A water jet cover and a dicing machine

Abstract

The utility model relates to the technical field of semiconductor equipment especially relates to a water spray cover and scribe machine. The water spray cover includes water spray cover main part, first water spray mechanism and second water spray mechanism, and first water spray mechanism and second water spray mechanism are fixedly installed on water spray cover main part, and the spray outlet of first water spray mechanism is towards the blade area of blade side part, and the spray outlet of second water spray mechanism is towards the blade position of blade bottom. Through the water spray cooling of the blade of first water spray mechanism and second water spray mechanism to the blade simultaneously, can reduce the temperature of the blade before cutting work piece, and then reduce various cutting defects caused by the high temperature of the blade in the cutting process, ensure the flatness of work piece cutting position.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a water spray cover and a dicing machine. Background Technology

[0002] When a dicing machine cuts a workpiece, the high-speed rotation of the blade generates a large amount of heat, which can adversely affect the workpiece and thus the cutting quality. In existing technology, the cooling device only sprays water onto the blade edge once, which is ineffective and easily affects the quality of the cut. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art or related technologies.

[0004] Therefore, this utility model provides a water spray cover, in which the water outlet of the first water spray mechanism is aligned with the side edge of the blade, and the second water spray mechanism is aligned with the bottom edge of the blade. During the cutting process of the dicing machine, the first water spray mechanism and the second water spray mechanism simultaneously spray water to cool the high-speed rotating blade, effectively reducing the blade temperature rise and ensuring a smooth cut surface of the workpiece.

[0005] This utility model also provides a dicing machine.

[0006] A water spray cover according to a first aspect embodiment of the present invention includes: The main body of the water spray hood is located around the blade. The first water spraying mechanism is installed on the main body of the water spray cover. The nozzle of the first water spraying mechanism faces the blade located on the side of the blade. The first water spraying mechanism is used to spray water onto the side blade of the blade. The second water spraying mechanism is installed on the main body of the water spray cover. The nozzle of the second water spraying mechanism faces the blade near the bottom of the blade, and the nozzle of the second water spraying mechanism is located below the nozzle of the first water spraying mechanism. The second water spraying mechanism is used to spray water onto the blade near the bottom of the blade.

[0007] Optionally, the water spray cover also includes: The third water spraying mechanism includes a first water spray pipe and a second water spray pipe arranged adjacent to each other. Both the first water spray pipe and the second water spray pipe are arranged on the main body of the water spray cover. The first water spray pipe is arranged parallel to one side of the blade, and the spray outlet of the first water spray pipe faces one side of the blade. The second water spray pipe is arranged parallel to the first water spray pipe and is located on the other side of the blade. The spray outlet of the second water spray pipe faces the other side of the blade. The nozzle of the first water spray pipe is located on one side of the blade, close to the blade, while the nozzle of the second water spray pipe is located on the other side of the blade.

[0008] Optionally, the third water spray mechanism also includes: A connecting pipe is provided, with one end connected to both the first and second water spray pipes, and the other end connected to the water supply mechanism.

[0009] Optionally, the water spray cover also includes: The first adjustment mechanism is slidably disposed on one side of the main body of the water spray cover. The first water spray mechanism and the second water spray mechanism are both disposed on the first adjustment mechanism, and are used to change the position of the first water spray mechanism relative to the blade and / or the position of the second water spray mechanism relative to the blade.

[0010] Optionally, the first adjustment mechanism includes: The first movable component is slidably mounted on the water spray cover body along the rotation axis of the blade, and the first water spray mechanism and the second water spray mechanism are both mounted on the first movable component. The first locking nut passes through the first moving part and is threadedly connected to the main body of the water spray cover, and is used to fix the first moving part relative to the main body of the water spray cover.

[0011] Optionally, the first adjustment mechanism may also include: The second moving part is slidably mounted on the first moving part along the direction of the blade height, and both the first water spraying mechanism and the second water spraying mechanism are disposed on the second moving part; The second locking nut passes through the second moving part and is threadedly connected to the first moving part, and is used to fix the second moving part relative to the first moving part.

[0012] Optionally, the water spray cover also includes: The nozzle assembly is mounted on the first adjustment mechanism, with the nozzle outlet facing downwards. The nozzle assembly is used to connect to an external water supply device and / or a two-fluid generator.

