A reactor

Abstract

This utility model provides a reactor, relating to the field of solar cell processing technology. The reactor includes a furnace body, a heat dissipation structure, and a heater. A reaction chamber is formed inside the furnace body. The heat dissipation structure dissipates heat from the reaction chamber. The heater is located outside the furnace body and spaced apart from the furnace body to form a heat dissipation channel. In this embodiment, the reactor is equipped with a heat dissipation structure. When the furnace body is operating, solar cells are placed inside the reaction chamber, the heater heats the reaction chamber, and the heat dissipation structure stops operating. When the furnace body stops operating, the solar cells are removed from the reaction chamber, the heater stops operating, the heat dissipation structure dissipates heat from the furnace body shell, and the furnace body shell then dissipates heat to the reaction chamber. This results in high temperature adjustment efficiency and high processing efficiency of solar cells.

Description

Technical Field

[0001] This utility model relates to the field of solar cell processing technology, and in particular to a reaction furnace. Background Technology

[0002] Different processing techniques for solar cells require different processing temperatures. Therefore, when a solar cell completes one process and moves to the next, the temperature in the furnace structure needs to be adjusted promptly to the required processing temperature for that next process. In related technologies, the temperature adjustment efficiency of the furnace structure is too low, thus affecting the processing efficiency of solar cells.

[0003] In view of this, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0004] To address the problem of low temperature adjustment efficiency in furnace structures, which affects the processing efficiency of solar cells, the present invention aims to provide a reactor with high temperature adjustment efficiency and high processing efficiency of solar cells.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] The first aspect of this utility model provides a reactor, comprising:

[0007] The furnace body, which forms a reaction chamber;

[0008] A heat dissipation structure is used to dissipate heat from the reaction chamber;

[0009] The heater is located outside the furnace body and spaced apart from the furnace body to form a heat dissipation channel with the furnace body.

[0010] Optionally, the heat dissipation structure includes a fan, a radiator, and ventilation pipes. Both ends of the heat dissipation channel are connected to ventilation pipes, the ventilation pipes are connected to the radiator, and the radiator is connected to the fan.

[0011] Optionally, the heat dissipation structure also includes an insulation layer, which is located on the outer periphery of the ventilation duct.

[0012] Optionally, the heat dissipation structure also includes a switch and a door, the switch being connected to the door to control the door to open or close; when the door is closed, the door is located between the radiator and the ventilation duct.

[0013] Optionally, the ventilation duct is a multi-branch ventilation duct, with the fan connected to each branch ventilation duct and configured in a one-to-one correspondence.

[0014] Optionally, the heat dissipation structure includes a cooling device, a heat-conducting component, and a lifting device. There is at least one heat-conducting component, and the at least one heat-conducting component is disposed at intervals between each other in the cooling device. The lifting device is connected to the cooling device to drive the cooling device to move up and down, and the cooling device drives the heat-conducting component to move synchronously.

[0015] Optionally, the heat dissipation structure includes a cooling device, a heat-conducting component, and a telescopic device. There is at least one heat-conducting component, and the at least one heat-conducting component is disposed at intervals between each other in the cooling device. The telescopic device is disposed between the cooling device and the heat-conducting component to drive the heat-conducting component to extend or retract into the heat dissipation channel.

[0016] Optionally, the heat-conducting element is a copper rod or an aluminum rod.

[0017] A second aspect of this utility model provides a reactor, comprising:

[0018] The furnace body, which forms a reaction chamber;

[0019] A heat dissipation structure is used to dissipate heat from the reaction chamber;

[0020] The heat dissipation structure includes a fan, which is located at one end of the furnace body and connected to the reaction chamber through an air inlet channel.

[0021] Alternatively, the heat dissipation structure includes a fan and a vacuum device, with the fan located at one end of the furnace body and connected to the reaction chamber through an air inlet channel;

[0022] The vacuum device is located at the other end of the furnace body and is connected to the reaction chamber through the air outlet channel.

[0023] Optionally, it also includes a heater, which is located outside the furnace body and spaced apart from the furnace body to form a heat dissipation channel with the furnace body.

