A sample exchange device

Abstract

This invention relates to the field of scanning electron microscopy, and more particularly to a sample exchange device. It includes a second plate with a first plate arranged parallel to it at intervals on its upper side. Multiple sets of guide grooves are evenly distributed inside the first plate, and each guide groove contains a slidable connecting arm. A sample stage is fixedly connected to the inner top of each connecting arm. Multiple sets of movable adjustment mechanisms are evenly distributed on the second plate, with the positions of the mechanisms corresponding to the guide grooves. The edges of the first and second plates are fixedly connected by multiple sets of evenly distributed fixed supports. This invention, with its multiple sample stages, can simultaneously accommodate multiple samples. The movable adjustment mechanisms can move the sample stages and adjust their positions, thereby achieving automatic sample exchange. This eliminates the need for manual operation, enabling rapid and accurate sample exchange, significantly reducing the time required for sample change and improving detection efficiency.

Description

Technical Field

[0001] This utility model relates to the field of scanning electron microscopy, and more specifically, to a sample exchange device. Background Technology

[0002] A scanning electron microscope (SEM) is a high-resolution microscope that uses an electron beam to scan the surface of a sample and acquire information about its morphology and composition. It is widely used in materials science, biology, medicine, geology, and many other fields, becoming one of the most important tools in modern scientific research. The basic principle of a scanning electron microscope is to use a focused electron beam to scan the sample surface point by point, exciting various physical signals, such as secondary electrons, reflected electrons, absorbed electrons, and X-rays. These signals are received by a detector and converted into electrical signals, which are then used to generate images on a computer. The resolution of a scanning electron microscope is far higher than that of an optical microscope, allowing the observation of details at the nanometer level.

[0003] However, scanning electron microscopy (SEM) typically requires manual sample replacement during sample testing, which is not only time-consuming and labor-intensive but can also lead to sample damage or testing errors due to improper human operation. Therefore, developing a device capable of automatically exchanging samples is of great significance for improving the testing efficiency and accuracy of scanning electron microscopy. Utility Model Content

[0004] To address the shortcomings of existing methods, this invention provides a sample exchange device that can automatically move and position samples, enabling automatic sample replacement, thereby simplifying the operation process and improving testing efficiency.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A sample exchange device includes a second plate and a first plate. The first plate is arranged parallel to the upper side of the second plate at intervals. Multiple sets of guide grooves are uniformly formed inside the first plate. Each set of guide grooves is provided with a slidable connecting arm. A sample stage is fixedly connected to the inner side of the top of the connecting arm. Multiple sets of movable adjustment mechanisms are uniformly arranged on the second plate, and the movable adjustment mechanisms are positioned corresponding to the guide grooves. The lower end of the connecting arm is fixedly connected to the movable adjustment mechanism. The edges between the first plate and the second plate are fixedly connected by multiple sets of uniformly arranged fixed supports.

[0007] Furthermore, the movable adjustment mechanism includes a motor, a base, a threaded screw, and a slide. The base is fixedly mounted on the second layer plate, and a threaded screw is horizontally mounted on the base. The left end of the threaded screw is fixedly connected to the output end of the motor. The threaded screw is threadedly connected to the slide, and the lower end of the connecting arm is fixedly connected to the slide.

[0008] Furthermore, the slide table has sliders installed on both sides of the bottom front, and the upper end of the machine base has guide rails adapted to the sliders on both the front and rear sides, and the sliders are connected to the guide rails.

[0009] Furthermore, a base plate is provided parallel to each other on the lower side of the second layer plate, and linear electric push rods are mounted on both the left and right sides of the base plate, with the top of the linear electric push rods fixedly connected to the second layer plate.

[0010] Furthermore, guide rods are fixed on both the front and rear sides of the base plate near the corners, and the guide rods penetrate the second layer plate.

[0011] Furthermore, a sliding sleeve is provided at the connection between the second layer plate and the guide rod, and the sliding sleeve is fitted on the outside of the guide rod.

[0012] Furthermore, guide grooves are provided on both sides of the guide groove near the edge on the first layer plate, and limiting plates are provided on both sides of the connecting arm. Rotatable balls are embedded at the bottom of the limiting plates and are engaged in the guide grooves.