[0013] Optionally, the angle between the spray direction of the nozzle assembly's nozzle outlet and the horizontal plane ranges from 30° to 60°.

[0014] Optionally, the water spray cover also includes: The second adjustment mechanism is slidably mounted on the second moving part, and the nozzle assembly is disposed on the second adjustment mechanism to change the height position of the nozzle assembly relative to the blade.

[0015] Optionally, the second adjustment mechanism may also include: The third movable component is slidably mounted on the second movable component along the direction of the blade height, and the nozzle assembly is mounted on the third movable component; The third locking nut passes through the third moving part and is threadedly connected to the second moving part, and is used to fix the third moving part relative to the second moving part.

[0016] Optionally, the water spray cover also includes: The third adjustment mechanism is slidably disposed on the other side of the water spray hood body, and the third water spray mechanism is disposed on the third adjustment mechanism to change the height position of the third water spray mechanism relative to the blade.

[0017] Optionally, the third adjustment body may also include: The fourth movable component is slidably mounted on the water spray hood body along the direction of the blade height, and the third water spray mechanism is mounted on the fourth movable component; The fourth locking nut passes through the fourth moving part and is threadedly connected to the main body of the water spray cover, and is used to fix the fourth moving part relative to the main body of the water spray cover.

[0018] A water spray hood according to a second aspect of the present invention includes a dicing machine according to the first aspect or various embodiments.

[0019] One of the above technical solutions has at least the following advantages or beneficial effects: A water spray cover according to an embodiment of the present invention includes a water spray cover body, a first water spray mechanism, and a second water spray mechanism. Both the first and second water spray mechanisms are fixedly installed on the water spray cover body. The nozzle of the first water spray mechanism faces the cutting edge area on the side of the blade and continuously sprays water towards the cutting edge on the side of the blade. The nozzle of the second water spray mechanism faces the cutting edge position at the bottom of the blade and continuously sprays water towards the cutting edge at the bottom of the blade. When the dicing machine is performing normal cutting operations, the first and second water spray mechanisms simultaneously spray water to cool the cutting edge of the blade, which can reduce the temperature of the blade before cutting the workpiece, thereby reducing various cutting defects caused by high blade temperature and ensuring the flatness of the workpiece cutting position.

[0020] The dicing machine provided in this embodiment of the utility model is equipped with the water spray cover mentioned above. Since the water spray cover has the above-mentioned technical effects, the dicing machine equipped with the water spray cover should also have the corresponding technical effects. Attached Figure Description

[0021] Figure 1 A schematic diagram of the structure of a water spray cover according to an embodiment of the present invention is shown; Figure 2 This diagram illustrates a structural schematic of an embodiment of the present invention, which includes a first adjustment mechanism. Figure 3 This invention provides a schematic diagram of a structure including a nozzle assembly according to an embodiment of the present invention. Figure 4 A schematic diagram of a structure with a third water spraying mechanism is shown in one embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures: 100-Water spray hood body, 200-First water spray mechanism, 300-Second water spray mechanism, 400-Third water spray mechanism, 500-First adjustment mechanism, 600-Spray head assembly, 700-Second adjustment mechanism, 800-Third adjustment mechanism, 900-Blade; 410 - First water spray pipe, 420 - Second water spray pipe, 430 - Connecting pipe; 510 - First moving part, 520 - First locking nut, 530 - Second moving part, 540 - Second locking nut; 710 - Third moving part; 720 - Third locking nut; 810 - Fourth moving part, 820 - Fourth locking nut. Detailed Implementation

[0023] To better explain and facilitate understanding of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] When a dicing machine cuts a workpiece, the high-speed rotation of the blade generates a large amount of heat, which can adversely affect the workpiece and thus the cutting quality. In existing technology, the cooling device only sprays water onto the blade edge once, which is ineffective and easily affects the quality of the cut.

[0025] To address at least one of the technical problems existing in the prior art or related technologies, this utility model provides a water spray cover comprising a main body, a first water spray mechanism, and a second water spray mechanism. Both the first and second water spray mechanisms are fixedly mounted on the main body. The nozzle of the first water spray mechanism faces the cutting edge area on the side of the blade, continuously spraying water towards the cutting edge. The nozzle of the second water spray mechanism faces the cutting edge position at the bottom of the blade, continuously spraying water towards the cutting edge. During normal cutting operation of the dicing machine, the first and second water spray mechanisms work synchronously. Through the synergistic effect of the first and second water spray mechanisms, the temperature of the blade before cutting the workpiece can be reduced, the impact of high temperature on workpiece cutting can be mitigated, various cutting defects caused by high temperature can be avoided, and the flatness of the cut position of the workpiece can be guaranteed.