[0024] Compared with the prior art, this utility model brings the following technical effects:

[0025] In this embodiment of the reactor, when the furnace is operating, solar cells are placed inside the reaction chamber, the heater heats the reaction chamber, and the heat dissipation structure stops working. When the furnace stops operating, the solar cells are removed from the reaction chamber, the heater stops working, and the heat dissipation structure dissipates heat to the furnace shell through heat dissipation channels, and then heats the reaction chamber from the furnace shell. This method of heat dissipation to the reaction chamber results in high temperature regulation efficiency and high processing efficiency of the solar cells. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 A schematic diagram of the structure of a reactor according to an embodiment of the present invention is shown;

[0028] Figure 2 A schematic diagram of the structure of a reactor according to an embodiment of the present invention is shown;

[0029] Figure 3 A schematic diagram of the structure of a reactor according to an embodiment of the present invention is shown;

[0030] Figure 4 A schematic diagram of the structure of a reactor according to an embodiment of the present invention is shown;

[0031] Figure 5 A schematic diagram of the structure of a reactor according to an embodiment of the present invention is shown;

[0032] Figure 6 A schematic diagram of the structure of a reactor according to one embodiment of the present invention is shown.

[0033] Explanation of key component symbols:

[0034] 10-Furnace body; 11-Reaction chamber; 20-Heater;

[0035] 31-Fan; 32-Vacuum device; 33-Air inlet channel; 34-Air outlet channel;

[0036] 41-Fan; 42-Heat dissipation channel; 43-Radiator; 44-Ventilation duct; 45-Insulation layer; 46-Switch device; 47-Door; 48-Branch ventilation duct;

[0037] 51-Cooling device; 52-Heat-conducting component; 53-Lifting device; 54-Telescopic device. Detailed Implementation

[0038] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0039] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0040] With the continuous development of the photovoltaic industry, current photovoltaic processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD all require reactions to take place within a furnace structure. Specifically, solar cells (silicon wafers or crystals) are mounted in a specific boat (carrier) and fed into the reaction chamber of the furnace structure for processing. By heating the reaction chamber and introducing specific reaction gases, specific processes such as coating, diffusion, oxidation, and thin film deposition are achieved on the silicon wafers or crystals. As the photovoltaic industry continues to develop, the requirements for equipment are constantly increasing, and process routes are also constantly being updated.

[0041] Different processing techniques for solar cells require different processing temperatures. Therefore, when a solar cell completes one process and moves to the next, the temperature in the furnace structure needs to be adjusted promptly to the required processing temperature for that next process. In related technologies, the temperature adjustment efficiency of the furnace structure is too low, thus affecting the processing efficiency of solar cells.

[0042] Please see Figures 2-6 This invention provides a reactor, which includes a furnace body 10, a heater 20, and a heat dissipation structure. A reaction chamber 11 is formed within the furnace body 10, which is used to house solar cells. The heater 20 is located outside the furnace body 10 and spaced apart from it to form a heat dissipation channel 42. The heat dissipation structure is used to cool the reaction chamber 11.

[0043] It should be noted that the reactor can be a double-layered cylindrical or near-cylindrical furnace body structure. The furnace body 10 can be an inner furnace body, and the outer furnace body is set on the outer layer of the furnace body 10. The inner wall of the outer furnace body can be provided with multiple heaters 20, so that the multiple heaters 20 on the inner wall of the outer furnace body can provide heat to the furnace body 10, thereby providing the temperature required for processing the battery cells in the reaction chamber 11 of the furnace body 10.

[0044] In this embodiment, when the furnace body 10 is operating, the solar cells are placed into the reaction chamber 11, the heater 20 heats the reaction chamber 11, and the heat dissipation structure stops working. When the furnace body 10 stops working, the solar cells are removed from the reaction chamber 11, the heater 20 stops working, and the heat dissipation structure dissipates heat to the shell of the furnace body 10 through the heat dissipation channel 42, and then dissipates heat from the shell of the furnace body 10 to the reaction chamber 11. In this way, the reaction chamber 11 is cooled, but the heater 20 is not cooled, resulting in high temperature adjustment efficiency and high processing efficiency of the solar cells.