[0013] Furthermore, the sample stage has a circular structure, and a sample positioning groove is formed inside the upper surface of the sample stage.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. This utility model can accommodate multiple sets of samples simultaneously by setting multiple sample stages. At the same time, the set moving adjustment mechanism can drive the sample stages to move and adjust their positions, thereby realizing automatic replacement between different samples. The sample replacement can be achieved quickly and accurately without manual operation, which greatly shortens the time required for sample replacement and thus improves the detection efficiency.

[0016] 2. This utility model can control the direction and distance of the slide table's movement through the set movable adjustment mechanism, drive the connecting arm to slide in the guide groove, and then drive the sample stage to move, thereby realizing the automatic replacement of samples.

[0017] 3. This utility model can precisely control the extension and retraction length of the linear electric push rod, thereby driving the second layer plate and the first layer plate to move for deep processing, realizing flexible adjustment of the sample stage height, so that the device can adapt to scanning electron microscopes of different specifications, improving the versatility and adaptability of the device.

[0018] 4. In this invention, the guide groove provides a precise path for the movement of the connecting arm. When the connecting arm slides within the guide groove, the ball bearings at the bottom of the limiting plate engage with the guide groove, ensuring that the connecting arm can move smoothly along the predetermined trajectory. This achieves precise positioning of the sample stage. Simultaneously, the rolling of the ball bearings within the guide groove reduces friction and wear, making the movement smoother and extending the lifespan of the device. Furthermore, the cooperation between the limiting plate and the guide groove effectively prevents the connecting arm from shifting or wobbling during movement, enhancing the stability of the device and ensuring the accuracy and reliability of the sample during testing. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0020] Figure 2 This is a front view of the present invention.

[0021] Figure 3 This is a top view of the present invention.

[0022] Figure 4 This is a schematic diagram of the structure of the first and second layers in this utility model.

[0023] Figure 5 This is a partial structural schematic diagram of the present invention.

[0024] Figure 6 This is a schematic diagram of the movable adjustment mechanism in this utility model.

[0025] In the diagram: 1. Sample stage; 2. First shelf; 3. Moving adjustment mechanism; 31. Motor; 32. Base; 33. Slider; 34. Guide rail; 35. Threaded screw; 36. Slide table; 4. Second shelf; 5. Guide support rod; 6. Base plate; 7. Linear electric push rod; 8. Connecting arm; 9. Guide groove; 10. Fixed support column; 11. Sliding sleeve; 12. Guide slide groove; 13. Limiting plate; 14. Sample positioning groove. Detailed Implementation

[0026] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0027] Example:

[0028] like Figures 1 to 6As shown, a sample exchange device includes a second plate 4 and a first plate 2. The first plate 2 is arranged parallel to the upper side of the second plate 4 at intervals. Multiple sets of guide grooves 9 are evenly formed inside the first plate 2. Each set of guide grooves 9 is provided with a sliding connecting arm 8. A sample stage 1 is fixedly connected to the inner top of the connecting arm 8. Multiple sets of moving adjustment mechanisms 3 are evenly arranged on the second plate 4, and the moving adjustment mechanisms 3 are positioned corresponding to the guide grooves 9. The lower end of the connecting arm 8 is fixedly connected to the moving adjustment mechanism 3. The edges between the first plate 2 and the second plate 4 are fixedly connected by multiple sets of evenly arranged fixed support pillars 10. This design solves the problem that in the sample detection process of existing scanning electron microscopes, it is usually necessary to manually change the sample, which is not only time-consuming and labor-intensive, but may also cause sample damage or test errors due to improper human operation.

[0029] The device can accommodate multiple samples simultaneously through multiple sample stages 1. The movable adjustment mechanism 3 can move the sample stages 1 and adjust their positions, thereby realizing automatic replacement between different samples. The sample replacement can be fast and accurate without manual operation, which greatly shortens the time required for sample replacement and thus improves the detection efficiency.

