A waste evacuation device and a processing apparatus

Abstract

This utility model provides a waste discharge device and processing equipment, relating to the field of furnace exhaust gas treatment technology. The waste discharge device includes: a cooling assembly comprising a housing and a cooling plate disposed within the housing; the housing is connected to an inlet pipe and an outlet pipe respectively; and cooling holes are formed on the cooling plate; a heat exchanger and / or a fan for cooling the high-temperature waste gas passing through the cooling assembly; in this embodiment, the cooling assembly, by providing a cooling plate within the housing, restricts the flow of high-temperature waste gas towards the outlet pipe, thereby increasing the contact time between the fan and / or the heat exchanger and the high-temperature waste gas within the cooling assembly, thus improving the cooling effect on the high-temperature waste gas.

Description

Technical Field

[0001] This utility model relates to the field of furnace exhaust gas treatment technology, and in particular to a waste discharge device and processing equipment. Background Technology

[0002] With the continuous development of the photovoltaic industry, the current photovoltaic industry includes processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD. Different production processes require that solar cells (silicon wafers or crystals) be placed in a specific boat (carrier) and fed into the reaction chamber of the furnace for processing. By heating the reaction chamber and introducing specific reaction gases, specific processes such as coating, diffusion, oxidation, and thin film deposition are achieved on the silicon wafers or crystals. As the photovoltaic industry continues to develop, the requirements for equipment are constantly increasing, and the process routes are also constantly being updated.

[0003] The high-temperature exhaust gas discharged from the furnace needs to be cooled by a waste discharge device to meet emission requirements. However, the existing waste discharge devices have low cooling efficiency, which prevents efficient treatment of the high-temperature exhaust gas and affects the processing efficiency of the equipment.

[0004] In view of this, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this utility model is to provide a waste discharge device and processing equipment, which have high efficiency in treating high-temperature waste gas and high processing efficiency in processing equipment.

[0006] To achieve the above objectives, the present invention employs the following technical means:

[0007] The first aspect of this utility model provides a waste discharge device, comprising:

[0008] The cooling assembly includes a housing and a cooling plate disposed inside the housing. The housing is connected to an air inlet pipe and an air outlet pipe, and the cooling plate has cooling holes.

[0009] Heat exchangers and / or fans are used to cool high-temperature exhaust gases passing through cooling components.

[0010] Optionally, the housing is provided with an air inlet connector and an air outlet connector, the air inlet connector being connected to the air inlet pipe and the air outlet connector being connected to the air outlet pipe.

[0011] Optionally, the cooling plate divides the housing into a first chamber and a second chamber, which are connected by cooling holes. The first chamber is connected to the air inlet connector, and the second chamber is connected to the air outlet connector.

[0012] Optionally, a number of cooling holes are provided on the cooling plate, and the cooling holes are arranged in an array with the geometric center of the cooling plate as the center.

[0013] Optionally, the heat exchanger includes a cold source, a housing, and a drive unit. The cold source is connected to the housing, and the drive unit is used to drive the cooling medium to circulate between the cold source and the housing. A reciprocating flow channel is formed inside the housing.

[0014] Optionally, it also includes a frame and two fans, the two fans being spaced apart on the base plate of the frame, and an opening in the base plate located between the fans and the cooling components.

[0015] Optionally, it includes several cooling components, each group of cooling components is connected to an air inlet pipe and an air outlet pipe, and a heat exchanger and / or a fan is set up corresponding to several cooling components.

[0016] Optionally, it also includes a first sealing assembly, a second sealing assembly, and a connector. The first sealing assembly is located at the connection between the air inlet pipe and the air outlet of the furnace body; the second sealing assembly is located at the air outlet joint between the air inlet pipe and the cooling assembly.

[0017] The connector is located at the connection between the air outlet connector and the air outlet pipe.

[0018] Optionally, it also includes a switch assembly located on the air outlet pipe.

[0019] A second aspect of this utility model is to provide a processing device, including the waste discharge device of any of the above claims.

