A radio frequency connector and semiconductor device processing apparatus

Abstract

The utility model provides a kind of radio frequency connector and the processing equipment of semiconductor device.The radio frequency connector includes socket and at least one spring.The socket includes the socket of accommodating radio frequency rod, wherein the inner wall of the socket is made of conductive material.The at least one spring is made of conductive material, and includes multiple radial arrangement elastic ring, wherein each the elastic ring is distributed along its circumferential direction in the socket, and respectively elastically contacts the inner wall of the radio frequency rod and the socket.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor process equipment, and in particular to a radio frequency connector and a semiconductor device processing equipment. Background Technology

[0002] In plasma-enhanced chemical vapor deposition (PECVD) equipment, the heating rods in the heating assembly are often connected to the subsequent circuitry via RF connectors. Therefore, RF connectors need to have characteristics such as fast insertion and removal, high current handling capacity, high impedance repeatability, high temperature resistance, and controllable insertion and removal force.

[0003] In existing technologies, traditional RF connectors use the core as the high potential and the outer shell as the grounding loop, with an insulating medium filling the middle. However, in existing devices, the heating rod requires a cooling structure and a support structure for the heating components. Due to mechanical and space limitations, conventional RF connectors cannot be used. Furthermore, during RF operation, it is difficult to ensure a completely tight connection between the components. When tiny gaps appear in the connections, existing RF connectors are prone to arcing and burning. In addition, existing RF connectors are more susceptible to deformation or oxidation at high temperatures, resulting in poor contact impedance repeatability and affecting process stability.

[0004] In order to overcome the above-mentioned defects in the existing technology, there is an urgent need in the field for a radio frequency connection technology to avoid abnormal discharge in the connection gap of non-elastic ends and reduce contact resistance. Utility Model Content

[0005] The following provides a brief overview of one or more aspects to offer a basic understanding of them. This overview is not an exhaustive summary of all conceived aspects, nor is it intended to identify key or decisive elements of all aspects, nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed descriptions that follow.

[0006] To overcome the aforementioned defects in the existing technology, this utility model provides an RF connector and a semiconductor device processing equipment. By setting elastic rings with elastic structures both inside and out to elastically contact the RF rod and the inner wall of the socket respectively, abnormal discharge occurs in the connection gap of the non-elastic end. Furthermore, by setting multiple elastic rings to connect the RF rod and the inner wall of the socket at multiple points, the contact resistance is reduced.

[0007] Specifically, according to a first aspect of the present invention, an RF connector includes a socket and at least one spring. The socket includes a jack for receiving an RF rod, wherein the inner wall of the jack is made of a conductive material. The at least one spring is made of a conductive material and includes a plurality of radially arranged elastic coils, wherein each of the elastic coils is circumferentially distributed within the jack and elastically contacts the RF rod and the inner wall of the jack, respectively.

[0008] Furthermore, in some embodiments of this utility model, the inner wall of the insertion hole is provided with at least one circumferentially extending groove for accommodating the at least one spring, increasing the contact area and / or the number of contact points with the at least one spring, and restricting its axial displacement.

[0009] Furthermore, in some embodiments of this utility model, the cross-section of the groove along the radial direction of the insertion hole is rectangular, so as to contact the spring via its upper surface, lower surface and side surface, or the cross-section of the groove along the radial direction of the insertion hole is arc-shaped, so as to fit and contact the spring, thereby increasing the contact area with the spring.

[0010] Furthermore, in some embodiments of this utility model, the radio frequency connector includes 1 to 5 springs, wherein each spring is arranged along the axial direction of the socket, and the inner wall of the socket is provided with 1 to 5 grooves to accommodate a corresponding spring.

[0011] Furthermore, in some embodiments of this utility model, the outer surface of the elastic ring and / or the inner wall of the insertion hole are provided with a conductive protective layer.

[0012] Furthermore, in some embodiments of this utility model, the conductive protective layer is a composite layered structure composed of a 5μm nickel layer and a 1μm gold layer.

[0013] Furthermore, in some embodiments of this utility model, the spring is made of beryllium copper or stainless steel.

[0014] Furthermore, in some embodiments of this utility model, the spring includes 40 to 60 elastic coils arranged radially.

[0015] Furthermore, in some embodiments of this utility model, the spring is ring-shaped, with an inner diameter smaller than the diameter of the radio frequency rod to elastically contact the radio frequency rod, and / or its outer diameter is larger than the diameter of the socket to elastically contact the inner wall of the socket.