[0026] The following description, with reference to the accompanying drawings, describes some embodiments of the water spray hood and dicing machine provided according to the present invention.

[0027] See Figures 1 to 4The present invention provides a water spray cover, comprising a water spray cover body 100, a first water spraying mechanism 200, and a second water spraying mechanism 300; the water spray cover body 100 is disposed around a blade 900; the first water spraying mechanism 200 is disposed on the water spray cover body 100, the nozzle of the first water spraying mechanism 200 faces the blade located on the side of the blade 900, and the first water spraying mechanism 200 is used to spray water onto the side blade of the blade 900; the second water spraying mechanism 300 is disposed on the water spray cover body 100, the nozzle of the second water spraying mechanism 300 faces the blade near the bottom of the blade 900, and the nozzle of the second water spraying mechanism 300 is located below the nozzle of the first water spraying mechanism 200; the second water spraying mechanism 300 is used to spray water onto the blade near the bottom of the blade 900.

[0028] The water spray cover provided in this embodiment includes a water spray cover body 100, a first water spraying mechanism 200, and a second water spraying mechanism 300. The water spray cover body 100 is assembled on the outer periphery of the blade 900, which can form a semi-enclosed protection for the blade 900. At the same time, it provides a stable mounting carrier for the first water spraying mechanism 200 and the second water spraying mechanism 300, so that the spray outlets of the first water spraying mechanism 200 and the second water spraying mechanism 300 can accurately spray water onto the blade 900, avoiding deviation in the spraying position.

[0029] For example, the water sprayed from the nozzle of the first water spraying mechanism 200 can be cooling water; the water sprayed from the nozzle of the second water spraying mechanism 300 can be cooling water.

[0030] The first water spraying mechanism 200 is fixedly installed on the water spray cover body 100, and the spray outlet of the first water spraying mechanism 200 faces the cutting edge area on the side of the blade 900. During operation, water can be continuously sprayed onto the cutting edge on the side of the blade 900 to cool the cutting edge on the side of the blade 900 during high-speed rotation. At the same time, after the sprayed cooling water comes into contact with the cutting edge on the side of the blade 900, it will continue to extend in the spraying direction under the action of impact force. At this time, the sprayed cooling water is divided into two parts by the cutting edge on the side of the blade 900, and these two parts of cooling water continue to move along the side wall of the blade 900. While cooling the side wall of the blade 900, it can also clean the workpiece debris remaining on the side wall of the blade 900, so that the blade 900 can maintain its sharpness.

[0031] The second water spraying mechanism 300 is also fixedly installed on the water spray cover body 100. The spray outlet of the second water spraying mechanism 300 faces the cutting edge position at the bottom of the blade 900. During operation, water can be continuously sprayed onto the cutting edge at the bottom of the blade 900 to cool down the cutting edge at the bottom of the blade 900 which is rotating at high speed. In addition, during this process, the cooling water on the blade 900 enters the cutting position between the blade 900 and the workpiece through the rotation of the blade 900. The cooling water located here can cool the cutting position of the blade 900 and the workpiece.

[0032] For example, the first water spraying mechanism 200 may be, but is not limited to, a first bent tube, the nozzle of which faces the blade area on the side of the blade 900, and the first bent tube is disposed on the water spraying cover body 100; the second water spraying mechanism 300 may be, but is not limited to, a second bent tube, the nozzle of which faces the blade area at the bottom of the blade 900, and the second bent tube is disposed on the water spraying cover body 100.

[0033] As can be seen from the above, the nozzle of the second water spraying mechanism 300 is located below the nozzle of the first water spraying mechanism 200. The nozzles of the second water spraying mechanism 300 and the first water spraying mechanism 200 form a staggered vertical arrangement. When the blade 900 is continuously cutting the workpiece, the cooling water sprayed by the first water spraying mechanism 200 continuously acts on the cutting edge of the side of the blade 900, completing the real-time cooling and debris removal work in this area, and ensuring the stability of the cutting edge of the side of the blade 900. At the same time, the second water spraying mechanism 300 sprays water to cool the cutting edge of the blade 900 near the cutting position, so as to reduce the temperature of the blade 900, avoid various cutting defects caused by high temperature, and ensure the flatness of the workpiece cutting position.