[0030] In this embodiment, the moving adjustment mechanism 3 includes a motor 31, a base 32, a threaded screw 35, and a slide 36. The base 32 is fixedly mounted on the second layer plate 4. The threaded screw 35 is horizontally mounted on the base 32. The left end of the threaded screw 35 is fixedly connected to the output end of the motor 31. The threaded screw 35 is threadedly connected to the slide 36, and the lower end of the connecting arm 8 is fixedly connected to the slide 36. The moving adjustment mechanism 3 can control the moving direction and distance of the slide 36, causing the connecting arm 8 to slide within the guide groove 9, thereby moving the sample stage 1 and realizing automated sample replacement.

[0031] In this embodiment, sliders 33 are mounted on both sides of the bottom front of the slide stage 36, and guide rails 34 adapted to the sliders 33 are mounted on both the front and rear sides of the upper end of the base 32. The sliders 33 and guide rails 34 are connected in a cooperative manner. The sliders 33 and guide rails 34 form a stable sliding connection, which allows the slide stage 36 to slide smoothly on the guide rails 34 without deviation or wobbling. The cooperative connection between the sliders 33 and guide rails 34 not only provides stable support but also ensures the accuracy of the slide stage 36's movement. The guide rails 34 serve as the path for the slide stage 36's movement, ensuring that the slide stage 36 can move along a predetermined trajectory, thereby achieving precise sample positioning.

[0032] In this embodiment, a base plate 6 is arranged parallel to each other on the lower side of the second layer plate 4. Linear electric actuators 7 are mounted on both the left and right sides of the base plate 6, and the top ends of the linear electric actuators 7 are fixedly connected to the second layer plate 4. The linear electric actuators 7 can precisely control their extension and retraction length, thereby driving the second layer plate 4 and the first layer plate 2 to move and achieve flexible adjustment of the height of the sample stage 1. This allows the device to adapt to scanning electron microscopes of different specifications, improving the versatility and adaptability of the device.

[0033] In this embodiment, guide rods 5 are fixed on both the front and rear sides of the base plate 6 near the corners, and the guide rods 5 pass through the second layer plate 4. The guide rods 5 guide the lifting and lowering movement of the second layer plate 4, ensuring that the second layer plate 4 can move along a predetermined trajectory during the lifting and lowering process, thereby maintaining the accurate positioning of the sample stage 1 and the precise focus of the sample. At the same time, the guide rods 5 support the second layer plate 4, ensuring the stability of the second layer plate 4 and enhancing the overall stability of the device.

[0034] In this embodiment, a sliding sleeve 11 is provided at the connection between the second layer plate 4 and the guide rod 5, and the sliding sleeve 11 is fitted onto the outside of the guide rod 5. The sliding sleeve 11 ensures that the second layer plate 4 can slide smoothly along the guide rod 5 during the lifting and lowering process. The sliding sleeve 11 acts as a buffer layer between the second layer plate 4 and the guide rod 5, reducing direct contact and wear between them, reducing friction and resistance, and making the movement smoother.

[0035] In this embodiment, guide grooves 12 are provided on both sides of the guide groove 9 near the edge on the first layer plate 2, and limiting plates 13 are provided on both sides of the connecting arm 8. Rotatable balls are embedded in the bottom of the limiting plates 13, and the balls are engaged in the guide grooves 12. The guide grooves 12 provide a precise path for the movement of the connecting arm 8. When the connecting arm 8 slides within the guide groove 9, the balls at the bottom of the limiting plates 13 engage in the guide grooves 12, ensuring that the connecting arm 8 can move smoothly along a predetermined trajectory, thereby achieving precise positioning of the sample stage 1. Simultaneously, the rolling of the balls within the guide grooves 12 reduces friction and wear, making the movement smoother and extending the service life of the device. Furthermore, the cooperation between the limiting plates 13 and the guide grooves 12 effectively prevents the connecting arm 8 from shifting or shaking during movement, enhancing the stability of the device and ensuring the accuracy and reliability of the sample during the testing process.

[0036] In this embodiment, the sample stage 1 has a circular structure, and a sample positioning groove 14 is provided inside the upper surface of the sample stage 1. The sample positioning groove 14 enables the sample to be accurately placed in a predetermined position, thereby achieving sample positioning and avoiding displacement or tilting of the sample during the detection process, thus ensuring the accuracy and reliability of the detection results.

