Sealing structure of ITO target sintering furnace

Abstract

The utility model relates to sintering furnace technical field, concretely relates to a kind of sealing structure of ITO target material sintering furnace, including furnace body, bottom plate, lifting platform and lifting device, furnace body is installed on bottom plate, the side of furnace body is equipped with furnace mouth, lifting platform is installed on bottom plate by lifting device, further include sealing device, sealing device includes upper frame, bottom frame, sealing upper ring, sealing bottom ring and installation component, upper frame is fixedly installed on furnace body, and close to furnace mouth, bottom frame is fixedly installed on lifting platform, sealing groove is equipped in bottom frame, sealing bottom ring is arranged in sealing groove, sealing upper ring is arranged in sealing groove, and contact with sealing bottom ring, installation component is arranged on bottom frame, when furnace body warms up, sealing upper ring expands by heat, and extrude sealing bottom ring, sealing bottom ring is protected simultaneously, avoid sealing bottom ring direct contact high temperature, can guarantee the long-term sealing effect of furnace body, and will not cause pollution to material on lifting platform.

Description

Technical Field

[0001] This utility model relates to the field of sintering furnace technology, and in particular to a sealing structure for an ITO target sintering furnace. Background Technology

[0002] ITO target sintering requires a precisely controlled high-temperature atmosphere. Any leakage will cause fluctuations in oxygen concentration and introduce impurities, resulting in incomplete oxidation of the target, cracks, uneven density, and other problems, which seriously affect product quality. However, conventional sintering furnace doors are sealed with a single rubber ring, which is prone to aging and failure at high temperatures and cannot meet the requirements of long-term high-temperature operation.

[0003] Existing patent CN217303545U describes a sealing mechanism for a sintering furnace used for firing ITO targets. The mechanism includes: a furnace body; a lower abutment located at the lower end of the furnace body; a lifting support plate located parallel to the lower end of the furnace body; the lifting support plate is driven by a lifting structure inherent to the sintering furnace; the lower abutment, the lifting support plate, and several side abutments are all made of ceramic; a frame sand storage trough located at the upper end of the lifting support plate; and several side abutments located inside the frame sand storage trough. By raising the lifting support plate, the lower abutment is partially buried in the sand within the frame sand storage trough, expanding the sealing surface of the lower abutment. The sand can withstand high temperatures, resulting in higher sealing efficiency for the furnace body. Furthermore, the rising process of the lifting support plate causes the several side abutments to be subjected to a transmission force, thus abutting the lower abutment against the lower abutment, making the lower abutment more firmly positioned, increasing the sealing angle of the furnace body, reducing heat leakage, and ensuring better sealing and protection of the furnace body.

[0004] However, when the lifting pallet in the device detaches from the second frame, the second frame will get sand from the sand storage tank and may contaminate the material on the lifting pallet. Utility Model Content

[0005] The purpose of this invention is to provide a sealing structure for an ITO target sintering furnace, which solves the problem that when the lifting pallet in the aforementioned device is separated from the second frame, the second frame will be covered with sand from the frame sand storage tank, and this can easily contaminate the material on the lifting pallet.

[0006] To achieve the above objectives, this utility model provides a sealing structure for an ITO target sintering furnace, comprising a furnace body, a bottom plate, a lifting platform, and a lifting device. The furnace body is mounted on the bottom plate, and a furnace opening is provided on one side of the furnace body. The lifting platform is mounted on the bottom plate via the lifting device. The furnace also includes a sealing device comprising an upper frame, a bottom frame, an upper sealing ring, a bottom sealing ring, and an installation assembly. The upper frame is fixedly mounted on the furnace body and close to the furnace opening. The bottom frame is fixedly mounted on the lifting platform. A sealing groove is provided within the bottom frame. The bottom sealing ring is disposed within the sealing groove, and the upper sealing ring is disposed within the sealing groove and contacts the bottom sealing ring. The installation assembly is disposed on the bottom frame.

[0007] The mounting assembly includes a mounting frame and a limiting member. The mounting frame is mounted on the bottom frame via the limiting member and is located within the sealing groove. The mounting frame is fixedly connected to the sealing bottom ring.

[0008] The limiting component includes a limiting rod and a fixing block. The limiting rod is threaded to the bottom frame, and one end of the limiting rod abuts against the mounting frame. The fixing block is fixedly installed on the limiting rod and is located at the end of the limiting rod away from the mounting frame.

[0009] The lifting device includes a lifting cylinder, a mounting block, and a guide assembly. The lifting cylinder is mounted on the base plate; the mounting block is fixedly mounted on the lifting platform and fixedly connected to the output end of the lifting cylinder; the guide assembly is disposed on the base plate.