[0034] In summary, during normal cutting operations of the dicing machine, the blade 900 rotates at high speed and continuously cuts the workpiece. The first water spraying mechanism 200 and the second water spraying mechanism 300 simultaneously carry out water spraying operations. The first water spraying mechanism 200 sprays water to cool the cutting edge located on the side of the blade 900, while the second water spraying mechanism 300 sprays water to cool the cutting edge located near the bottom of the blade 900. Through the synergistic effect of the first water spraying mechanism 200 and the second water spraying mechanism 300, the temperature of the blade 900 before cutting the workpiece can be reduced, avoiding the impact of the high temperature of the blade 900 on the workpiece cutting during the cutting process, avoiding various cutting defects caused by high temperature, and ensuring the flatness of the cut position of the workpiece.

[0035] See Figure 1 and Figure 4In some instances, the water spray hood further includes a third water spray mechanism 400; the third water spray mechanism 400 includes a first water spray pipe 410 and a second water spray pipe 420 arranged adjacent to each other, both the first water spray pipe 410 and the second water spray pipe 420 being disposed on the main body 100 of the water spray hood, the first water spray pipe 410 being arranged parallel to one side of the blade 900, and the nozzle of the first water spray pipe 410 facing one side of the blade 900; the second water spray pipe 420 being arranged parallel to the first water spray pipe 410 and located on the other side of the blade 900, and the nozzle of the second water spray pipe 420 facing the other side of the blade 900; wherein, the nozzle of the first water spray pipe 410 is disposed closer to one side of the blade 900, and the nozzle of the second water spray pipe 420 is disposed closer to the other side of the blade 900.

[0036] In this technical solution, the third water spraying mechanism 400 includes a first water spraying pipe 410 and a second water spraying pipe 420 arranged adjacent to each other. The first water spraying pipe 410 is arranged on one side of the blade 900 along the thickness direction, and the second water spraying pipe 420 is arranged on the other side of the blade 900 along the thickness direction. The first water spraying pipe 410 and the second water spraying pipe 420 spray water from both sides of the blade 900 towards the blade body at the same time, which can cool both sides of the blade body of the blade 900 simultaneously and improve the overall cooling effect of the blade 900.

[0037] Furthermore, during high-speed rotation, the blade 900 forms a rotating air barrier around itself. By positioning the nozzle of the first water spray pipe 410 closer to one side of the blade 900, the distance between the nozzle and one side of the blade 900 is reduced, thereby increasing the resistance of the water sprayed from the nozzle of the first water spray pipe 410 to penetrate the rotating air barrier. Similarly, by positioning the nozzle of the second water spray pipe 420 closer to the other side of the blade 900, the distance between the nozzle and the other side of the blade 900 is reduced, thereby increasing the resistance of the water sprayed from the nozzle of the second water spray pipe 420 to penetrate the rotating air barrier. Therefore, by positioning the nozzle of the first water spray pipe 410 closer to one side of the blade 900 and the nozzle of the second water spray pipe 420 closer to the other side of the blade 900, the cooling effect loss of the blade 900 caused by the rotating air barrier can be reduced.

[0038] As can be seen from the above, the first water spray pipe 410 and the second water spray pipe 420 are arranged in parallel. Since the nozzles of the first water spray pipe 410 and the second water spray pipe 420 are both located close to the blade 900, the first water spray pipe 410 and the second water spray pipe 420 are also arranged close to each other to reduce the space occupied in the thickness direction of the water spray cover.

[0039] For example, the first water spraying mechanism 200 and the second water spraying mechanism 300 are disposed on the same side, both disposed on the first side of the blade 900, and the third water spraying mechanism 400 is disposed on the second side of the blade 900.

[0040] See Figure 1 and Figure 4 In some instances, the third water spray mechanism 400 also includes a connecting pipe 430; one end of the connecting pipe 430 is connected to both the first water spray pipe 410 and the second water spray pipe 420, and the other end of the connecting pipe 430 is used to connect to the water supply mechanism.