[0045] The heater 20 heats the furnace body 10 through its own thermal radiation, and the furnace body 10 then heats the reaction chamber 11. In this way, the heater 20 and the furnace body 10 can be independent of each other. When the heat dissipation structure dissipates heat to the reaction chamber 11 of the furnace body 10, it can concentrate the heat dissipation on the reaction chamber 11 without cooling the heater 20, thus further improving the heat dissipation efficiency of the heat dissipation mechanism.

[0046] For example, the heater 20 is a resistance wire. The resistance wire can achieve both non-contact heating with the furnace body 10 and heating of the reaction chamber 11 inside the furnace body 10.

[0047] It should be noted that both the furnace body 10 and the heater 20 are fixed by a frame (not shown in the figure). The heat dissipation structure is also fixed by a frame or flange.

[0048] Please see Figure 1 This embodiment provides a reactor, including a furnace body 10, a heater 20 and a heat dissipation structure, with a reaction chamber 11 formed inside the furnace body 10.

[0049] The heat dissipation structure includes a fan 31 and a vacuum device 32. The fan 31 is located at one end of the furnace body 10 and is connected to the reaction chamber 11 through the air inlet channel 33. The vacuum device 32 is located at the other end of the furnace body 10 and is connected to the reaction chamber 11 through the air outlet channel 34.

[0050] When the furnace body 10 stops working, the heater 20 stops working, and the blower 31 and vacuum device 32 work synchronously. Specifically, the blower 31 blows gas into the reaction chamber 11, while the vacuum device 32 evacuates air from the reaction chamber 11, creating a pressure gradient from high to low among the blower 31, the reaction chamber 11, and the vacuum device 32, thereby causing the hot air in the reaction chamber 11 to leave. The air outlet direction of the blower 31 and the air extraction direction of the vacuum device 32 are both... Figure 1 As indicated by the arrow in the diagram. In this embodiment, the reaction chamber 11 is used as an air duct. On the one hand, there is no need for indirect heat transfer through the furnace wall of the furnace body 10, resulting in good air cooling effect. On the other hand, there is no need to dissipate heat from the heater 20, resulting in more concentrated heat dissipation, which is suitable for scenarios where the reaction chamber 11 needs to be cooled quickly.

[0051] To prevent the gas blown by the heat dissipation structure from contaminating the reaction chamber 11 and thus affecting the cell processing quality, the gas blown by the heat dissipation structure can be a pure inert gas, such as nitrogen. The vacuum device 32 can be a vacuum pump or a vacuum generator.

[0052] In an alternative embodiment, the heat dissipation structure may consist only of a fan 31, which is located at one end of the furnace body 10 and is connected to the reaction chamber 11 through an air inlet channel 33.

[0053] In this embodiment, the heater 20 is spaced apart from the furnace body 10 and located outside the furnace body 10, forming a heat dissipation channel 42 between the heater 20 and the furnace body 10. The heat dissipation channel 42 allows for the addition of other forms of heat dissipation structures, which work in conjunction with the heat dissipation structure of this embodiment to further improve heat dissipation efficiency and increase the processing efficiency of the battery cells.

[0054] Please see Figure 2 and Figure 3 This embodiment provides a reactor, including a furnace body 10, a heater 20 and a heat dissipation structure. A reaction chamber 11 is formed inside the furnace body 10. The heater 20 is located outside the furnace body 10 and is spaced apart from the furnace body 10, forming a heat dissipation channel 42 with the furnace body 10.

[0055] The heat dissipation channel 42 is equipped with a fan 41 at both the input and output ends. One fan 41 can be configured to blow gas into the heat dissipation channel 42, while the other fan 41 draws air from the heat dissipation channel 42 to create a pressure difference within the heat dissipation channel 42, thereby increasing the air flow rate within the heat dissipation channel 42 and thus improving the air's ability to dissipate heat from the furnace body 10 and the heater 20.

[0056] For example, the fan 41 located at the upper end of the furnace body 10 transports gas, and the fan 41 located at the lower end of the furnace body 20 draws in gas. The direction of airflow in the heat dissipation channel 42 is shown in the figure. Figure 2 As indicated by the arrows. The fan 41 at the upper end of the furnace body 10 draws in gas, and the fan 41 at the lower end delivers gas. The airflow direction in the heat dissipation channel 42 is shown below. Figure 3 As indicated by the arrow. The upper and lower ends of the furnace body 10 are only joined together. Figure 2 and Figure 3 As shown.