[0010] The guide assembly includes a guide seat and a guide rod. The guide seat is fixedly installed on the lifting platform, and the guide rod is fixedly installed on the base plate and slides in cooperation with the guide seat.

[0011] This utility model discloses a sealing structure for an ITO target sintering furnace. In use, the material is placed on the lifting platform, and then the lifting cylinder is activated. The lifting cylinder moves the lifting platform upwards, and the lifting platform carries the material into the furnace body. Simultaneously, the upper frame at the bottom of the furnace body enters the sealing groove of the bottom frame on the lifting platform. When the furnace body heats up, the upper sealing ring expands due to heat and compresses the bottom sealing ring, protecting it from direct contact with high temperatures. This ensures the long-term sealing effect of the furnace body and prevents contamination of the material on the lifting platform. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0013] Figure 1 This is a schematic diagram of the overall structure of the sealing structure of an ITO target sintering furnace according to this utility model.

[0014] Figure 2 This is a structural schematic diagram of the sealing device of this utility model.

[0015] Figure 3 This is a schematic diagram of the installation components of this utility model.

[0016] Figure 4 This is a schematic diagram showing the connection between the sealing upper ring and the bottom frame of this utility model.

[0017] In the diagram: 101-furnace body, 102-bottom plate, 103-lifting platform, 104-furnace opening, 105-upper frame, 106-bottom frame, 107-sealing upper ring, 108-sealing bottom ring, 109-sealing groove, 110-mounting frame, 111-limiting rod, 112-fixing block, 113-lifting cylinder, 114-mounting block, 115-guide seat, 116-guide rod. Detailed Implementation

[0018] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0019] The embodiment of this application is as follows:

[0020] Please see Figure 1-4 , Figure 1 This is a schematic diagram of the overall structure of the sealing structure of an ITO target sintering furnace according to this utility model. Figure 2 This is a structural schematic diagram of the sealing device of this utility model. Figure 3 This is a schematic diagram of the installation components of this utility model. Figure 4 This is a schematic diagram showing the connection between the sealing upper ring and the bottom frame of this utility model.

[0021] This utility model provides a sealing structure for an ITO target sintering furnace, including a furnace body 101, a bottom plate 102, a lifting platform 103, and a lifting device. It also includes a sealing device comprising an upper frame 105, a bottom frame 106, an upper sealing ring 107, a bottom sealing ring 108, and an installation assembly. The installation assembly includes an installation frame 110 and a limiting component, which includes a limiting rod 111 and a fixing block 112. The lifting device includes a lifting cylinder 113, an installation block 114, and a guide assembly, which includes a guide seat 115 and a guide rod 116. This solution solves the problem that when the lifting plate in the aforementioned device detaches from the second frame, the second frame will be contaminated with sand from the frame's sand storage tank, easily polluting the material on the lifting plate.

[0022] In this embodiment, the sealing bottom ring 108 is protected by the sealing top ring 107 to prevent the sealing bottom ring 108 from directly contacting high temperature, thus ensuring the long-term sealing effect of the furnace body 101.

[0023] The upper frame 105 is fixedly installed on the furnace body 101 and close to the furnace opening 104. The bottom frame 106 is fixedly installed on the lifting platform 103. A sealing groove 109 is provided in the bottom frame 106. A sealing bottom ring 108 is disposed in the sealing groove 109. A sealing upper ring 107 is disposed in the sealing groove 109 and contacts the sealing bottom ring 108. The mounting assembly is disposed on the bottom frame 106. The upper frame 105 is located directly above the sealing groove 109 on the bottom frame 106, and its structure is adapted to the structure of the sealing groove 109. The sealing upper ring 107... The structure is C-shaped. The upper sealing ring 107 is made of metal (such as Inconel alloy), while the lower sealing ring 108 is made of high-temperature resistant rubber. The installation components facilitate the installation and replacement of the lower sealing ring 108 and the upper sealing ring 107. When the furnace body 101 heats up, the upper sealing ring 107 expands due to heat and compresses the lower sealing ring 108, while protecting the lower sealing ring 108 from direct contact with high temperature. This ensures the long-term sealing effect of the furnace body 101 and prevents contamination of the materials on the lifting platform 103.

[0024] Secondly, the mounting frame 110 is mounted on the bottom frame 106 by the limiting member and is located in the sealing groove 109. The mounting frame 110 is fixedly connected to the sealing bottom ring 108. The mounting frame 110 is located at the bottom of the sealing groove 109. The limiting member can limit the mounting frame 110. By releasing the limiting member from limiting the mounting frame 110, the mounting frame 110, together with the sealing upper ring 107 and the sealing bottom ring 108, can be removed, making it convenient to replace the sealing upper ring 107 and the sealing bottom ring 108.

