattice precursor with a load of 4707 N, and otherwise the same as in Example 1 was obtained to obtain a sintered body of lattice zirconia sheet.

[0223] Example 5: Manufacturing Example of Reticulated Sheet Sintered Body

[0224] In the firing process of Example 1, instead of the above-mentioned load, the mullite plate was placed on the lattice precursor with a load of 10591N, and otherwise the same as in Example 1 was obtained to obtain a sintered body of lattice zirconia sheet.

[0225] Example 6: Manufacturing Example of Reticulated Sheet Sintered Body

[0226] In the firing process of Example 1, instead of the above-mentioned load, the mullite plate was placed on the lattice precursor with a load of 24228N, and otherwise a sintered body of the lattice zirconia sheet was obtained in the same manner as in Example 1.

[0227] Example 7: Manufacturing Example of Reticulated Sheet Sintered Body

[0228] In the firing process of Example 1, instead of the above-mentioned load, the mullite plate was placed on the lattice precursor with a load of 29420N, and otherwise the same as in Example 1 was obtained to obtain a sintered body of lattice zirconia sheet.

[0229] Comparative Example 1: Manufacturing Example of Reticulated Sheet Sintered Body

[0230] In the firing process of Example 1, the mullite plate is not placed on the lattice precursor, so that the load based thereon is 0N. Otherwise, the sintered body of the lattice zirconia sheet is obtained in the same manner as in Example 1.

[0231] Method for converting pressure on a plate (heavy plate)

[0232] The pressure calculation for the mullite-based slab during firing will be explained using Example 1 as an example. Calculations can also be performed similarly based on the slab load in other examples.

[0233] In Example 1, the load on a mullite slab with dimensions of 150mm (length) × 150mm (width) × 1.0mm (thickness) was 96N. Ink was applied to the uppermost line portion of the aforementioned grid-like precursor before the load was placed on the slab. The width of the ink-colored area on the slab was measured, and the contact width W (mm) between the uppermost line portion of the grid-like precursor and the slab was estimated to be 0.298mm. Based on the length of 150mm and the number of 215 lines in the uppermost line portion of the grid-like precursor, the contact area between the uppermost line portion of the grid-like precursor and the slab was calculated as 0.298mm (contact width = pressure width) × 150mm (length of line portion) × 215 (number of lines) = 9610.5mm. 2 At this point, the applied pressure when the mullite ceramic plate is placed on the second line of the coating is calculated to be 96 N (load) / 96 × 10.5 mm. 2 (Contact area) = 0.01 N / mm 2 .

[0234] Similarly, the applied pressure in Example 2 was 0.03 N / mm. 2 The applied pressure in Example 3 was 0.12 N / mm. 2 The applied pressure in Example 4 was 0.49 N / mm. 2 The applied pressure in Example 5 was 1.10 N / mm. 2 The applied pressure in Example 6 was 2.52 N / mm. 2 The applied pressure in Example 7 was 3.06 N / mm. 2 The applied pressure in Comparative Example 1 was 0 N / mm. 2 .

[0235] Evaluation of the properties and durability of sintered mesh bodies

[0236] The characteristics of the sintered mesh bodies of Examples 1-7 and Comparative Example 1 are evaluated below.

[0237] 1) Warpage evaluation (warpage rate determination)

[0238] To verify that a sintered mesh with small warpage was obtained in the immediate post-manufacturing (firing) stage according to the present invention, the warpage of the sintered mesh was measured and evaluated as follows.

[0239] With a metal ruler aligned with one diagonal (212.1 mm in length) of the sintered mesh sheet, the warpage of the other diagonal (212.1 mm in length), constituting the longest portion, was measured using a gap gauge. The warpage (mm) of the diagonal portion with the larger value was divided by the length of the diagonal to obtain the "maximum warpage ratio = warpage / maximum length (mm / mm)". The maximum warpage ratio for Examples 1-7 and Comparative Example 1 was then compared with the plate-based pressure (N / mm). 2 The results are shown in Table 1. The evaluation criteria for the maximum warpage ratio are as follows.

[0240] A (Best): Maximum warpage ratio is 1.0 × 10⁻⁶ -3 the following.

[0241] B (Good): Maximum warpage ratio is greater than 1.0 × 10⁻⁶. -3 ~2.0×10 -3 the following.

[0242] C (Available): Maximum warpage ratio is greater than 2.0 × 10 -3 ~4.5×10 -3 the following.