[0037] The working principle of this sample exchange device is as follows: First, the device is installed in the sample chamber of a scanning electron microscope, with the center of the first plate 2 aligned with the lens of the scanning electron microscope. The device is in standby mode, with all sample stages 1 positioned initially on the first plate 2 near its edge. The samples to be tested are placed in the sample positioning slots 14 of each sample stage 1 on the first plate 2, ensuring precise sample positioning. Based on the required sample order, the corresponding movement adjustment mechanism 3 is activated via the control system. The motor 31 drives the threaded screw 35 to rotate. The threaded connection between the threaded screw 35 and the slide 36 allows the slide 36 to move back and forth along the guide rail 34 on the base 32. The slide 36 drives the connecting arm 8 to slide within the guide groove 9, while the ball bearings at the bottom of the limiting plate 13 roll within the guide groove 12, ensuring smooth movement. The connecting arm 8 moves the sample stage 1 to the center position of the first plate 2, placing the sample directly below the lens of the scanning electron microscope, ready for testing. The scanning electron microscope then tests the sample located below it. After the current sample is tested, the moving adjustment mechanism 3 moves the sample stage 1 back to its initial position. Then, another set of moving adjustment mechanisms 3 is activated to move the next sample stage 1 to be tested to the testing position. Furthermore, the height of the second layer plate 4 can be adjusted using the linear electric push rod 7 to accommodate different sizes of scanning electron microscopes or different testing requirements.

[0038] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. Any obvious variations or modifications derived from the technical solutions of this utility model are still within the protection scope of this utility model.

Claims

1. A sample exchange device, comprising a second plate (4) and a first plate (2), characterized in that: The second layer plate (4) is provided with a first layer plate (2) at intervals and parallel to each other. The first layer plate (2) has multiple sets of guide grooves (9) evenly opened inside. Each set of guide grooves (9) is provided with a sliding connecting arm (8). The sample stage (1) is fixedly connected to the inner side of the top of the connecting arm (8). The second layer plate (4) is provided with multiple sets of moving adjustment mechanisms (3), and the moving adjustment mechanism (3) is corresponding to the guide groove (9). The lower end of the connecting arm (8) is fixedly connected to the moving adjustment mechanism (3). The edges between the first layer plate (2) and the second layer plate (4) are fixedly connected by multiple sets of evenly arranged fixed support columns (10).

2. The sample exchange device according to claim 1, characterized in that: The moving adjustment mechanism (3) includes a motor (31), a base (32), a threaded screw (35), and a slide (36). The base (32) is fixed on the second layer plate (4). The threaded screw (35) is horizontally mounted on the base (32). The left end of the threaded screw (35) is fixedly connected to the output end of the motor (31). The threaded screw (35) is threadedly connected to the slide (36). The lower end of the connecting arm (8) is fixedly connected to the slide (36).

3. The sample exchange device according to claim 2, characterized in that: The slide table (36) has sliders (33) installed on both sides of the bottom front. The upper end of the machine base (32) has guide rails (34) adapted to the sliders (33) on both the front and rear sides. The sliders (33) and guide rails (34) are connected in cooperation.

4. The sample exchange device according to claim 1, characterized in that: A base plate (6) is arranged parallel to each other on the lower side of the second layer plate (4). Linear electric push rods (7) are mounted on both the left and right sides of the base plate (6). The top of the linear electric push rods (7) is fixedly connected to the second layer plate (4).

5. The sample exchange device according to claim 4, characterized in that: Guide rods (5) are fixed on both the front and rear sides of the base plate (6) near the corners, and the guide rods (5) penetrate the second layer plate (4).

6. The sample exchange device according to claim 5, characterized in that: A sliding sleeve (11) is provided at the connection between the second layer plate (4) and the guide rod (5), and the sliding sleeve (11) is sleeved on the outside of the guide rod (5).

7. The sample exchange device according to claim 1, characterized in that: The first layer plate (2) has guide grooves (12) on both sides of the guide groove (9) near the edge. The connecting arm (8) has limit plates (13) on both sides, and the bottom of the limit plates (13) is fitted with rotatable balls that are inserted into the guide grooves (12).

8. The sample exchange device according to claim 1, characterized in that: The sample stage (1) has a circular structure, and a sample positioning groove (14) is provided inside the upper surface of the sample stage (1).

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