[0025] Furthermore, the limiting rod 111 is threadedly engaged with the bottom frame 106, and one end of the limiting rod 111 abuts against the mounting frame 110. The fixing block 112 is fixedly installed on the limiting rod 111 and located at the end of the limiting rod 111 away from the mounting frame 110. The limiting rod 111 is threaded, and the fixing block 112 is welded to the end of the limiting rod 111. By rotating the fixing block 112, the fixing block 112 drives the limiting rod 111 to rotate, and through threaded transmission, it moves on the bottom frame 106, so that the end of the limiting rod 111 abuts against the mounting frame 110, thereby limiting the mounting frame 110 and preventing the mounting frame 110 from detaching from the sealing groove 109 during normal use.

[0026] Furthermore, the lifting cylinder 113 is mounted on the base plate 102; the mounting block 114 is fixedly mounted on the lifting platform 103 and fixedly connected to the output end of the lifting cylinder 113; the guide assembly is disposed on the base plate 102, the lifting cylinder 113 is fixed to the base plate 102 by screws, the mounting block 114 is fixed to the bottom of the lifting platform 103 by screws, the output end of the lifting cylinder 113 is welded to the mounting block 114, and through the guiding cooperation of the guide assembly, the output end of the lifting cylinder 113 drives the mounting block 114 to move vertically, so that the mounting block 114 drives the lifting plate to move vertically.

[0027] Finally, the guide seat 115 is fixedly installed on the lifting platform 103; the guide rod 116 is fixedly installed on the base plate 102 and slides with the guide seat 115. The guide seat 115 is arranged on both sides of the lifting platform 103, and the guide rod 116 is welded to the base plate 102. Through the sliding cooperation of the guide seat 115 and the guide rod 116, the lifting and lowering of the lifting platform 103 can be guided.

[0028] In this embodiment, during use, the material is placed on the lifting platform 103, and then the lifting cylinder 113 is activated. The lifting cylinder 113 drives the lifting platform 103 to move upward, and the lifting platform 103 carries the material into the furnace body 101. At the same time, the upper frame 105 at the bottom of the furnace body 101 enters the sealing groove 109 of the bottom frame 106 on the lifting platform 103. When the furnace body 101 heats up, the sealing upper ring 107 expands due to heat and squeezes the sealing bottom ring 108, while protecting the sealing bottom ring 108 and preventing it from directly contacting the high temperature. This ensures the long-term sealing effect of the furnace body 101 and does not contaminate the material on the lifting platform 103.

[0029] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art can understand that all or part of the processes for implementing the above embodiments and equivalent changes made in accordance with the claims of this application still fall within the scope of this application.

Claims

1. A sealing structure for an ITO target sintering furnace, comprising a furnace body, a bottom plate, a lifting platform, and a lifting device, wherein the furnace body is mounted on the bottom plate, a furnace opening is provided on one side of the furnace body, and the lifting platform is mounted on the bottom plate via the lifting device, characterized in that, It also includes sealing devices; The sealing device includes an upper frame, a bottom frame, an upper sealing ring, a bottom sealing ring, and an installation assembly. The upper frame is fixedly installed on the furnace body and close to the furnace opening. The bottom frame is fixedly installed on the lifting platform. A sealing groove is provided in the bottom frame. The bottom sealing ring is disposed in the sealing groove. The upper sealing ring is disposed in the sealing groove and contacts the bottom sealing ring. The installation assembly is disposed on the bottom frame.

2. The sealing structure of the ITO target sintering furnace as described in claim 1, characterized in that, The mounting assembly includes a mounting frame and a limiting member. The mounting frame is mounted on the bottom frame via the limiting member and is located within the sealing groove. The mounting frame is fixedly connected to the sealing bottom ring.

3. The sealing structure of the ITO target sintering furnace as described in claim 2, characterized in that, The limiting component includes a limiting rod and a fixing block. The limiting rod is threaded into the bottom frame, and one end of the limiting rod abuts against the mounting frame. The fixing block is fixedly installed on the limiting rod and is located at the end of the limiting rod away from the mounting frame.

4. The sealing structure of the ITO target sintering furnace as described in claim 1, characterized in that, The lifting device includes a lifting cylinder, a mounting block, and a guide assembly. The lifting cylinder is mounted on the base plate; the mounting block is fixedly mounted on the lifting platform and fixedly connected to the output end of the lifting cylinder; the guide assembly is disposed on the base plate.

5. The sealing structure of the ITO target sintering furnace as described in claim 4, characterized in that, The guiding assembly includes a guide seat and a guide rod. The guide seat is fixedly installed on the lifting platform; the guide rod is fixedly installed on the base plate and slides in cooperation with the guide seat.

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