[0243] D (Unusable): Maximum warpage ratio greater than 4.5 × 10 -3 .

[0244] It should be noted that the warpage rate of the aforementioned mullite slab is the ratio of the warpage per unit length (mm) obtained by dividing the warpage (mm) of the longest portion of its main surface by the length of the longest portion. The warpage rate of the sintered mesh body is measured using the same method described herein. It should be noted that the "main surface" of the mullite slab here refers to the surface in contact with the lattice-shaped precursor when the slab is placed on it.

[0245] 2) Durability evaluation for multilayer stacks

[0246] Since mesh sheet sintered bodies are often stored and transported in multi-layer stacks, and sometimes transported from warehouses to other locations by trolleys over elevation differences, it is desirable that they maintain a high level of rigidity, preventing collapse and associated defects, even under such turbulent handling conditions, and be able to be neatly stacked in multiple layers. Therefore, the durability of mesh sheet sintered bodies in multi-layer stacking is evaluated below.

[0247] Ten mesh sheet sintered bodies were stacked in multiple layers, with 10×10×10mm mullite supports (hereinafter referred to as "mullite supports") placed at the four corners of a 150mm diameter area. For this multi-layered stacked mesh sheet sintered body, a vibration testing machine (trade name "VIBRATORY PACKER, TYPEVP-40" manufactured by SINFONIA TECHNOLOGY) was used to vibrate at intensity level 5 for 180 seconds to observe whether the multi-layered stacking state could be maintained, and the amount of protrusion from the mullite supports was measured and evaluated according to the following criteria. The amount of protrusion from the supports in the multi-layered stacking vibration test for Examples 1-7 and Comparative Example 1 is shown in Table 1.

[0248] ◎ (Best): Maintains multi-layer stacking without collapsing, with the mullite support extending less than 1mm beyond the self-supporting plate.

[0249] ○ (Good): Maintains multi-layer stacking without collapsing, with the mullite support extending more than 1mm to less than 3mm beyond the self-supporting plate.

[0250] △ (Can): Maintain multi-layer stacking without collapsing, with the mullite support extending more than 3mm to 5mm beyond the self-supporting plate.

[0251] × (Impossible): The cargo collapsed, or multiple layers of stacked goods collapsed.

[0252] 3) Durability evaluation relative to transport

[0253] Since sintered mesh sheets are sometimes transported while placed on a platform, it is desirable to maintain stable transport even under conditions of vigorous movement, minimizing lateral displacement and associated defects. Therefore, the transport durability of sintered mesh sheets is evaluated below.

[0254] A sintered mesh sheet was placed on a 1-m long roller conveyor and moved. The distance of lateral displacement / left-right bending was measured at the starting position and at a position 90cm ahead, and evaluated according to the following criteria. The lateral displacement in the conveyor transport tests for Examples 1-7 and Comparative Example 1 is shown in Table 1.

[0255] ◎ (Best): Lateral displacement distance is less than 10mm.

[0256] ○ (Good): Lateral displacement distance is more than 10mm and less than 30mm.

[0257] △ (Optional): Lateral displacement distance is 30mm or more to less than 50mm.

[0258] × (Not allowed): Lateral displacement distance is more than 50m.

[0259]

[0260] 4) Determination of the maximum rate of change of the gap dimension of the line section

[0261] If the load on the plate during the firing process of the lattice-shaped precursor obtained by coating and drying the raw material paste is too high, the lines will deviate from their designed positions during shrinkage. When used as a firing plate for microelectronic components, there are concerns that electronic components may fall from the openings of the sintered mesh, or, in the case of multi-stage firing, fall to lower layers and become stuck. Therefore, the variation (variation) of the gap size of the lines in the sintered mesh is ideally small. By keeping the variation of the gap size of the lines within a specified range, such falling from the openings and getting stuck can be effectively suppressed.

[0262] Therefore, regarding the sintered mesh sheets obtained in the above embodiments, the gap dimensions (opening dimensions) of all lines were measured using a digital microscope (Keyence Corporation, trade name "VHX-5000"). The maximum rate of change of the minimum and maximum values ​​of these gap dimensions relative to the median value was evaluated according to the following criteria. The "median value" in this evaluation criterion refers to the average value obtained when 50 measurements were taken of the gap dimensions (opening dimensions) of the lines. The maximum rate of change of the gap dimensions of the lines for Examples 1-7 relative to the median value was compared with the plate-based pressure (N / mm). 2 (These are shown together in Table 2.)