[0057] The fan 41 is connected to the radiator 43, and the radiator 43 is connected to the ventilation duct 44. The radiator 43 dissipates heat from the air blown by the fan 41. The ventilation duct 44 is used to connect the radiator 43 and the heat dissipation channel 42.

[0058] The heat dissipation mechanism also includes an insulation layer 45, which is located around the ventilation duct 44. The insulation layer 45 minimizes the impact of high external temperatures on the ventilation duct 44. When the gas blown by the fan 41 passes through the ventilation duct 44, the temperature of the blown gas can remain constant, thus preventing the problem of excessively high temperature of the gas blown by the fan 41 affecting the cooling of the reaction chamber 11.

[0059] The heat dissipation mechanism also includes a switch device 46 and a door 47. The switch device 46 is connected to the door 47, and can move the door 47 to open or close it. The switch device 46 can be a mechanical touch switch, such as a toggle or handle, allowing manual control of the door 47 to open or close. Optionally, the switch device 46 can be a switch for a drive motor connected to the door 47, allowing the drive motor to open or close the door 47 by controlling the switch device 46.

[0060] Specifically, when door 47 is closed, door 47 moves between ventilation duct 44 and radiator 43 to prevent the fan 41 from blowing gas from radiator 43 into or out of ventilation duct 44. When door 47 is open, door 47 moves away from one end of ventilation duct 44, and fan 41 can normally deliver gas to ventilation duct 44 (see...). Figure 2 Alternatively, the gas in the heat dissipation pipes can reach the radiator 43 from the ventilation pipe 44 (see...). Figure 3 Furthermore, door 47 contains insulation material to effectively prevent the temperature inside ventilation duct 44 from being affected by the outside environment when door 47 is closed. The insulation material can be rock wool or glass wool.

[0061] Please see Figure 4 The ventilation duct 44 includes multiple branch ventilation ducts 48, and is equipped with the same number of fans 41 as the branch ventilation ducts 48. The input end of each branch ventilation duct 48 is connected to a fan 41, and the branch ventilation ducts 48 are distributed at multiple locations in the heat dissipation channel 42 formed between the furnace body 10 and the heater 20. In this way, multiple fans 41 simultaneously blow air into the heat dissipation channel 42 through multiple branch ventilation ducts 48, thereby further improving the heat dissipation efficiency of the heat dissipation structure.

[0062] Please see Figure 5 This embodiment provides a reactor, including a furnace body 10, a heater 20 and a heat dissipation structure. A reaction chamber 11 is formed inside the furnace body 10. The heater 20 is located outside the furnace body 10 and is arranged around the furnace body 10. A heat dissipation channel 42 is formed between the furnace body 10 and the heater 20.

[0063] The heat dissipation structure includes a cooling device 51, a heat-conducting component 52, and a lifting device 53. There are two heat-conducting components 52, which are spaced apart on the cooling device 51. The lifting device 53 is connected to the cooling component and is used to drive the cooling device 51 to rise and fall. The cooling device 51 drives the heat-conducting component 52 to rise and fall synchronously.

[0064] The two heat-conducting elements 52 are spaced apart from each other, with the distance between them just exceeding the width of the furnace body 10. This allows them to fall into the heat dissipation channel 42 during descent, precisely fitting against or approaching the outer wall of the furnace body 10. The heat dissipation channel 42 is formed between the furnace body 10 and the heater 20.

[0065] When cooling of the reaction chamber 11 is required, the lifting device 53 lowers the cooling device 51 so that the heat-conducting element 52 extends into the heat dissipation channel 42 and comes into contact with or near the outer wall of the furnace body 10 to cool the furnace body 10. After the furnace body 10 is cooled, the reaction chamber 11 is also cooled. When cooling of the reaction chamber 11 is not required, the lifting device 53 raises the cooling zone device to detach it from the heat-conducting channel and separate the heat-conducting element 52 from the outer wall of the furnace body 10.

[0066] The cooling device 51 can be a circulating water cooling system. The heat-conducting component 52 can be a copper rod or an aluminum rod to reduce losses during the cooling transfer process.

