A precise marble platform for full-automatic special-shaped scribing processing

Abstract

The utility model belongs to the technical field of processing platform, concretely relates to a precision marble platform for full -automatic special -shaped slicing processing, including X -axis, Y -axis and vacuum adsorption platform, X -axis includes X -axis marble base, X -axis linear guide rail, X -axis slide and X -axis linear motor, Y -axis includes Y -axis marble base, Y -axis linear guide rail, Y -axis slide and Y -axis linear motor, X -axis marble base is gantry marble base, and the gantry marble base is fixed on Y -axis marble base, and the perpendicularity of Y -axis and X -axis is less than 5um, and the vacuum adsorption platform is fixed on Y -axis slide, overcome the deficiency of prior art, solve the problem of special -shaped slicing efficiency and precision, easy to maintain, and the response speed of platform can be improved greatly.

Description

Technical Field

[0001] This utility model belongs to the field of processing platform technology, specifically relating to a precision marble platform for fully automatic irregular dicing processing. Background Technology

[0002] A laser scribing machine is a precision device that uses a high-energy-density laser beam to cut or scribe materials. Its core principle is to use laser energy to locally melt, vaporize, or induce stress fracture in the material, thereby achieving high-precision processing. Working principles and technical approaches include: Thermal stress-controlled fracture technology: This technology uses laser to locally heat the material surface, creating a temperature gradient that induces thermal stress, causing the material to fracture along a predetermined path. This technology reduces the heat-affected zone and is suitable for cutting brittle materials such as silicon wafers and ceramics. Laser melting and vaporization: Traditional laser scribing machines directly focus a laser beam to instantly melt and vaporize the material, suitable for materials such as metals and glass. For example, fiber laser scribing machines use a 1064nm wavelength laser, achieving a cutting line width ≤30μm and an accuracy of ±10μm. Stealth cutting technology: For example, Han's Laser's LED stealth scribing machine uses an infrared ultrafast laser focused into the material for modified cutting, avoiding surface damage, and is suitable for high-end applications such as sapphire substrates.

[0003] However, with the rapid development of consumer electronics in recent years, China has become the largest consumer of electronic products, and its consumption is still growing rapidly every year. Laser scribing machine is the most important process in the manufacturing of electronic products, and the precision scribing platform is the most core component of the scribing machine. Traditional platforms cannot scribing irregular shapes and have a slow response speed. Therefore, there is an urgent need to develop a precision marble platform with high precision and fast response speed to solve the problems of efficiency and accuracy in scribing irregular shapes. Utility Model Content

[0004] The purpose of this invention is to provide a precision marble platform for fully automatic irregular-shaped dicing processing, which overcomes the shortcomings of the prior art, solves the problems of dicing efficiency and accuracy of irregular shapes, is easy to maintain, and greatly improves the platform's response speed.

[0005] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0006] A precision marble platform for fully automated irregular-shaped dicing processing includes an X-axis, a Y-axis, and a vacuum adsorption platform. The X-axis includes an X-axis marble base, X-axis linear guides, an X-axis slide plate, and an X-axis linear motor. Multiple X-axis linear guides are horizontally mounted on the X-axis marble base along the X-axis direction. The X-axis slide plate is fixed to the X-axis linear guides and slides along them. The X-axis linear motor is fixed to the X-axis marble base and connected to the X-axis slide plate to control its movement. The Y-axis includes a Y-axis marble base, Y-axis linear guides, a Y-axis slide plate, and a Y-axis linear motor. Multiple Y-axis linear guides are horizontally mounted on the Y-axis marble base along the Y-axis direction. The Y-axis slide plate is fixed to the Y-axis linear guides and slides along them. The Y-axis linear motor is fixed to the Y-axis marble base and connected to the Y-axis slide plate to control its movement. The X-axis marble base is a gantry marble base, fixed to the Y-axis marble base. The perpendicularity between the Y-axis and X-axis is less than 5 μm. The vacuum adsorption platform is fixed to the Y-axis slide plate.