[0263] ◎Best: The gap size (maximum / minimum value) of the line section is less than ±30% relative to the median value.

[0264] 〇Good: The gap size (maximum / minimum value) of the line section is greater than ±30% to less than ±60% relative to the median value.

[0265] △Can: The gap size (maximum / minimum value) of the line section is greater than ±60% to less than ±110% relative to the median value.

[0266] ×Not allowed: The gap size (maximum / minimum value) of the line section is greater than ±110% relative to the median value.

[0267] 5) Determination of the maximum rate of change of the sheet width dimension

[0268] If the load on the plate during the firing process of the shaped body (i.e., the lattice-shaped precursor) obtained by coating and drying the raw material paste is too high, the lines will be constrained during shrinkage, causing deformation of the entire or part of the outer periphery of the sintered mesh sheet. If the deformation of the outer periphery of the sintered mesh sheet is large, there is a risk that it will be impossible to correctly identify straight lines using image recognition when used as a firing plate, leading to material handling problems. Therefore, the variation (variation) in the width dimension of the sintered mesh sheet is ideally small. By keeping the variation in the width dimension of the sintered mesh sheet within a specified range, deformation of the outer periphery can be effectively suppressed, preventing the problems caused by it.

[0269] Therefore, for the approximately rectangular (approximately square) mesh sheet sintered body obtained in the above embodiments, when two rulers are arranged in a manner with the shortest distance interval between any two opposite sides constituting the approximately rectangular shape, the maximum and minimum values ​​of the sheet width are obtained by measuring the distance between the two points C and D, the intersection points of the lines perpendicular to these two rulers and the aforementioned two sides, i.e., the sheet width, by using vernier calipers to measure the overall length covering both sides. In cases where the rulers cannot be circumscribed to a side due to a protruding corner of one side of the approximately rectangular shape, the rulers are arranged in a manner circumscribed to each part instead of that side.

[0270] The maximum rate of change of the minimum and maximum values ​​of the sheet width relative to the median value was evaluated according to the following criteria. The "median value" in the evaluation criteria for the maximum rate of change of the sheet width refers to the average value obtained when the sheet width was measured at 6 points. The maximum rate of change of the sheet width for Examples 1-7 was compared with the plate-based applied pressure (N / mm). 2 (These are shown together in Table 2.)

[0271] ◎Best: The width dimension (maximum / minimum) is less than ±1.5% of the median.

[0272] Good: The width dimension (maximum / minimum) is greater than ±1.5% to less than ±3.0% of the median value.

[0273] △Can: The width of the piece (maximum / minimum) is greater than ±3.0% to less than ±4.5% relative to the median.

[0274] ×Not allowed: The width dimension (maximum / minimum) is greater than ±4.5% relative to the median.

[0275] 6) Vibration test of chip components

[0276] The goal is to use the multi-layered stacked mesh sintered body as a firing support plate for firing, so that even when fine electronic components are placed on each sintered body for firing and transport, the electronic components will not fall off the mesh and can be stably maintained.

[0277] Therefore, when the mesh sheet sintered bodies obtained in the above embodiments are stacked in multiple layers using mullite supports, as in item 2) "Durability evaluation of multilayer stacks", 16 chip capacitors (JIS designation 1005: 1.00mm ± 0.05mm) as electronic components are placed on each sintered body at appropriate intervals. 0.50mm±0.05mm 0.50mm ± 0.05mm). For the chip capacitors thus mounted together with the multilayer stacked mesh sheet sintered body, a vibration testing machine (SINFONIA TECHNOLOGY, trade name "VIBRATORY PACKER, TYPEVP-40") was used at 60Hz and vibrated at intensity level 5 for 180 seconds. The number of chip capacitors falling off the mesh was recorded, and the percentage relative to the total number of chip capacitors was calculated. The component drop rate in the vibration test of the chip components for Examples 1-7 was compared with the board-based pressure (N / mm). 2 (These are shown together in Table 2.)

[0278] 7) Edge impact test

[0279] When a mesh sheet sintered body is used as a sintering support plate for sintering, for example when constructing a multi-layer stack, it is often held (clamped) by machinery during the processing operation. Therefore, it is desirable to have a degree of durability that will not cause defects even when a certain degree of pressure is applied to the edge of the mesh sheet sintered body through such operation.