[0016] Furthermore, according to a second aspect of the present invention, a semiconductor device processing apparatus includes a process chamber, an RF power supply, and an RF connector as described in any of the first aspects of the present invention. The process chamber contains a heating plate, wherein an RF electrode is integrated within the plate body of the heating plate, and an RF rod for connecting the RF electrode is provided on the handle of the heating plate. The RF power supply provides an RF voltage. One end of the RF connector is connected to the RF power supply, and the other end is elastically connected to the RF rod via at least one spring within a socket of its receptacle. Attached Figure Description

[0017] The above-described features and advantages of this invention can be better understood after reading the following detailed description of the embodiments of this disclosure in conjunction with the accompanying drawings. In the drawings, the components are not necessarily drawn to scale, and components having similar related characteristics or features may have the same or similar reference numerals.

[0018] Figure 1 The structure of a radio frequency connector in the prior art is shown.

[0019] Figure 2 A schematic diagram of a semiconductor device processing apparatus according to some embodiments of the present invention is shown.

[0020] Figure 3 The present invention illustrates a radio frequency connector structure according to some embodiments thereof.

[0021] Figure 4 A spring structure in a radio frequency connector provided according to some embodiments of the present invention is shown.

[0022] Figure 5 A comparison graph showing the temperature rise over time of a radio frequency connector provided according to some embodiments of the present invention and a radio frequency connector in the prior art under the same 10A current is shown.

[0023] Figure 6 A comparison graph showing the temperature rise over time of a radio frequency connector provided according to some embodiments of the present invention and a radio frequency connector in the prior art under the same 15A current is shown.

[0024] Figure label:

[0025] Heating plate 1

[0026] RF rod 2

[0027] RF connector 3

[0028] Socket 4

[0029] Spring 5

[0030] Elastic band 6

[0031] Groove 7 Detailed Implementation

[0032] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Although the description of this utility model will be presented in conjunction with preferred embodiments, this does not mean that the features of this utility model are limited to this embodiment. On the contrary, the purpose of describing the utility model in conjunction with the embodiments is to cover other options or modifications that may be derived based on the claims of this utility model. To provide a deep understanding of this utility model, many specific details will be included in the following description. This utility model may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this utility model, some specific details will be omitted in the description.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood as the orientations shown in the relevant paragraphs and accompanying drawings. These relative terms are for illustrative purposes only and do not imply that the described device must be manufactured or operated in a specific orientation; therefore, they should not be construed as limiting the scope of this invention.

[0035] It is understood that although terms such as "first," "second," and "third" may be used herein to describe various components, regions, layers, and / or parts, these components, regions, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers, and / or parts. Therefore, the first component, region, layer, and / or part discussed below may be referred to as the second component, region, layer, and / or part without departing from some embodiments of this utility model.

[0036] As described above, in the prior art, the RF connector uses the middle core as the high potential, the outer shell as the grounding loop, and fills the middle with an insulating medium.

[0037] Please refer to the following first. Figure 1 , Figure 1The structure of a radio frequency connector in the prior art is shown.

[0038] like Figure 1 As shown, in existing RF connectors, each spring contacts the heating rod via elastic contact. However, because the spring is machined from a straight piece of metal into an arc shape, it's difficult to ensure that the arc's curvature perfectly matches the curvature of the connector's inner wall. Therefore, it's challenging to guarantee contact between the upper and lower annular metal discs and the connector's inner wall. Furthermore, when the heating rod is subjected to lateral force, gaps can easily form between the upper and lower metal discs and the connector's inner wall. Due to the skin effect, high-frequency electrical activity is more prone to localized voltage increases when the contact area decreases. When the voltage exceeds the air breakdown threshold, breakdown discharge occurs, leading to increased temperature and device damage. Therefore, existing RF connectors are prone to gaps at the connection points, resulting in arcing and abnormal discharge.

[0039] To overcome the aforementioned defects in the existing technology, this utility model provides an RF connector and a semiconductor device processing equipment. By setting elastic rings with elastic structures both inside and out to elastically contact the RF rod and the inner wall of the socket respectively, abnormal discharge occurs in the connection gap of the non-elastic end. Furthermore, by setting multiple elastic rings to connect the RF rod and the inner wall of the socket at multiple points, the contact resistance is reduced.

[0040] In some non-limiting embodiments, the radio frequency connector provided in the first aspect of the present invention can be configured in the processing equipment for the semiconductor device provided in the second aspect of the present invention.

[0041] Please refer to Figure 2 , Figure 2 A schematic diagram of a semiconductor device processing apparatus according to some embodiments of the present invention is shown.

[0042] like Figure 2 As shown, the semiconductor device processing equipment includes a process chamber, an RF rod 2, an RF power supply (not shown), and an RF connector 3 provided in the first aspect of this invention. A heating plate 1 is disposed inside the process chamber 1. The handle of the heating plate 1 is provided with an RF rod 2 for connecting RF electrodes, thereby integrating RF electrodes inside the plate to achieve a heating effect. The RF power supply provides the RF voltage. One end of the RF connector 3 is connected to the aforementioned RF power supply, and the other end is elastically connected to the RF rod 2 via at least one spring within the socket of its receptacle.