[0020] Compared with the prior art, this utility model brings the following technical effects:

[0021] In this embodiment, the cooling assembly has a cooling plate installed inside the housing. The cooling plate can restrict the flow of high-temperature exhaust gas towards the outlet pipe, thereby increasing the contact time between the fan and / or heat exchanger and the high-temperature exhaust gas inside the cooling assembly, and thus improving the cooling effect on the high-temperature exhaust gas. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 The diagram shows a usage scenario of the waste discharge device according to some embodiments of the present invention;

[0024] Figure 2 The diagram shows a schematic representation of the waste discharge device according to some embodiments of the present invention.

[0025] Figure 3The diagram shows a schematic representation of the cooling assembly according to some embodiments of the present invention;

[0026] Figure 4 for Figure 3 A sectional view cut along axis AA;

[0027] Figure 5 A top view of a cooling assembly according to some embodiments of the present invention is shown;

[0028] Figure 6 for Figure 3 A sectional view cut along the CC axis;

[0029] Figure 7 The diagram shows a schematic representation of the waste discharge device according to some embodiments of the present invention.

[0030] Figure 8 A schematic diagram of the internal structure of a heat exchanger according to some embodiments of the present invention is shown.

[0031] Explanation of key component symbols:

[0032] 100 - Furnace body; 200 - Waste discharge device;

[0033] 10-Cooling assembly; 11-Housing; 12-Inlet connector; 13-Outlet connector; 14-Cooling plate; 141-Cooling hole; 15-First chamber; 16-Second chamber;

[0034] 20 - Intake pipe;

[0035] 30 - Exhaust pipe;

[0036] 41-First sealing assembly; 42-Second sealing assembly; 43-Connector; 44-Switch assembly;

[0037] 50 - Heat exchanger; 51 - Housing; 52 - Reciprocating flow channel; 53 - First cooling pipe; 54 - Second cooling pipe;

[0038] 60- Fan;

[0039] 70 - Frame; 71 - Base plate; 72 - Support plate; Detailed Implementation

[0040] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0041] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0042] Please see Figure 1 This utility model provides a waste discharge device 200, which is connected to the output end of the furnace body 100 and is used to cool the high-temperature waste gas discharged from the furnace body 100 to meet the emission requirements.

[0043] Please see Figure 2 , Figure 7 and Figure 8 In one embodiment, the waste discharge device 200 includes a cooling assembly 10, an inlet pipe 20, an outlet pipe 30, a heat exchanger 50, and a fan 60. The cooling assembly 10 is connected to the inlet pipe 20 and the outlet pipe 30, respectively. The heat exchanger 50 is connected to the cooling assembly 10 and is used to exchange heat with the high-temperature waste gas flowing through the cooling assembly 10. The fan 60 is oriented towards the cooling assembly 10 to cool the high-temperature waste gas flowing through the cooling assembly 10.

[0044] In this embodiment, the waste discharge device 200 includes two sets of cooling components 10. Each set of cooling components 10 is connected to an air inlet pipe 20 and an air outlet pipe 30. The heat exchanger 50 and the fan 60 work together on the two sets of cooling components 10.

[0045] Compared to using a single, larger cooling component 10, the waste discharge device 200 of this embodiment employs two sets of cooling components 10, each set of cooling components 10 being connected to an inlet pipe 20 and an outlet pipe 30. This allows for a more flexible arrangement of the number and location of cold sources (such as heat exchangers 50 and fans 60) as needed, thereby improving the waste discharge device 200's efficiency in treating high-temperature waste gas.

[0046] In other embodiments, the waste discharge device 200 may have only one fan 60, only one heat exchanger 50, or two fans 60. The scope of protection is not limited to the specific limitations of this embodiment.

[0047] Please see Figures 3-6 In order to improve the cooling efficiency of the cooling assembly 10, one embodiment of the cooling assembly 10 includes a housing 11 and a cooling plate 14 disposed on the inner wall of the housing 11. The housing 11 is provided with an air inlet connector 12 and an air outlet connector 13. Cooling holes 141 are opened on the air inlet connector 12 and the cooling plate 14.

[0048] The cooling plate 14 divides the internal space of the housing 11 into a first chamber 15 and a second chamber 16. The first chamber 15 is directly connected to the air inlet pipe 20, and the second chamber 16 is connected to the air outlet pipe 30. The first chamber 15 and the second chamber 16 communicate with each other through cooling holes 141. Furthermore, the first chamber 15 and the second chamber 16 have approximately the same volume.