[0041] In this technical solution, the third water spraying mechanism 400 also includes a connecting pipe 430. The first water spraying pipe 410 and the second water spraying pipe 420 are simultaneously connected to the water supply mechanism through the connecting pipe 430. Compared with the prior art where the first water spraying pipe is connected to a separate pipe and the second water spraying pipe is connected to a separate pipe, the first water spraying pipe 410 and the second water spraying pipe 420 can save space by being connected to a common connecting pipe 430.

[0042] See Figures 1 to 3 In some instances, the water spray cover also includes a first adjustment mechanism 500; the first adjustment mechanism 500 is slidably disposed on one side of the water spray cover body 100, and the first water spray mechanism 200 and the second water spray mechanism 300 are both disposed on the first adjustment mechanism 500, for changing the position of the first water spray mechanism 200 relative to the blade 900, and / or the position of the second water spray mechanism 300 relative to the blade 900.

[0043] In this technical solution, the water spray cover also includes a first adjustment mechanism 500, wherein the first water spray mechanism 200 and the second water spray mechanism 300 are assembled on one side of the water spray cover body 100 through the first adjustment mechanism 500; the operator can adjust the position of the first water spray mechanism 200 and / or the second water spray mechanism 300 relative to the blade 900 according to the actual working conditions of the blade 900, so as to ensure that the cooling water sprayed by the first water spray mechanism 200 and / or the second water spray mechanism 300 can be accurately aimed at the cutting edge area of ​​the blade 900, and avoid the cooling effect from the position deviation.

[0044] For example, the first adjustment mechanism 500 can adjust the height position of the first water spraying mechanism 200 relative to the blade 900 or the position along the rotation axis of the blade 900, and / or the first adjustment mechanism 500 can adjust the height position of the second water spraying mechanism 300 relative to the blade 900 or the position along the rotation axis of the blade 900.

[0045] See Figures 1 to 3In some instances, the first adjustment mechanism 500 includes a first moving member 510 and a first locking nut 520; the first moving member 510 is slidably mounted on the spray hood body 100 along the rotation axis of the blade 900, and the first spray mechanism 200 and the second spray mechanism 300 are both disposed on the first moving member 510; the first locking nut 520 passes through the first moving member 510 and is threadedly connected to the spray hood body 100 to fix the first moving member 510 relative to the spray hood body 100.

[0046] In this technical solution, the first adjustment mechanism 500 includes a first moving part 510 and a first locking nut 520. The first moving part 510 is slidably mounted on the spray cover body 100 along the rotation axis of the blade 900, and the first spray mechanism 200 and the second spray mechanism 300 are both mounted on the first moving part 510. The first moving part 510 can drive the first spray mechanism 200 and the second spray mechanism 300 to slide together along the rotation axis of the blade 900 to adjust the position of the first spray mechanism 200 and the second spray mechanism 300 in this direction. After the adjustment is completed, the first locking nut 520 is rotated to make the first moving part 510 in close contact with the spray cover body 100, thereby locking the first moving part 510 on the spray cover body 100 and keeping the adjusted position stable.

[0047] For example, a first limiting groove is provided on the outer wall of the first moving member 510 along the rotation axis direction of the blade 900, and a first locking nut 520 is disposed in the first limiting groove, thereby ensuring that the moving length of the first moving member 510 along the rotation axis direction of the blade 900 is the length of the first limiting groove, thus limiting the moving range of the first moving member 510.

[0048] See Figures 1 to 3 In some instances, the first adjustment mechanism 500 further includes a second movable member 530 and a second locking nut 540; the second movable member 530 is slidably mounted on the first movable member 510 along the direction of the blade 900 height, and the first water spraying mechanism 200 and the second water spraying mechanism 300 are both disposed on the second movable member 530; the second locking nut 540 passes through the second movable member 530 and is threadedly connected to the first movable member 510, for fixing the second movable member 530 relative to the first movable member 510.