[0043] For the specific structure of the RF connector in this utility model, please refer to [reference needed]. Figure 3 and Figure 4 , Figure 3 The present invention illustrates a radio frequency connector structure according to some embodiments thereof. Figure 4A spring structure in a radio frequency connector provided according to some embodiments of the present invention is shown.

[0044] like Figure 3 and Figure 4 As shown, the RF connector includes a socket 4 and at least one spring 5. The socket 4 includes a recess for accommodating an RF rod 2. The inner wall of the recess is made of a conductive material to achieve electrical contact between the RF rod and the socket. The at least one spring 5 is also made of a conductive material and includes multiple radially arranged elastic coils 6, each elastic coil 6 distributed circumferentially within the recess and elastically contacting the RF rod 2 and the inner wall of the recess, respectively. This spring contact structure utilizing elastic coils 6 achieves tight contact and a high-density layout of contact points. Simultaneously, the synergistic effect of multiple springs 5 ​​improves the contact uniformity of the RF connector 3, thereby preventing abnormal discharge in the connection gap at the non-elastic ends, increasing the effective contact area at the contact points, and reducing contact resistance.

[0045] Furthermore, the inner wall of the socket is provided with at least one circumferentially extending groove 7 to accommodate at least one spring 5. This arrangement can increase the contact area and / or the number of contact points between the groove 7 and at least one spring 5, and limit its axial displacement.

[0046] Please continue to refer to this. Figure 3 ,like Figure 3 As shown, the groove 7 has a rectangular cross-section along the radial direction of the insertion hole, so that the spring 5 is contacted through its upper surface, lower surface and side surface. This increases the effective contact area by increasing the number of contact points, thereby reducing the contact resistance and reducing the heat generation at the connection under the same current conditions.

[0047] Alternatively, in other embodiments, the cross-section of the groove 7 along the radial direction of the insertion hole may also be arc-shaped, thereby making closer contact with the spring 5 to increase the contact area between the groove 7 and the spring 5, and similarly achieving the effect of reducing contact resistance and reducing heat generation at the connection under the same current conditions.

[0048] Optionally, the RF connector may include 1 to 5 springs 5, wherein each spring 5 is arranged along the axial direction of the socket. Correspondingly, the inner wall of the socket is also provided with 1 to 5 grooves 7 to accommodate one corresponding spring 5. This invention increases the number of contact points by increasing the number of springs 5, thereby increasing the effective contact area and effectively reducing contact resistance. Preferably, the RF connector may be provided with 3 springs and corresponding grooves.

[0049] Furthermore, in some embodiments of this invention, a conductive protective layer is provided on the outer surface of the elastic ring 6 and / or the inner wall of the socket. This conductive protective layer serves two purposes: firstly, to prevent oxidation of the spring 5 and the inner wall of the socket, and secondly, to achieve better friction resistance.

[0050] Furthermore, in some embodiments of this invention, the conductive protective layer is a composite layered structure composed of a 5μm nickel layer and a 1μm gold layer.

[0051] Optionally, the spring 5 can be made of beryllium copper or stainless steel (specification 316L).

[0052] Optionally, the spring 5 includes 40 to 60 radially arranged elastic coils 6. This invention increases the number of contact points by increasing the number of elastic coils 6, thereby increasing the effective contact area and reducing the contact resistance. Preferably, the number of radially arranged elastic coils in the spring can be 50.

[0053] Please continue to refer to this. Figure 4 ,like Figure 4 As shown, spring 5 is ring-shaped, with an inner diameter smaller than the diameter of RF rod 2, to elastically contact RF rod 2. Furthermore, the outer diameter of spring 5 is larger than the diameter of the socket, to elastically contact the inner wall of the socket. This arrangement effectively avoids gaps between the RF connector 3, RF rod 2, and the inner wall of the socket, thus reducing the likelihood of abnormal discharge. For example, when the diameter of RF rod 2 in this invention is 4mm, the inner diameter of spring 5 can be 3.7-3.9mm, thereby utilizing the elastic deformation of spring 5 to tightly contact RF rod 2 and the inner wall of the socket. By adjusting the inner diameter and number of springs 5 ​​and the number of elastic coils 6, this invention can quantitatively adjust the insertion and extraction force of RF rod 2 in RF connector 3, thereby reducing damage to RF rod 2 caused by insertion and extraction.

[0054] Figure 5 and Figure 6 The graphs show a comparison of the temperature rise over time of the RF connector provided according to some embodiments of the present invention and the RF connector in the prior art under the same currents of 10A and 15A.