[0049] In this embodiment, the cooling assembly 10 has a cooling plate 14 installed inside the housing 11. The cooling plate 14 can restrict the flow of high-temperature exhaust gas towards the exhaust pipe 30, thereby increasing the contact time between the fan 60 and the heat exchanger 50 and the high-temperature exhaust gas in the cooling assembly 10, and thus improving the cooling effect on the high-temperature exhaust gas.

[0050] In addition, the high-temperature exhaust gas remains in the first chamber 15 for a long time under the stop of the cooling plate 14, which will cause the pressure in the first chamber 15 to rise continuously. As a result, it flows from the cooling hole 141 to the second chamber 16, which has a lower pressure than the first chamber 15, and then flows from the second chamber 16 into the exhaust pipe 30.

[0051] Specifically, the air inlet connector 12 is located on the top wall of the housing 11, and the air outlet connector 13 is located on the side wall of the housing 11, close to the bottom wall of the housing 11. The air inlet connector 12 is connected to the air inlet pipe 20, and the air outlet connector 13 is connected to the air outlet pipe 30. The air inlet connector 12 and the air outlet connector 13 are arranged in this way so that the high-temperature exhaust gas moves throughout the entire housing 11 from the time it flows into the cooling assembly 10 to the time it leaves the cooling assembly 10, thereby making full use of the space of the cooling assembly 10.

[0052] The flow direction of high-temperature exhaust gas in the cooling component 10 is as follows Figure 4 As indicated by the arrow. Specifically, after the high-temperature exhaust gas is discharged from the furnace body 100, it first enters the inlet pipe 20, then enters the cooling component 10 through the inlet pipe 20, and then the heat exchanger 50 and the fan 60 cool down the high-temperature exhaust gas in the cooling component 10. Finally, the cooled exhaust gas is discharged through the outlet pipe 30.

[0053] In one specific embodiment, the cooling plate 14 is integrally formed with the housing 11. That is, the cooling plate 14 is fixedly connected to the inner peripheral wall of the housing 11. Specifically, the cooling plate 14 is welded to the inner wall of the housing 11.

[0054] The integral molding of the cooling plate 14 and the housing 11 can reduce the manufacturing process of the cooling assembly 10 and improve production efficiency.

[0055] In other embodiments, the cooling plate 14 is configured to be detachably connected to the housing 11.

[0056] For example, several buckles are provided around the periphery of the cooling plate 14, and corresponding slots are provided on the inner wall of the housing 11. The cooling plate 14 is detachably fixed to the housing 11 by the engagement of the buckles and the slots. The detachable connection between the cooling plate 14 and the housing 11 allows the user to remove the cooling plate 14 from the cooling assembly 10 for cleaning and maintenance.

[0057] The cooling plate 14 is adapted to the shape of the inner peripheral wall of the housing 11. Specifically, the inner peripheral wall of the housing 11 is cylindrical, and the cooling plate 14 is a circular flat plate. That is, the area of ​​the cooling plate 14 is much larger than the thickness of the cooling plate 14.

[0058] In one embodiment, the cooling assembly 10 includes a plurality of cooling plates 14 arranged along the axial direction of the cooling assembly 10, and adjacent cooling plates 14 are spaced apart from each other.

[0059] In this embodiment, the cooling component 10 is a cylindrical shape with rounded ends, and the axial direction of the cylindrical shape is the axial direction of the cooling component 10.

[0060] In this embodiment, the cooling assembly 10 is equipped with several layers of cooling plates 14, which allows the high-temperature exhaust gas to stay in the cooling assembly 10 for a longer time, thereby further improving the cooling effect of the cooling assembly 10.

[0061] Furthermore, the cooling plate 14 has a plurality of cooling holes 141, and the cooling holes 141 are arranged in an array around the geometric center of the cooling plate 14. Specifically, the cross-section of the cooling plate 14 is circular, and the cooling holes 141 are arranged in a circular array around the center of the circle.

[0062] By arraying cooling holes 141 on the cooling plate 14, the cooling holes 141 guide the high-temperature exhaust gas, allowing the high-temperature exhaust gas to continue flowing in a laminar flow form, thereby improving the flow efficiency of the high-temperature exhaust gas in the cooling assembly 10.