[0049] In this technical solution, the first adjustment mechanism 500 further includes a second moving part 530 and a second locking nut 540. The second moving part 530 is slidably mounted on the first moving part 510 along the height direction of the blade 900. The first water spraying mechanism 200 and the second water spraying mechanism 300 are integrally assembled on the second moving part 530. The second moving part 530 can drive the first water spraying mechanism 200 and the second water spraying mechanism 300 to adjust their positions along the height direction of the blade 900, adapting to processing requirements of different blade specifications 900 or different cutting depths. After the position is adjusted to the correct position, the second locking nut 540 is tightened to ensure close contact between the second moving part 530 and the first moving part 510, thus fixing the second moving part 530 on the first moving part 510 and ensuring accurate water spraying positions of the first water spraying mechanism 200 and the second water spraying mechanism 300. Simultaneously, the second moving part 530, fixedly mounted on the first moving part 510, can move along the rotation axis of the blade 900 with the first moving part 510.

[0050] For example, the outer wall of the second moving part 530 is provided with a second limiting groove along the height direction of the blade 900, and the second locking nut 540 is disposed in the second limiting groove, which can limit the movement range of the second moving part 530 and avoid excessive movement during the adjustment process, which could cause the first water spraying mechanism 200 or the second water spraying mechanism 300 to accidentally contact the workpiece.

[0051] See Figures 1 to 3 In some instances, the spray hood also includes a nozzle assembly 600; the nozzle assembly 600 is disposed on the first adjustment mechanism 500, the nozzle outlet of the nozzle assembly 600 is disposed downward, and the nozzle assembly is used to connect to an external water supply device and / or a two-fluid generator.

[0052] In this technical solution, the water spray hood also includes a nozzle assembly 600 mounted on the first adjustment mechanism 500. The nozzle of the nozzle assembly 600 faces downwards and is aimed at the area to be cut or the area already cut on the workpiece. The sprayed water can promptly wash away any remaining cutting debris on the surface of the workpiece, thus not affecting the cutting accuracy of the dicing machine. Simultaneously, the nozzle assembly 600 is mounted on the first adjustment mechanism 500 and can move synchronously with it.

[0053] For example, the water sprayed by the nozzle assembly 600 can be presented as a rinsing surface, with the rinsing surface of the nozzle assembly 600 facing one side of the blade 900, and the rinsing surface of the nozzle assembly 600 is perpendicular to the cutting edge of the blade 900, so as to rinse the workpiece being cut by the blade 900 and promptly wash away the cutting debris remaining on the surface of the workpiece.

[0054] For example, the nozzle assembly 600 can be connected to an external water supply device, and the nozzle assembly 600 connected to the external water supply device can spray water independently; the nozzle assembly 600 can also be connected to an external two-fluid generator, and the nozzle assembly 600 connected to the external two-fluid generator can spray water vapor two-fluid.

[0055] See Figures 1 to 3 In some instances, the angle between the spray direction of the nozzle assembly 600 and the horizontal plane ranges from 30° to 60°.

[0056] In this technical solution, the workpiece is set horizontally, and the spraying direction of the nozzle assembly 600 is set at an angle of 30°-60° with the horizontal plane, which allows the sprayed cooling water to be more adapted to the angle of the workpiece surface.

[0057] For example, the angle between the water spray direction of the nozzle assembly 600 and the horizontal plane is selected as 45°, which is the most effective way to wash away debris.

[0058] See Figures 1 to 3 In some instances, the spray nozzle also includes a second adjustment mechanism 700; the second adjustment mechanism 700 is slidably mounted on the second moving part 530, and the nozzle assembly 600 is disposed on the second adjustment mechanism 700 for changing the height position of the nozzle assembly 600 relative to the blade 900.

[0059] In this technical solution, the water spray hood also includes a second adjustment mechanism 700, wherein the nozzle assembly 600 is mounted on the second moving part 530, and the operator can adjust the height position of the nozzle assembly 600 relative to the blade 900 according to the actual working conditions, so as to ensure that the nozzle assembly 600 achieves the effect of cleaning the surface of the workpiece.

[0060] See Figures 1 to 3 In some instances, the second adjustment mechanism 700 further includes a third moving member 710 and a third locking nut 720; the third moving member 710 is slidably mounted on the second moving member 530 along the direction of the blade 900 height, and the nozzle assembly 600 is disposed on the third moving member 710; the third locking nut 720 passes through the third moving member 710 and is threadedly connected to the second moving member 530 to fix the third moving member 710 relative to the second moving member 530.