[0007] Furthermore, the X-axis also includes an X-axis grating ruler, an X-axis limit switch, an X-axis dust cover, and an X-axis cable chain. The X-axis grating ruler is mounted on the X-axis marble base and is parallel to the X-axis linear guide rail. The X-axis limit switch is located at both ends of the X-axis marble base. There are two X-axis dust covers, which are respectively mounted at both ends of the Y-axis slide plate.

[0008] Furthermore, the Y-axis also includes a Y-axis grating ruler, a Y-axis limit switch, a Y-axis dust cover, and a Y-axis cable chain. The Y-axis grating ruler is installed on the Y-axis marble base and is parallel to the Y-axis linear guide rail. The Y-axis limit switch is located at both ends of the Y-axis marble base. There are two Y-axis dust covers, which are installed at both ends of the Y-axis slide plate.

[0009] Furthermore, the X-axis linear motor is a linear motor, which includes a linear motor stator and a linear motor mover. The linear motor stator on the X-axis linear motor is fixed on the X-axis marble base, and the linear motor mover on the X-axis linear motor is fixed on the X-axis slide plate.

[0010] Furthermore, the X-axis grating ruler and the linear motor stator on the X-axis linear motor constitute a fully closed-loop system.

[0011] Furthermore, the Y-axis linear motor is a linear motor, with the stator of the Y-axis linear motor fixed on the Y-axis marble base, and the mover of the Y-axis linear motor fixed on the Y-axis slide plate.

[0012] Furthermore, the Y-axis grating ruler and the linear motor stator on the Y-axis linear motor constitute a fully closed-loop system.

[0013] Compared with the prior art, this utility model has the following advantages:

[0014] 1. Both the Y-axis and X-axis use marble bases. The marble bases can reduce the friction of the platform, increase the acceleration of the platform, and reduce vibration.

[0015] 2. Both the Y-axis and X-axis slides are driven by high-precision linear guides and linear motors, which can improve the straightness of the platform and thus improve the cutting quality.

[0016] 3. Irregularly shaped dicing blades are fixed using a vacuum adsorption platform, which can significantly increase the dicing area and reduce costs;

[0017] 4. The X-axis marble base is a gantry marble base, which is fixed on the Y-axis marble base to form a flying optical path, which can solve the problem of irregularly shaped dicing. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a precision marble platform used for fully automated irregular-shaped dicing.

[0019] Figure 2 This is a schematic diagram of a precision marble platform in a partially transparent state for fully automated irregular-shaped dicing processing.

[0020] Figure 3 This is a schematic diagram of the internal structure of a precision marble platform used for fully automated irregular-shaped dicing.

[0021] The markings in the diagram are as follows: 11. X-axis marble base, 12. X-axis linear guide, 13. X-axis slide plate, 14. X-axis linear motor, 15. X-axis grating ruler, 16. X-axis limit switch, 17. X-axis dust cover, 18. X-axis cable chain, 21. Y-axis marble base, 22. Y-axis linear guide, 23. Y-axis slide plate, 24. Y-axis linear motor, 25. Y-axis grating ruler, 26. Y-axis limit switch, 27. Y-axis dust cover, 28. Y-axis cable chain, 3. Vacuum adsorption platform. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] As shown in the figure, the precision marble platform for fully automatic irregular dicing processing described in this utility model includes a Y-axis, an X-axis, and a vacuum adsorption platform 3. The Y-axis is located at the bottom and designed in a horizontal direction, the X-axis is located at the top and designed in a vertical direction, and the vacuum adsorption platform is located above the Y-axis.

[0024] The X-axis includes an X-axis marble base 11, an X-axis linear guide rail 12, an X-axis slide plate 13, an X-axis linear motor 14, an X-axis grating ruler 15, an X-axis limit switch 16, an X-axis dust cover 17, and an X-axis drag chain 18. The X-axis linear motor is a linear motor, which includes a linear motor stator and a linear motor mover. The linear motor stator on the X-axis linear motor is fixed on the X-axis marble base, and the linear motor mover on the X-axis linear motor is fixed on the X-axis slide plate. The X-axis grating ruler and the linear motor stator on the X-axis linear motor form a fully closed-loop system with a repeatability accuracy of up to 5µm, a straightness of less than 5µm, and a dynamic following error of less than 5µm.