[0055] Please refer to Figure 5 and Figure 6 As shown in the diagram, regardless of whether the operating current is 10A or 15A, the temperature of the RF connector increases over time. However, the temperature of the RF connector 3 in this invention remains lower than that of the RF connector in the prior art. Measurements show that under a 10A current condition, the temperature of the RF connector 3 in this invention eventually stabilizes at 87.8℃, while the temperature of the RF connector in the prior art eventually stabilizes at 96.5℃. Similarly, in... Figure 6Under the 15A current condition shown, the temperature 3 of the RF connector in this invention eventually stabilized at 164.4℃, while the temperature of the RF connector in the prior art eventually stabilized at 194.5℃. The RF connector structure in this invention can effectively reduce contact resistance, thereby reducing circuit heating and effectively avoiding high-temperature deformation or oxidation of the connector.

[0056] Furthermore, experimental measurements show that, under the condition that the contact resistance of existing RF connectors is 2.76Ω, the contact resistance of the RF connector 3 in this invention is only 0.19Ω. The structure of the RF connector 3 in this invention can effectively reduce the contact resistance.

[0057] Furthermore, since the RF connector in this invention has roughly the same external dimensions as existing connectors, the RF connector in this invention can directly replace existing connectors on existing equipment.

[0058] In summary, the RF connector and semiconductor device processing equipment provided by this utility model can both make elastic contact between the RF rod and the inner wall of the socket by setting elastic rings with elastic structures inside and out, thereby avoiding abnormal discharge in the connection gap of the non-elastic end. Furthermore, by setting multiple elastic rings, the RF rod and the inner wall of the socket can be connected at multiple points, thereby reducing contact resistance.

[0059] Although the methods described above are illustrated and depicted as a series of actions for the sake of simplicity, it should be understood and appreciated that these methods are not limited by the order of the actions, as some actions may occur in a different order and / or concurrently with other actions from the illustrations and descriptions herein or not illustrated and described herein but which may be understood by those skilled in the art, according to one or more embodiments.

[0060] The prior description of this disclosure is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to this disclosure will be apparent to those skilled in the art, and the general principles defined herein may be applied to other variations without departing from the spirit or scope of this disclosure. Therefore, this disclosure is not intended to be limited to the examples and designs described herein, but should be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A radio frequency connector, characterized in that, include: A socket, comprising a jack for receiving an RF rod, wherein the inner wall of the jack is made of a conductive material; and At least one spring, made of a conductive material, includes a plurality of radially arranged elastic coils, wherein each of the elastic coils is distributed circumferentially within the socket and elastically contacts the radio frequency rod and the inner wall of the socket, respectively.

2. The radio frequency connector as described in claim 1, characterized in that, The inner wall of the insertion hole is provided with at least one circumferentially extending groove for accommodating the at least one spring, increasing the contact area and / or the number of contact points with the at least one spring, and restricting its axial displacement.

3. The radio frequency connector as described in claim 2, characterized in that, The groove has a rectangular cross-section along the radial direction of the insertion hole, so that it contacts the spring via its upper surface, lower surface, and side surface, or The groove has an arc-shaped cross-section along the radial direction of the insertion hole, which fits in close contact with the spring to increase the contact area with the spring.

4. The radio frequency connector as described in claim 2, characterized in that, The radio frequency connector includes 1 to 5 springs, wherein each spring is arranged along the axial direction of the socket, and the inner wall of the socket is provided with 1 to 5 grooves to accommodate a corresponding spring.

5. The RF connector as described in claim 1, characterized in that, The outer surface of the elastic ring and / or the inner wall of the insertion hole are provided with a conductive protective layer.

6. The radio frequency connector as described in claim 5, characterized in that, The conductive protective layer is a composite layered structure consisting of a 5μm nickel layer and a 1μm gold layer.

7. The RF connector as claimed in claim 1, characterized in that, The spring is made of beryllium copper or stainless steel.

8. The radio frequency connector as claimed in claim 1, characterized in that, The spring includes 40 to 60 elastic coils arranged radially.

9. The radio frequency connector as claimed in claim 1, characterized in that, The spring is ring-shaped, with its inner diameter being smaller than the diameter of the radio frequency rod to elastically contact the radio frequency rod, and / or its outer diameter being larger than the diameter of the socket to elastically contact the inner wall of the socket.

10. A semiconductor device processing apparatus, characterized in that, include: The process chamber contains a heating plate, wherein the heating plate has an integrated radio frequency electrode inside its body, and the handle of the heating plate has a radio frequency rod for connecting the radio frequency electrode. RF power supply, used to provide RF voltage; and The RF connector as described in any one of claims 1 to 9 has one end connected to the RF power supply, and the other end resiliently connected to the RF rod via at least one spring within the socket of its receptacle.

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