[0063] In this embodiment, the cooling hole 141 is circular. Of course, depending on different usage requirements, the cooling hole 141 can also be semi-circular, elliptical, or square. A plurality of cooling holes 141 can be evenly arranged on the cooling plate 14, or they can be arbitrarily arranged on the cooling plate 14.

[0064] The diameters of the cooling holes 141 can be configured to be consistent to ensure that the flow rate of high-temperature exhaust gas through each cooling hole 141 is consistent. Of course, to meet actual needs, the cooling holes 141 can also be configured to be of different sizes.

[0065] Please refer to it again. Figure 2In one specific embodiment, the waste discharge device 200 further includes a first sealing component 41 and a second sealing component 42, which are sequentially arranged on the air inlet pipe 20 along the direction of high-temperature waste gas flow.

[0066] The first sealing component 41 is located at the connection between the furnace body 100 and the air inlet pipe 20, and the second sealing component 42 is located at the connection between the air inlet pipe 20 and the air inlet connector 12 of the cooling component 10. The first sealing component 41 can improve the sealing performance between the air inlet pipe 20 and the furnace body 100, and the second sealing component 42 can improve the sealing performance between the air inlet pipe 20 and the cooling component 10, thus preventing high-temperature exhaust gas from spreading in the exhaust component or being lost during the process of flowing from the furnace body 100 into the exhaust component.

[0067] Specifically, the first sealing assembly 41 and the second sealing assembly 42 adopt a flange sealing form. Both the first sealing assembly 41 and the second sealing assembly 42 include two nuts, a sealing block, and a screw. The sealing block is positioned around the outlet end of the air inlet pipe 20 and the furnace body 100, and also around the air inlet connector 12 of the air inlet pipe 20 and the cooling assembly 10. The two nuts are placed at opposite ends of the sealing block, and the position of the sealing block is locked by screws passing through the two nuts. Both sealing blocks are made of heat-insulating material (such as quartz), and their service life is not easily affected by high temperatures, ensuring stable and reliable operation.

[0068] The waste discharge device 200 also includes a connector 43, which is located at the connection between the exhaust connector 13 and the exhaust pipe 30. The connector 43 can improve the sealing performance between the exhaust pipe 30 and the cooling assembly 10, prevent high-temperature exhaust gas from spreading in the waste discharge assembly, and has strong stability.

[0069] Specifically, connector 43 is a straight-through connector. The exhaust connector 13 of the cooling assembly 10 is a bellows, which is non-insulated but easy to expand and contract. Connecting the bellows to the exhaust pipe 30 through the straight-through connector can prevent the spread of exhaust gas and protect the pipe at the outlet of the cooling assembly 10.

[0070] In one embodiment, the waste discharge device 200 further includes a switch assembly 44, which is disposed on the exhaust pipe 30 and located downstream of the connector 43 in the direction of high-temperature waste gas discharge.

[0071] The switch assembly 44 is used to adjust the gas flow rate in the exhaust assembly pipeline, so that the cooling assembly 10 can be set to cool the exhaust gas flow rate in the pipeline according to the amount of high temperature exhaust gas flow. This avoids the problem of reduced cooling efficiency of the cooling assembly 10 due to excessive high temperature exhaust gas flow in the pipeline. Thus, the switch assembly 44 can ensure the cooling efficiency of the cooling assembly 10 in the exhaust assembly.

[0072] Specifically, when the high-temperature exhaust gas flow rate is too high, the switching assembly 44 is adjusted to a smaller value to limit the flow rate of the high-temperature exhaust gas. Conversely, when the high-temperature exhaust gas flow rate is too low, the switching assembly 44 is adjusted to a larger value to increase the flow velocity of the high-temperature exhaust gas within the cooling assembly 10. Furthermore, the switching assembly 44 can be a gate valve, a stop valve, or a butterfly valve.

[0073] Please see Figure 2 and Figure 8 In one embodiment, the waste discharge assembly further includes a frame 70, on which the cooling assembly 10 is disposed. The heat exchanger 50 includes a housing 51, a cold source (not shown), and a drive unit (not shown). The cold source is connected to the housing 51, and the drive unit drives the cooling medium (such as cooling water) to circulate between the cold source and the housing 51.