[0061] In this technical solution, the second adjustment mechanism 700 also includes a third moving part 710 and a third locking nut 720. The third moving part 710 is slidably mounted on the second moving part 530 along the height direction of the blade 900. The nozzle assembly 600 is mounted on the bottom end of the third moving part 710. When adjusting the height of the nozzle assembly 600 relative to the blade 900, it is locked by rotating the third locking nut 720. After the nozzle assembly 600 is adjusted into place with the third moving part 710, the third locking nut 720 is tightened to make the third moving part 710 and the second moving part 530 in close contact, thereby fixing the third moving part 710 and the second moving part 530 relatively and making the nozzle assembly 600 work stably.

[0062] See Figure 1 and Figure 4 In some instances, the water spray hood also includes a third adjustment mechanism 800; the third adjustment mechanism 800 is slidably disposed on the other side of the water spray hood body 100, and the third water spray mechanism 400 is disposed on the third adjustment mechanism 800 for changing the height position of the third water spray mechanism 400 relative to the blade 900.

[0063] In this technical solution, the water spray hood also includes a third adjustment mechanism 800. The first adjustment mechanism 500 is slidably disposed on one side of the water spray hood body 100, and the third adjustment mechanism 800 is slidably disposed on the other side of the water spray hood body 100. The third water spray mechanism 400 is disposed on the third adjustment mechanism 800. The operator can adjust the height position of the third water spray mechanism 400 relative to the blade 900 according to the actual cutting depth of the blade 900, so as to ensure that the first water spray pipe 410 and the second water spray pipe 420 are always aligned with the corresponding area of ​​the blade 900, so as to avoid the cooling effect decrease due to the height deviation, and at the same time, it can also prevent the third water spray mechanism 400 from touching the workpiece. For example, the third water spraying mechanism 400 includes a first water spraying pipe 410 and a second water spraying pipe 420 arranged adjacent to each other. The first water spraying pipe 410 is fixedly installed on the third adjustment mechanism 800, and the second water spraying pipe 420 is fixedly installed on the third adjustment mechanism 800.

[0064] See Figure 1 and Figure 4 In some instances, the third adjustment mechanism 800 further includes a fourth moving member 810 and a fourth locking nut 820; the fourth moving member 810 is slidably mounted on the spray hood body 100 along the height of the blade 900, and the third spray mechanism 400 is disposed on the fourth moving member 810; the fourth locking nut 820 passes through the fourth moving member 810 and is threadedly connected to the spray hood body 100, for fixing the fourth moving member 810 relative to the spray hood body 100.

[0065] In this technical solution, the third adjustment mechanism 800 includes a fourth moving part 810 and a fourth locking nut 820. The fourth moving part 810 is slidably mounted on the water spray cover body 100 along the height direction of the blade 900. The first water spray pipe 410 and the second water spray pipe 420 in the third water spray mechanism 400 are both fixedly mounted on the fourth moving part 810. When adjusting the height position, only the fourth locking nut 820 needs to be loosened to drive the third water spray mechanism 400 to slide along the height direction of the blade 900, adapting to the processing requirements of different cutting depths. After the first water spray pipe 410 and the second water spray pipe 420 are adjusted into place, the fourth locking nut 820 is tightened to make the fourth moving part 810 in close contact with the water spray cover body 100, thereby locking the fourth moving part 810 in the corresponding position of the water spray cover body 100, keeping the water spray position of the third water spray mechanism 400 stable, ensuring that the first water spray pipe 410 and the second water spray pipe 420 are always accurately aligned with the blade 900, and maintaining a stable cooling effect.

[0066] For example, the outer wall of the fourth moving part 810 is provided with a third limiting groove along the height direction of the blade 900, and the fourth locking nut 820 is provided in the third limiting groove, which can limit the movement range of the fourth moving part 810 and prevent the workpiece of the third water spraying mechanism 400 from colliding due to excessive adjustment.

[0067] One embodiment of the present invention provides a dicing machine, which includes the water spray hood found in any of the above embodiments.

[0068] Since the dicing machine of this embodiment includes any of the water spray hoods in the first aspect described above, it has the beneficial effects of any of the above embodiments, which will not be repeated here.