[0025] The Y-axis includes a Y-axis marble base 21, a Y-axis linear guide rail 22, a Y-axis slide plate 23, a Y-axis linear motor 24, a Y-axis grating ruler 25, a Y-axis limit switch 26, a Y-axis dust cover 27, and a Y-axis drag chain 28. The Y-axis linear motor is a linear motor, which includes a linear motor stator and a linear motor mover. The linear motor stator on the Y-axis linear motor is fixed on the Y-axis marble base, and the linear motor mover on the Y-axis linear motor is fixed on the Y-axis slide plate. The Y-axis grating ruler and the linear motor stator on the Y-axis linear motor form a fully closed-loop system with a repeatability accuracy of up to 5µm, a straightness of less than 5µm, and a dynamic following error of less than 5µm.

[0026] The X-axis marble base is a gantry marble base, which is fixed on the Y-axis marble base. The perpendicularity between the Y-axis and the X-axis is less than 5um, thus ensuring that the roundness error of the irregular scribe is less than 10um.

[0027] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A precision marble platform for fully automated irregular-shaped dicing processing, comprising an X-axis and a Y-axis, characterized in that: It also includes a vacuum adsorption platform. The X-axis comprises an X-axis marble base, an X-axis linear guide, an X-axis sliding plate, and an X-axis linear motor. Multiple X-axis linear guides are horizontally mounted on the X-axis marble base along the X-axis direction. The X-axis sliding plate is fixed to the X-axis linear guides and slides along them. The X-axis linear motor is fixed to the X-axis marble base and connected to the X-axis sliding plate to control its movement. The Y-axis comprises a Y-axis marble base, a Y-axis linear guide, a Y-axis sliding plate, and a Y-axis linear motor. Multiple Y-axis linear guides are horizontally mounted on the Y-axis marble base along the Y-axis direction. The Y-axis sliding plate is fixed to the Y-axis linear guides and slides along them. The Y-axis linear motor is fixed to the Y-axis marble base and connected to the Y-axis sliding plate to control its movement. The X-axis marble base is a gantry marble base, fixed to the Y-axis marble base. The perpendicularity between the Y-axis and X-axis is less than 5 μm. The vacuum adsorption platform is fixed to the Y-axis sliding plate.

2. The precision marble platform for fully automated irregular-shaped dicing processing according to claim 1, characterized in that: The X-axis also includes an X-axis grating ruler, an X-axis limit switch, an X-axis dust cover, and an X-axis cable chain. The X-axis grating ruler is installed on the X-axis marble base and is parallel to the X-axis linear guide rail. The X-axis limit switch is located at both ends of the X-axis marble base. There are two X-axis dust covers, which are respectively installed at both ends of the Y-axis slide plate.

3. A precision marble platform for fully automated irregular-shaped dicing processing according to claim 1, characterized in that: The Y-axis also includes a Y-axis grating ruler, a Y-axis limit switch, a Y-axis dust cover, and a Y-axis cable chain. The Y-axis grating ruler is installed on the Y-axis marble base and is parallel to the Y-axis linear guide rail. The Y-axis limit switch is located at both ends of the Y-axis marble base. There are two Y-axis dust covers, which are respectively installed at both ends of the Y-axis slide plate.

4. A precision marble platform for fully automated irregular-shaped dicing processing according to claim 2, characterized in that: The X-axis linear motor is a linear motor, which includes a linear motor stator and a linear motor mover. The linear motor stator of the X-axis linear motor is fixed on the X-axis marble base, and the linear motor mover of the X-axis linear motor is fixed on the X-axis slide plate.

5. A precision marble platform for fully automated irregular-shaped dicing processing according to claim 4, characterized in that: The X-axis grating ruler and the linear motor stator on the X-axis linear motor constitute a fully closed-loop system.

6. A precision marble platform for fully automated irregular-shaped dicing processing according to claim 3, characterized in that: The Y-axis linear motor is a linear motor. The stator of the Y-axis linear motor is fixed on the Y-axis marble base, and the mover of the Y-axis linear motor is fixed on the Y-axis slide plate.

7. A precision marble platform for fully automated irregular-shaped dicing processing according to claim 6, characterized in that: The Y-axis grating ruler and the linear motor stator on the Y-axis linear motor constitute a fully closed-loop system.

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