[0067] In some embodiments, the processing equipment may include a reactor, and the heat dissipation structure of the reactor may be applied to the processing equipment. Specifically, the heat dissipation structure may be distributed at multiple locations at the top of the processing equipment, blowing heat dissipation gas from top to bottom, so that the reaction chamber 11 of the processing equipment can reach the processing temperature required by the process more quickly.

[0068] Please see Figure 6 This embodiment provides a reactor, including a furnace body 10, a heater 20 and a heat dissipation structure. A reaction chamber 11 is formed inside the furnace body 10. The heater 20 is located outside the furnace body 10 and is spaced apart from the furnace body 10, and there is a heat dissipation channel 42 between the heater 20 and the furnace body 10.

[0069] The heat dissipation structure includes a cooling device 51, a heat-conducting element 52, and a telescopic device 54. There are two heat-conducting elements 52, which are connected to the cooling device 51, extend into the heat dissipation channel 42, and are connected to the furnace body 10. The telescopic device 54 is located between the cooling device 51 and the heat-conducting element 52, and is used to control the extension or retraction of the heat-conducting element 52.

[0070] When cooling of the reaction chamber 11 is required, the telescopic device 54 extends the heat-conducting element 52, allowing it to extend into the heat dissipation channel 42 and adhere to or approach the outer wall of the furnace body 10 to cool the furnace body 10. Cooling of the furnace body 10 then cools the reaction chamber 11. When cooling of the reaction chamber 11 is no longer required, the telescopic device 54 retracts the heat-conducting element 52, disengaging it from the heat dissipation channel 42 and increasing the distance between the heat-conducting element 52 and the outer wall of the furnace body 10.

[0071] In this way, the heat-conducting component 52 can achieve communication with the cooling device 51 and the furnace body 10 through its movement, and the cooling device 51 does not need to move. The load on the telescopic structure is low and the movement accuracy is higher.

[0072] Furthermore, the heat dissipation structure also includes a switching device, which is electrically connected to the telescopic device 54. The switching device controls the telescopic device 54 to realize the telescopic movement of the heat-conducting component 52.

[0073] Specifically, the switching device can be a mechanical button or key. The telescopic device 54 can be a hydraulic cylinder, a telescopic motor, or an electric push rod. The heat-conducting component 52 can be a copper rod or an aluminum rod, as copper or aluminum rods have good thermal conductivity and can reduce cooling losses during the transfer process.

[0074] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom still fall within the protection scope of this invention.

Claims

1. A reactor furnace characterized by, The application relates to a heat dissipation structure of a furnace body. The furnace body is provided with a reaction chamber. The heat dissipation structure comprises a fan, a radiator and a ventilation pipe. The ventilation pipe is connected with the radiator and the fan.

2. The reactor of claim 1, wherein The heat dissipation structure further comprises an insulation layer.

3. The reactor of claim 2, wherein The heat dissipation structure further comprises a switch device and a door.

4. The reactor of claim 2, wherein The switch device is connected with the door to control the opening and closing of the door.

5. The reactor of claim 2, wherein The door is located between the radiator and the ventilation pipe when the door is closed.

6. The reactor of claim 1, wherein The ventilation pipe is a plurality of branch ventilation pipes.

7. The reactor of claim 1, wherein The fan is connected with the branch ventilation pipes.

8. The reactor according to claim 6 or 7, characterized in that The heat dissipation structure comprises a cooling device, a heat conducting member and a lifting device.

9. A reactor furnace characterized by, The heat conducting member is at least one. The heat conducting member is spaced apart from each other. The lifting device is connected with the cooling device to drive the cooling device to move up and down. The cooling device drives the heat conducting member to move synchronously. The heat conducting member is a copper rod or an aluminum rod. The application relates to a heat dissipation structure of a furnace body.

10. The reactor of claim 9, wherein The furnace body is provided with a reaction chamber. The heat dissipation structure comprises a fan. The fan is arranged at one end of the furnace body and connected with the reaction chamber through an air inlet channel. The heat dissipation structure further comprises a vacuum device. The vacuum device is arranged at the other end of the furnace body and connected with the reaction chamber through an air outlet channel. The heat dissipation structure further comprises a heater. The heater is arranged outside the furnace body and spaced apart from the furnace body to form a heat dissipation channel.

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