[0074] The housing 51 is equipped with several baffles, which form a reciprocating flow channel 52 to allow the cooling medium to flow within it. The reciprocating flow channel 52 increases the contact time between the cooling medium and the high-temperature exhaust gas in the cooling assembly 10, further improving the cooling effect of the cooling assembly 10. Furthermore, the reciprocating flow channel 52 has no dead zones, making full use of the space within the housing 51.

[0075] The housing 51 is also provided with a first cooling pipe 53 and a second cooling pipe 54. The first cooling pipe 53 is located at the inlet of the reciprocating flow channel 52, and the second cooling pipe 54 is located at the outlet of the reciprocating flow channel 52.

[0076] Two openings are provided on the same vertical wall of the housing 51, and the exhaust connectors 13 of the two sets of cooling components 10 are respectively connected to the exhaust pipe 30 through the two openings. In this way, interference between the housing 51 and the exhaust connectors 13 can be avoided, and the length of the exhaust connectors 13 can be effectively shortened.

[0077] Furthermore, the frame 70 includes a base plate 71 and a support plate 72 extending from one end of the base plate 71. The base plate 71 is used to support the cooling assembly 10, and the support plate 72 is used to support the exhaust pipe 30 and to support the switch assembly 44 on the exhaust pipe 30.

[0078] The height of the support plate 72 relative to the base plate 71 is adjustable to support the exhaust pipe 30 at different heights for discharging high-temperature exhaust gas. Specifically, the support plate 72 has a waist-shaped hole extending vertically, and the base plate 71 has a fixing hole that matches the waist-shaped hole. Fasteners are inserted through the waist-shaped hole and the fixing hole to fix the support plate 72 to the base plate 71. The height of the support plate 72 relative to the base plate 71 can be adjusted by adjusting the relative position of the waist-shaped hole and the fixing hole.

[0079] Please see Figure 2 and Figure 7In one embodiment, the base plate 71 is provided with two fans 60 arranged at intervals between each other, and the air outlet direction of the fans 60 is directed toward the cooling component. The base plate 71 has an opening located between the fans 60 and the cooling component 10, so that the fans 60 can output air through the opening on the base plate 71 to reach the cooling component 10.

[0080] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom still fall within the protection scope of this invention.

Claims

1. A waste discharge device, characterized in that, include: A cooling assembly includes a housing and a cooling plate disposed within the housing. The housing is connected to an air inlet pipe and an air outlet pipe, and cooling holes are provided on the cooling plate. A heat exchanger and / or a fan for cooling the high-temperature exhaust gas passing through the cooling assembly.

2. The waste discharge device according to claim 1, characterized in that, The housing is provided with an air inlet connector and an air outlet connector. The air inlet connector is connected to the air inlet pipe, and the air outlet connector is connected to the air outlet pipe.

3. The waste discharge device according to claim 1, characterized in that, The cooling plate divides the housing into a first chamber and a second chamber. The first chamber and the second chamber are connected through the cooling hole. The first chamber is connected to the air inlet connector, and the second chamber is connected to the air outlet connector.

4. The waste discharge device according to claim 1, characterized in that, The cooling plate has a plurality of cooling holes, which are arranged in an array around the geometric center of the cooling plate.

5. The waste discharge device according to claim 1, characterized in that, The heat exchanger includes a cold source, a housing, and a drive unit. The cold source is connected to the housing, and the drive unit is used to drive the cooling medium to circulate between the cold source and the housing. A reciprocating flow channel is formed inside the housing.

6. The waste discharge device according to claim 1, characterized in that, It also includes a frame and a fan, the fan being mounted on the base plate of the frame, and the base plate having a portion of the opening between the fan and the cooling assembly.

7. The waste discharge device according to claim 1, characterized in that, It includes several cooling components, each of which is connected to an air inlet pipe and an air outlet pipe; the heat exchanger and / or fan are arranged corresponding to the several cooling components.

8. The waste discharge device according to claim 1, characterized in that, It also includes a first sealing component, a second sealing component, and a connector. The first sealing component is located at the connection between the air inlet pipe and the air outlet of the furnace body; the second sealing component is located at the air outlet joint between the air inlet pipe and the cooling component; and the connector is located at the connection between the air outlet joint and the air outlet pipe.

9. The waste discharge device according to claim 1, characterized in that, It also includes a switch assembly, which is disposed on the air outlet pipe.

10. A processing device comprising the waste discharge device as described in any one of claims 1 to 9.

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