[0280] Therefore, for each of the above embodiments, a handle consisting of two opposing and parallel SUS blocks is used to advance the sintered mesh at a speed of 100 mm / s, causing the two SUS blocks to pressurize and contact the sintered mesh. At this time, it is observed whether any damage caused by notches or cracks occurs at the ends, corners, and edges of the sintered mesh. The same operation and observation are performed on 10 multi-layered stacked sintered meshes, and the percentage of broken pieces relative to 10 pieces is calculated as the breakage rate. The breakage rate in the edge impact tests of Examples 1-7 is compared with the plate-based pressure (N / mm). 2 (These are shown together in Table 2.)

[0281]

[0282] Based on these results, it was found that the ceramic sheet sintered body of the present invention, by sufficiently suppressing warping, can be neatly transported and stacked in multiple layers without lateral displacement, collapse, or associated defects, even under conditions of violent movement such as storage, transportation, and transporting from the warehouse to other locations by trolleys across height differences when placed on a table or stacked in multiple layers.

[0283] It has also been found that the preferred ceramic sheet sintered body of the present invention can prevent the sintered material from falling from the opening of the firing plate by suppressing the maximum rate of change of the gap size of the line portion within a specified range. In the case of multi-stage firing of the sintered material, it can prevent the sintered material from falling to the lower layer and getting stuck. Furthermore, by suppressing the maximum rate of change of the width size of the sheet within a specified range, it can effectively prevent material handling problems caused by misidentification of straight lines during image recognition of the firing plate.

[0284] Furthermore, it has been discovered that the preferred ceramic sheet sintered body of the present invention is used as a firing support plate in a multi-layer stacked state. Even when fine electronic components are placed on each sintered body for firing and transport, the electronic components will not fall off the mesh of the grid and can be stably held. As a result, it can have the following level of durability: even when a certain degree of pressure is applied to the edge of the mesh sheet sintered body by mechanical holding (clamping) and processing operations during the construction of multi-layer stacks, no defects will occur.

[0285] It should be noted that, in the above embodiments, zirconia mesh sintered bodies were manufactured and their properties and durability were measured. It was found that the manufacture of alumina, mullite, and yttrium oxide mesh sintered bodies can be successfully carried out by using a mullite plate load and atmospheric atmosphere firing process, and good properties and durability comparable to those of zirconia mesh sintered bodies can be obtained.

[0286] Furthermore, it was discovered that the manufacture of sintered meshes made of nitrides such as silicon nitride or aluminum nitride, or carbides such as silicon carbide, tantalum carbide, or niobium carbide, can be successfully carried out by using a carbon plate load, a tungsten plate load, or a tantalum plate load, and a firing process under an argon atmosphere, achieving good properties and durability comparable to those of zirconia sintered meshes.

Claims

1. A ceramic sheet sintered body comprising a first line portion layer and a second line portion layer, the first line portion layer being composed of a plurality of first line portions each extending in one direction arranged at a prescribed interval, the second line portion layer being composed of a plurality of second line portions each extending in one direction arranged at a prescribed interval in a manner of abutting on and crossing each of the first line portions, the first line portion layer and the second line portion layer being integrally formed, The warpage rate per unit length of the longest part of the main surface of the ceramic chip sintered body is 5 x 10 -3 mm / mm or less.

2. The ceramic green sheet according to claim 1, wherein a maximum variation rate of a middle value of a gap spaced apart with respect to each of the first line portions being within 80%.

3. The ceramic green sheet according to claim 1, wherein the ceramic sheet sintered body being substantially rectangular in plan view, when arranging two parallel imaginary lines A and B circumscribing any pair of opposite sides constituting the substantially rectangular shape and spaced apart at a shortest distance, a distance between two points of intersection C and D of a straight line perpendicular to the imaginary lines A and B and each of the pair of opposite sides, that is, a sheet width, the sheet width being measured throughout a length of the pair of opposite sides, a maximum variation rate of a middle value of the sheet width being within 5%.

4. The ceramic green sheet according to claim 2, wherein the ceramic sheet sintered body being substantially rectangular in plan view, when arranging two parallel imaginary lines A and B circumscribing any pair of opposite sides constituting the substantially rectangular shape and spaced apart at a shortest distance, a distance between two points of intersection C and D of a straight line perpendicular to the imaginary lines A and B and each of the pair of opposite sides, that is, a sheet width, the sheet width being measured throughout a length of the pair of opposite sides, a maximum variation rate of a middle value of the sheet width being within 5%.

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