[0069] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0070] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0071] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "beneath" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0072] In the description of this specification, the terms "one embodiment," "some embodiments," "embodiment," "exemplary embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0073] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make modifications, alterations, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A water spray cover, characterized in that, include: The main body of the water spray hood is located around the blade. A first water spraying mechanism is disposed on the main body of the water spray cover. The nozzle of the first water spraying mechanism faces the blade located on the side of the blade. The first water spraying mechanism is used to spray water onto the side blade of the blade. A second water spraying mechanism is disposed on the main body of the water spray cover. The nozzle of the second water spraying mechanism faces the blade near the bottom of the blade, and the nozzle of the second water spraying mechanism is located below the nozzle of the first water spraying mechanism. The second water spraying mechanism is used to spray water onto the blade near the bottom of the blade.

2. The water spray hood according to claim 1, characterized in that, Also includes: The third water spraying mechanism includes a first water spray pipe and a second water spray pipe arranged adjacent to each other. Both the first water spray pipe and the second water spray pipe are arranged on the main body of the water spray cover. The first water spray pipe is arranged parallel to one side of the blade, and the spray outlet of the first water spray pipe faces one side of the blade. The second water spray pipe is arranged parallel to the first water spray pipe and is located on the other side of the blade, with the spray outlet of the second water spray pipe facing the other side of the blade. The nozzle of the first water spray pipe is located near one side of the blade, while the nozzle of the second water spray pipe is located near the other side of the blade.

3. The water spray hood according to claim 2, characterized in that, The third water spray system also includes: A connecting pipe, one end of which is connected to both the first water spray pipe and the second water spray pipe, and the other end of which is used to connect to the water supply mechanism.

4. The water spray hood according to claim 2, characterized in that, Also includes: A first adjustment mechanism is slidably disposed on one side of the main body of the water spray cover. Both the first water spray mechanism and the second water spray mechanism are disposed on the first adjustment mechanism, and are used to change the position of the first water spray mechanism relative to the blade and / or the position of the second water spray mechanism relative to the blade.

5. The water spray hood according to claim 4, characterized in that, The first adjustment mechanism includes: The first movable component is slidably mounted on the water spray cover body along the rotation axis of the blade, and the first water spray mechanism and the second water spray mechanism are both disposed on the first movable component; A first locking nut passes through the first moving member and is threadedly connected to the main body of the water spray cover, for fixing the first moving member relative to the main body of the water spray cover.

6. The water spray hood according to claim 5, characterized in that, The first adjustment mechanism also includes: The second movable component is slidably mounted on the first movable component along the direction of the blade height, and both the first water spraying mechanism and the second water spraying mechanism are disposed on the second movable component; A second locking nut passes through the second moving member and is threadedly connected to the first moving member, for fixing the second moving member relative to the first moving member.

7. The water spray cover according to claim 6, characterized in that, Also includes: A nozzle assembly is disposed on the first adjustment mechanism, with the nozzle outlet of the nozzle assembly facing downwards, and the nozzle assembly is used to connect to an external water supply device and / or a two-fluid generator.

8. The water spray hood according to claim 7, characterized in that, The angle between the spray direction of the nozzle assembly's nozzle outlet and the horizontal plane ranges from 30° to 60°.

9. The water spray hood according to claim 7, characterized in that, Also includes: The second adjustment mechanism is slidably mounted on the second moving part, and the nozzle assembly is disposed on the second adjustment mechanism for changing the height position of the nozzle assembly relative to the blade.

10. The water spray hood according to claim 9, characterized in that, The second adjustment mechanism also includes: The third movable component is slidably mounted on the second movable component along the direction of the blade height, and the nozzle assembly is disposed on the third movable component; A third locking nut passes through the third moving member and is threadedly connected to the second moving member, used to fix the third moving member relative to the second moving member.

11. The water spray hood according to claim 4, characterized in that, Also includes: The third adjustment mechanism is slidably disposed on the other side of the water spray hood body, and the third water spray mechanism is disposed on the third adjustment mechanism for changing the height position of the third water spray mechanism relative to the blade.

12. The water spray hood according to claim 11, characterized in that, The third adjustment mechanism also includes: The fourth movable component is slidably mounted on the water spray hood body along the direction of the blade height, and the third water spray mechanism is disposed on the fourth movable component; A fourth locking nut passes through the fourth moving member and is threadedly connected to the main body of the water spray cover, for fixing the fourth moving member relative to the main body of the water spray cover.

13. A dicing machine, characterized in that, Includes the water spray hood as described in any one of claims 1 to 12.

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